8inch LNOI (LiNbO3 on Insulator) Wafer bakeng sa Optical Modulators Waveguides Integrated Circuits
Setšoantšo se qaqileng
Selelekela
Lithium Niobate on Insulator (LNOI) ke lisebelisoa tsa morao-rao tse sebelisoang lits'ebetsong tse fapaneng tse tsoetseng pele tsa optical le elektroniki. Li-wafers tsena li hlahisoa ka ho fetisetsa moalo o mosesaane oa lithium niobate (LiNbO₃) holim'a substrate e sireletsang, eo hangata e leng silicon kapa thepa e 'ngoe e loketseng, ka ho sebelisa mekhoa e rarahaneng e kang ho kenngoa ha ion le ho kopanya li-wafer. Theknoloji ea LNOI e arolelana lintho tse ngata tse tšoanang le tsa theknoloji ea Silicon on Insulator (SOI) empa e nka monyetla ka thepa e ikhethang ea lithium niobate, thepa e tsejoang ka litšobotsi tsa eona tsa piezoelectric, pyroelectric, le nonlinear optical.
Li-wafers tsa LNOI li fumane tlhokomelo e kholo mafapheng a kang a optics a kopantsoeng, mehala ea puisano, le quantum computing ka lebaka la ts'ebetso ea bona e phahameng ea lik'homphieutha tse phahameng le tse lebelo. Li-wafers li hlahisoa ho sebelisoa mokhoa oa "Smart-cut", o nolofalletsang taolo e nepahetseng holim'a botenya ba filimi e tšesaane ea lithium niobate, ho netefatsa hore li-wafers li kopana le litlhaloso tse hlokahalang bakeng sa lisebelisoa tse fapaneng.
Molao-motheo
Mokhoa oa ho theha li-wafers tsa LNOI o qala ka kristale e ngata ea lithium niobate. Kristale e kenella ho kenngoa ha ion, moo li-ion tsa helium tse nang le matla a phahameng li kenngoa ka holim'a kristale ea lithium niobate. Li-ion tsena li kenella ka har'a kristale ho ea botebong bo itseng 'me li senya sebopeho sa kristale, li etsa sefofane se senyehang seo hamorao se ka sebelisoang ho arola kristale ka likarolo tse tšesaane. Matla a khethehileng a li-ion tsa helium a laola botebo ba ho kenngoa, bo amang ka ho toba botenya ba lera la ho qetela la lithium niobate.
Ka mor'a ho kenngoa ha ion, kristale ea lithium niobate e tlamahanngoa le substrate ho sebelisa mokhoa o bitsoang wafer bonding. Mokhoa oa ho kopanya o atisa ho sebelisa mokhoa o tobileng oa ho kopanya, moo libaka tse peli (li-ion-implanted lithium niobate crystal le substrate) li hatelloa hammoho tlas'a mocheso o phahameng le khatello ea ho theha maqhama a matla. Maemong a mang, thepa e khomarelang e kang benzocyclobutene (BCB) e ka sebelisoa bakeng sa tšehetso e eketsehileng.
Ka mor'a ho tlamahanngoa, sephaphatha se kena tšebetsong ea annealing ho lokisa tšenyo leha e le efe e bakiloeng ke ho kenngoa ha ion le ho matlafatsa maqhama pakeng tsa lihlopha. Ts'ebetso ea annealing e boetse e thusa lera le tšesaane la lithium niobate hore le tlohe ho kristale ea pele, le siee lesela le tšesaane, la boleng bo holimo la lithium niobate le ka sebelisetsoang ho etsa lisebelisoa.
Litlhaloso
Li-wafers tsa LNOI li tšoauoa ka lintlha tse 'maloa tsa bohlokoa tse netefatsang hore li loketse lits'ebetso tse sebetsang hantle. Tsena li kenyelletsa:
Litlhaloso tsa Material.
| .Lintho tse bonahalang. | .Litlhaloso. |
| Lintho tse bonahalang | Homogeneous: LiNbO3 |
| Boleng ba Lintho | Li-bubble kapa li-inclusions <100μm |
| Boitloaelo | Y-seha ±0.2° |
| Botenya | 4.65g/cm³ |
| Mocheso oa Curie | 1142 ±1°C |
| Ponaletso | >95% ho 450-700 nm range (10 mm botenya) |
Litlhaloso tsa Tlhahiso.
| .Parameter. | .Tlhaloso. |
| Diameter | 150 limilimithara ±0.2 limilimithara |
| Botenya | 350 μm ±10 μm |
| Bophatlalatsi | <1.3 μm |
| Kakaretso ea Botenya (TTV) | Warp <70 μm @ 150 mm wafer |
| Phapang ea Botenya ba Sebaka (LTV) | <70 μm @ 150 mm sephaphatha |
| Boqhobane | Rq ≤0.5 nm (boleng ba AFM RMS) |
| Boleng ba Sefahleho | 40-20 |
| Lithako (tse sa tlosoeng) | 100-200 μm ≤3 likaroloana |
| Li-chips | <300 μm (sephaphatha se tletseng, ha ho na sebaka sa ho qheleloa ka thoko) |
| Mapetso | Ha ho mapetsong (sephaphatha se tletseng) |
| Tšhilafatso | Ha ho na matheba a sa tlosoeng (wafer e felletseng) |
| Ho bapisa | <30 arcseconds |
| Orientation Reference Planne (X-axis) | 47 ±2 limilimithara |
Lisebelisoa
Li-wafers tsa LNOI li sebelisoa mefuteng e mengata ea lits'ebetso ka lebaka la thepa ea tsona e ikhethang, haholo-holo mafapheng a lifoto, likhokahano le theknoloji ea quantum. Tse ling tsa lisebelisoa tsa bohlokoa li kenyelletsa:
Optics e Kopantsoeng:Li-wafers tsa LNOI li sebelisoa haholo lipotolohong tse kopaneng tsa optical, moo li nolofalletsang lisebelisoa tse sebetsang hantle haholo tsa lifoto tse kang li-modulator, li-waveguides le li-resonator. Lithepa tse phahameng tse se nang moeli tsa lithium niobate li etsa hore e be khetho e ntle haholo bakeng sa lits'ebetso tse hlokang ho qhekella ha leseli hantle.
Mehala ea puisano:Li-wafers tsa LNOI li sebelisoa ho li-modulator tsa optical, tseo e leng likarolo tsa bohlokoa lits'ebetsong tsa puisano tse potlakileng, ho kenyeletsoa marang-rang a fiber optic. Bokhoni ba ho fetola khanya ka maqhubu a phahameng bo etsa hore li-wafers tsa LNOI e be tse loketseng lits'ebetso tsa sejoale-joale tsa mehala.
Quantum Computing:Litheknoloji tsa quantum, li-wafers tsa LNOI li sebelisetsoa ho etsa likarolo tsa lik'homphieutha tsa quantum le mekhoa ea puisano ea quantum. Thepa ea optical e se nang moeli ea LNOI e sebelisoa ho theha lipara tsa photon tse kentsoeng, tse bohlokoa bakeng sa kabo ea linotlolo tsa quantum le cryptography ea quantum.
Sensora:Li-wafers tsa LNOI li sebelisoa lits'ebetsong tse fapaneng tsa kutlo, ho kenyeletsoa li-sensor tsa optical le acoustic. Bokhoni ba bona ba ho sebelisana le leseli le molumo bo li etsa hore li feto-fetohe bakeng sa mefuta e fapaneng ea mahlale a ho utloa.
LBH
Q:Theknoloji ea LNOI ke eng?
A: Theknoloji ea LNOI e kenyelletsa ho fetisetsoa ha filimi e tšesaane ea lithium niobate holim'a substrate e sireletsang, eo hangata e leng silicon. Theknoloji ena e phahamisa thepa e ikhethang ea lithium niobate, joalo ka litšoaneleho tsa eona tse phahameng tse se nang moeli, piezoelectricity, le pyroelectricity, e etsa hore e be e loketseng bakeng sa lisebelisoa tse kopaneng tsa optics le mehala ea puisano.
Q:Phapano ke efe lipakeng tsa LNOI le li-wafers tsa SOI?
A: Ka bobeli li-wafers tsa LNOI le SOI lia tšoana ka hore li na le lesela le lesesaane la lintho tse hokeloang ho substrate. Leha ho le joalo, li-wafers tsa LNOI li sebelisa lithium niobate e le thepa e tšesaane ea filimi, ha li-wafers tsa SOI li sebelisa silicon. Phapang e ka sehloohong e ka thepa ea thepa e tšesaane ea filimi, e nang le LNOI e fanang ka thepa e phahameng ea optical le piezoelectric.
Q:Melemo ea ho sebelisa liphaephe tsa LNOI ke efe?
A: Melemo ea mantlha ea li-wafers tsa LNOI li kenyelletsa lisebelisoa tsa tsona tse ntle haholo tsa mahlo, joalo ka li-coefficients tse phahameng tsa nonlinear, le matla a tsona a mochini. Litšobotsi tsena li etsa hore li-wafers tsa LNOI e be tse loketseng ho sebelisoa lits'ebetsong tsa lebelo le phahameng, maqhubu a holimo le a bongata.
Q:Na li-wafers tsa LNOI li ka sebelisoa bakeng sa lits'ebetso tsa quantum?
A: E, li-wafers tsa LNOI li sebelisoa haholo mahlaleng a quantum ka lebaka la bokhoni ba tsona ba ho hlahisa lipara tsa photon tse ferekaneng le ho lumellana ha tsona le li-photonics tse kopaneng. Mehaho ena e bohlokoa bakeng sa ts'ebeliso ea quantum computing, puisano le cryptography.
Q:Botenya bo tloaelehileng ba lifilimi tsa LNOI ke bofe?
A: Lifilimi tsa LNOI hangata li tloha ho li-nanometer tse makholo a 'maloa ho isa ho li-micrometer tse' maloa ka botenya, ho latela ts'ebeliso e khethehileng. Botenya bo laoloa nakong ea ts'ebetso ea ho kenngoa ha ion.
