6inch SiC Epitaxiy wafer N/P mofuta o amohelehile

Mokhoa oa ho lokisa silicon carbide epitaxial wafer ke mokhoa o sebelisang theknoloji ea Chemical Vapor Deposition (CVD). Melao-motheo ea tekheniki le mehato ea ts'ebetso ea ho lokisa ke tsena:

Molao-motheo oa tekheniki:

Ho ntshwa ha mouoane ka lik'hemik'hale: Ha ho sebediswa kgase ya thepa e tala mokgahlelong wa kgase, tlasa maemo a itseng a karabelo, e a bola mme e bewa hodima substrate ho etsa filimi e tshesane e lakatsehang.

Karabelo ea mokhahlelo oa khase: Ka pyrolysis kapa karabelo ea ho petsoha, likhase tse fapaneng tsa thepa e tala mokhahlelong oa khase li fetoloa ka lik'hemik'hale ka phapusing ea karabelo.

Mehato ea ts'ebetso ea ho lokisa:

Kalafo ea substrate: Substrate e hloekisoa le ho phekoloa esale pele ho netefatsa boleng le kristale ea wafer ea epitaxial.

Ho lokisa bothata ba kamore ea karabelo: lokisa mocheso, khatello le sekhahla sa phallo ea kamore ea karabelo le liparamente tse ling ho netefatsa botsitso le taolo ea maemo a karabelo.

Phepelo ea thepa e tala: fana ka thepa e tala ea khase e hlokahalang ka phapusing ea karabelo, ho kopanya le ho laola sekhahla sa phallo ha ho hlokahala.

Mokhoa oa karabelo: Ka ho futhumatsa kamore ea karabelo, phepelo ea khase e feta karabelong ea lik'hemik'hale ka kamoreng ho hlahisa depositi e lakatsehang, ke hore, filimi ea silicon carbide.

Ho Pholisa le ho Laolla: Qetellong ea karabelo, mocheso o theoleloa butle-butle ho pholile le ho tiisa masalla a ka kamoreng ea karabelo.

Ho annealing le ho sebetsa ka mora ho sebetsa ha wafer ya Epitaxial: wafer ya epitaxial e kentsweng e annealing mme e sebetswa ka mora ho sebetsa ho ntlafatsa thepa ya yona ya motlakase le ya optical.

Mehato le maemo a itseng a mokhoa oa ho lokisa wafer ea silicon carbide epitaxial a ka fapana ho latela lisebelisoa le litlhoko tse itseng. Se boletsoeng ka holimo ke feela phallo le molao-motheo oa ts'ebetso e akaretsang, ts'ebetso e itseng e hloka ho fetoloa le ho ntlafatsoa ho latela boemo ba 'nete.