Sekoti sa Sapphire se nang le Patterned (PSS) sa lisenthimithara tse 2, lisenthimithara tse 4, lisenthimithara tse 6, seo thepa ea GaN e lengoang ho sona e ka se sebelisang bakeng sa mabone a LED
Likarolo tse ka sehloohong
1. Litšobotsi tsa sebopeho:
Bokaholimo ba PSS bo na le khoune e hlophisehileng kapa paterone e kobehileng e nang le khutlotharo eo sebopeho, boholo le kabo ya yona di ka laolwang ka ho fetola diparamitha tsa tshebetso ya ho tjhesa.
Dibopeho tsena tsa ditshwantsho di thusa ho fetola tsela ya ho ata ha lesedi le ho fokotsa pontsho yohle ya lesedi, ka hona di ntlafatsa bokgoni ba ho ntsha lesedi.
2. Litšobotsi tsa thepa:
PSS e sebelisa safire ea boleng bo holimo e le thepa ea substrate, e nang le litšobotsi tsa ho ba thata haholo, ho khanna mocheso o phahameng, botsitso bo botle ba lik'hemik'hale le ponaletso ea mahlo.
Litšobotsi tsena li nolofalletsa PSS ho mamella maemo a thata joalo ka mocheso o phahameng le likhatello ha ka nako e ts'oanang e boloka ts'ebetso e ntle ea optical.
3. Tshebetso ya Optical:
Ka ho fetola ho hasana ha di-multiple sebakeng se pakeng tsa GaN le substrate ya safire, PSS e etsa hore di-photon tse bonahatswang ka botlalo ka hara lera la GaN di be le monyetla wa ho phonyoha substrate ya safire.
Tšobotsi ena e ntlafatsa haholo bokgoni ba ho ntsha lesedi ba LED mme e ntlafatsa matla a kganyang a LED.
4. Litšobotsi tsa ts'ebetso:
Ts'ebetso ea tlhahiso ea PSS e rarahane haholo, e kenyelletsa mehato e mengata e kang lithography le etching, 'me e hloka lisebelisoa tse nepahetseng haholo le taolo ea ts'ebetso.
Leha ho le jwalo, ka kgatelopele e tswelang pele ya theknoloji le phokotso ya ditjeo, tshebetso ya tlhahiso ya PSS e ntlafatswa le ho ntlafatswa butle-butle.
Molemo oa mantlha
1.Ntlafatsa bokgoni ba ho ntsha lesedi: PSS e ntlafatsa haholo bokgoni ba ho ntsha lesedi la LED ka ho fetola tsela ya ho phatlalatsa lesedi le ho fokotsa pontsho yohle.
2.Lelefatsa bophelo ba LED: PSS e ka fokotsa bongata ba ho falla ha thepa ea GaN epitaxial, ka hona e fokotsa ho kopana hape ho sa etseng mahlaseli le ho khutlela morao ha motlakase sebakeng se sebetsang, e leng se eketsang bophelo ba LED.
3. Ntlafatsa khanya ea LED: Ka lebaka la ntlafatso ea bokhoni ba ho ntša khanya le katoloso ea bophelo ba LED, matla a khanya ea LED ho PSS a ntlafalitsoe haholo.
4. Fokotsa litšenyehelo tsa tlhahiso: Le hoja ts'ebetso ea tlhahiso ea PSS e rarahane haholo, e ka ntlafatsa katleho e khanyang le bophelo ba LED haholo, ka hona ea fokotsa litšenyehelo tsa tlhahiso ho isa bohōleng bo itseng le ho ntlafatsa tlholisano ea sehlahisoa.
Libaka tse ka sehloohong tsa kopo
1. Mabone a LED: PSS e le thepa ea substrate bakeng sa li-chip tsa LED, e ka ntlafatsa haholo katleho ea khanya le bophelo ba LED.
Lefapheng la mabone a LED, PSS e sebelisoa haholo lihlahisoa tse fapaneng tsa mabone, joalo ka mabone a literateng, mabone a tafole, mabone a likoloi le tse ling.
2. Disebediswa tsa semiconductor: Ntle le mabone a LED, PSS e ka boela ya sebediswa ho etsa disebediswa tse ding tsa semiconductor, tse kang di-detector tsa mabone, di-laser, jj. Disebediswa tsena di na le mefuta e mengata ya ditshebediso tsa puisano, tsa bongaka, tsa sesole le mafapheng a mang.
3. Ho kopanngoa ha optoelectronic: Thepa ea optical le botsitso ba PSS li etsa hore e be e 'ngoe ea thepa e ntle tšimong ea ho kopanngoa ha optoelectronic. Ho kopanngoa ha optoelectronic, PSS e ka sebelisoa ho etsa li-waveguide tsa optical, li-switch tsa optical le likarolo tse ling ho phethahatsa phetiso le ts'ebetso ea matšoao a optical.
Litekanyetso tsa tekheniki
| Ntho | Substrate ea Sapphire e nang le Patterned (2 ~ 6inch) | ||
| Bophara | 50.8 ± 0.1 mm | 100.0 ± 0.2 mm | 150.0 ± 0.3 mm |
| Botenya | 430 ± 25μm | 650 ± 25μm | 1000 ± 25μm |
| Boikutlo ba Bokaholimo | Sefofane sa C (0001) se sa shebaneng le M-axis (10-10) 0.2 ± 0.1° | ||
| Sefofane sa C (0001) se sa shebaneng le A-axis (11-20) 0 ± 0.1° | |||
| Boikutlo ba Motheo bo bataletseng | Sefofane sa A (11-20) ± 1.0° | ||
| Bolelele ba Sephara ba Motheo | 16.0 ± 1.0 mm | 30.0 ± 1.0 mm | 47.5 ± 2.0 mm |
| Sefofane sa R | Hora ea borobong | ||
| Qetello ea Bokaholimo bo ka Pele | E entsoe ka dipaterone | ||
| Qetello ea Bokamorao | SSP: E ntle haholo, Ra=0.8-1.2um; DSP: E bentšitsoeng ka Epi, Ra<0.3nm | ||
| Letšoao la Laser | Lehlakore le ka morao | ||
| TTV | ≤8μm | ≤10μm | ≤20μm |
| SEKHUKHU | ≤10μm | ≤15μm | ≤25μm |
| WARP | ≤12μm | ≤20μm | ≤30μm |
| Ho se kenyeletsoe ha Moeli | ≤2 mm | ||
| Tlhaloso ea Paterone | Sebopeho sa Sebopeho | Dome, Khoune, Piramide | |
| Bophahamo ba Paterone | 1.6~1.8μm | ||
| Bophara ba Paterone | 2.75~2.85μm | ||
| Sebaka sa Lipaterone | 0.1 ~ 0.3μm | ||
XKH e shebane le nts'etsopele, tlhahiso le thekiso ea substrate ea sapphire e nang le lipaterone (PSS), 'me e ikemiselitse ho fana ka lihlahisoa tsa PSS tsa boleng bo holimo le tse sebetsang hantle ho bareki lefatšeng ka bophara. XKH e na le theknoloji e tsoetseng pele ea tlhahiso le sehlopha sa litsebi tsa botekgeniki, se ka fetolang lihlahisoa tsa PSS ka litlhaloso tse fapaneng le meaho e fapaneng ea lipaterone ho latela litlhoko tsa bareki. Ka nako e ts'oanang, XKH e ela hloko boleng ba sehlahisoa le boleng ba tšebeletso, 'me e ikemiselitse ho fa bareki mefuta e felletseng ea tšehetso ea botekgeniki le litharollo. Lefapheng la PSS, XKH e bokelletse boiphihlelo le melemo e mengata, 'me e labalabela ho sebetsa' moho le balekane ba lefats'e ho khothaletsa nts'etsopele e ncha ea mabone a LED, lisebelisoa tsa semiconductor le liindasteri tse ling.
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