Lintlha tsa bohlokoa bakeng sa Boitokisetso ba Crystal ea boleng bo phahameng ba Silicon Carbide Single Crystal

Mekhoa e ka sehloohong ea ho lokisetsa kristale e le 'ngoe ea silicon e kenyelletsa: Physical Vapor Transport (PVT), Khōlo ea Tharollo ea Top-Seeded (TSSG), le High-Temperature Chemical Vapor Deposition (HT-CVD). Har'a tsena, mokhoa oa PVT o amoheloa haholo tlhahiso ea indasteri ka lebaka la thepa ea eona e bonolo, ho laola habonolo, le lisebelisoa tse tlaase le litšenyehelo tsa ts'ebetso.

Lintlha tsa Bohlokoa tsa Tekheniki bakeng sa Khōlo ea PVT ea Silicon Carbide Crystals

Ha o holisa likristale tsa silicon carbide o sebelisa mokhoa oa Physical Vapor Transport (PVT), lintlha tse latelang tsa tekheniki li tlameha ho nahanoa:

1. Bohloeki ba Lisebelisoa tsa Graphite ka Phaposing ea Kholo: Lintho tse sa hloekang ka likarolo tsa graphite li tlameha ho ba ka tlase ho 5 × 10⁻⁶, ha lintho tse sa hloekang ka ho kenya letsoho li tlameha ho ba ka tlase ho 10 × 10⁻⁶. Lintho tse kang B le Al li lokela ho bolokoa ka tlase ho 0.1×10⁻⁶.
2. Khetho e nepahetseng ea Crystal Polarity Selection: Liphuputso tse matla li bontša hore sefahleho sa C (0001) se loketse ho hōla likristale tsa 4H-SiC, ha sefahleho sa Si (0001) se sebelisetsoa ho hōla likristale tsa 6H-SiC.
3. Tšebeliso ea Likristale tsa Peo ea Off-Axis: Likristale tsa peo ea Off-axis li ka fetola symmetry ea kholo ea kristale, tsa fokotsa likoli kristale.
4. Mokhoa o Phahameng oa Peo ea Crystal Bonding.
5. Ho Boloka Botsitso ba Sebopeho sa Khōlo ea Crystal Nakong ea Potoloho ea Kholo.

Theknoloji ea Bohlokoa bakeng sa Kholiso ea Silicon Carbide Crystal

1. Theknoloji ea Doping bakeng sa Silicon Carbide Powder
   Ho kenya phofo ea silicon carbide ka tekanyo e loketseng ea Ce ho ka tsitsisa kholo ea likristale tse le 'ngoe tsa 4H-SiC. Liphetho tse sebetsang li bontša hore Ce doping e ka:

• Eketsa sekhahla sa kholo ea likristale tsa silicon carbide.
• Laola mokhoa oa ho hōla ha kristale, ho etsa hore e be e ts'oanang le e tloaelehileng.
• Hatella sebopeho se sa hloekang, ho fokotsa liphoso le ho nolofatsa tlhahiso ea kristale e le 'ngoe le likristale tsa boleng bo phahameng.
• Thibela kutu e ka morao ea kristale le ho ntlafatsa chai ea kristale e le 'ngoe.

• Theknoloji ea Taolo ea Mocheso oa Axial le Radial Gradient
  Mocheso oa mocheso oa axial o ama haholo mofuta oa kholo ea kristale le katleho. Tekanyo e nyane haholo ea mocheso e ka lebisa ho sebopeho sa polycrystalline le ho fokotsa sekhahla sa kholo. Li-gradients tse nepahetseng tsa mocheso oa axial le radial li thusa kholo e potlakileng ea kristale ea SiC ha li ntse li boloka boleng bo tsitsitseng ba kristale.
• Theknoloji ea Taolo ea Basal Plane (BPD).
  Bofokoli ba BPD bo hlaha haholo ha khatello ea ho kuta ka har'a kristale e feta khatello e matla ea ho kuta ea SiC, e kenyang litsamaiso tse thellang. Kaha li-BPD li na le li-perpendicular ho tataiso ea kholo ea kristale, li theha haholo nakong ea kholo ea kristale le ho pholile.
• Mouoane oa Mohato oa Mohatla Adjustment Technology
  Ho eketsa karo-karolelano ea carbon-to-silicon tikolohong ea kholo ke mokhoa o atlehang oa ho tsitsisa kholo ea kristale e le 'ngoe. Karolelano e phahameng ea carbon-to-silicon e fokotsa sekhahla se seholo sa mehato, e boloka tlhahisoleseling ea kholo ea kristale ea peo, 'me e hatella sebopeho sa polytype.
• Theknoloji ea ho Laola Khatello e Tlase
  Ho imeloa kelellong nakong ea khōlo ea kristale ho ka baka ho kobeha ha lifofane tsa kristale, ho lebisa boleng bo bobe ba kristale kapa esita le ho phunyeha. Ho imeloa kelellong ho boetse ho eketsa ho senyeha ha sefofane sa basal, se ka senyang boleng ba epitaxial le ts'ebetso ea lisebelisoa.

Setšoantšo sa 6-inch SiC wafer scanning

Mekhoa ea ho Fokotsa Khatello ea Maikutlo ho Likristale:

• Fetola kabo ea tšimo ea mocheso le liparamente tsa ts'ebetso ho thusa kholo e haufi-ufi ea likristale tse le 'ngoe tsa SiC.
• Ntlafatsa sebopeho sa crucible ho lumella kholo ea mahala ea kristale ka litšitiso tse nyane.
• Fetola mekhoa ea ho lokisa kristale ea peo ho fokotsa ho se lumellane hoa katoloso ea mocheso lipakeng tsa kristale ea peo le sets'oants'o sa graphite. Mokhoa o tloaelehileng ke ho siea lekhalo la 2 mm pakeng tsa kristale ea peo le sets'oants'o sa graphite.
• Ntlafatsa lits'ebetso tsa ho koala sebopi ka ho kenya ts'ebetso ea sebopi sa in-situ, ho lokisa mocheso le bolelele ba nako ho lokolla khatello ea kelello ka botlalo.

Trends In Silicon Carbide Crystal Growth Technology

Ha re shebile pele, theknoloji ea boleng bo holimo ea SiC single crystal e tla nts'etsapele ka litsela tse latelang:

1. Khōlo e Kholo
   Bophara ba likristale tse le 'ngoe tsa silicon carbide bo fetohile ho tloha ho limilimithara tse' maloa ho isa ho 6-inch, 8-inch, esita le boholo bo boholo ba 12-inch. Li-crystals tsa SiC tse bophara bo boholo li ntlafatsa katleho ea tlhahiso, li fokotsa litšenyehelo, 'me li finyella litlhoko tsa lisebelisoa tsa matla a phahameng.
2. Khōlo ea Boemo bo Phahameng
   Likristale tsa boleng bo holimo tsa SiC li bohlokoa bakeng sa lisebelisoa tse sebetsang hantle. Le hoja ho se ho entsoe tsoelo-pele e khōlō, ho ntse ho e-na le mefokolo e kang liphaephe tse nyenyane, ho kheloha le litšila, tse amang tšebetso ea lisebelisoa le ho tšepahala.
3. Phokotso ea Litšenyehelo
   Litsenyehelo tse phahameng tsa ho lokisa kristale ea SiC li fokotsa ts'ebeliso ea eona libakeng tse itseng. Ho ntlafatsa mekhoa ea kholo, ho ntlafatsa ts'ebetso ea tlhahiso, le ho fokotsa litšenyehelo tsa thepa e tala ho ka thusa ho fokotsa litšenyehelo tsa tlhahiso.
4. Khōlo e Bohlale
   Ka tsoelo-pele ho AI le data e kholo, theknoloji ea kholo ea kristale ea SiC e tla tsoela pele ho amohela litharollo tse bohlale. Ho lekola le ho laola ka nako ea 'nete ho sebelisa li-sensor le litsamaiso tse ikemetseng ho tla matlafatsa botsitso le taolo ea ts'ebetso. Ho feta moo, li-analytics tse kholo tsa data li ka ntlafatsa maemo a kholo, tsa ntlafatsa boleng ba kristale le katleho ea tlhahiso.

Theknoloji ea boleng bo holimo ea silicon carbide e le 'ngoe ea ho lokisa kristale ke ntho e ka sehloohong e shebaneng le lipatlisiso tsa thepa ea semiconductor. Ha theknoloji e ntse e hatela pele, mekhoa ea ho holisa kristale ea SiC e tla tsoela pele ho fetoha, e fana ka motheo o tiileng oa lits'ebetso maemong a mocheso o phahameng, maqhubu a phahameng le a matla a phahameng.