Filimi e loantšang ho bonahatsa ea AR e koahetsoeng ka lense ea silicon e koahetsoeng ka monocrystalline silicon

Filimi e thibelang ho bonahatsa ea AR e koahetsoeng ka lense ea silicon e koahetsoeng ka monocrystalline silicon Setšoantšo se Hlahisitsoeng

Tlhaloso e Khutšoanyane:

Lense ea silicon e koahetsoeng ka monocrystalline ke karolo e sebetsang ea optical e thehiloeng ho silicon e hloekileng haholo ea monocrystalline (Si) ka ts'ebetso e nepahetseng ea optical le theknoloji ea ho koahela. Silicon e nang le monocrystalline e na le phetiso e ntle ea leseli sehlopheng sa infrared (1.2-7μm), 'me hammoho le liphahlo tse kang filimi e thibelang ho bonahatsa (AR), filimi e bonahatsang ka ho fetisisa (HR) kapa filimi ea sefe, e ka ntlafatsa haholo phetiso kapa ts'ebetso ea ho bonahatsa ea lihlopha tse itseng. Lihlahisoa li sebelisoa haholo litšoantšong tsa infrared, laser optics le ho lemoha semiconductor.

Romella imeile ho rona

Likaroloana

Litšobotsi tsa lense ea silicon e koahetsoeng:

1. Tshebetso ya Optical:
Mefuta ea phetisetso: 1.2-7μm (haufi le infrared ho isa bohareng ba infrared), phetisetso >90% sehlopheng sa lifensetere tsa sepakapaka sa 3-5μm (kamora ho penta).
Ka lebaka la index e phahameng ea refractive (n≈ 3.4@4μm), filimi e thibelang ho bonahatsa (joalo ka MgF₂/Y₂O₃) e lokela ho penteloa ho fokotsa tahlehelo ea ho bonahatsa bokaholimo.

2. Botsitso ba mocheso:
Koefficient e tlase ea katoloso ea mocheso (2.6×10⁻⁶/K), khanyetso ea mocheso o phahameng (mocheso o sebetsang ho fihlela ho 500℃), e loketse lits'ebetso tsa laser tse matla haholo.

3. Thepa ea mechini:
Bothata ba Mohs 7, ho hanyetsa ho ngoapa, empa bo fokola haholo, bo hloka tšireletso ea ho thiba mahlakore.

4. Litšobotsi tsa ho roala:
Customized anti-reflection film (AR@3-5μm), high reflection film (HR@10.6μm for CO₂ laser), bandpass filter film, etc.

Lisebelisoa tsa lense ea silicon tse koahetsoeng:

(1) Sistimi ea ho nka litšoantšo tsa mocheso oa infrared
Jwalo ka karolo ya bohlokwa ya dilense tsa infrared (lebanta la 3-5μm kapa 8-12μm) bakeng sa tlhokomelo ya tshireletso, tlhahlobo ya indasteri le disebediswa tsa pono ya bosiu tsa sesole.

(2) Sistimi ea optical ea laser
CO₂ Laser (10.6μm): Lense e bonahatsang haholo bakeng sa li-resonator tsa laser kapa setering ea mahlaseli.

Laser ea faeba (1.5-2μm): Lense ea filimi e thibelang ho bonahatsa e ntlafatsa katleho ea ho kopanya.

(3) Lisebelisoa tsa teko ea semiconductor
Sepheo sa microscope sa infrared bakeng sa ho lemoha sekoli sa wafer, se hanyetsanang le mafome a plasma (ho hlokahala tšireletso e khethehileng ea ho roala).

(4) lisebelisoa tsa tlhahlobo ea spectral
Jwalo ka karolo ya spectral ya Fourier infrared spectrometer (FTIR), phetiso e phahameng le ho sotha maqhubu a tlase ho a hlokahala.

Litekanyetso tsa tekheniki:

Lense ea silicon e koahetsoeng ka monocrystalline e fetohile karolo ea bohlokoa e ke keng ea nkeloa sebaka tsamaisong ea mahlo ea infrared ka lebaka la phetiso ea eona e ntle ea leseli la infrared, botsitso bo phahameng ba mocheso le litšobotsi tsa ho roala tse ka fetoloang. Litšebeletso tsa rona tse ikhethileng tse ikhethileng li netefatsa ts'ebetso e ntle ka ho fetisisa ea lilense lits'ebetsong tsa laser, tlhahlobo le litšoantšo.

E tloaelehileng	Theko e Phahameng
Thepa	Silicone
Boholo	5mm-300mm	5mm-300mm
Mamello ea Boholo	± 0.1mm	± 0.02mm
Lesoba le hlakileng	≥90%	95%
Boleng ba Bokaholimo	60/40	20/10
Bohareng	3'	1'
Mamello ea Bolelele ba Focal	± 2%	± 0.5%
Ho koahela	Ha e koahetsoe, AR, BBAR, e bonahatsang

Tšebeletso e ikhethileng ea XKH

XKH e fana ka mokhoa o felletseng oa ho fetola lilense tsa silicon tse koahetsoeng ka monocrystalline: Ho tloha ho khetho ea substrate ea silicon e koahetsoeng ka monocrystalline (ho hanyetsa >1000Ω·cm), ts'ebetso ea optical e nepahetseng (e chitja/e potolohang, ho nepahala ha bokaholimo λ/4@633nm), ho koahela ka mokhoa o ikhethileng (filimi e khahlanong le ho bonahatsa/ho bonahatsa ka mokhoa o phahameng/sesebelisoa sa ho sefa, ho tšehetsa moralo oa lihlopha tse ngata), ho ea ho liteko tse tiileng (sekhahla sa phetiso, moeli oa tšenyo ea laser, tlhahlobo ea ts'epo ea tikoloho), ho tšehetsa sehlopha se senyenyane (likarolo tse 10) ho isa tlhahisong e kholo. E boetse e fana ka litokomane tsa tekheniki (li-curve tsa ho koahela, liparamente tsa optical) le tšehetso ea kamora thekiso ho fihlela litlhoko tse hlokang tsa litsamaiso tsa optical tsa infrared.