Lisebelisoa tsa Bohlokoa tse Tala bakeng sa Tlhahiso ea Semiconductor: Mefuta ea Li-substrate tsa Wafer

Li-substrate tsa Wafer e le Lisebelisoa tsa Bohlokoa Lisebelisoang tsa Semiconductor

Li-substrate tsa wafer ke tsona tse jarang disebediswa tsa semiconductor ka ho toba, mme thepa ya tsona e bontsha ka ho toba tshebetso ya sesebediswa, ditjeo le masimo a tshebediso. Ka tlase ke mefuta e meholo ya di-substrate tsa wafer hammoho le melemo le mathata a tsona:

1.Silicone (Si)

• Karolo ea mmaraka:E ikarabella bakeng sa ho feta 95% ea 'maraka oa lefats'e oa li-semiconductor.

• Melemo:

  • Theko e tlase:Thepa e tala e ngata (silicon dioxide), lits'ebetso tsa tlhahiso tse butsoitseng, le moruo o matla oa boholo.

  • Ho lumellana ho hoholo ha ts'ebetso:Theknoloji ea CMOS e butsoitse haholo, e tšehetsa li-node tse tsoetseng pele (mohlala, 3nm).

  • Boleng bo botle ba kristale:Li-wafer tse bophara bo boholo (haholo-holo tse lisenthimithara tse 12, lisenthimithara tse 18 tse ntseng li ntlafatsoa) tse nang le botenya bo tlase li ka lengoa.

  • Thepa e tsitsitseng ea mechini:Ho bonolo ho seha, ho bentša le ho sebetsana le sona.

• Mathata:

  • Lekhalo le lesesaane (1.12 eV):Motlakase o phahameng oa ho dutla mochesong o phahameng, o fokotsang ts'ebetso ea sesebelisoa sa motlakase.

  • Lekhalo le sa tobang:Bokgoni bo tlase haholo ba ho ntša mosi o tswang leseding, ha bo a lokela disebediswa tsa optoelectronic tse kang di-LED le di-laser.

  • Ho tsamaea ha dielektrone ho fokolang:Tshebetso e tlase ya maqhubu a phahameng ha e bapiswa le di-semiconductor tse kopaneng.
    

2.Gallium Arsenide (GaAs)

• Likopo:Lisebelisoa tsa RF tse nang le maqhubu a phahameng (5G/6G), lisebelisoa tsa optoelectronic (lisebelisoa tsa laser, lisele tsa letsatsi).

• Melemo:

  • Ho tsamaea ha dielektrone ho hoholo (5–6× ho feta ha silicon):E loketse lits'ebetso tse potlakileng haholo, tse nang le maqhubu a phahameng joalo ka puisano ea maqhubu a millimeter.

  • Lekhalo le tobileng la bandgap (1.42 eV):Phetoho ea photoelectric e sebetsang hantle haholo, motheo oa li-laser tsa infrared le li-LED.

  • Ho hanyetsa mocheso o phahameng le mahlaseli a kotsi:E loketse libaka tsa lifofane le libaka tse thata.

• Mathata:

  • Theko e phahameng:Thepa e haellang, kholo e thata ea kristale (e sekametseng ho falla), boholo bo fokolang ba wafer (haholo-holo lisenthimithara tse 6).

  • Mekaniki ea Brittle:E kotsing ea ho robeha, e leng se fellang ka chai e tlase ea ts'ebetso.

  • Chefo:Arsenic e hloka taolo e tiileng le taolo ea tikoloho.

3. Silicon Carbide (SiC)

• Likopo:Lisebelisoa tsa motlakase tse nang le mocheso o phahameng le motlakase o phahameng (li-inverter tsa EV, liteishene tsa ho tjhaja), lifofane.

• Melemo:

  • Sekheo se seholo sa leqhubu (3.26 eV):Matla a ho senyeha a phahameng (10× a silicon), mamello ea mocheso o phahameng (mocheso o sebetsang >200 °C).

  • Ho khanna ha mocheso o phahameng (≈3× silicon):Ho qhala mocheso hantle haholo, ho nolofalletsang matla a sistimi ho feta tekano.

  • Tahlehelo e tlase ea ho fetola:E ntlafatsa bokgoni ba ho fetola motlakase.

• Mathata:

  • Tokisetso ea substrate e thata:Khōlo e liehang ea kristale (> beke e le 'ngoe), taolo e thata ea sekoli (liphaephe tse nyenyane, ho falla), litšenyehelo tse phahameng haholo (5–10× silicon).

  • Boholo ba wafer e nyane:Haholo-holo lisenthimithara tse 4–6; lisenthimithara tse 8 li ntse li ntse li ntlafatsoa.

  • Ho thata ho sebetsana le eona:E thata haholo (Mohs 9.5), e leng se etsang hore ho seha le ho bentsha ho nke nako e telele.

4. Gallium Nitride (GaN)

• Likopo:Lisebelisoa tsa motlakase tse nang le maqhubu a phahameng (ho tjhaja ka potlako, liteishene tsa motheo tsa 5G), li-LED/lase tse putsoa.

• Melemo:

  • Ho tsamaea ha dielektrone ho phahameng haholo + lekhalo le pharaletseng la bandgap (3.4 eV):E kopanya ts'ebetso ea maqhubu a phahameng (> 100 GHz) le matla a phahameng.

  • Ho hanyetsa ka tlase:E fokotsa tahlehelo ea matla a sesebelisoa.

  • E lumellana le Heteroepitaxy:Hangata e lengoa holim'a li-substrate tsa silicon, safire, kapa SiC, e leng se fokotsang litšenyehelo.

• Mathata:

  • Ho thatafalloa ho hola ka bongata ba kristale e le 'ngoe:Heteroepitaxy ke ntho e tloaelehileng, empa ho se tshwane ha lattice ho hlahisa diphoso.

  • Theko e phahameng:Li-substrate tsa Native GaN li theko e boima haholo (wafer ea lisenthimithara tse 2 e ka bitsa likete tse 'maloa tsa USD).

  • Liphephetso tsa ho tšepahala:Liketsahalo tse kang ho putlama ha hona joale li hloka ntlafatso.

5. Phosphide ea Indium (InP)

• Likopo:Lipuisano tsa optical tse potlakileng haholo (li-laser, li-photodetector), lisebelisoa tsa terahertz.

• Melemo:

  • Ho tsamaea ha dielektrone tse ngata haholo:E tšehetsa ts'ebetso ea >100 GHz, e sebetsa hantle ho feta GaAs.

  • Lekhalo la leqhubu le tobileng le bapisang bolelele ba leqhubu:Thepa ea mantlha bakeng sa puisano ea faeba ea optical ea 1.3–1.55 μm.

• Mathata:

  • E bonolo ebile e theko e boima haholo:Litšenyehelo tsa substrate li feta silicon ea 100×, boholo ba wafer bo lekanyelitsoeng (lisenthimithara tse 4–6).

6. Safira (Al₂O₃)

• Likopo:Mabone a LED (GaN epitaxial substrate), khalase e koahelang lisebelisoa tsa elektroniki.

• Melemo:

  • Theko e tlase:Theko e tlase haholo ho feta di-substrate tsa SiC/GaN.

  • Botsitso bo botle ba lik'hemik'hale:E hanela mafome, e sireletsa mocheso haholo.

  • Ponaletso:E loketse meaho ea LED e otlolohileng.

• Mathata:

  • Ho se tsamaisane ha lerako le leholo le GaN (>13%):E baka bongata bo boholo ba sekoli, e leng se hlokang mealo e thibelang.

  • Ho tsamaisa mocheso hampe (~1/20 ea silicon):E fokotsa ts'ebetso ea li-LED tse matla haholo.

7. Dikarolo tse ka tlase tsa letsopa (AlN, BeO, jj.)

• Likopo:Li-spreader tsa mocheso bakeng sa li-module tse nang le matla a phahameng.

• Melemo:

  • Ho thibela mocheso + ho tsamaisa mocheso ka matla a phahameng (AlN: 170–230 W/m·K):E loketse ho paka ka bongata bo boholo.

• Mathata:

  • Kristale e seng e le 'ngoe:Ha e khone ho tšehetsa kholo ea sesebelisoa ka kotloloho, e sebelisoa feela e le li-substrate tsa ho paka.

8. Li-substrate tse khethehileng

• SOI (Silicone hodima Insulator):

  • Sebopeho:Sandwichi ea Silicone/SiO₂/silicone.

  • Melemo:E fokotsa bokgoni ba parasitic, e thatafaditsweng ke mahlaseli, e thibela ho dutla ha metsi (e sebediswang ho RF, MEMS).

  • Mathata:Theko e phahameng ka 30–50% ho feta silicon e ngata.

• Quartz (SiO₂):E sebelisoa ho li-photomasks le MEMS; e hanyetsa mocheso o phahameng empa e fokola haholo.

• Taemane:Substrate e phahameng ka ho fetisisa ea ho tsamaisa mocheso (>2000 W/m·K), tlas'a R&D bakeng sa ho qhala mocheso o feteletseng.

Tafole ea Kakaretso ea Papiso

Lintlha tsa Bohlokoa bakeng sa Khetho ea Substrate

• Litlhoko tsa tshebetso:GaAs/InP bakeng sa maqhubu a phahameng; SiC bakeng sa motlakase o phahameng, mocheso o phahameng; GaAs/InP/GaN bakeng sa optoelectronics.

• Lithibelo tsa litšenyehelo:Lisebelisoa tsa elektroniki tsa bareki li rata silicon; masimo a maemo a holimo a ka lokafatsa li-premium tsa SiC/GaN.

• Ho rarahana ha kopanyo:Silicon e ntse e sa nkeloe sebaka ke ho lumellana ha CMOS.

• Tsamaiso ea mocheso:Lisebelisoa tse matla haholo li khetha SiC kapa GaN e thehiloeng ho daemane.

• Ho hola ha ketane ea phepelo:Si > Sapphire > GaAs > SiC > GaN > InP.

Mokhoa oa Nakong e Tlang

Ho kopanngoa ha mefuta e fapaneng (mohlala, GaN-on-Si, GaN-on-SiC) ho tla leka-lekanya tshebetso le ditjeo, ho kganna kgatelopele ho 5G, dikoloi tsa motlakase, le khomphutha ya quantum.