Silicon carbide (SiC), joalo ka mofuta oa lisebelisoa tsa semiconductor tse pharalletseng, e bapala karolo ea bohlokoa haholo ts'ebelisong ea mahlale a morao-rao le theknoloji. Silicon carbide e na le botsitso bo botle ba mocheso, mamello e phahameng ea matla a motlakase, ho tsamaisa ka boomo le lisebelisoa tse ling tse ntle haholo tsa 'mele le optical,' me e sebelisoa haholo lisebelisoa tsa optoelectronic le lisebelisoa tsa letsatsi. Ka lebaka la tlhokahalo e ntseng e eketseha ea lisebelisoa tsa elektroniki tse sebetsang hantle le tse tsitsitseng, ho tseba theknoloji ea kholo ea silicon carbide e fetohile sebaka se chesang.
Joale u tseba hakae ka ts'ebetso ea kholo ea SiC?
Kajeno re tla tšohla mekhoa e meraro e meholo bakeng sa kholo ea silicon carbide single crystals: physical vapor transport (PVT), liquid phase epitaxy (LPE), le mocheso o phahameng oa lik'hemik'hale oa mouoane (HT-CVD).
Mokhoa oa Phetisetso ea Moholi oa 'mele (PVT)
Mokhoa oa phetiso ea mouoane oa 'mele ke o mong oa mekhoa e sebelisoang haholo ea ho holisa silicon carbide. Khōlo ea kristale e le 'ngoe ea silicon carbide e itšetlehile haholo ka ho fokotseha ha phofo ea sic le ho tsosolosoa ha kristale ea peo tlas'a maemo a phahameng a mocheso. Ka crucible ea graphite e koetsoeng, phofo ea silicon carbide e futhumatsoa ho mocheso o phahameng, ka taolo ea mocheso oa mocheso, mouoane oa silicon carbide o theohela holim'a kristale ea peo, 'me butle-butle e hola kristale e kholo e le 'ngoe.
Boholo ba SiC ea monocrystalline eo re fanang ka eona hajoale e entsoe ka mokhoa ona oa kholo. Hape ke mokhoa o ka sehloohong indastering.
Liquid phase epitaxy (LPE)
Likristale tsa silicon carbide li lokisoa ke epitaxy ea mokelikeli ka mokhoa oa kholo ea kristale sehokelong se tiileng sa mokelikeli. Ka mokhoa ona, phofo ea silicon carbide e qhibiliha ka tharollo ea silicon-carbon ka mocheso o phahameng, ebe mocheso o theoleloa e le hore silicon carbide e fokotsehe ho tloha tharollo 'me e hōle holim'a likristale tsa peo. Monyetla o ka sehloohong oa mokhoa oa LPE ke bokhoni ba ho fumana likristale tsa boleng bo phahameng ka mocheso o tlaase oa ho hōla, litšenyehelo li batla li le tlaase, 'me li loketse tlhahiso e kholo.
Mocheso o phahameng oa mocheso oa lik'hemik'hale oa Mouoane (HT-CVD)
Ka ho hlahisa khase e nang le silicon le carbon ka kamoreng ea karabelo ka mocheso o phahameng, kristale e le 'ngoe ea silicon carbide e kenngoa ka ho toba holim'a kristale ea peo ka lebaka la lik'hemik'hale. Molemo oa mokhoa ona ke hore sekhahla sa phallo le maemo a karabelo ea khase e ka laoloa ka nepo, e le ho fumana kristale ea silicon carbide e nang le bohloeki bo phahameng le mefokolo e fokolang. Ts'ebetso ea HT-CVD e ka hlahisa likristale tsa silicon carbide tse nang le thepa e ntle haholo, e bohlokoa haholo bakeng sa lits'ebetso moo ho hlokahalang lisebelisoa tsa boleng bo holimo haholo.
Ts'ebetso ea kholo ea silicon carbide ke motheo oa ts'ebeliso le nts'etsopele ea eona. Ka boqapi bo tsoelang pele ba theknoloji le ntlafatso, mekhoa ena e meraro ea kholo e phetha karolo ea eona ho fihlela litlhoko tsa linako tse fapaneng, ho netefatsa boemo ba bohlokoa ba silicon carbide. Ka ho teba ha lipatlisiso le tsoelo-pele ea theknoloji, mokhoa oa ho hōla oa thepa ea silicon carbide o tla tsoela pele ho ntlafatsoa, 'me ts'ebetso ea lisebelisoa tsa elektronike e tla ntlafatsoa le ho feta.
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Nako ea poso: Jun-23-2024