LNOI Wafer (Lithium Niobate on Insulator) Telecommunications Sensing High Electro-Optic
Setšoantšo se qaqileng
Kakaretso
Ka har'a lebokose la li-wafer ho na le li-grooves tse lekanang, tseo litekanyo tsa tsona li ts'oanang hantle ho tšehetsa mahlakore a mabeli a sephaphatha. Lebokose la kristale hangata le entsoe ka thepa ea polasetiki ea translucent PP e hananang le mocheso, ho roala le motlakase o sa fetoheng. Mebala e fapaneng ea li-additives e sebelisoa ho khetholla likarolo tsa ts'ebetso ea tšepe ka tlhahiso ea semiconductor. Ka lebaka la boholo bo nyane ba senotlolo sa li-semiconductors, lipaterone tse teteaneng, le litlhoko tse thata haholo tsa boholo ba likaroloana tlhahisong, lebokose la wafer le tlameha ho netefatsoa hore le na le tikoloho e hloekileng ea ho hokahana le "microenvironment box reaction cavity" ea mechini e fapaneng ea tlhahiso.
Mokhoa oa ho Etsa
Ho etsoa ha li-wafers tsa LNOI ho na le mehato e 'maloa e nepahetseng:
Mohato oa 1: Ho kenngoa ha Helium IonLi-ion tsa Helium li kenngoa ka har'a kristale e ngata ea LN ho sebelisa mochine oa ion. Li-ion tsena li lula botebong bo itseng, li etsa sefofane se fokolang seo qetellong se tla thusa ho arohana ha lifilimi.
Mohato oa 2: Sebopeho sa Base SubstrateSilicon e arohaneng kapa sephaephe sa LN se na le oxidized kapa se koahetsoe ka SiO2 ho sebelisa PECVD kapa thermal oxidation. Bokaholimo ba eona bo hlophisitsoe bakeng sa ho kopanya hantle.
Mohato oa 3: Ho kopanya LN ho Substratekristale ea LN e kentsoeng ka ion ea phetoa ebe e hokelloa holim'a sekoahelo sa motheo ho sebelisoa bonding e otlolohileng. Litlhophisong tsa lipatlisiso, benzocyclobutene (BCB) e ka sebelisoa e le sekhomaretsi ho nolofatsa maqhama tlas'a maemo a thata haholo.
Mohato oa 4: Phekolo ea Mocheso le Karohano ea LifilimiAnnealing e kenya tšebetsong sebopeho sa bubble botebong bo kentsoeng, e nolofalletsang ho arohana ha filimi e tšesaane (ka holimo ho LN layer) ho tsoa bongata. Matla a mochine a sebelisoa ho phethahatsa exfoliation.
Mohato oa 5: Ho bentša holim'a sefahlehoChemical Mechanical Polishing (CMP) e sebelisoa ho boreleli holim'a LN, ho ntlafatsa boleng ba optical le tlhahiso ea lisebelisoa.
Tekheniki Parameters
| Lintho tse bonahalang | Optical Kereiti LiNbO3 maqhubu (White or Ntsho) | |
| Curie Temp | 1142±0.7℃ | |
| Ho poma Lenaka | X/Y/Z joalo-joalo | |
| Diameter/ boholo | 2"/3"/4" ±0.03mm | |
| Tol(±) | <0.20 limilimithara ±0.005mm | |
| Botenya | 0.18 ~ 0.5mm kapa ho feta | |
| Ea mantlha E bataletseng | 16mm/22mm/32mm | |
| TTV | <3μm | |
| Inamela | -30 | |
| Warp | <40μm | |
| Boitloaelo E bataletseng | Tsohle lia fumaneha | |
| Bokaholimo Mofuta | Lehlakore le le Leng le hloekisitsoeng(SSP)/Mahlakore a mabeli a bentšitsoeng(DSP) | |
| E bentšitsoe lehlakore Ra | <0.5nm | |
| S/D | 20/10 | |
| Qetello Litekanyetso | R=0.2mm Mofuta oa C or Bullnose | |
| Boleng | Mahala of petso (bubble). le kenyeletso) | |
| Optical tepisitsoe | Mg/Fe/Zn/MgO etc bakeng sa ya mahlo mophato LN liphaphatha ka kopile | |
| Sephaphatha Bokaholimo Litekanyetso | Lenane la refractive | No=2.2878/Ne=2.2033 @632nm wavelength/prism coupler mokhoa. |
| Tšilafalo, | Ha ho letho | |
| Likaroloana c>0,3μ m | <=30 | |
| Scratch, Chipping | Ha ho letho | |
| Sekoli | Ha ho na mapheo a mathoko, mengopo, mats'oao, matheba | |
| Sephutheloana | Lebokose la Qty / Wafer | 25pcs lebokose le leng |
Sebelisa Maemo
Ka lebaka la ho tenyetseha le ts'ebetso ea eona, LNOI e sebelisoa liindastering tse ngata:
Lifoto:Li-modulator tse kopanetsoeng, li-multiplexers, le li-circuits tsa photonic.
RF/Acoustics:Li-modulators tsa acousto-optic, li-filters tsa RF.
Quantum Computing:Li-mixer tsa frequency tse se nang moeli le lijenereithara tsa photon-pair.
Tšireletso le Sefofane:Li-gyros tsa optical tse lahleheloang haholo, lisebelisoa tse fetohang khafetsa.
Lisebelisoa tsa Bongaka:Li-biosensors tsa Optical le li-probe tsa mats'oao a maqhubu a holimo.
LBH
P: Hobaneng ha LNOI e ratoa ho feta SOI litsamaisong tsa optical?
A:LNOI e na le li-coefficients tse phahameng tsa electro-optic le mefuta e mengata ea pepenene, e nolofalletsang ts'ebetso e phahameng ho li-circuits tsa photonic.
P: Na CMP e tlamehile ka mor'a ho arohana?
A:Ee. Bokaholimo ba LN bo mahoashe ka mor'a ho seha ion 'me bo tlameha ho belisoa ho fihlela litlhoko tsa optical-grade.
P: Bongata ba boholo ba wafer bo teng?
A:Li-wafers tsa khoebo tsa LNOI haholo-holo ke 3" le 4", leha barekisi ba bang ba hlahisa mefuta e 6".
P: Na lera la LN le ka sebelisoa hape kamora ho arohana?
A:Kristale ea motheo e ka belisoa hape 'me ea sebelisoa hape ka makhetlo a' maloa, le hoja boleng bo ka senyeha ka mor'a hore ho be le lipotoloho tse ngata.
P: Na li-wafers tsa LNOI li lumellana le ts'ebetso ea CMOS?
A:E, li etselitsoe ho ikamahanya le mekhoa e tloaelehileng ea ho etsa semiconductor, haholo-holo ha ho sebelisoa likaroloana tsa silicon.
