3inch Bohloeki bo phahameng ba Semi-Insulation （HPSI）SiC wafer 350um Dummy grade Prime grade
Kopo
Li-wafer tsa HPSI SiC li bohlokoa haholo ho nolofatseng lisebelisoa tsa motlakase tsa moloko o latelang, tse sebelisoang lits'ebetsong tse fapaneng tsa ts'ebetso e phahameng:
Mekhoa ea Phetoho ea Matla: Li-wafer tsa SiC li sebetsa e le thepa ea mantlha bakeng sa lisebelisoa tsa motlakase tse kang li-MOSFET tsa motlakase, li-diode le li-IGBT, tse bohlokoa bakeng sa phetoho e sebetsang hantle ea matla lipotolohong tsa motlakase. Likarolo tsena li fumanoa mehloling ea motlakase e sebetsang hantle haholo, li-drive tsa motlakase le li-inverter tsa indasteri.
Likoloi tsa Motlakase (li-EV):Tlhoko e ntseng e hola ea likoloi tsa motlakase e hloka tšebeliso ea lisebelisoa tsa motlakase tse sebetsang hantle haholoanyane, 'me li-wafer tsa SiC li ka pele phetohong ena. Li-powertrain tsa motlakase tsa EV, li-wafer tsena li fana ka bokhoni bo phahameng ba ho chencha le ho potlakisa, tse tlatsetsang linakong tsa ho tjhaja kapele, sebaka se selelele, le ts'ebetso e ntlafalitsoeng ea kakaretso ea likoloi.
Matla a Nchafatsoang:Litsamaisong tsa eneji e nchafatsoang tse kang matla a letsatsi le a moea, li-wafer tsa SiC li sebelisoa ho li-inverter le li-converter tse nolofalletsang ho hapa le ho aba matla ka katleho e kholo. Ho khanna ha mocheso o phahameng le motlakase o phahameng oa ho senyeha ha SiC li netefatsa hore litsamaiso tsena li sebetsa ka mokhoa o tšepahalang, esita le tlas'a maemo a feteletseng a tikoloho.
Boiketsetso ba Liindasteri le Liroboto:Di-elektroniki tse sebetsang hantle haholo ditsamaisong tsa othomathike tsa diindasteri le dirobotong di hloka disebediswa tse kgonang ho fetoha kapele, ho sebetsana le meroalo e meholo ya motlakase, le ho sebetsa tlasa kgatello e phahameng. Di-semiconductor tse thehilweng ho SiC di fihlela ditlhoko tsena ka ho fana ka bokgoni bo phahameng le ho tiya, esita le maemong a thata a tshebetso.
Mekhoa ea puisano:Meralong ea meralo ea puisano, moo ho tšepahala ho phahameng le phetoho e sebetsang hantle ea matla li leng bohlokoa, li-wafer tsa SiC li sebelisoa phepelong ea motlakase le li-converter tsa DC-DC. Lisebelisoa tsa SiC li thusa ho fokotsa tšebeliso ea matla le ho ntlafatsa ts'ebetso ea sistimi litsing tsa data le marang-rang a puisano.
Ka ho fana ka motheo o tiileng bakeng sa lits'ebetso tse nang le matla a mangata, wafer ea HPSI SiC e nolofalletsa nts'etsopele ea lisebelisoa tse bolokang matla hantle, e thusang liindasteri ho fetohela litharollong tse tala le tse tšoarellang haholoanyane.
Matlo
| mosebetsi | Kereiti ea Tlhahiso | Kereiti ea Lipatlisiso | Sehlopha sa Mashano |
| Bophara | 75.0 mm ± 0.5 mm | 75.0 mm ± 0.5 mm | 75.0 mm ± 0.5 mm |
| Botenya | 350 µm ± 25 µm | 350 µm ± 25 µm | 350 µm ± 25 µm |
| Boikutlo ba Wafer | Mothating: <0001> ± 0.5° | Mothating: <0001> ± 2.0° | Mothating: <0001> ± 2.0° |
| Botenya ba Micropipe bakeng sa 95% ea Li-wafer (MPD) | ≤ 1 cm⁻² | ≤ 5 cm⁻² | ≤ 15 cm⁻² |
| Ho hanyetsa motlakase | ≥ 1E7 Ω·cm | ≥ 1E6 Ω·cm | ≥ 1E5 Ω·cm |
| Dopant | E phutholotsoe | E phutholotsoe | E phutholotsoe |
| Boikutlo ba Motheo bo bataletseng | {11-20} ± 5.0° | {11-20} ± 5.0° | {11-20} ± 5.0° |
| Bolelele ba Sephara ba Motheo | 32.5 mm ± 3.0 mm | 32.5 mm ± 3.0 mm | 32.5 mm ± 3.0 mm |
| Bolelele ba Bobedi bo Sephara | 18.0 mm ± 2.0 mm | 18.0 mm ± 2.0 mm | 18.0 mm ± 2.0 mm |
| Boikutlo bo Bobedi bo bataletseng | Haeba sefahleho se shebile holimo: 90° CW ho tloha foleteng ea mantlha ± 5.0° | Haeba sefahleho se shebile holimo: 90° CW ho tloha foleteng ea mantlha ± 5.0° | Haeba sefahleho se shebile holimo: 90° CW ho tloha foleteng ea mantlha ± 5.0° |
| Ho se kenyeletsoe ha Moeli | 3 mm | 3 mm | 3 mm |
| LTV/TTV/Seqha/Koba | 3 µm / 10 µm / ±30 µm / 40 µm | 3 µm / 10 µm / ±30 µm / 40 µm | 5 µm / 15 µm / ± 40 µm / 45 µm |
| Bokahare bo Bobebe | Sefahleho sa C: Se bentšitsoeng, Sefahleho sa Si: CMP | Sefahleho sa C: Se bentšitsoeng, Sefahleho sa Si: CMP | Sefahleho sa C: Se bentšitsoeng, Sefahleho sa Si: CMP |
| Mapetso (a hlahlojoang ke khanya e matla haholo) | Ha ho letho | Ha ho letho | Ha ho letho |
| Lipoleiti tsa Hex (li hlahlobiloe ke khanya e matla haholo) | Ha ho letho | Ha ho letho | Sebaka se kopaneng 10% |
| Libaka tsa Polytype (tse hlahlobiloeng ke khanya e matla haholo) | Sebaka se kopaneng 5% | Sebaka se kopaneng 5% | Sebaka se kopaneng 10% |
| Mengoapo (e hlahlojwang ke lesedi le matla haholo) | ≤ mengoapo e 5, bolelele bo kopaneng ≤ 150 mm | ≤ mengoapo e 10, bolelele bo kopaneng ≤ 200 mm | ≤ mengoapo e 10, bolelele bo kopaneng ≤ 200 mm |
| Ho qhaqha Edge | Ha ho letho le dumelletsweng bophara le botebo ba ≥ 0.5 mm | 2 e lumelletsoe, bophara le botebo ba ≤ 1 mm | 5 e lumelletsoe, bophara le botebo ba ≤ 5 mm |
| Tšilafalo ea bokaholimo (e hlahlojoa ke khanya e matla haholo) | Ha ho letho | Ha ho letho | Ha ho letho |
Melemo ea Bohlokoa
Tshebetso e Phahameng ya Thermal: Ho tsamaisa mocheso ka matla ha SiC ho netefatsa ho qhala ha mocheso ka katleho disebedisweng tsa motlakase, ho di dumella ho sebetsa maemong a hodimo a matla le maqhubu ntle le ho chesa haholo. Sena se fetolela ho ditsamaiso tse nyane, tse sebetsang hantle le nako e telele ya tshebetso.
Motlakase o Arohaneng Haholo: Ka lekhalo le leholo ha le bapisoa le silicon, li-wafer tsa SiC li tšehetsa lits'ebetso tsa motlakase o phahameng, e leng se etsang hore li be ntle bakeng sa likarolo tsa motlakase tsa elektroniki tse hlokang ho mamella motlakase o phahameng oa motlakase, joalo ka likoloing tsa motlakase, litsamaisong tsa motlakase oa gridi, le litsamaisong tsa matla a nchafatsoang.
Tahlehelo e Fokotseng ea Matla: Ho hanyetsa ho tlase le lebelo le potlakileng la ho chencha ha lisebelisoa tsa SiC ho fella ka tahlehelo e fokotsehileng ea matla nakong ea ts'ebetso. Sena ha se ntlafatse feela katleho empa se boetse se ntlafatsa poloko ea matla ka kakaretso ea litsamaiso tseo li kenngoang ho tsona.
Ho Tšepahala ho Ntlafalitsoeng Tikolohong e Mathata: Thepa e tiileng ea thepa ea SiC e e lumella ho sebetsa maemong a feteletseng, joalo ka mocheso o phahameng (ho fihlela ho 600°C), motlakase o phahameng le maqhubu a phahameng. Sena se etsa hore li-wafer tsa SiC li lokele lits'ebetso tse hlokang matla tsa indasteri, likoloi le matla.
Bokgoni ba Matla: Disebediswa tsa SiC di fana ka matla a mangata ho feta disebediswa tsa setso tse thehilweng ho silicon, e leng se fokotsang boholo le boima ba ditsamaiso tsa motlakase tsa elektroniki ha ka nako e ts'oanang di ntse di ntlafatsa bokgoni ba tsona ka kakaretso. Sena se lebisa ho bolokeng ditjeo le kgatello e nyane ya tikoloho ditshebedisong tse kang matla a ntjhafatswang le dikoloi tsa motlakase.
Ho Kgolofala: Bophara ba lisenthimithara tse 3 le mamello e nepahetseng ea tlhahiso ea wafer ea HPSI SiC li netefatsa hore e ka atolosoa bakeng sa tlhahiso ea bongata, e fihlela litlhoko tsa lipatlisiso le tsa tlhahiso ea khoebo.
Qetello
Wafer ea HPSI SiC, e nang le bophara ba lisenthimithara tse 3 le botenya ba 350 µm ± 25 µm, ke thepa e ntle ka ho fetisisa bakeng sa moloko o latelang oa lisebelisoa tsa elektroniki tse sebetsang hantle. Motsoako oa eona o ikhethang oa ho tsamaisa mocheso, motlakase o phahameng oa ho senyeha, tahlehelo e tlase ea matla, le ts'epo tlas'a maemo a feteletseng e etsa hore e be karolo ea bohlokoa bakeng sa lits'ebetso tse fapaneng tsa phetoho ea motlakase, matla a nchafatsoang, likoloi tsa motlakase, litsamaiso tsa indasteri le likhokahano tsa mohala.
Wafer ena ea SiC e loketse haholo liindasteri tse batlang ho fihlela katleho e phahameng, ho boloka matla a mangata, le ho ntlafala ha ts'epo ea sistimi. Ha theknoloji ea motlakase ea motlakase e ntse e tsoela pele ho fetoha, wafer ea HPSI SiC e fana ka motheo oa nts'etsopele ea litharollo tsa moloko o latelang, tse bolokang matla hantle, tse khannang phetoho ho ea bokamosong bo tsitsitseng haholoanyane, bo se nang khabone e ngata.
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