Lisebelisoa tsa bohlokoa tsa Raw bakeng sa Tlhahiso ea Semiconductor: Mefuta ea Li-Wafer Substrates

Li-Wafer Substrates e le Lisebelisoa tsa Bohlokoa ho Lisebelisoa tsa Semiconductor

Wafer substrates ke bajari ba 'mele ba lisebelisoa tsa semiconductor,' me thepa ea bona ea thepa e khetholla ka kotloloho ts'ebetso ea sesebelisoa, litšenyehelo le likarolo tsa ts'ebeliso. Ka tlase ke mefuta ea mantlha ea li-wafer substrates hammoho le melemo le mathata a tsona:

1.Silicon (Si)

• Karolo ea mmaraka:E ikarabella ho feta 95% ea 'maraka oa lefats'e oa semiconductor.

• Melemo:

  • Theko e tlase:Lisebelisoa tse ngata tse tala (silicon dioxide), mekhoa ea tlhahiso e holileng, le moruo o matla oa sekala.

  • Tšebelisano e phahameng ea ts'ebetso:Theknoloji ea CMOS e holile haholo, e tšehetsa li-node tse tsoetseng pele (mohlala, 3nm).

  • Boleng bo botle ba kristale:Li-wafers tse kholo (haholo-holo li-inch tse 12, 18-inch tse ntseng li ntlafatsoa) tse nang le bokooa bo fokolang li ka lengoa.

  • Thepa e tsitsitseng ea mochini:Ho bonolo ho seha, ho bentša le ho tšoara.

• Mefokolo:

  • Narrow bandgap (1.12 eV):Ho lutla ho hoholo ha mocheso ho mocheso o phahameng, ho fokotsa matla a sesebelisoa sa motlakase.

  • Sehlopha se sa tobang:Ts'ebetso e tlase haholo ea tlhahiso ea khanya, e sa lokelang lisebelisoa tsa optoelectronic joalo ka li-LED le lasers.

  • Motsamao o fokolang oa elektronike:Ts'ebetso e tlase ea maqhubu a holimo ha e bapisoa le li-semiconductors tse kopaneng.
    

2.Gallium Arsenide (GaAs)

• Lisebelisoa:Lisebelisoa tsa RF tse phahameng-frequency (5G / 6G), lisebelisoa tsa optoelectronic (lasers, lisele tsa letsatsi).

• Melemo:

  • Motsamao o phahameng oa elektronike (5–6× oa silicon):E loketse lits'ebetso tse potlakileng, tse phahameng haholo joalo ka puisano ea millimeter-wave.

  • Lekhalo le tobileng (1.42 eV):Phetoho ea matla a holimo a motlakase, motheo oa li-lasers tsa infrared le li-LED.

  • Mocheso o phahameng le ho hanyetsa mahlaseli:E loketse sebaka sa sefofane le tikoloho e thata.

• Mefokolo:

  • Theko e phahameng:Lintho tse fokolang, khōlo e thata ea kristale (e atisang ho senyeha), boholo bo fokolang ba li-wafer (haholo-holo 6-inch).

  • Brittle mechanics:E tloaetse ho robeha, e bakang chai e tlase ea ts'ebetso.

  • Chefo:Arsenic e hloka ho ts'oaroa ka thata le taolo ea tikoloho.

3. Silicon Carbide (SiC)

• Lisebelisoa:Lisebelisoa tsa matla a phahameng a mocheso le a phahameng (li-inverters tsa EV, liteishene tsa ho tjhaja), sebaka sa sefofane.

• Melemo:

  • Phapang e pharaletseng (3.26 eV):Matla a phahameng a ho senya (10 × ea silicon), mamello e phahameng ea mocheso (mocheso o sebetsang> 200 ° C).

  • Thermal conductivity e phahameng (≈3× silicon):Phallo e ntle ea mocheso, e nolofalletsang matla a matla a sistimi e phahameng.

  • Tahlehelo e tlase ea switching:E ntlafatsa bokhoni ba ho fetola matla.

• Mefokolo:

  • Ho lokisa substrate e thata:Khōlo e liehang ea kristale (> beke ea 1), taolo e thata ea sekoli (micropipes, dislocations), theko e phahameng haholo (5-10 × silicon).

  • Sekhahla se senyenyane:Haholo-holo 4-6 inch; 8-inch e ntse e tsoela pele ho ntlafatsoa.

  • Ho thata ho sebetsa:Ho thata haholo (Mohs 9.5), ho etsa hore ho itšeha le ho bentša nako ho ja nako.

4. Gallium Nitride (GaN)

• Lisebelisoa:Lisebelisoa tsa matla a maqhubu a phahameng (ho tjhaja ka potlako, liteishene tsa motheo tsa 5G), li-LED / lasers tse putsoa.

• Melemo:

  • Motsamao oa elektrone o phahameng haholo + lekhalo le pharaletseng (3.4 eV):E kopanya maqhubu a phahameng (> 100 GHz) le ts'ebetso ea matla a phahameng.

  • Boikemelo bo tlase:E fokotsa tahlehelo ea matla a sesebelisoa.

  • Heteroepitaxy e lumellana:E atisa ho lengoa ka silicon, safire, kapa SiC substrates, ho fokotsa litšenyehelo.

• Mefokolo:

  • Ho thata ho hola ka kristale e le 'ngoe:Heteroepitaxy e tloaelehile, empa ho se tsamaisane ha lerata ho hlahisa mefokolo.

  • Theko e phahameng:Li-substrates tsa Native GaN li turu haholo (sephaphatha sa 2-inch se ka bitsa likete tse 'maloa tsa USD).

  • Mathata a ho tšepahala:Lintho tse kang ho putlama ha hona joale li hloka ntlafatso.

5. Indium Phosphide (InP)

• Lisebelisoa:Lipuisano tse phahameng tsa optical (lasers, photodetectors), lisebelisoa tsa terahertz.

• Melemo:

  • Motsamao oa elektronike o phahameng haholo:E ts'ehetsa> ts'ebetso ea 100 GHz, e fetang li-GaAs.

  • Lekhalo le tobileng le tsamaisanang le wavelength:Lisebelisoa tsa mantlha bakeng sa likhokahano tsa 1.3–1.55 μm optical fiber.

• Mefokolo:

  • E bobebe ebile e theko e boima haholo:Litsenyehelo tsa substrate li feta 100× silicon, boholo bo fokolang ba liphaephe (4-6 inch).

6. Sapphire (Al₂O₃)

• Lisebelisoa:Lebone la LED (GaN epitaxial substrate), lisebelisoa tsa elektronike tse koahelang khalase.

• Melemo:

  • Theko e tlase:E theko e tlase haholo ho feta li-substrates tsa SiC/GaN.

  • Botsitso bo botle ba lik'hemik'hale:E hana ho bola, e sireletsa matla haholo.

  • Ponaletso:E loketse meaho ea LED e otlolohileng.

• Mefokolo:

  • Phapang e kholo ea lattice le GaN (> 13%):E baka sekoli se phahameng, se hlokang li-buffer layers.

  • Ts'ebetso e mpe ea mocheso (~ 1/20 ea silicon):E fokotsa ts'ebetso ea li-LED tse nang le matla a phahameng.

7. Lisebelisoa tsa Ceramic (AlN, BeO, joalo-joalo)

• Lisebelisoa:Li-spreaders tsa mocheso bakeng sa li-module tsa matla a phahameng.

• Melemo:

  • Insulating + high thermal conductivity (AlN: 170–230 W/m·K):E loketse liphutheloana tse phahameng haholo.

• Mefokolo:

  • kristale e seng 'ngoe:Ha e khone ho tšehetsa kholo ea sesebelisoa ka kotloloho, e sebelisoang feela joalo ka liphutheloana tsa ho paka.

8. Li-substrates tse khethehileng

• SOI (Silicon ho Insulator):

  • Sebopeho:Sandwich ea Silicon/SiO₂/silicon.

  • Melemo:E fokotsa matla a parasitic, mahlaseli a thata-thata, khatello ea leakage (e sebelisoang ho RF, MEMS).

  • Mefokolo:30-50% e theko e boima ho feta silicon e ngata.

• Quartz (SiO₂):E sebelisoa ho li-photomasks le MEMS; ho hanyetsa mocheso o phahameng empa ho brittle haholo.

• Taemane:Karolo e phahameng ka ho fetisisa ea mocheso oa mocheso (> 2000 W/m·K), tlas'a R&D bakeng sa ho ntša mocheso o feteletseng.

Papiso ea Kakaretso Tafole

Lintlha tsa bohlokoa tsa ho khetha Substrate

• Litlhoko tsa ts'ebetso:GaAs / InP bakeng sa maqhubu a phahameng; SiC bakeng sa motlakase o phahameng, mocheso o phahameng; GaAs/InP/GaN bakeng sa optoelectronics.

• Litšitiso:Lisebelisoa tsa elektronike tsa bareki li rata silicon; masimo a maemo a holimo a ka lokafatsa litefello tsa SiC/GaN.

• Mathata a ho kopanya:Silicon e lula e sa nkeloe sebaka bakeng sa tšebelisano ea CMOS.

• Taolo ea mocheso:Lisebelisoa tsa matla a phahameng li khetha SiC kapa GaN e thehiloeng ho taemane.

• Kholiso ea ketane ea phepelo:Si > Sapphire > GaAs > SiC > GaN > InP.

Mokhoa oa Bokamoso

Ho kopanya ho fapaneng (mohlala, GaN-on-Si, GaN-on-SiC) ho tla leka-lekanya ts'ebetso le litšenyehelo, ho khanna tsoelo-pele ho 5G, likoloi tsa motlakase, le quantum computing.