4H/6H-P 6inch SiC wafer Zero MPD kereiti ya Tlhahiso Kereiti ya Dummy
4H/6H-P Mofuta oa SiC Composite Substrates Tafole e tloaelehileng ea parameter
6 inch bophara ba Silicon Carbide (SiC) Substrate Tlhaloso
Kereiti | Zero MPD TlhahisoKereiti (Z Kereiti) | Tlhahiso e TloaelehilengKereiti (P Kereiti) | Sehlopha sa Dummy (D Kereiti) | ||
Diameter | 145.5 limilimithara ~ 150.0 limilimithara | ||||
Botenya | 350 μm ± 25 μm | ||||
Wafer Orientation | -Offaxis: 2.0° -4.0° ho leba [1120] ± 0.5° bakeng sa 4H/6H-P, Ho axis:〈111〉± 0.5° bakeng sa 3C-N | ||||
Boima ba Micropipe | 0cm-2 | ||||
Ho hanyetsa | mofuta oa 4H/6H-P | ≤0.1 Ωꞏcm | ≤0.3 Ωꞏcm | ||
n-mofuta 3C-N | ≤0.8 mΩꞏcm | ≤1 m Ωꞏcm | |||
Maemo a mantlha a Flat | 4H/6H-P | -{1010} ± 5.0° | |||
3C-N | -{110} ± 5.0° | ||||
Bolelele ba Phatlalatso ba Pele | 32.5 limilimithara ± 2.0 limilimithara | ||||
Bolelele ba Bokhabane ba Bobeli | 18.0 limilimithara ± 2.0 limilimithara | ||||
Boemo ba Bobeli ba Flat | Sefahleho sa silicon holimo: 90° CW. ho tloha ho Prime flat ± 5.0° | ||||
Kenyelletso ea Edge | 3 limilimithara | 6 limilimithara | |||
LTV/TTV/Bow /Warp | ≤2.5 μm/≤5 μm/≤15 μm/≤30 μm | ≤10 μm/≤15 μm/≤25 μm/≤40 μm | |||
Boqhobane | Polish Ra≤1 nm | ||||
CMP Ra≤0.2 nm | Ra≤0.5 nm | ||||
Edge Cracks By High Intensity Leseli | Ha ho letho | Bolelele bo akaretsang ≤ 10 mm, bolelele bo le bong≤2 mm | |||
Hex Plates By High Intensity Light | Kakaretso ≤0.05% | Kakaretso ≤0.1% | |||
Libaka tsa Polytype Ka Leseli le Matla a Phahameng | Ha ho letho | Kakaretso≤3% | |||
Likakaretso tsa Carbon tse bonoang | Kakaretso ≤0.05% | Kakaretso ≤3% | |||
Silicon Surface Scratches By High Intensity Light | Ha ho letho | Bolelele ba kakaretso≤1× bophara ba wafer | |||
Edge Chips Phahameng ka ho Matla Leseli | Ha ho e lumelletsoeng ≥0.2mm bophara le botebo | 5 e lumelletsoe, ≤1 mm ka 'ngoe | |||
Tšilafalo ea Sefahleho sa Silicon Ka Matla a Phahameng | Ha ho letho | ||||
Sephutheloana | Multi-wafer Cassette kapa Single Wafer Container |
Lintlha:
※ Meeli ea bofokoli e sebetsa sebakeng sohle sa wafer ntle le sebaka se ka thoko. # Mengoako e lokela ho hlahlojoa ho Si face o
Mofuta oa 4H/6H-P oa 6-inch SiC wafer e nang le kereiti ea Zero MPD le boemo ba tlhahiso kapa dummy e sebelisoa haholo lits'ebetsong tse tsoetseng pele tsa elektroniki. Ts'ebetso ea eona e ntle ea mocheso, matla a phahameng a ho senyeha, le ho hanyetsa maemo a thata ho etsa hore e be e loketseng bakeng sa lisebelisoa tsa motlakase, tse kang li-switches tse phahameng le li-inverters. Mophato oa Zero MPD o netefatsa bofokoli bo fokolang, bo bohlokoa bakeng sa lisebelisoa tse tšepahalang haholo. Li-wafers tsa boemo ba tlhahiso li sebelisoa tlhahisong e kholo ea lisebelisoa tsa motlakase le lits'ebetso tsa RF, moo ts'ebetso le ho nepahala ho leng bohlokoa. Ka lehlakoreng le leng, li-wafers tsa boemo ba Dummy li sebelisetsoa ho lekanya tšebetso, tlhahlobo ea lisebelisoa, le prototyping, e thusang taolo e tsitsitseng ea boleng libakeng tsa tlhahiso ea semiconductor.
Melemo ea N-mofuta oa SiC composite substrates e kenyelletsa
- High Thermal Conductivity: Sephaphatha sa 4H / 6H-P SiC se senya mocheso ka katleho, se etsa hore se tšoanelehe bakeng sa lisebelisoa tsa elektronike tse nang le mocheso o phahameng le o matla.
- Motlakase o phahameng oa ho senya: Bokhoni ba eona ba ho sebetsana le li-voltage tse phahameng ntle le ho hloleha bo e etsa hore e be e loketseng bakeng sa lisebelisoa tsa elektroniki tsa motlakase le lits'ebetso tsa switching tse matla haholo.
- Zero MPD (Micro Pipe Defect) Kereiti: Tekanyo e fokolang ea sekoli e netefatsa ts'epo le ts'ebetso e phahameng, e bohlokoa bakeng sa lisebelisoa tsa elektroniki tse batloang.
- Tlhahiso-Kereiti ea Tlhahiso ea Boipheliso: E loketse tlhahiso e kholo ea lisebelisoa tsa semiconductor tse sebetsang hantle tse nang le litekanyetso tse thata tsa boleng.
- Kereiti ea Dummy bakeng sa Teko le Teko: E nolofalletsa ts'ebetso ea ts'ebetso, tlhahlobo ea lisebelisoa, le prototyping ntle le ho sebelisa li-wafers tsa boemo bo holimo tsa tlhahiso.
Ka kakaretso, li-wafers tsa 4H/6H-P 6-inch SiC tse nang le mophato oa Zero MPD, boemo ba tlhahiso, le boemo ba dummy li fana ka melemo e mengata bakeng sa nts'etsopele ea lisebelisoa tsa elektroniki tse sebetsang hantle haholo. Li-wafers tsena li molemo haholo lits'ebetsong tse hlokang ts'ebetso ea mocheso o phahameng, matla a phahameng a matla, le phetolo ea matla e sebetsang hantle. Mophato oa Zero MPD o netefatsa bofokoli bo fokolang bakeng sa ts'ebetso e ts'eptjoang le e tsitsitseng ea sesebelisoa, athe liphaephe tsa boemo ba tlhahiso li ts'ehetsa tlhahiso e kholo ka taolo e tiileng ea boleng. Li-wafer tsa boemo ba li-dummy li fana ka tharollo e theko e tlaase bakeng sa ts'ebetso ea ts'ebetso le ho lekanya lisebelisoa, e leng se etsang hore e be tsa bohlokoa haholo bakeng sa ho etsoa ha semiconductor e nepahetseng haholo.