2 inch 4 inch 6 inch Patterned Sapphire Substrate (PSS) eo thepa ea GaN e hōlileng ho eona e ka sebelisoang bakeng sa mabone a LED.

Tlhaloso e Khutšoanyane:

Paterone ea safire substrate (PSS) ke maske bakeng sa etching e omeletseng holim'a sapphire substrate, maske e ngotsoe ka mohlala ka mokhoa o tloaelehileng oa lithography, 'me joale safire e kenngoa ke theknoloji ea ICP etching,' me mask a tlosoa, 'me qetellong GaN thepa e hōlileng ho eona, e le hore epitaxy ea longitudinal ea GaN epitaxy e fetoha horise. Ts'ebetso ena e kenyelletsa mehato e 'maloa e kang ho roala photoresist, ho pepeseha mehato, ho hlahisa mokhoa oa ho pepeseha, ICP e omileng le ho hloekisa.

Re romelle lengolo-tsoibila

Lintlha tsa Sehlahisoa

Li-tag tsa Sehlahisoa

Lintlha tse ka sehloohong

1. Litšobotsi tsa sebopeho:
Sebaka sa PSS se na le mokhoa o hlophisitsoeng oa cone kapa triangular conical pattern eo sebōpeho sa eona, boholo le kabo ea eona e ka laoloang ka ho fetola mekhoa ea etching process.
Mehaho ena ea litšoantšo e thusa ho fetola tsela ea khaso ea leseli le ho fokotsa ho bonahatsa khanya eohle, ka hona ho ntlafatsa bokhoni ba ho ntša leseli.

2. Litšobotsi tsa lintho tse bonahalang:
PSS e sebelisa safire ea boleng bo holimo e le thepa ea substrate, e nang le litšobotsi tsa boima bo phahameng, conductivity e phahameng ea mocheso, botsitso bo botle ba lik'hemik'hale le ponaletso ea optical.
Litšobotsi tsena li thusa PSS ho mamella maemo a thata joalo ka mocheso o phahameng le likhatello ha e ntse e boloka ts'ebetso e ntle ea optical.

3. Ts'ebetso ea Optical:
Ka ho fetola ho hasana ka makhetlo a mangata ho sebopeho se pakeng tsa GaN le sapphire substrate, PSS e etsa hore li-photon tse bonahalang ka ho feletseng ka har'a GaN layer li be le monyetla oa ho baleha substrate ea safire.
Karolo ena e ntlafatsa haholo ts'ebetso ea khanya ea leseli la LED mme e ntlafatsa matla a khanyang a LED.

4. Litšobotsi tsa ts'ebetso:
Ts'ebetso ea tlhahiso ea PSS e batla e rarahane, e kenyelletsa mehato e mengata e kang lithography le etching, 'me e hloka lisebelisoa tse nepahetseng tse phahameng le taolo ea ts'ebetso.
Leha ho le joalo, ka tsoelo-pele e tsoelang pele ea thekenoloji le phokotso ea litšenyehelo, mokhoa oa tlhahiso ea PSS butle-butle oa ntlafatsoa le ho ntlafatsoa.

Molemo oa mantlha

1. Ntlafatsa bokhoni ba ho ntša leseli: PSS e ntlafatsa haholo ts'ebetso ea khanya ea khanya ea LED ka ho fetola tsela ea khaso ea leseli le ho fokotsa ho bonahatsa ka ho feletseng.

2.Ho lelefatsa bophelo ba LED: PSS e ka fokotsa sekhahla sa dislocation ea GaN epitaxial materials, kahoo e fokotsa recombination e se nang mahlaseli le ho khutlisetsa morao ho lutla ha hona joale sebakeng se sebetsang, ho lelefatsa bophelo ba LED.

3. Ntlafatsa khanya ea LED: Ka lebaka la ntlafatso ea bokhoni ba ho ntša leseli le katoloso ea bophelo ba LED, matla a khanyang a LED ho PSS a ntlafatsoa haholo.

4. Fokotsa litšenyehelo tsa tlhahiso: Le hoja ts'ebetso ea tlhahiso ea PSS e batla e rarahane, e ka ntlafatsa haholo katleho e khanyang le bophelo ba LED, kahoo e fokotsa litšenyehelo tsa tlhahiso ho isa tekanyong e itseng le ho ntlafatsa tlhōlisano ea sehlahisoa.

Libaka tsa kopo tse ka sehloohong

1. Leseli la LED: PSS e le thepa ea substrate bakeng sa lisebelisoa tsa LED, e ka ntlafatsa haholo katleho e khanyang le bophelo ba LED.
Sebakeng sa mabone a LED, PSS e sebelisoa haholo lihlahisoa tse fapaneng tsa mabone, tse kang mabone a seterateng, mabone a tafole, mabone a koloi joalo-joalo.

Lisebelisoa tsa 2.Semiconductor: Ho phaella ho mabone a LED, PSS e ka boela ea sebelisoa ho etsa lisebelisoa tse ling tsa semiconductor, tse kang lisebelisoa tsa leseli, lasers, joalo-joalo Lisebelisoa tsena li na le mefuta e mengata ea likopo tsa puisano, bongaka, sesole le masimo a mang.

3.Optoelectronic integration: Thepa ea optical le botsitso ba PSS e etsa hore e be e 'ngoe ea lisebelisoa tse loketseng tšimong ea optoelectronic integration.In optoelectronic integration, PSS e ka sebelisoa ho etsa li-waveguides optical, optical switches le likarolo tse ling ho hlokomela phetiso le ts'ebetso ea matšoao a optical.

Litekanyetso tsa tekheniki

Ntho	Sebopeho sa Sapphire Substrate(2~6inch)
Diameter	50.8 ± 0.1 limilimithara	100.0 ± 0.2 limilimithara	150.0 ± 0.3 limilimithara
Botenya	430 ± 25μm	650 ± 25μm	1000 ± 25μm
Boemo ba Bokaholimo	C-plane (0001) off-angle ho ea ho M-axis (10-10) 0.2 ± 0.1°
	C-plane (0001) off-angle e lebang A-axis (11-20) 0 ± 0.1°
Maemo a Motheo a Flat	A-Plane (11-20) ± 1.0°
Bolelele ba Phatlalatso ba Pele	16.0 ± 1.0 limilimithara	30.0 ± 1.0 limilimithara	47.5 ± 2.0 limilimithara
R-Sefofane	9-o'clock
Qetello ea Bokaholimo bo ka Pele	Paterone
Back Surface Finish	SSP:Fatše-ntle,Ra=0.8-1.2um; DSP: Epi e bentšitsoeng, Ra<0.3nm
Laser Mark	Lehlakore le ka morao
TTV	≤8μm	≤10μm	≤20μm
KOBANE	≤10μm	≤15μm	≤25μm
TLHOKOMELO	≤12μm	≤20μm	≤30μm
Kenyelletso ea Edge	≤2 limilimithara
Tlhaloso ea Paterone	Sebopeho sa Sebopeho	Dome, Cone, Phiramide
	Bophahamo ba Mohlala	1.6 ~ 1.8μm
	Paterone Diameter	2.75 ~ 2,85μm
	Sebaka sa Mohlala	0.1~0.3μm

XKH e tsepamisitse maikutlo ho nts'etsopele, tlhahiso le thekiso ea mohlala oa sapphire substrate (PSS), 'me e ikemiselitse ho fana ka lihlahisoa tsa PSS tsa boleng bo phahameng, tse sebetsang hantle ho bareki ho pota lefatše. XKH e na le theknoloji e tsoetseng pele ea tlhahiso le sehlopha sa setsebi sa litsebi, se ka khonang ho iketsetsa lihlahisoa tsa PSS ka litlhaloso tse fapaneng le mekhoa e fapaneng ea mekhoa ho latela litlhoko tsa bareki. Ka nako e ts'oanang, XKH e ela hloko boleng ba sehlahisoa le boleng ba litšebeletso, 'me e ikemiselitse ho fa bareki mefuta e mengata ea tšehetso ea theknoloji le tharollo. Lefapheng la PSS, XKH e bokelletse boiphihlelo le melemo e mengata, 'me e labalabela ho sebetsa 'moho le balekane ba lefats'e ho khothaletsa ka kopanelo nts'etsopele ea mabone a LED, lisebelisoa tsa semiconductor le liindasteri tse ling.