6inch 150mm Silicon Carbide SiC Wafers 4H-N mofuta oa MOS kapa Lipatlisiso tsa Tlhahiso ea SBD le sehlopha sa Dummy
Libaka tsa Kopo
6-inch silicon carbide single crystal substrate e bapala karolo ea bohlokoa liindastering tse ngata. Taba ea pele, e sebelisoa haholo indastering ea semiconductor bakeng sa ho etsa lisebelisoa tsa elektroniki tse matla haholo joalo ka li-transistors tsa motlakase, li-circuits tse kopaneng le li-module tsa motlakase. Ts'ebetso ea eona e phahameng ea mocheso le ho hanyetsa mocheso o phahameng ho etsa hore ho be bonolo ho senya mocheso, e leng se etsang hore ho be le ts'ebetso e ntlafetseng le ho tšepahala. Taba ea bobeli, li-wafers tsa silicon carbide li bohlokoa mafapheng a lipatlisiso bakeng sa nts'etsopele ea lisebelisoa le lisebelisoa tse ncha. Ho feta moo, silicon carbide wafer e fumana lits'ebetso tse ngata lefapheng la optoelectronics, ho kenyeletsoa tlhahiso ea li-LED le diode tsa laser.
Litlhaloso tsa Sehlahisoa
The 6-inch silicon carbide single crystal substrate e na le bophara ba lisenthimithara tse 6 (hoo e ka bang 152.4 mm). The ka holimo roughness ke Ra <0.5 nm, le botenya ke 600 ± 25 μm. Substrate e ka etsoa ka mokhoa oa mofuta oa N kapa oa P, ho latela litlhoko tsa bareki. Ho feta moo, e bonts'a botsitso bo ikhethang ba mochini, bo khonang ho mamella khatello le ho thothomela.
Diameter | 150±2.0mm (6inch) | ||||
Botenya | 350 μm±25μm | ||||
Boitloaelo | Ka lehlakoreng le leng: <0001> ± 0.5° | Off axis: 4.0 ° ho 1120±0.5 ° | |||
Polytype | 4H | ||||
Ho hanyetsa(Ω·cm) | 4H-N | 0.015~0.028 Ω·cm/0.015~0.025ohm·cm | |||
4/6H-SI | >1E5 | ||||
Boemo ba mantlha bo bataletseng | {10-10}±5.0° | ||||
Bolelele ba sephara ba mantlha (mm) | 47.5 mm± 2.5 limilimithara | ||||
Qetello | Chamfer | ||||
TTV / Bow / Warp (um) | ≤15 /≤40 /≤60 | ||||
AFM Front (Si-face) | Polish Ra≤1 nm | ||||
CMP Ra≤0.5 nm | |||||
LTV | ≤3μm(10mm*10mm) | ≤5μm(10mm*10mm) | ≤10μm(10mm*10mm) | ||
TTV | ≤5μm | ≤10μm | ≤15μm | ||
Lekhapetla la lamunu/likoti/mapetso/tšilafatso/matheba/li-striations | Ha ho letho | Ha ho letho | Ha ho letho | ||
indents | Ha ho letho | Ha ho letho | Ha ho letho |
6-inch silicon carbide single crystal substrate ke thepa e sebetsang hantle haholo e sebelisoang haholo indastering ea semiconductor, lipatlisiso, andoptoelectronics. E fana ka conductivity e babatsehang ea mocheso, botsitso ba mechine, le ho hanyetsa mocheso o phahameng, ho etsa hore e loketse ho etsoa ha lisebelisoa tsa elektronike tse matla le lipatlisiso tse ncha tsa thepa. Re fana ka litlhaloso tse fapaneng le likhetho tsa Customize ho fihlela litlhoko tse fapaneng tsa bareki.Ikopanye le rona bakeng sa lintlha tse ling mabapi le li-wafers tsa silicon carbide!