Silicon carbide (SiC), e le mofuta oa thepa ea semiconductor ea sebapali se seholo, e bapala karolo ea bohlokoa haholoanyane ts'ebelisong ea mahlale le theknoloji ea sejoale-joale. Silicon carbide e na le botsitso bo botle ba mocheso, mamello e phahameng ea tšimo ea motlakase, ho tsamaisa motlakase ka boomo le thepa e meng e ntle ea 'mele le ea mahlo,' me e sebelisoa haholo lisebelisoa tsa optoelectronic le lisebelisoa tsa letsatsi. Ka lebaka la tlhoko e ntseng e eketseha ea lisebelisoa tsa elektroniki tse sebetsang hantle le tse tsitsitseng, ho tseba theknoloji ea kholo ea silicon carbide e fetohile sebaka se chesang.
Joale u tseba hakae ka mokhoa oa kholo ea SiC?
Kajeno re tla buisana ka mekhoa e meraro e meholo bakeng sa kholo ea likristale tse le 'ngoe tsa silicon carbide: transport ea mouoane oa 'mele (PVT), liquid phase epitaxy (LPE), le high temperature chemical vapor deposition (HT-CVD).
Mokhoa oa Phetisetso ea Mouoane oa 'Mele (PVT)
Mokhoa oa ho fetisetsa mouoane oa 'mele ke o mong oa mekhoa ea kholo ea silicon carbide e sebelisoang haholo. Kholo ea silicon carbide ea kristale e le 'ngoe e itšetlehile haholo ka ho kenngoa ha phofo ea sic le ho fetoloa ha kristale ea peo tlas'a maemo a mocheso o phahameng. Ka har'a graphite crucible e koetsoeng, phofo ea silicon carbide e futhumatsoa ho fihlela mochesong o phahameng, ka taolo ea gradient ea mocheso, mouoane oa silicon carbide oa kokobela holim'a kristale ea peo, 'me butle-butle e holisa kristale e le' ngoe e kholo.
Bongata bo boholo ba monocrystalline SiC eo re fanang ka yona hajwale e entswe ka tsela ena ya kgolo. Hape ke tsela e ka sehloohong indastering.
Mokelikeli oa epitaxy ea karolo ea metsi (LPE)
Likristale tsa silicon carbide li lokisoa ka epitaxy ea mokelikeli ka mokhoa oa kholo ea kristale sebakeng se kopaneng sa solid-liquid. Mokhoeng ona, phofo ea silicon carbide e qhibilihisoa ka tharollong ea silicon-carbon mochesong o phahameng, ebe mocheso oa theoleloa e le hore silicon carbide e tsoe ka har'a tharollo 'me e hole holim'a likristale tsa peo. Molemo o moholo oa mokhoa oa LPE ke bokhoni ba ho fumana likristale tsa boleng bo holimo mochesong o tlase oa kholo, litšenyehelo li tlase haholo, 'me li loketse tlhahiso e kholo.
Ho ntšoa ha mouoane oa lik'hemik'hale mochesong o phahameng (HT-CVD)
Ka ho kenya khase e nang le silicon le carbon ka phapusing ea karabelo mochesong o phahameng, lera le le leng la kristale la silicon carbide le beoa ka ho toba holim'a kristale ea peo ka karabelo ea lik'hemik'hale. Molemo oa mokhoa ona ke hore sekhahla sa phallo le maemo a karabelo ea khase li ka laoloa ka nepo, e le hore ho fumanoe kristale ea silicon carbide e hloekileng haholo le liphoso tse fokolang. Ts'ebetso ea HT-CVD e ka hlahisa likristale tsa silicon carbide tse nang le thepa e ntle haholo, e leng ea bohlokoa haholo bakeng sa lits'ebetso moo ho hlokahalang thepa ea boleng bo holimo haholo.
Ts'ebetso ea kholo ea carbide ea silicon ke motheo oa ts'ebeliso le nts'etsopele ea eona. Ka boqapi bo tsoelang pele ba theknoloji le ntlafatso, mekhoa ena e meraro ea kholo e bapala karolo ea eona ho fihlela litlhoko tsa liketsahalo tse fapaneng, ho netefatsa boemo ba bohlokoa ba carbide ea silicon. Ka ho teba ha lipatlisiso le tsoelo-pele ea theknoloji, ts'ebetso ea kholo ea thepa ea carbide ea silicon e tla tsoela pele ho ntlafatsoa, 'me ts'ebetso ea lisebelisoa tsa elektroniki e tla ntlafala le ho feta.
(ho thibela)
Nako ea poso: Phuptjane-23-2024