Khahlanong le mokokotlo oa phetoho ea AI, likhalase tsa AR li ntse li kena butle-butle kelellong ea sechaba. Joalo ka paradigm e kopanyang lefatše la sebele le la 'nete, likhalase tsa AR li fapana le lisebelisoa tsa VR ka ho lumella basebelisi ho bona litšoantšo tse reriloeng ka mokhoa oa dijithale le leseli la tikoloho ka nako e le ngoe. Ho finyella ts'ebetso ena e 'meli-ho etsa litšoantšo tsa microdisplay mahlong ha u ntse u boloka phetisetso ea khanya ea ka ntle-optical-grade silicon carbide (SiC)-based AR glasses e sebelisa mohaho oa waveguide (lightguide). Moralo ona o phahamisa ponahalo e felletseng ea kahare ho fetisa litšoantšo, tse ts'oanang le phetiso ea fiber ea optical, joalo ka ha ho bontšitsoe setšoantšong sa schematic.
Ka tloaelo, substrate e le 'ngoe ea 6-inch high-purity semi-insulating substrate e ka fana ka likhalase tse 2, athe substrate ea 8-inch e amohela lipara tse 3-4. Ho amoheloa ha lisebelisoa tsa SiC ho fana ka melemo e meraro ea bohlokoa:
- Exceptional refractive index (2.7): E thusa >80° sebaka sa ponahalo se nang le mebala e felletseng (FOV) ka lesela le le leng la lense, e tlosa lintho tse entsoeng ka monokotšoai tse atileng meralong e tloaelehileng ea AR.
- Integrated tri-color (RGB) waveguide: E nkela sebaka sa li-waveguide stacks tse ngata, e fokotsa boholo ba sesebelisoa le boima ba tsona.
- Superior thermal conductivity (490 W/m·K): E fokotsa ho bokellana ha mocheso ho bakoang ke ho senyeha ha optical.
Melemo ena e tsamaisitse tlhoko e matla ea mmaraka ea likhalase tsa AR tse thehiloeng ho SiC. SiC ea optical-grade e sebelisoang ka tloaelo e na le likristale tse phahameng-purity semi-insulating (HPSI), tseo litlhoko tsa tsona tse thata tsa ho lokisetsa li tlatsetsang litšenyehelo tse phahameng tsa hona joale. Ka lebaka leo, nts'etsopele ea likaroloana tsa HPSI SiC ke tsa bohlokoa.
1. Tšimoloho ea Semi-Insulating SiC Powder
Tlhahiso ea boemo ba indasteri haholo-holo e sebelisa mocheso o phahameng oa "self-propagating synthesis" (SHS), mokhoa o hlokang taolo e hlokolosi:
- Lisebelisoa tse tala: 99.999% ea carbon / silicon powders e hloekileng e nang le boholo ba likaroloana tsa 10-100 μm.
- Crucible purity: Likarolo tsa graphite li hloekisoa ka mocheso o phahameng ho fokotsa litšila tsa tšepe.
- Taolo ea sepakapaka: 6N-purity argon (e nang le li-in-line purifiers) e hatella ho kenngoa ha nitrogen; trace HCl/H₂ likhase li ka hlahisoa ho senya metsoako ea boron le ho fokotsa naetrojene, le hoja mahloriso a H₂ a hloka ho ntlafatsa ho thibela ho bola ha graphite.
- Maemo a lisebelisoa: Lioto tsa Synthesis li tlameha ho fumana <10⁻⁴ Pa base vacuum, ka liprothokholo tse hlahlobiloeng tsa ho lutla.
2. Mathata a Khōlo ea Crystal
Khōlo ea HPSI SiC e arolelana litlhoko tse tšoanang tsa bohloeki:
- Feedstock: 6N+-purity SiC phofo e nang le B/Al/N <10¹⁶ cm⁻³, Fe/Ti/O e ka tlase ho mellwane, le dimetale tse nyane tsa alkali (Na/K).
- Lisebelisoa tsa khase: 6N argon / hydrogen blends e ntlafatsa ho hanyetsa.
- Thepa: Lipompo tsa molek'hule li netefatsa vacuum ea ultrahigh (<10⁻⁶ Pa); Phekolo ea pele ea crucible le nitrogen purging li bohlokoa.
Substrate Processing Innovations
Ha ho bapisoa le silicon, mekoloko ea nako e telele ea SiC ea kholo le khatello ea maikutlo (e bakang ho qhekella / ho thella) e hloka ts'ebetso e tsoetseng pele:
- Laser slicing: E eketsa chai ho tloha ho li-wafers tse 30 (350 μm, wire saw) ho ea ho >50 wafers ka 20-mm boule, e nang le monyetla oa ho fokotsa 200-μm. Nako ea ho sebetsa e theoha ho tloha matsatsing a 10-15 (saha ea terata) ho ea ho <20 min/wafer bakeng sa likristale tsa 8-inch.
3. Litšebelisano tsa Indasteri
Sehlopha sa Meta's Orion se qalile ho amoheloa ha SiC waveguide ea optical-grade, se hlohlelletsa matsete a R&D. Likamano tse kholo li kenyelletsa:
- TankeBlue & MUDI Micro: Kholiso e kopaneng ea lilense tsa waveguide tsa AR tse fapaneng.
- Jingsheng Mech, Longqi Tech, XREAL, & Kunyou Optoelectronics: Selekane sa maano bakeng sa kopanyo ea ketane ea phepelo ea AI/AR.
Likhakanyo tsa 'maraka li hakanya likarolo tse 500,000 tsa AR tse thehiloeng ho SiC selemo le selemo ka 2027, tse jang 250,000 6-inch (kapa 125,000 8-inch) substrates. Taba ena e totobatsa karolo ea phetoho ea SiC molokong o latelang oa AR optics.
XKH e sebetsa ka thata ho fana ka li-substrates tsa SiC tsa 4H-semi-insulating (4H-SEMI) tsa boleng bo holimo tse nang le li-diameter tse ka khonehang ho tloha ho 2-inch ho ea ho 8-inch, tse etselitsoeng ho finyella litlhoko tse khethehileng tsa kopo ho RF, motlakase oa motlakase, le AR/VR optics. Matla a rona a kenyelletsa phepelo ea molumo e tšepahalang, ho etsoa ka nepo (botenya, ho shebana le maemo, pheletso ea bokaholimo), le ts'ebetso e felletseng ea ka tlung ho tloha khōlong ea kristale ho isa ho polishing. Ka ntle ho 4H-SEMI, re boetse re fana ka 4H-N-type, 4H/6H-P-type, le 3C-SiC substrates, tse tšehetsang mefuta e fapaneng ea semiconductor le optoelectronic innovations.
Nako ea poso: Aug-08-2025