8inch SiC Production grade sephaka 4H-N SiC substrate

8inch SiC Production grade bafer 4H-N SiC substrate Featured Image

Tlhaloso e Khutšoanyane:

Li-substrates tsa SiC tsa 8-inch li sebelisoa lisebelisoa tsa elektronike tse matla haholo, tse kang matla a MOSFET (Metal Oxide Semiconductor Field Effect Transistors), Schottky diode le lisebelisoa tse ling tsa semiconductor ea matla.

Re romelle lengolo-tsoibila

Lintlha tsa Sehlahisoa

Li-tag tsa Sehlahisoa

Tafole e latelang e bonts'a litlhaloso tsa li-wafers tsa rona tsa 8inch SiC:

8inch N-mofuta oa SiC DSP Litlhaloso
Nomoro	Ntho	Yuniti	Tlhahiso	Patlisiso	Dummy
1: mekhahlelo
1.1	polytype	--	4H	4H	4H
1.2	tshepediso ya bokahodimo	°	<11-20>4±0.5	<11-20>4±0.5	<11-20>4±0.5
2:Parameter ea motlakase
2.1	dopant	--	n-mofuta oa Nitrojene	n-mofuta oa Nitrojene	n-mofuta oa Nitrojene
2.2	ho hanyetsana	ohm ·cm	0.015~0.025	0.01~0.03	NA
3: Paramethara ea mochini
3.1	bophara	mm	200±0.2	200±0.2	200±0.2
3.2	botenya	μm	500±25	500±25	500±25
3.3	Notch orientation	°	[1- 100]±5	[1- 100]±5	[1- 100]±5
3.4	Botebo ba Notch	mm	1 ~ 1.5	1 ~ 1.5	1 ~ 1.5
3.5	LTV	μm	≤5(10mm*10mm)	≤5(10mm*10mm)	≤10(10mm*10mm)
3.6	TTV	μm	≤10	≤10	≤15
3.7	Inamela	μm	-25 ~ 25	- 45-45	- 65-65
3.8	Warp	μm	≤30	≤50	≤70
3.9	AFM	nm	Ra≤0.2	Ra≤0.2	Ra≤0.2
4:Sebopeho
4.1	boima ba micropipe	e/cm2	≤2	≤10	≤50
4.2	dikahare tsa tshepe	liathomo/cm2	≤1E11	≤1E11	NA
4.3	TSD	e/cm2	≤500	≤1000	NA
4.4	BPD	e/cm2	≤2000	≤5000	NA
4.5	TED	e/cm2	≤7000	≤10000	NA
5.Boleng ba pele
5.1	ka pele	--	Si	Si	Si
5.2	pheletso e kahodimo	--	Si-face CMP	Si-face CMP	Si-face CMP
5.3	karoloana	sekoahelo	≤100(boholo≥0.3μm)	NA	NA
5.4	ngoapa	sekoahelo	≤5, Kakaretso ea Bolelele≤200mm	NA	NA
5.5	Qetello li-chips/indents/cracks/ stains/tshilafatso	--	Ha ho letho	Ha ho letho	NA
5.6	Libaka tsa polytype	--	Ha ho letho	Sebaka ≤10%	Sebaka ≤30%
5.7	tshoao ka pele	--	Ha ho letho	Ha ho letho	Ha ho letho
6:Boleng ba morao
6.1	qetellong qetellong	--	MP ea sefahleho sa C	MP ea sefahleho sa C	MP ea sefahleho sa C
6.2	ngoapa	mm	NA	NA	NA
6.3	Bokooa bo ka morao li-chips/li-indent	--	Ha ho letho	Ha ho letho	NA
6.4	Bokhopo ba mokokotlo	nm	Ra≤5	Ra≤5	Ra≤5
6.5	Ho tšoaea ka morao	--	Notch	Notch	Notch
7: ntlha
7.1	bohale	--	Chamfer	Chamfer	Chamfer
8:Sephutheloana
8.1	phutheloana	--	Epi-ready with vacuum phutheloana	Epi-ready with vacuum phutheloana	Epi-ready with vacuum phutheloana
8.2	phutheloana	--	Multi-wafer sephuthelo sa khasete	Multi-wafer sephuthelo sa khasete	Multi-wafer sephuthelo sa khasete