N-Type SiC Composite Substrates Dia6inch Monocrystaline ea boleng bo holimo le substrate ea boleng bo tlase
N-Type SiC Composite Substrates Tafole e tloaelehileng ea parameter
项目Lintho | 指标Tlhaloso | 项目Lintho | 指标Tlhaloso |
直径Diameter | 150±0.2mm | 正 面 ( 硅 面 ) 粗 糙 度 Boka pele (si-face) /si-fahleng | Ra≤0.2nm (5μm*5μm) |
晶型Polytype | 4H | Edge Chip, Scratch, Crack (tlhahlobo ea pono) | Ha ho letho |
电阻率Ho hanyetsa | 0.015-0.025ohm ·cm | 总厚度变化TTV | ≤3μm |
Fetisetsa lera Botenya | ≥0.4μm | 翘曲度Warp | ≤35μm |
空洞Lefeela | ≤5ea/wafer (2mm>D>0.5mm) | 总厚度Botenya | 350±25μm |
Lebitso la "N-mofuta" le bolela mofuta oa doping o sebelisoang lisebelisoa tsa SiC. Ho fisiks ea semiconductor, doping e kenyelletsa ho kenyelletsa litšila ka boomo ho semiconductor ho fetola thepa ea eona ea motlakase. Doping ea mofuta oa N e hlahisa likarolo tse fanang ka lielektrone tse sa lefelloeng tse ngata, e leng se fanang ka boitsebiso bo sa tsitsang.
Melemo ea li-substrates tse kopaneng tsa mofuta oa N-SiC li kenyelletsa:
1. Ts'ebetso e phahameng ea mocheso: SiC e na le mocheso o phahameng oa mocheso 'me e ka sebetsa ka mocheso o phahameng, e leng se etsang hore e tšoanelehe bakeng sa lisebelisoa tsa elektronike tse matla le tse phahameng.
2. Matla a phahameng a ho senya: Lisebelisoa tsa SiC li na le matla a phahameng a ho senya, a li nolofalletsang ho mamella libaka tse phahameng tsa motlakase ntle le ho senyeha ha motlakase.
3. Ho hanyetsa lik'hemik'hale le tikoloho: SiC e hanyetsa lik'hemik'hale 'me e khona ho mamella maemo a thata a tikoloho, e leng se etsang hore e tšoanelehe ho sebelisoa lits'ebetsong tse thata.
4. Ho fokotsa matla a ho lahleheloa ke matla: Ha ho bapisoa le lisebelisoa tse tloaelehileng tsa silicon-based, li-substrates tsa SiC li nolofalletsa ho fetola matla ka katleho le ho fokotsa tahlehelo ea matla ho lisebelisoa tsa elektronike.
5. Wide bandgap: SiC e na le sekhahla se pharaletseng, se lumellang nts'etsopele ea lisebelisoa tsa elektronike tse ka sebetsang ka mocheso o phahameng le matla a phahameng a matla.
Ka kakaretso, li-substrates tse kopantsoeng tsa mofuta oa N-mofuta oa SiC li fana ka melemo ea bohlokoa bakeng sa nts'etsopele ea lisebelisoa tsa elektroniki tse sebetsang hantle haholo, haholo lits'ebetsong moo ts'ebetso ea mocheso o phahameng, matla a phahameng a matla, le phetolo ea matla e sebetsang hantle li leng bohlokoa.