AlN-on-NPSS Wafer: Lera la Aluminium Nitride le Sebetsang ka Bongata holim'a Substrate ea Sapphire e sa bentšitsoeng bakeng sa Litšebeliso tsa Mocheso o Phahameng, Matla a Phahameng le RF

Tlhaloso e Khutšoanyane:

Wafer ea AlN-on-NPSS e kopanya lera la aluminium nitride (AlN) le substrate ea safire e sa bentšoang (NPSS) ho fana ka tharollo e loketseng bakeng sa lits'ebetso tsa mocheso o phahameng, matla a phahameng, le maqhubu a radio (RF). Motsoako o ikhethang oa ho tsamaisa mocheso o ikhethang oa AlN le thepa ea motlakase, hammoho le matla a matle a mechini a substrate, o etsa hore wafer ena e be khetho e ratoang bakeng sa lits'ebetso tse hlokang thuso tse kang lisebelisoa tsa motlakase, lisebelisoa tsa maqhubu a phahameng le likarolo tsa optical. Ka ho qhala mocheso hantle, tahlehelo e tlase, le ho lumellana le libaka tsa mocheso o phahameng, wafer ena e nolofalletsa nts'etsopele ea lisebelisoa tsa moloko o latelang tse nang le ts'ebetso e phahameng.

Romella imeile ho rona

Likaroloana

Lera la AlN le sebetsang hantle: Aluminium Nitride (AlN) e tsebahala kaho khanna ha mocheso o phahameng(~200 W/m·K),lekhalo le lehololemotlakase o phahameng oa ho senyeha, e leng se etsang hore e be thepa e loketseng bakeng samatla a phahameng, maqhubu a phahamenglemocheso o phahamenglits'ebetso.

Substrate ea Sapphire e sa bentšitsoeng (NPSS): Safire e sa bentšoang e fana kae bolokang tjhelete, e matla ka mechinemotheo, ho netefatsa motheo o tsitsitseng bakeng sa kgolo ya epitaxial ntle le ho rarahana ha ho bentsha bokahodimo. Dibopeho tse ntle tsa mechini tsa NPSS di etsa hore e dule e tiile bakeng sa dibaka tse thata.

Ho Tsitsisa ho Hoholo ha Thermal: Wafer ea AlN-on-NPSS e ka mamella ho feto-fetoha ho feteletseng ha mocheso, e leng se etsang hore e lokele ho sebelisoa homotlakase oa elektronike, litsamaiso tsa likoloi, Mabone a LEDlelits'ebetso tsa opticaltse hlokang tshebetso e tsitsitseng maemong a mocheso o phahameng.

Ho kenya motlakase: AlN e na le thepa e ntle ea ho thibela motlakase, e leng se etsang hore e be e phethahetseng bakeng sa lits'ebetso mooho itšehla thajana ha motlakasee bohlokoa haholo, ho kenyeletsoaLisebelisoa tsa RFlelisebelisoa tsa elektroniki tsa microwave.

Ho qhala ha mocheso ka tsela e phahameng: Ka ho tsamaisa mocheso ka matla a phahameng, lera la AlN le netefatsa ho qhala ha mocheso ka katleho, e leng ntho ea bohlokoa bakeng sa ho boloka ts'ebetso le bolelele ba nako ea lisebelisoa tse sebetsang ka matla a phahameng le khafetsa.

Li-parameter tsa Tekheniki

Paramethara	Tlhaloso
Bophara ba Wafer	2-inch, 4-inch (boholo bo ikgethileng bo a fumaneha)
Mofuta oa Substrate	Substrate ea Sapphire e sa bentšitsoeng (NPSS)
Botenya ba Lera la AlN	2µm ho isa ho 10µm (e ka fetoloang)
Botenya ba substrate	430µm ± 25µm (bakeng sa lisenthimithara tse 2), 500µm ± 25µm (bakeng sa lisenthimithara tse 4)
Ho khanna ha mocheso	200 W/m·K
Ho hanyetsa motlakase	Ho kenya mocheso o phahameng, ho loketse lits'ebetso tsa RF
Bokahare bo Bobebe	Ra ≤ 0.5µm (bakeng sa lera la AlN)
Bohloeki ba Lintho	AlN e hloekileng haholo (99.9%)
'Mala	Bosweu/Bosweu bo sa Tšoeu (Lera la AlN le nang le substrate ya NPSS e mmala o bobebe)
Sekoahelo sa Wafer	< 30µm (e tloaelehileng)
Mofuta oa ho sebelisa lithethefatsi	E sa kenngoang doped (e ka fetoloa)

Likopo

TheSejana sa AlN-on-NPSSe etselitsoe mefuta e mengata ea lits'ebetso tse sebetsang hantle liindastering tse 'maloa:

Lisebelisoa tsa Elektroniki tse Matla a Phahameng: Ho tsamaisa mocheso ho phahameng ha lera la AlN le thepa ea ho thibela mocheso ho etsa hore e be thepa e loketseng bakeng sali-transistors tsa matla, li-rectifierleli-IC tsa motlakasee sebediswa holikoloi, indasterilematla a nchafatsoanglitsamaiso.

Likarolo tsa Radio-Frequency (RF): Thepa e ntle ea ho thibela motlakase ea AlN, hammoho le tahlehelo ea eona e tlase, e nolofalletsa tlhahiso eaLi-transistor tsa RF, Li-HEMT (Li-transistors tsa High-Electron-Mobility)le tse linglikarolo tsa microwavetse sebetsang ka katleho maqhubung a phahameng le maemong a matla.

Lisebelisoa tsa OpticalLi-wafer tsa AlN-on-NPSS li sebelisoa hodiode tsa laser, Mabone a LEDleli-photodetectors, mooho khanna ha mocheso o phahamengleho tiea ha mechinili bohlokoa bakeng sa ho boloka ts'ebetso ka nako e telele.

Li-sensor tsa Mocheso o Phahameng: Bokhoni ba wafer ba ho mamella mocheso o feteletseng bo etsa hore e lokele ho sebelisoali-sensor tsa mochesoletlhokomelo ea tikoloholiindastering tse kangsefofane, likoloileoli le khase.

Sephutheloana sa Semiconductor: E sebelisoa ho li-spreader tsa mochesolemekhahlelo ea taolo ea mochesolitsamaisong tsa ho paka, ho netefatsa botšepehi le katleho ea li-semiconductor.

Lipotso le Likarabo

P: Molemo o moholo oa li-wafer tsa AlN-on-NPSS ke ofe ho feta thepa ea setso joalo ka silicon?

A: Molemo o moholo ke oa AlNho khanna ha mocheso o phahameng, e leng se e lumellang ho ntsha mocheso ka katleho, e leng se etsang hore e be e loketseng bakeng samatla a phahamenglelits'ebetso tse sebelisoang khafetsa haholomoo taolo ea mocheso e leng ea bohlokoa. Ho feta moo, AlN e na lelekhalo le leholole e babatsehangho thibela motlakase, e leng se etsang hore e be betere bakeng sa tšebeliso hoRFlelisebelisoa tsa microwaveha e bapisoa le silicon ea setso.

P: Na lera la AlN hodima di-wafer tsa NPSS le ka etswa hore le etswe ka tsela e ikgethang?

K: E, lera la AlN le ka fetoloa ho latela botenya (ho tloha ho 2µm ho isa ho 10µm kapa ho feta) ho fihlela litlhoko tse ikhethileng tsa kopo ea hau. Re boetse re fana ka mokhoa oa ho iketsetsa ho latela mofuta oa doping (mofuta oa N kapa mofuta oa P) le lera le eketsehileng bakeng sa mesebetsi e ikhethileng.

P: Tšebeliso e tloaelehileng ea wafer ena indastering ea likoloi ke efe?

K: Indastering ea likoloi, li-wafer tsa AlN-on-NPSS li sebelisoa haholo homotlakase oa elektronike, Sistimi ea mabone a LEDleli-sensor tsa mochesoLi fana ka taolo e phahameng ea mocheso le ho thibela motlakase, e leng ntho ea bohlokoa bakeng sa litsamaiso tse sebetsang hantle haholo tse sebetsang tlas'a maemo a fapaneng a mocheso.