50.8mm/100mm AlN Template on NPSS/FSS AlN template on safire

Tlhaloso e Khutšoanyane:

AlN-On-Sapphire e bua ka motsoako oa lisebelisoa tseo ho tsona lifilimi tsa aluminium nitride li lengoang ho li-substrates tsa Sapphire. Ka sebopeho sena, filimi ea boleng bo holimo ea aluminium nitride e ka hōlileng ka lik'hemik'hale tsa mouoane oa lik'hemik'hale (CVD) kapa organometrical chemical vapor deposition (MOCVD), e leng se etsang hore filimi ea aluminium nitride le sapphire substrate e be le motsoako o motle. Melemo ea sebopeho sena ke hore aluminium nitride e na le conductivity e phahameng ea mocheso, botsitso bo phahameng ba lik'hemik'hale le thepa e ntle ea optical, athe sapphire substrate e na le thepa e ntle ea mochine le ea mocheso le ho pepeseha.


Lintlha tsa Sehlahisoa

Li-tag tsa Sehlahisoa

AlN-On-Sapphire

AlN-On-Sapphire e ka sebelisoa ho etsa lisebelisoa tse fapaneng tsa photoelectric, joalo ka:
1. Li-chips tsa LED: Hangata li-chips tsa LED li entsoe ka lifilimi tsa aluminium nitride le lisebelisoa tse ling. Ts'ebetso le botsitso ba li-leds li ka ntlafatsoa ka ho sebelisa li-wafers tsa AlN-On-Sapphire e le karoloana ea li-chips tsa LED.
2. Li-Lasers: Li-wafers tsa AlN-On-Sapphire li ka boela tsa sebelisoa e le li-substrates tsa lasers, tse atisang ho sebelisoa ho tsa bongaka, puisano le thepa ea thepa.
3. Lisele tsa letsatsi: Ho etsoa ha lisele tsa letsatsi ho hloka hore ho sebelisoe lisebelisoa tse kang aluminium nitride. AlN-On-Sapphire e le substrate e ka ntlafatsa katleho le bophelo ba lisele tsa letsatsi.
4. Lisebelisoa tse ling tsa optoelectronic: Li-wafers tsa AlN-On-Sapphire li ka boela tsa sebelisoa ho etsa li-photodetectors, lisebelisoa tsa optoelectronic, le lisebelisoa tse ling tsa optoelectronic.

Qetellong, li-wafers tsa AlN-On-Sapphire li sebelisoa haholo tšimong ea opto-electrical ka lebaka la conductivity ea tsona e phahameng ea mocheso, botsitso bo phahameng ba lik'hemik'hale, tahlehelo e tlaase le thepa e ntle ea optical.

50.8mm/100mm AlN Template ho NPSS/FSS

Ntho Litlhaloso
Tlhaloso Setšoantšo sa AlN-on-NPSS Setšoantšo sa AlN-on-FSS
Bophara ba sephaephe 50.8mm, 100mm
Substrate c-sefofane NPSS C-planer Sapphire (FSS)
Botenya ba Substrate 50.8mm, 100mmc-sefofane sa Planar Sapphire (FSS)100mm : 650 um
Botenya ba AIN epi-layer 3 ~ 4 um (sepheo: 3.3um)
Boikhantšo Ho sireletsa

Bokaholimo

Jwalo kaha o hodile
RMS <1nm RMS <2nm
Ka morao Qhiloe
FWHM(002)XRC <150 arcsec <150 arcsec
FWHM(102)XRC <300 arcsec <300 arcsec
Kenyelletso ea Edge <2mm <3 limilimithara
Boemo ba mantlha bo bataletseng sefofane+0,1 °
Bolelele ba pele bo bataletseng 50.8mm: 16+/-1 limilimithara 100mm: 30+/-1 limilimithara
Sephutheloana E phuthetsoe ka lebokoseng la thomello kapa setshelo se le seng sa wafer

Setšoantšo se qaqileng

Setšoantšo sa FSS AlN ka safire3
Setšoantšo sa FSS AlN ka safire4

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