8inch SiC Production grade sephaka 4H-N SiC substrate
Tafole e latelang e bonts'a litlhaloso tsa li-wafers tsa rona tsa 8inch SiC:
8inch N-mofuta oa SiC DSP Litlhaloso | |||||
Nomoro | Ntho | Yuniti | Tlhahiso | Patlisiso | Dummy |
1: liparamente | |||||
1.1 | polytype | -- | 4H | 4H | 4H |
1.2 | tshepediso ya bokahodimo | ° | <11-20>4±0.5 | <11-20>4±0.5 | <11-20>4±0.5 |
2:Parameter ea motlakase | |||||
2.1 | dopant | -- | n-mofuta oa Nitrojene | n-mofuta oa Nitrojene | n-mofuta oa Nitrojene |
2.2 | ho hanyetsana | ohm ·cm | 0.015~0.025 | 0.01~0.03 | NA |
3:Paramethara ea mochini | |||||
3.1 | bophara | mm | 200±0.2 | 200±0.2 | 200±0.2 |
3.2 | botenya | μm | 500±25 | 500±25 | 500±25 |
3.3 | Notch orientation | ° | [1- 100]±5 | [1- 100]±5 | [1- 100]±5 |
3.4 | Botebo ba Notch | mm | 1 ~ 1.5 | 1 ~ 1.5 | 1 ~ 1.5 |
3.5 | LTV | μm | ≤5(10mm*10mm) | ≤5(10mm*10mm) | ≤10(10mm*10mm) |
3.6 | TTV | μm | ≤10 | ≤10 | ≤15 |
3.7 | Inamela | μm | -25 ~ 25 | - 45-45 | - 65-65 |
3.8 | Warp | μm | ≤30 | ≤50 | ≤70 |
3.9 | AFM | nm | Ra≤0.2 | Ra≤0.2 | Ra≤0.2 |
4:Sebopeho | |||||
4.1 | boima ba micropipe | e/cm2 | ≤2 | ≤10 | ≤50 |
4.2 | dikahare tsa tshepe | liathomo/cm2 | ≤1E11 | ≤1E11 | NA |
4.3 | TSD | e/cm2 | ≤500 | ≤1000 | NA |
4.4 | BPD | e/cm2 | ≤2000 | ≤5000 | NA |
4.5 | TED | e/cm2 | ≤7000 | ≤10000 | NA |
5.Boleng ba pele | |||||
5.1 | ka pele | -- | Si | Si | Si |
5.2 | pheletso e kahodimo | -- | Si-face CMP | Si-face CMP | Si-face CMP |
5.3 | karoloana | sekoahelo | ≤100(boholo≥0.3μm) | NA | NA |
5.4 | ngoapa | sekoahelo | ≤5, Kakaretso ea Bolelele≤200mm | NA | NA |
5.5 | Qetello li-chips/indents/cracks/ stains/tshilafatso | -- | Ha ho letho | Ha ho letho | NA |
5.6 | Libaka tsa polytype | -- | Ha ho letho | Sebaka ≤10% | Sebaka ≤30% |
5.7 | tshoao ka pele | -- | Ha ho letho | Ha ho letho | Ha ho letho |
6:Boleng ba morao | |||||
6.1 | qetellong qetellong | -- | MP ea sefahleho sa C | MP ea sefahleho sa C | MP ea sefahleho sa C |
6.2 | ngoapa | mm | NA | NA | NA |
6.3 | Bokooa bo ka morao li-chips/ li-indent | -- | Ha ho letho | Ha ho letho | NA |
6.4 | Bokhopo ba mokokotlo | nm | Ra≤5 | Ra≤5 | Ra≤5 |
6.5 | Ho tšoaea ka morao | -- | Notch | Notch | Notch |
7: ntlha | |||||
7.1 | bohale | -- | Chamfer | Chamfer | Chamfer |
8:Sephutheloana | |||||
8.1 | phutheloana | -- | Epi-ready with vacuum phutheloana | Epi-ready with vacuum phutheloana | Epi-ready with vacuum phutheloana |
8.2 | phutheloana | -- | Multi-wafer sephuthelo sa khasete | Multi-wafer sephuthelo sa khasete | Multi-wafer sephuthelo sa khasete |
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