2inch SiC ingot Dia50.8mmx10mmt 4H-N monocrystal

Tlhaloso e Khutšoanyane:

A 2-inch SiC (silicon carbide) ingot e bua ka kristale e le 'ngoe ea cylindrical kapa block ea silicon carbide e bophara ba lisenthimithara tse peli kapa moeli. Li-ingots tsa silicon carbide li sebelisoa e le lisebelisoa tsa ho qala bakeng sa tlhahiso ea lisebelisoa tse fapaneng tsa semiconductor, tse kang lisebelisoa tsa motlakase tsa motlakase le lisebelisoa tsa optoelectronic.

Re romelle lengolo-tsoibila

Lintlha tsa Sehlahisoa

Li-tag tsa Sehlahisoa

SiC Crystal Growth Technology

Litšobotsi tsa SiC li etsa hore ho be thata ho holisa likristale tse le 'ngoe. Sena se bakoa haholo ke taba ea hore ha ho na mohato oa mokelikeli o nang le karo-karolelano ea stoichiometric ea Si : C = 1: 1 ka khatello ea sepakapaka, 'me ho ke ke ha khoneha ho hōlisa SiC ka mekhoa ea khōlo e hōlileng ka ho fetisisa, e kang mokhoa o tobileng oa ho hula le the falling crucible method, e leng tsona tse ka sehloohong tsa indasteri ea semiconductor. Ka khopolo, tharollo e nang le karo-karolelano ea stoichiometric ea Si : C = 1: 1 e ka fumanoa feela ha khatello e le kholo ho feta 10E5atm mme mocheso o phahame ho feta 3200 ℃. Hona joale, mekhoa e tloaelehileng e kenyelletsa mokhoa oa PVT, mokhoa oa mokelikeli oa mokelikeli, le mokhoa oa ho beha lik'hemik'hale oa mocheso o phahameng oa mouoane.

Li-wafers tsa SiC le likristale tseo re fanang ka tsona li lengoa haholo ke lipalangoang tsa mouoane (PVT), 'me se latelang ke kenyelletso e khutšoane ea PVT:

Mokhoa oa ho tsamaisa mouoane oa 'mele (PVT) o simolohile ho mokhoa oa khase-phase sublimation o qapiloeng ke Lely ka 1955, moo phofo ea SiC e kenngoa ka har'a tube ea graphite ebe e futhumatsoa ka mocheso o phahameng ho etsa hore phofo ea SiC e bole 'me e fokotsehe, ebe graphite. tube e pholile fatše, 'me likaroloana tsa khase tse bolileng tsa phofo ea SiC li kenngoa le ho khantša joaloka likristale tsa SiC sebakeng se potolohileng tube ea graphite. Le hoja mokhoa ona o le thata ho fumana likristale tse le 'ngoe tsa SiC tse boholo bo boholo le mokhoa oa ho bea ka har'a tube ea graphite o thata ho o laola, o fana ka maikutlo ho bafuputsi ba latelang.

YM Tairov et al. Russia e hlahisitse khopolo ea kristale ea peo motheong ona, e ileng ea rarolla bothata ba sebopeho sa kristale se sa laoleheng le boemo ba nucleation ea likristale tsa SiC. Bafuputsi ba latelang ba ile ba tsoela pele ho ntlafatsa 'me qetellong ba hlahisa mokhoa oa ho fetisa mouoane (PVT) o sebelisoang indastering kajeno.

Joalo ka mokhoa oa khale oa ho holisa kristale oa SiC, PVT hajoale ke mokhoa o ka sehloohong oa kholo ea likristale tsa SiC. Ha ho bapisoa le mekhoa e meng, mokhoa ona o na le litlhoko tse tlaase bakeng sa lisebelisoa tsa ho hōla, mokhoa o bonolo oa ho hōla, ho laola ka matla, tsoelo-pele e feletseng le lipatlisiso, 'me e se e entsoe ka indasteri.