HPSI SiC wafer dia: 3inch botenya: 350um ± 25 µm bakeng sa Power Electronics
Kopo
Li-wafer tsa HPSI SiC li sebelisoa lits'ebetsong tse fapaneng tsa elektroniki tsa motlakase, ho kenyeletsoa:
Li-semiconductor tsa Matla:Li-wafer tsa SiC li sebelisoa haholo tlhahisong ea li-diode tsa motlakase, li-transistors (MOSFET, IGBTs), le thyristors. Li-semiconductor tsena li sebelisoa haholo lits'ebetsong tsa phetoho ea motlakase tse hlokang bokhoni bo phahameng le botšepehi, joalo ka li-drive tsa liindasteri, phepelo ea motlakase, le li-inverter bakeng sa litsamaiso tsa matla a nchafatsoang.
Likoloi tsa Motlakase (li-EV):Metsing a motlakase a likoloi tsa motlakase, lisebelisoa tsa motlakase tse thehiloeng ho SiC li fana ka lebelo le potlakileng la ho fetola, bokhoni bo phahameng ba matla, le tahlehelo e fokotsehileng ea mocheso. Likarolo tsa SiC li loketse lits'ebetso lits'ebetsong tsa taolo ea betri (BMS), meralo ea motheo ea ho tjhaja, le litjhaja tse ka hare ho sekepe (OBCs), moo ho fokotsa boima le ho eketsa bokhoni ba phetoho ea matla ho leng bohlokoa.
Mekhoa ea Matla a Nchafatsoang:Li-wafer tsa SiC li ntse li sebelisoa haholoanyane ho li-inverter tsa letsatsi, lijenereithara tsa turbine ea moea, le litsamaiso tsa polokelo ea matla, moo bokhoni bo phahameng le ho tiea li leng bohlokoa. Likarolo tse thehiloeng ho SiC li nolofalletsa matla a mangata le ts'ebetso e ntlafetseng lits'ebetsong tsena, e leng se ntlafatsang bokhoni ba phetoho ea matla ka kakaretso.
Lisebelisoa tsa Elektroniki tsa Matla a Indasteri:Litšebelisong tsa indasteri tse sebetsang hantle haholo, tse kang li-drive tsa li-motor, liroboto, le lisebelisoa tse kholo tsa motlakase, tšebeliso ea li-wafer tsa SiC e lumella ts'ebetso e ntlafetseng mabapi le bokhoni, ts'epo le taolo ea mocheso. Lisebelisoa tsa SiC li ka sebetsana le maqhubu a phahameng a ho fetola le mocheso o phahameng, e leng se etsang hore li lokele libaka tse hlokang boiteko bo bongata.
Litsi tsa Mehala le tsa Data:SiC e sebelisoa phepelong ea motlakase bakeng sa lisebelisoa tsa puisano le litsi tsa data, moo ho tšepahala ho phahameng le phetoho e sebetsang hantle ea motlakase li leng bohlokoa. Lisebelisoa tsa motlakase tse thehiloeng ho SiC li nolofalletsa bokhoni bo phahameng ka boholo bo bonyenyane, e leng se fetolelang tšebeliso e fokotsehileng ea motlakase le bokhoni bo betere ba ho pholisa meralong ea motheo e meholo.
Motlakase o phahameng oa ho senyeha, khanyetso e tlase, le ho tsamaisoa ha mocheso ho babatsehang ha li-wafer tsa SiC li li etsa hore e be substrate e loketseng lits'ebetso tsena tse tsoetseng pele, e leng se nolofalletsang nts'etsopele ea lisebelisoa tsa motlakase tse bolokang matla tsa moloko o latelang.
Matlo
| Thepa | Boleng |
| Bophara ba Wafer | Li-inchi tse 3 (76.2 mm) |
| Botenya ba Wafer | 350 µm ± 25 µm |
| Boikutlo ba Wafer | <0001> ho-axis ± 0.5° |
| Boima ba Micropipe (MPD) | ≤ 1 cm⁻² |
| Ho hanyetsa motlakase | ≥ 1E7 Ω·cm |
| Dopant | E phutholotsoe |
| Boikutlo ba Motheo bo bataletseng | {11-20} ± 5.0° |
| Bolelele ba Sephara ba Motheo | 32.5 mm ± 3.0 mm |
| Bolelele ba Bobedi bo Sephara | 18.0 mm ± 2.0 mm |
| Boikutlo bo Bobedi bo bataletseng | Haeba sefahleho se shebile holimo: 90° CW ho tloha foleteng ea mantlha ± 5.0° |
| Ho se kenyeletsoe ha Moeli | 3 mm |
| LTV/TTV/Seqha/Koba | 3 µm / 10 µm / ±30 µm / 40 µm |
| Bokahare bo Bobebe | Sefahleho sa C: Se bentšitsoeng, Sefahleho sa Si: CMP |
| Mapetso (a hlahlojoang ke khanya e matla haholo) | Ha ho letho |
| Lipoleiti tsa Hex (li hlahlobiloe ke khanya e matla haholo) | Ha ho letho |
| Libaka tsa Polytype (tse hlahlobiloeng ke khanya e matla haholo) | Sebaka se kopaneng 5% |
| Mengoapo (e hlahlojwang ke lesedi le matla haholo) | ≤ mengoapo e 5, bolelele bo kopaneng ≤ 150 mm |
| Ho qhaqha Edge | Ha ho letho le dumelletsweng bophara le botebo ba ≥ 0.5 mm |
| Tšilafalo ea bokaholimo (e hlahlojoa ke khanya e matla haholo) | Ha ho letho |
Melemo ea Bohlokoa
Ho khanna ha mocheso o phahameng:Li-wafer tsa SiC li tsebahala ka bokhoni ba tsona bo ikhethang ba ho tima mocheso, e leng se lumellang lisebelisoa tsa motlakase ho sebetsa ka bokgabane bo phahameng le ho sebetsana le maqhubu a phahameng ntle le ho chesa haholo. Tšobotsi ena e bohlokoa haholo lisebelisoa tsa motlakase moo taolo ea mocheso e leng phephetso e kholo.
Motlakase o Phahameng oa ho Senyeha:Lekhalo le leholo la SiC le nolofalletsa disebediswa ho mamella maemo a phahameng a motlakase, e leng se etsang hore di be ntle bakeng sa ditshebediso tsa motlakase o phahameng jwalo ka digridi tsa motlakase, dikoloi tsa motlakase le mechini ya diindasteri.
Bokgoni bo Phahameng:Motsoako oa maqhubu a phahameng a ho chencha le khanyetso e tlase e fella ka lisebelisoa tse nang le tahlehelo e tlase ea matla, e ntlafatsang katleho ea phetoho ea matla ka kakaretso le ho fokotsa tlhoko ea litsamaiso tse rarahaneng tsa ho pholisa.
Tšepahala Tikolohong e Mabifi:SiC e kgona ho sebetsa maemong a lehodimo a phahameng (ho fihlela ho 600°C), e leng se etsang hore e lokele ho sebediswa dibakeng tse neng di tla senya disebediswa tsa setso tse thehilweng hodima silicon.
Poloko ea Matla:Lisebelisoa tsa motlakase tsa SiC li ntlafatsa katleho ea phetoho ea matla, e leng ntho ea bohlokoa ho fokotseng tšebeliso ea matla, haholo-holo lits'ebetsong tse kholo joalo ka li-converter tsa motlakase tsa indasteri, likoloi tsa motlakase le meralo ea motheo ea matla a nchafatsoang.
Setšoantšo se qaqileng
