Gallium Nitride (GaN) Epitaxial e hodisitsweng hodima di-wafer tsa Sapphire 4inch 6inch bakeng sa MEMS
Matlotlo a GaN holim'a Li-wafer tsa Sapphire
●Bokgoni bo Phahameng:Disebediswa tse thehilweng ho GaN di fana ka matla a fetang a mahlano ho feta disebediswa tse thehilweng ho silicon, e leng se ntlafatsang tshebetso ditshebedisong tse fapaneng tsa elektroniki, ho kenyeletswa le ho amplification ya RF le optoelectronics.
●Lekhalo le Sephara la Bandgap:Lekhalo le leholo la GaN le nolofalletsa bokgoni bo phahameng dithempereichareng tse phahameng, e leng se etsang hore e be ntle bakeng sa ditshebediso tse matla le tse nang le maqhubu a mangata.
●Ho tšoarella:Bokhoni ba GaN ba ho sebetsana le maemo a feteletseng (lithempereichara tse phahameng le mahlaseli a kotsi) bo netefatsa ts'ebetso e tšoarellang nako e telele libakeng tse thata.
● Boholo bo Bonyenyane:GaN e dumella tlhahiso ya disebediswa tse nyane le tse bobebe ha di bapiswa le disebediswa tsa semiconductor tsa setso, e leng se thusang elektroniki tse nyane le tse matla haholoanyane.
Kakaretso
Gallium Nitride (GaN) e hlahella e le semiconductor e kgethwang bakeng sa ditshebediso tse tswetseng pele tse hlokang matla a hodimo le bokgoni bo botle, jwalo ka di-module tsa RF front-end, ditsamaiso tsa puisano tse lebelo le hodimo, le mabone a LED. Di-wafer tsa GaN epitaxial, ha di hodiswa hodima di-substrate tsa safire, di fana ka motswako wa ho tsamaisa mocheso o phahameng, motlakase o phahameng wa ho senyeha, le karabelo e pharaletseng ya maqhubu, e leng senotlolo bakeng sa tshebetso e ntle disebedisweng tsa puisano tse se nang mohala, di-radar le di-jammer. Di-wafer tsena di fumaneha ka bophara ba lisenthimithara tse 4 le lisenthimithara tse 6, ka botenya bo fapaneng ba GaN ho fihlela ditlhoko tse fapaneng tsa tekheniki. Thepa e ikgethang ya GaN e etsa hore e be mokhethoa wa bohlokwa bakeng sa bokamoso ba di-elektroniki tsa motlakase.
Liparamente tsa Sehlahisoa
| Tšobotsi ea Sehlahisoa | Tlhaloso |
| Bophara ba Wafer | 50mm, 100mm, 50.8mm |
| Sebaka se ka tlas'a lefatše | Safire |
| Botenya ba Lera la GaN | 0.5 μm - 10 μm |
| Mofuta/Doping ea GaN | Mofuta oa N (Mofuta oa P o fumaneha ha o kopuoa) |
| Boikutlo ba Kristale ba GaN | <0001> |
| Mofuta oa ho bentša | E bentšitsoeng ka lehlakore le le leng (SSP), E bentšitsoeng ka lehlakore le le leng (DSP) |
| Botenya ba Al2O3 | 430 μm - 650 μm |
| TTV (Phetoho ea Botenya Bohle) | ≤ 10 μm |
| Seqha | ≤ 10 μm |
| Koahela | ≤ 10 μm |
| Sebaka sa Bokaholimo | Sebaka se ka Sebelisoang > 90% |
Lipotso le Likarabo
P1: Melemo ea bohlokoa ea ho sebelisa GaN ho feta li-semiconductor tsa setso tse thehiloeng ho silicon ke efe?
A1: GaN e fana ka melemo e 'maloa ea bohlokoa ho feta silicon, ho kenyeletsoa le lekhalo le pharaletseng, le e lumellang ho sebetsana le li-voltage tse phahameng tsa ho senyeha le ho sebetsa ka katleho maemong a phahameng a mocheso. Sena se etsa hore GaN e be e loketseng bakeng sa lits'ebetso tse matla a phahameng, tse nang le maqhubu a phahameng joalo ka li-module tsa RF, li-amplifier tsa matla, le li-LED. Bokhoni ba GaN ba ho sebetsana le matla a phahameng a matla bo boetse bo nolofalletsa lisebelisoa tse nyane le tse sebetsang hantle ha li bapisoa le mekhoa e meng e thehiloeng ho silicon.
P2: Na GaN hodima di-wafer tsa Sapphire e ka sebediswa ditshebedisong tsa MEMS (Micro-Electro-Mechanical Systems)?
A2: E, GaN ho di-wafer tsa Sapphire e loketse ditshebediso tsa MEMS, haholoholo moo ho hlokahalang matla a phahameng, botsitso ba mocheso le lerata le tlase. Ho tshwarella le bokgoni ba thepa dibakeng tse nang le maqhubu a phahameng ho etsa hore e be ntle bakeng sa disebediswa tsa MEMS tse sebediswang ditsamaisong tsa puisano ya waelese, ho utlwa le radar.
P3: Ke ditshebediso dife tse ka bang teng tsa GaN puisanong ya waelese?
A3: GaN e sebediswa haholo di-moduleng tsa RF front-end bakeng sa puisano ya waelese, ho kenyeletswa le meralo ya motheo ya 5G, ditsamaiso tsa radar, le di-jammer. Bongata ba yona ba matla a hodimo le ho tsamaisa mocheso ho etsa hore e be e phethahetseng bakeng sa disebediswa tse matla a hodimo, tse nang le maqhubu a hodimo, e leng se nolofalletsang tshebetso e betere le dintlha tse nyane tsa sebopeho ha di bapiswa le ditharollo tse thehilweng ho silicon.
P4: Linako tsa ho etella pele le bongata bo fokolang ba odara bakeng sa GaN ho li-wafer tsa Sapphire ke life?
A4: Linako tsa ho etella pele le bongata bo fokolang ba odara lia fapana ho latela boholo ba wafer, botenya ba GaN, le litlhoko tse itseng tsa bareki. Ka kopo ikopanye le rona ka kotloloho bakeng sa litheko tse qaqileng le ho fumaneha ho latela litlhaloso tsa hau.
P5: Na nka fumana botenya ba lera la GaN kapa maemo a doping a ikhethileng?
A5: E, re fana ka mokhoa oa ho fetola botenya ba GaN le maemo a doping ho fihlela litlhoko tse ikhethileng tsa ts'ebeliso. Ka kopo re tsebise litlhaloso tseo u li batlang, 'me re tla fana ka tharollo e etselitsoeng uena.
Setšoantšo se qaqileng
