AlN-on-NPSS Wafer: Aluminium Nitride Layer e Phahameng ka ho Fetisisa holim'a Sapphire Substrate e sa Pholisoang bakeng sa Mocheso o Phahameng, Matla a Phahameng, le Likopo tsa RF.

AlN-on-NPSS Wafer: High-Performance Aluminium Nitride Layer on Non Sapphire Substrate bakeng sa Mocheso o Phahameng oa Mocheso, Matla a Phahameng, le RF Application Featured Image

Tlhaloso e Khutšoanyane:

Sephaphatha sa AlN-on-NPSS se kopanya lera la aluminium nitride (AlN) e sebetsang ka holimo le sapphire substrate e sa hloekisitsoeng (NPSS) ho fana ka tharollo e loketseng bakeng sa lisebelisoa tsa mocheso o phahameng, matla a phahameng le a radio-frequency (RF). Motsoako o ikhethang oa AlN's conductivity e ikhethang ea mocheso le thepa ea motlakase, hammoho le matla a matle a mochini a substrate, li etsa hore sephaephe sena e be khetho e ratoang bakeng sa lits'ebetso tse hlokang matla joalo ka lisebelisoa tsa motlakase, lisebelisoa tsa maqhubu a holimo le likarolo tsa optical. Ka mokhoa o babatsehang oa ho senya mocheso, tahlehelo e tlaase, le ho lumellana le maemo a phahameng a mocheso, sephaphatha sena se nolofalletsa ho hlahisa lisebelisoa tsa moloko o latelang ka ts'ebetso e phahameng.

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Likaroloana

Phaello e Phahameng ea Ts'ebetso ea AlN: Aluminium Nitride (AlN) e tsejoa ka eonaphahameng mocheso conductivity(~200 W/m·K),sephara se seholo, lematla a phahameng a ho senya, ho etsa hore e be boitsebiso bo loketseng bakeng samatla a phahameng, maqhubu a phahameng, lemocheso o phahamenglits'ebetso.

Sapphire Substrate e sa Belisoang (NPSS): Sapphire e sa belisoang e fana kae hlokang chelete e ngata, matla ka metjhinimotheo, ho netefatsa motheo o tsitsitseng oa kholo ea epitaxial ntle le ho rarahana ha ho belisoa ha holim'a metsi. Thepa e ntle haholo ea NPSS e etsa hore e tšoarelle libakeng tse thata.

Phahameng Thermal Stability: Sephaphatha sa AlN-on-NPSS se ka mamella ho fetoha ha mocheso o feteletseng, se etsa hore se loketse ho sebelisoamatla a elektronike, tsamaiso ea likoloi, Li-LED, lelisebelisoa tsa opticale hlokang ts'ebetso e tsitsitseng maemong a mocheso o phahameng.

Insulation ea Motlakase: AlN e na le thepa e ntle haholo ea ho sireletsa motlakase, e etsa hore e be e loketseng lits'ebetso mooho itšehla thajana ka motlakasee bohlokoa, ho kenyelletsaLisebelisoa tsa RFlemicrowave elektronike.

Phallo e Phahameng ea Mocheso: Ka conductivity e phahameng ea mocheso, lesela la AlN le tiisa hore ho na le mocheso o sebetsang hantle oa mocheso, e leng oa bohlokoa bakeng sa ho boloka ts'ebetso le nako e telele ea lisebelisoa tse sebetsang tlas'a matla a phahameng le maqhubu.

Tekheniki Parameters

Paramethara	Tlhaloso
Wafer Diameter	2-inch, 4-inch (boholo ba tloaelo bo fumaneha)
Mofuta oa Substrate	Sapphire Substrate e sa Belisoang (NPSS)
AlN Layer Botenya	2µm ho isa ho 10µm (e ka khonahala)
Botenya ba Substrate	430µm ± 25µm (bakeng sa 2-inch), 500µm ± 25µm (bakeng sa 4-inch)
Thermal Conductivity	200 W/m·K
Ho hanyetsa Motlakase	Insulation e phahameng, e loketseng lits'ebetso tsa RF
Bokhopo ba Sekaho	Ra ≤ 0.5µm (bakeng sa AlN layer)
Bohloeki ba Lintho	Bohloeki bo holimo AlN (99.9%)
Mmala	White/Off-White (AlN layer e nang le NPSS substrate e khanyang)
Wafer Warp	<30µm (tloaelehileng)
Mofuta oa Doping	Un-doped (e ka etsoa ka mokhoa o ikhethileng)

Lisebelisoa

TheSephaphatha sa AlN-on-NPSSe etselitsoe mefuta e mengata e fapaneng ea ts'ebetso e phahameng ho liindasteri tse 'maloa:

Elektronike e Matla a Phahameng: The AlN layer's high thermal conductivity and insulating properties etsa hore e be thepa e loketseng bakeng sali-transistors tsa matla, baloki, lematla a ICssebelisoa kakoloi, indasteri, lematla a tsosolositsoenglitsamaiso.

Likarolo tsa Radio-Frequency (RF).: Thepa e babatsehang ea ho sireletsa motlakase ea AlN, hammoho le tahlehelo ea eona e tlaase, e nolofalletsa tlhahiso eaRF transistors, HEMTs (High-Electron-Mobility Transistors), le tse linglikarolo tsa microwavetse sebetsang hantle ka maqhubu a phahameng le maemo a matla.

Lisebelisoa tsa Optical: Li-wafers tsa AlN-on-NPSS li sebelisoa holi-diode tsa laser, Li-LED, leli-photodetectors, moo hophahameng mocheso conductivityleho tiea ha mochinili bohlokoa bakeng sa ho boloka ts'ebetso ka nako e telele ea bophelo.

Li-Sensors tsa Mocheso o Phahameng: Bokhoni ba sephaphatha ba ho mamella mocheso o feteletseng bo etsa hore e loketselisensara tsa mochesoletlhokomelo ea tikoloholiindastering tse kangsefofane, koloi, leoli le khase.

Semiconductor Packaging: E sebelisoa ho lisebelisoa tsa mochesolemekhahlelo ea tsamaiso ea mochesolits'ebetsong tsa ho paka, ho netefatsa ts'epo le ts'ebetso ea li-semiconductors.

Q&A

P: Molemo o ka sehloohong oa li-wafers tsa AlN-on-NPSS ho feta lisebelisoa tsa setso tse kang silicon ke ofe?

A: Molemo o moholo ke oa AlNphahameng mocheso conductivity, e leng se lumellang ho senya mocheso ka katleho, ho etsa hore e be se loketseng bakeng samatla a phahamenglelisebelisoa tse phahameng tsa maqhubumoo taolo ya mocheso e leng bohlokwa. Ho feta moo, AlN e na lesephara se seholole e babatsehangho kenya letsoho motlakase, e leng se etsang hore e be molemo ka ho fetisisa bakeng sa tšebelisoRFlelisebelisoa tsa microwaveha e bapisoa le silicon ea setso.

P: Na lera la AlN ho li-wafers tsa NPSS li ka etsoa?

K: Ee, AlN layer e ka hlophisoa ho latela botenya (ho tloha ho 2µm ho isa ho 10µm kapa ho feta) ho fihlela litlhoko tse ikhethileng tsa kopo ea hau. Re boetse re fana ka mokhoa oa ho iketsetsa ho latela mofuta oa doping (mofuta oa N kapa P-mofuta) le likarolo tse ling bakeng sa mesebetsi e khethehileng.

P: Ke kopo efe e tloaelehileng ea sephaphatha see indastering ea likoloi?

A: Ho indasteri ea likoloi, li-wafers tsa AlN-on-NPSS li sebelisoa hangata homatla a elektronike, Lisebelisoa tsa mabone a LED, lelisensara tsa mocheso. Li fana ka tsamaiso e phahameng ea mocheso le ho kenya motlakase, e leng ntho ea bohlokoa bakeng sa mekhoa e phahameng ea ts'ebetso e sebetsang tlas'a maemo a fapaneng a mocheso.