4inch 6inch 8inch SiC Sebōpi sa Khōlo ea Crystal bakeng sa Ts'ebetso ea CVD

1. Sistimi e tsoetseng pele ea Taolo ea Mocheso
Sebōpi se na le sistimi e futhumatsang ea libaka tse ngata e khonang ho boloka mocheso o fihlang ho 2300 ° C ka ho ts'oana ha ± 1 ° C ho pholletsa le phaposi eohle ea kholo. Taolo ena e nepahetseng ea mocheso e finyelloa ka:
Libaka tse futhumatsang tse 12 tse laoloang ka boikemelo.
Tlhokomelo e sa hlokahaleng ea thermocouple (Mofuta oa C W-Re).
Li-algorithms tsa phetoho ea boemo ba mocheso oa nako ea 'nete.
Mabota a kamore a pholileng ka metsi bakeng sa taolo ea mocheso oa mocheso.

2. Theknoloji ea Phano ea Khase le Ho Kopanya
Sistimi ea rona ea kabo ea khase e netefatsa ho tsoakoa ka mokhoa o nepahetseng oa selelekela le phepelo e tšoanang:
Balaoli ba phallo ea bongata ka ± 0.05sccm ho nepahala.
Multi-point gase ente e mengata.
Tlhokomelo ea sebopeho sa khase e kahare ho situ (FTIR spectroscopy).
Matšeliso a phallang ka boiketsetso nakong ea lipotoloho tsa kholo.

3. Ntlafatso ea Boleng ba Crystal
Sistimi e kenyelletsa mekhoa e mengata e mecha ea ho ntlafatsa boleng ba kristale:
Sets'oants'o sa substrate se pota-potileng (0-100rpm e ka khonehang).
Theknoloji e tsoetseng pele ea taolo ea moeli oa moeli.
Sistimi ea ho beha leihlo sekoli ka har'a situ (ho hasana ha laser ea UV).
Matšeliso a khatello ea maikutlo ka ho iketsa nakong ea kholo.

4. Tshebetso ea Boiketsetso le Taolo
Phethahatso e phethahetseng ea recipe.
AI ea kholo ea kholo ea nako ea nnete.
Tlhokomelo e hole le tlhahlobo ea mafu.
1000+ ho rengoa ha data ea parameter (e bolokiloeng lilemo tse 5).

5. Likarolo tsa Tšireletseho le Tšepahalang
Ts'ireletso e sa hlokeng makhetlo a mararo ho feta mocheso.
Mokhoa o ikemetseng oa ho hloekisa maemo a tšohanyetso.
Moralo oa sebopeho se lekantsoeng ka litšisinyeho tsa lefatše.
98.5% tiisetso ea nako ea ho qetela.

6. Scalable Architecture
Moralo oa modular o lumella ho ntlafatsa bokhoni.
E lumellana le boholo ba 100mm ho isa ho 200mm.
E ts'ehetsa litlhophiso tse otlolohileng le tse tšekaletseng.
Likarolo tsa phetoho e potlakileng bakeng sa tlhokomelo.

7. Matla a Matla
30% ea tšebeliso e tlase ea matla ho feta litsamaiso tse bapisoang.
Sistimi ea ho khutlisa mocheso e hapa 60% ea mocheso oa litšila.
Mokhoa o ntlafalitsoeng oa tšebeliso ea khase.
Litlhoko tsa setsi tse lumellanang le LEED.

8. Lintho Tse Fetohang
E holisa li-polytypes tsohle tse kholo tsa SiC (4H, 6H, 3C).
E ts'ehetsa mefuta e fapaneng ea conductive le semi-insulating.
E fana ka mefuta e fapaneng ea merero ea doping (N-mofuta, P-mofuta).
E lumellana le li-precursor tse ling (mohlala, TMS, TES).

9. Ts'ebetso ea Vacuum System
Khatello ea motheo: <1×10⁻⁶ Torr
Sekhahla sa ho lutla: <1×10⁻⁹ Torr·L/sec
Lebelo la ho pompa: 5000L/s (bakeng sa SiH₄)

Taolo ea khatello e ikemetseng nakong ea lipotoloho tsa kholo
Tlhaloso ena e felletseng ea tekheniki e bonts'a bokhoni ba sistimi ea rona ea ho hlahisa likristale tsa SiC tsa boemo ba lipatlisiso le boleng ba tlhahiso tse nang le botsitso bo etelletseng pele indastering le chai. Motsoako oa taolo e nepahetseng, tlhahlobo e tsoetseng pele, le boenjiniere bo matla bo etsa hore sistimi ena ea CVD e be khetho e nepahetseng bakeng sa lisebelisoa tsa R&D le tsa tlhahiso ea molumo ho lisebelisoa tsa motlakase, lisebelisoa tsa RF, le lits'ebetso tse ling tse tsoetseng pele tsa semiconductor.