8Inch 200mm 4H-N SiC Wafer Conductive dummy grade research

8Inch 200mm 4H-N SiC Wafer Conductive dummy kereite ea lipatlisiso Featured Image

Tlhaloso e Khutšoanyane:

Ha mebaraka ea lipalangoang, ea matla le ea indasteri e ntse e fetoha, tlhokahalo ea lisebelisoa tsa elektronike tse tšepahalang le tse phahameng li ntse li eketseha. Ho fihlela litlhoko tsa ts'ebetso e ntlafalitsoeng ea semiconductor, bahlahisi ba lisebelisoa ba shebile lisebelisoa tse pharaletseng tsa semiconductor, joalo ka rona 4H SiC Prime Grade portfolio ea 4H n -type silicon carbide (SiC) wafers.

Re romelle lengolo-tsoibila

Lintlha tsa Sehlahisoa

Li-tag tsa Sehlahisoa

Ka lebaka la thepa ea eona e ikhethang ea 'mele le ea elektroniki, lisebelisoa tsa 200mm SiC wafer semiconductor li sebelisoa ho theha lisebelisoa tsa elektroniki tse sebetsang hantle, tse phahameng haholo, tse hananang le radiation le tsa maqhubu a phahameng. Theko ea substrate ea 8inch SiC e ntse e fokotseha butle butle ha theknoloji e ntse e tsoela pele le tlhokahalo e ntse e hola. Lintlafatso tsa morao-rao tsa theknoloji li lebisa tlhahisong ea tlhahiso ea li-wafers tsa 200mm SiC. Melemo e ka sehloohong ea lisebelisoa tsa SiC wafer semiconductor ha li bapisoa le li-wafers tsa Si le GaAs: Matla a tšimo ea motlakase a 4H-SiC nakong ea ho senyeha ha leholiotsoana a feta taelo ea boholo bo phahameng ho feta litekanyetso tse tsamaellanang tsa Si le GaAs. Sena se lebisa ho fokotseha ho hoholo ha mohanyetsi oa mmuso oa Ron. Restivity e tlase ea boemo bo tlase, e kopantsoeng le sekhahla se phahameng sa hona joale le conductivity ea mocheso, e lumella tšebeliso ea lisebelisoa tse nyane haholo bakeng sa lisebelisoa tsa motlakase. Mocheso o phahameng oa mocheso oa SiC o fokotsa ho hanyetsa mocheso oa chip. Thepa ea elektronike ea lisebelisoa tse thehiloeng ho li-wafers tsa SiC li tsitsitse haholo ha nako e ntse e ea le ka mocheso o tsitsitseng, e leng se tiisang ho tšepahala ho phahameng ha lihlahisoa. Silicon carbide e hanyetsana haholo le mahlaseli a thata, a sa nyenyefatse thepa ea elektronike ea chip. Mocheso o phahameng oa ho sebetsa oa kristale (ho feta 6000C) o u lumella ho etsa lisebelisoa tse ka tšeptjoang haholo bakeng sa maemo a thata a ts'ebetso le lisebelisoa tse khethehileng. Hajoale, re ka fana ka liphaephe tse nyane tsa 200mmSiC ka mokhoa o tsitsitseng le ka mokhoa o tsoelang pele 'me ra ba le setoko se seng ka ntlong ea polokelo.

Tlhaloso

Nomoro	Ntho	Yuniti	Tlhahiso	Patlisiso	Dummy
1. Mekhahlelo
1.1	polytype	--	4H	4H	4H
1.2	tshepediso ya bokahodimo	°	<11-20>4±0.5	<11-20>4±0.5	<11-20>4±0.5
2. Parameter ea motlakase
2.1	dopant	--	n-mofuta oa Nitrojene	n-mofuta oa Nitrojene	n-mofuta oa Nitrojene
2.2	ho hanyetsana	ohm ·cm	0.015~0.025	0.01~0.03	NA
3. Mechini parameter
3.1	bophara	mm	200±0.2	200±0.2	200±0.2
3.2	botenya	μm	500±25	500±25	500±25
3.3	Notch orientation	°	[1- 100]±5	[1- 100]±5	[1- 100]±5
3.4	Botebo ba Notch	mm	1 ~ 1.5	1 ~ 1.5	1 ~ 1.5
3.5	LTV	μm	≤5(10mm*10mm)	≤5(10mm*10mm)	≤10(10mm*10mm)
3.6	TTV	μm	≤10	≤10	≤15
3.7	Inamela	μm	-25 ~ 25	- 45-45	- 65-65
3.8	Warp	μm	≤30	≤50	≤70
3.9	AFM	nm	Ra≤0.2	Ra≤0.2	Ra≤0.2
4. Sebopeho
4.1	boima ba micropipe	e/cm2	≤2	≤10	≤50
4.2	dikahare tsa tshepe	liathomo/cm2	≤1E11	≤1E11	NA
4.3	TSD	e/cm2	≤500	≤1000	NA
4.4	BPD	e/cm2	≤2000	≤5000	NA
4.5	TED	e/cm2	≤7000	≤10000	NA
5. Boleng bo botle
5.1	ka pele	--	Si	Si	Si
5.2	pheletso e kahodimo	--	Si-face CMP	Si-face CMP	Si-face CMP
5.3	karoloana	sekoahelo	≤100(boholo≥0.3μm)	NA	NA
5.4	ngoapa	sekoahelo	≤5, Kakaretso ea Bolelele≤200mm	NA	NA
5.5	Qetello li-chips/indents/cracks/ stains/tshilafatso	--	Ha ho letho	Ha ho letho	NA
5.6	Libaka tsa polytype	--	Ha ho letho	Sebaka ≤10%	Sebaka ≤30%
5.7	tshoao ka pele	--	Ha ho letho	Ha ho letho	Ha ho letho
6. Morao boleng
6.1	qetellong qetellong	--	MP ea sefahleho sa C	MP ea sefahleho sa C	MP ea sefahleho sa C
6.2	ngoapa	mm	NA	NA	NA
6.3	Bokooa bo ka morao li-chips/li-indent	--	Ha ho letho	Ha ho letho	NA
6.4	Bokhopo ba mokokotlo	nm	Ra≤5	Ra≤5	Ra≤5
6.5	Ho tšoaea ka morao	--	Notch	Notch	Notch
7. Ntlheng
7.1	bohale	--	Chamfer	Chamfer	Chamfer
8. Sephutheloana
8.1	phutheloana	--	Epi-ready with vacuum phutheloana	Epi-ready with vacuum phutheloana	Epi-ready with vacuum phutheloana
8.2	phutheloana	--	Multi-wafer sephuthelo sa khasete	Multi-wafer sephuthelo sa khasete	Multi-wafer sephuthelo sa khasete