Li-wafer tsa SiC tsa lisenthimithara tse 4 6H tse thibelang mocheso tse nang le mocheso o fokolang, tse entsoeng ka lipatlisiso le tse sa tloaelehang.
Tlhaloso ea Sehlahisoa
| Sehlopha | Kereiti ea Tlhahiso ea Lefela la MPD (Kereiti ea Z) | Kereiti e Tloaelehileng ea Tlhahiso (Kereiti ea P) | Kereiti ea Dummy (Kereiti ea D) | ||||||||
| Bophara | 99.5 mm ~ 100.0 mm | ||||||||||
| 4H-SI | 500 μm±20 μm | 500 μm±25 μm | |||||||||
| Boikutlo ba Wafer |
Mothapo o sa sebetseng: 4.0° ho ya ho< 1120 > ± 0.5° bakeng sa 4H-N, Mothapo o sa sebetseng: <0001>± 0.5° bakeng sa 4H-SI | ||||||||||
| 4H-SI | ≤1cm-2 | ≤5 cm-2 | ≤15 cm-2 | ||||||||
| 4H-SI | ≥1E9 Ω·cm | ≥1E5 Ω·cm | |||||||||
| Boikutlo ba Motheo bo bataletseng | {10-10} ±5.0° | ||||||||||
| Bolelele ba Sephara ba Motheo | 32.5 mm±2.0 mm | ||||||||||
| Bolelele ba Bobedi bo Sephara | 18.0 mm±2.0 mm | ||||||||||
| Boikutlo bo Bobedi bo bataletseng | Silicon e shebile holimo: 90° CW. ho tloha ho Prime flat ±5.0° | ||||||||||
| Ho se kenyeletsoe ha Moeli | 3 mm | ||||||||||
| LTV/TTV/Seqha/Sekotwana | ≤3 μm/≤5 μm/≤15 μm/≤30 μm | ≤10 μm/≤15 μm/≤25 μm/≤40 μm | |||||||||
| Ho ba le makukuno | Sefahleho sa C | Sepolishe | Ra≤1 nm | ||||||||
| Sefahleho sa Si | CMP | Ra≤0.2 nm | Ra≤0.5 nm | ||||||||
| Mapetso a Moeli ka Leseli le Matla a Phahameng | Ha ho letho | Bolelele bo bokellaneng ≤ 10 mm, e le 'ngoe bolelele ≤2 mm | |||||||||
| Lipoleiti tsa Hex ka Leseli le Phahameng la Matla | Sebaka se bokellaneng ≤0.05% | Sebaka se bokellaneng ≤0.1% | |||||||||
| Libaka tsa Polytype ka Leseli le Matla a Phahameng | Ha ho letho | Sebaka se bokellaneng ≤3% | |||||||||
| Ho kenyeletsoa ha Khabone e Bonahalang | Sebaka se bokellaneng ≤0.05% | Sebaka se bokellaneng ≤3% | |||||||||
| Ho ngoatheloa ha bokaholimo ba Silicon ke Leseli le Matla a Phahameng | Ha ho letho | Bolelele bo bokellaneng ≤1 * bophara ba wafer | |||||||||
| Li-chips tsa Edge tse Phahameng ka Matla a Phahameng | Ha ho letho le dumelletsweng bophara le botebo ba ≥0.2 mm | 5 e lumelletsoe, ≤1 mm ka 'ngoe | |||||||||
| Tšilafalo ea Bokaholimo ba Silicon ka Matla a Phahameng | Ha ho letho | ||||||||||
| Sephutheloana | Cassette ea wafer e nang le li-multi-wafer kapa setshelo se le seng sa wafer | ||||||||||
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