Mekhoa e meholo ea ho holisa likristale tse le 'ngoe tsa silicon carbide e kenyelletsa Physical Vapor Transport (PVT), Khōlo ea Tharollo e Phahameng ka ho Fetisisa (TSSG), le High-Temperature Chemical Vapor Deposition (HT-CVD).

Har'a tsena, mokhoa oa PVT e se e le mokhoa o ka sehloohong oa tlhahiso ea indasteri ka lebaka la ho seta ha thepa e bonolo, ho sebetsa habonolo le ho laola, le lisebelisoa tse tlaase le litšenyehelo tsa ts'ebetso.

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Lintlha tsa Bohlokoa tsa Tekheniki tsa Kholiso ea SiC Crystal Ho Sebelisa Mokhoa oa PVT

Ho holisa likristale tsa silicon carbide ka mokhoa oa PVT, lintlha tse 'maloa tsa tekheniki li tlameha ho laoloa ka hloko:

1. Bohloeki ba Lisebelisoa tsa Graphite Lefapheng la Thermal
   Lisebelisoa tsa graphite tse sebelisoang tšimong ea mocheso oa kristale li tlameha ho finyella litlhoko tse tiileng tsa bohloeki. Lintho tse sa hloekang ka likarolo tsa graphite li lokela ho ba ka tlase ho 5 × 10⁻⁶, le bakeng sa li-insulation felts ka tlase ho 10 × 10⁻⁶. Ka ho khetheha, likahare tsa boron (B) le aluminium (Al) li tlameha ho ba ka tlase ho 0.1×10⁻⁶.

2. Polarity e nepahetseng ea Crystal ea Peo
   Boitsebiso bo matla bo bontša hore C-face (0001) e loketse ho hōla likristale tsa 4H-SiC, ha Si-face (0001) e loketse ho hōla ha 6H-SiC.

3. Tšebeliso ea Likristale tsa Peo ea Off-Axis
   Peo ea off-axis e ka fetola symmetry ea kholo, ea fokotsa liphoso tsa kristale, 'me ea khothaletsa boleng bo betere ba kristale.

4. Mokhoa o Tšepahalang oa Crystal Bonding Technique
   Kamano e nepahetseng pakeng tsa kristale ea peo le mohlokomeli ke ea bohlokoa bakeng sa botsitso nakong ea kholo.

5. Ho boloka botsitso ba Sehokelo sa Kholo
   Nakong ea potoloho eohle ea kholo ea kristale, sebopeho sa kholo se tlameha ho lula se tsitsitse ho netefatsa tsoelo-pele ea boleng bo phahameng ba kristale.

 

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Litheknoloji tsa Core ho Kholo ea SiC Crystal

1. Theknoloji ea Doping bakeng sa SiC Powder

Doping SiC phofo e nang le cerium (Ce) e ka tsitsisa kholo ea polytype e le 'ngoe e kang 4H-SiC. Boithuto bo bontšitse hore Ce doping e ka:

• Eketsa sekhahla sa kholo ea likristale tsa SiC;

• Ntlafatsa mokhoa oa kristale bakeng sa kholo e ts'oanang le ea tataiso;

• Fokotsa litšila le mefokolo;

• Thibela ho bola ha kristale ka morao;

• Ntlafatsa sekhahla sa tlhahiso ea kristale e le 'ngoe.

2. Taolo ea Axial le Radial Thermal Gradients

Li-gradients tsa mocheso oa Axial li ama kristale polytype le sekhahla sa kholo. Gradient e nyane haholo e ka lebisa ho polytype inclusions le ho fokotsa lipalangoang tsa thepa sebakeng sa mouoane. Ho ntlafatsa li-axial le radial gradients ho bohlokoa bakeng sa kholo e potlakileng le e tsitsitseng ea kristale ka boleng bo tsitsitseng.

3. Theknoloji ea Taolo ea Basal Plane (BPD).

Li-BPD li theha haholo-holo ka lebaka la khatello ea ho kuta e fetang moeli oa bohlokoa oa likristale tsa SiC, ho kenya tšebetsong li-slip system. Joalo ka ha li-BPD li lebile ntlheng ea kholo, hangata li hlaha nakong ea kholo ea kristale le ho pholile. Ho fokotsa khatello ea kelello ka hare ho ka fokotsa haholo BPD.

4. Taolo ea Karolelano ea Karohano ea Mohato oa Phase

Ho eketsa karo-karolelano ea carbon-to-silicon karolong ea mouoane ke mokhoa o tiisitsoeng oa ho khothalletsa kholo ea polytype e le 'ngoe. Karo-karolelano e phahameng ea C / Si e fokotsa macrostep bunching 'me e boloka lefa la holim'a kristale ea peo, kahoo e thibela ho thehoa ha li-polytype tse sa batleheng.

5. Mekhoa ea Kholiso ea Khatello e Tlase

Khatello ea maikutlo nakong ea khōlo ea kristale e ka lebisa ho lifofane tse kobehileng tsa lattice, mapetsong, le ho tsieleha ho phahameng ha BPD. Litšitiso tsena li ka fetela ho epitaxial layers 'me tsa ama ts'ebetso ea sesebelisoa hampe.

Mekhoa e mengata ea ho fokotsa khatello ea kelello ea kristale e kenyelletsa:

• Ho lokisa kabo ea tšimo ea mocheso le mekhoa ea ts'ebetso ho khothaletsa kholo e haufi-ufi;

• Ho ntlafatsa moralo oa crucible ho lumella kristale ho hola ka bolokolohi ntle le tšitiso ea mochini;

• Ho ntlafatsa sets'oants'o sa sets'oants'o sa peo ho fokotsa ho se lumellane ha katoloso ea mocheso lipakeng tsa peo le graphite nakong ea mocheso, hangata ka ho siea lekhalo la 2 mm lipakeng tsa peo le sets'oants'o;

• Ho hloekisa lits'ebetso tsa annealing, ho lumella kristale hore e phomole ka sebōpi, le ho fetola mocheso le nako ho imolla khatello ea kelello ka botlalo.

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Mekhoa ho SiC Crystal Growth Technology

1. Boholo ba Crystal e Khōloanyane
SiC single crystal diameters e eketsehile ho tloha ho limilimithara tse 'maloa ho isa ho 6-inch, 8-inch, esita le li-wafers tse 12-inch. Li-wafers tse kholo li eketsa katleho ea tlhahiso le ho fokotsa litšenyehelo, ha li ntse li kopana le litlhoko tsa lisebelisoa tsa lisebelisoa tse phahameng.

2. Boleng bo Phahameng ba Crystal
Likristale tsa boleng bo holimo tsa SiC li bohlokoa bakeng sa lisebelisoa tse sebetsang hantle. Leha ho na le lintlafatso tse kholo, likristale tsa hajoale li ntse li bonts'a liphoso tse kang li-micropipes, dislocations, le litšila, tseo kaofela li ka senyang ts'ebetso ea sesebelisoa le ts'epahalo.

3. Phokotso ea Litšenyehelo
Tlhahiso ea kristale ea SiC e ntse e theko e boima, e fokotsa ho amoheloa ka bongata. Ho fokotsa litšenyehelo ka mekhoa e ntlafetseng ea kholo, ho eketsa katleho ea tlhahiso, le ho fokotsa litšenyehelo tsa thepa e tala ho bohlokoa bakeng sa ho atolosa lisebelisoa tsa 'maraka.

4. Tlhahiso e Bohlale
Ka tsoelo-pele ea bohlale ba maiketsetso le mahlale a maholo a data, kholo ea kristale ea SiC e ntse e ea lits'ebetsong tse bohlale, tse ikemetseng. Li-sensor le litsamaiso tsa taolo li ka hlokomela le ho lokisa maemo a kholo ka nako ea nnete, ho ntlafatsa botsitso ba ts'ebetso le ho tseba esale pele. Litlhahlobo tsa data li ka ntlafatsa le ho feta liparamente tsa ts'ebetso le boleng ba kristale.

Nts'etsopele ea theknoloji ea boleng bo holimo ea SiC single kristale e shebaneng haholo le lipatlisiso tsa thepa ea semiconductor. Ha theknoloji e ntse e tsoela pele, mekhoa ea ho hōla ha kristale e tla tsoela pele ho fetoha le ho ntlafatsa, ho fana ka motheo o tiileng oa likopo tsa SiC ka lisebelisoa tsa elektronike tse nang le mocheso o phahameng, maqhubu a phahameng le a matla a phahameng.