Khahlanong le semelo sa phetohelo ea AI, likhalase tsa AR li ntse li kena kelellong ea sechaba butle-butle. E le mokhoa o kopanyang lefats'e la sebele le la sebele ka mokhoa o se nang sekoli, likhalase tsa AR li fapana le lisebelisoa tsa VR ka ho lumella basebelisi ho bona litšoantšo tse bontšitsoeng ka dijithale le leseli la tikoloho le potolohileng ka nako e le 'ngoe. Ho fihlela ts'ebetso ena e habeli - ho hlahisa litšoantšo tsa microdisplay mahlong ha ba ntse ba boloka phetiso ea leseli la kantle - likhalase tsa AR tse thehiloeng ho optical-grade silicon carbide (SiC) li sebelisa moralo oa waveguide (lightguide). Moralo ona o sebelisa ponts'o e felletseng ea kahare ho fetisa litšoantšo, tse tšoanang le phetiso ea faeba ea optical, joalo ka ha ho bontšitsoe setšoantšong sa schematic.
Ka tlwaelo, substrate e le nngwe ya di-inch tse 6 e nang le bohloeki bo phahameng e ka hlahisa dipara tse 2 tsa digalase, ha substrate ya di-inch tse 8 e amohela dipara tse 3-4. Ho amohelwa ha thepa ya SiC ho fana ka melemo e meraro ya bohlokwa:
- Letšoao le ikhethang la refractive (2.7): E nolofalletsa sebaka sa pono sa 'mala o felletseng sa >80° (FOV) ka lera le le leng la lense, e felisa lintho tsa khale tsa mookoli tse tloaelehileng meralong ea AR e tloaelehileng.
- Leqhubu la maqhubu le kopantsoeng la mebala e meraro (RGB): Le nkela sebaka sa li-stack tsa leqhubu la maqhubu a nang le mekhahlelo e mengata, le fokotsa boholo le boima ba sesebelisoa.
- Ho tsamaisa mocheso ka tsela e phahameng ka ho fetisisa (490 W/m·K): Ho fokotsa ho senyeha ha mahlasedi a bonahalang ho bakwang ke ho bokellana ha mocheso.
Melemo ena e bakile tlhoko e matla ea 'maraka bakeng sa likhalase tsa AR tse thehiloeng ho SiC. SiC ea sehlopha sa optical e sebelisoang hangata e na le likristale tsa semi-insulating tse hloekileng haholo (HPSI), tseo litlhoko tsa tsona tse thata tsa ho lokisa li tlatsetsang litšenyehelong tse phahameng tsa hajoale. Ka lebaka leo, nts'etsopele ea li-substrate tsa HPSI SiC ke ea bohlokoa.
1. Ho kopanngoa ha Phofo ea SiC e Sireletsang ka Semi
Tlhahiso ea indasteri e sebelisa haholo-holo tlhahiso ea ho iketsetsa lintho ka mocheso o phahameng (SHS), ts'ebetso e hlokang taolo e hlokolosi:
- Lisebelisoa tse tala: Phofo ea khabone/silicon e hloekileng ea 99.999% e nang le boholo ba likaroloana tsa 10–100 μm.
- Bohloeki bo ka Seboping: Likarolo tsa graphite li hloekisoa ka mocheso o phahameng ho fokotsa ho hasana ha litšila tsa tšepe.
- Taolo ea sepakapaka: Argon ea 6N-purity (e nang le li-purifier tse ka har'a mola) e thibela ho kenngoa ha naetrojene; likhase tse ka morao tsa HCl/H₂ li ka kenngoa ho fetola metsoako ea boron le ho fokotsa naetrojene, leha khatello ea H₂ e hloka ntlafatso ho thibela ho bola ha graphite.
- Maemo a Lisebelisoa: Lifono tsa tlhahiso li tlameha ho fihlella <10⁻⁴ Pa base vacuum, ka mekhoa e matla ea ho hlahloba ho lutla.
2. Liphephetso tsa Kholo ea Kristale
Kholo ea HPSI SiC e na le litlhoko tse tšoanang tsa bohloeki:
- Sejo: Phofo ea SiC ea 6N+-purity e nang le B/Al/N <10¹⁶ cm⁻³, Fe/Ti/O ka tlase ho meeli ea moeli, le litšepe tse fokolang tsa alkali (Na/K).
- Mekhoa ea khase: Metswako ea argon/hydrogen ea 6N e eketsa ho hanyetsa.
- Lisebelisoa: Lipompo tsa limolek'hule li netefatsa vacuum e phahameng haholo (<10⁻⁶ Pa); kalafo ea pele ho crucible le ho hloekisa naetrojene li bohlokoa haholo.
2.1 Mekhoa e Mecha ea ho Sibolla Lintho Tse Nyane
Ha ho bapisoa le silicon, lipotoloho tsa kgolo tse telele tsa SiC le kgatello ya tlhaho (e bakang ho petsoha/ho kgaoha ha mahlakore) di hloka tshebetso e tswetseng pele:
- Ho seha ka laser: Ho eketsa chai ho tloha ho di-wafer tse 30 (350 μm, sakha ya terata) ho isa ho di-wafer tse fetang 50 ka boule ya 20-mm, ka monyetla wa ho fokotsa boima ba 200-μm. Nako ya ho sebetsana e theoha ho tloha matsatsing a 10-15 (sakha ya terata) ho isa ho <20 min/wafer bakeng sa dikristale tse 8-inch.
3. Tšebelisano-'moho ea Indasteri
Sehlopha sa Meta sa Orion se bile pula-maliboho ho amoheleng tataiso ea maqhubu a SiC ea boleng ba optical, e leng se ileng sa susumetsa matsete a R&D. Likamano tsa bohlokoa li kenyelletsa:
- TankeBlue le MUDI Micro: Ntlafatso e kopaneng ea lilense tsa maqhubu a AR a tsamaisang maqhubu.
- Jingsheng Mech, Longqi Tech, XREAL, le Kunyou Optoelectronics: Selekane sa maano bakeng sa kopanyo ya ketane ya phepelo ya AI/AR.
Likhakanyo tsa 'maraka li hakanya hore ho tla ba le li-unit tsa AR tse 500,000 tse thehiloeng ho SiC selemo le selemo ka 2027, tse jang li-substrate tse 250,000 tsa lisenthimithara tse 6 (kapa tse 125,000 tsa lisenthimithara tse 8). Tsela ena e totobatsa karolo ea phetoho ea SiC ho li-optics tsa AR tsa moloko o latelang.
XKH e ikhethile ka ho fana ka li-substrate tsa SiC tsa boleng bo holimo tsa 4H-semi-insulation (4H-SEMI) tse nang le bophara bo ka fetoloang ho tloha ho 2-inch ho isa ho 8-inch, tse etselitsoeng ho fihlela litlhoko tse ikhethileng tsa ts'ebeliso ho RF, motlakase oa elektroniki, le AR/VR optics. Matla a rona a kenyelletsa phepelo e tšepahalang ea bophahamo, ho etsa lintho ka nepo (botenya, tataiso, qetello ea bokaholimo), le ts'ebetso e felletseng ea kahare ho tloha kholong ea kristale ho isa ho polishing. Ka ntle ho 4H-SEMI, re boetse re fana ka li-substrate tsa 4H-N, 4H/6H-P-type, le 3C-SiC, tse tšehetsang boqapi bo fapaneng ba semiconductor le optoelectronic.
Nako ea poso: Phato-08-2025