Li-substrate tsa Semiconductor le Epitaxy: Metheo ea Tekheniki e ka Morao ho Matla a Sejoale-joale le Lisebelisoa tsa RF

Tsoelo-pele theknolojing ea semiconductor e hlalosoa ka ho eketsehileng ke lintlafatso libakeng tse peli tsa bohlokoa:li-substratelemekhahlelo ea epitaxialLikarolo tsena tse peli li sebetsa 'moho ho fumana ts'ebetso ea motlakase, mocheso le ts'epo ea lisebelisoa tse tsoetseng pele tse sebelisoang likoloing tsa motlakase, liteisheneng tsa motheo tsa 5G, lisebelisoa tsa elektroniki tsa bareki le litsamaiso tsa puisano tsa optical.

Leha substrate e fana ka motheo wa sebele le wa kristale, lera la epitaxial le bopa motheo o sebetsang moo boitshwaro ba maqhubu a phahameng, matla a phahameng, kapa ba optoelectronic bo entsweng teng. Ho tsamaellana ha tsona—ho hokahanya kristale, katoloso ya mocheso, le thepa ya motlakase—ke habohlokoa bakeng sa ho ntshetsa pele disebediswa tse nang le bokgoni bo phahameng, ho fetola ka potlako, le ho boloka matla a mangata.

Sengoloa sena se hlalosa kamoo li-substrate le mahlale a epitaxial li sebetsang kateng, hore na ke hobane'ng ha li le bohlokoa, le hore na li bopa bokamoso ba lisebelisoa tsa semiconductor joang joalo kaSi, GaN, GaAs, safire, le SiC.

1. Ke engSubstrate ea semiconductor?

Substrate ke "sethala" sa kristale e le 'ngoe seo sesebelisoa se hahiloeng ho sona. Se fana ka tšehetso ea sebopeho, ho qhala ha mocheso, le template ea athomo e hlokahalang bakeng sa kholo ea epitaxial ea boleng bo holimo.

Mesebetsi ea Bohlokoa ea Substrate

• Tšehetso ea mechini:E netefatsa hore sesebediswa se dula se tsitsitse ka sebopeho nakong ya tshebetso le tshebetso.

• Setšoantšo sa kristale:E tataisa lera la epitaxial ho hola ka mahlakore a athomo a tsamaellanang, e fokotsa diphoso.

• Karolo ea motlakase:E ka tsamaisa motlakase (mohlala, Si, SiC) kapa ea sebetsa e le sesebelisoa sa ho thibela motlakase (mohlala, safire).

Lisebelisoa tse Tloaelehileng tsa Substrate

Kamoo Li-substrate li Etsoang Kateng

1. Tlhoekiso ea thepa:Silicon kapa metsoako e meng e hloekisoa ho fihlela e hloekile haholo.

2. Kgolo ea kristale e le 'ngoe:

   • Czochralski (CZ)– mokhoa o tloaelehileng haholo oa silicon.

   • Sebaka sa ho Phaphamala (FZ)– e hlahisa likristale tse hloekileng haholo.

3. Ho seha le ho bentša wafer:Li-boule li sehoa ka li-wafer ebe li bentšitsoe hore li be boreleli.

4. Ho hlwekisa le ho hlahloba:Ho tlosa litšila le ho hlahloba bongata ba liphoso.

Liphephetso tsa Tekheniki

Lisebelisoa tse ling tse tsoetseng pele—haholo-holo SiC—li thata ho li hlahisa ka lebaka la kholo e liehang haholo ea kristale (ke 0.3–0.5 mm/hora feela), litlhoko tsa taolo e tiileng ea mocheso, le tahlehelo e kholo ea ho seha (tahlehelo ea kerf ea SiC e ka fihla ho >70%). Bothata bona ke lebaka le leng leo ka lona thepa ea moloko oa boraro e lulang e le theko e boima.

2. Lera la Epitaxial ke Eng?

Ho holisa lera la epitaxial ho bolela ho beha filimi e tšesaane, e hloekileng haholo, ea kristale e le 'ngoe holim'a substrate e nang le tataiso e otlolohileng hantle ea lattice.

Lera la epitaxial le etsa qeto eaboitšoaro ba motlakaseea sesebelisoa sa ho qetela.

Hobaneng Epitaxy e le ea Bohlokoa

• E eketsa bohloeki ba kristale

• E nolofalletsa liprofaele tsa doping tse ikhethileng

• E fokotsa ho ata ha sekoli sa substrate

• E theha meaho e fapaneng e entsoeng ka boqapi joalo ka liliba tsa quantum, HEMTs, le li-superlattice

Mahlale a Maholo a Epitaxy

Liparamente tsa Bohlokoa ho Epitaxy

• Botenya ba lera:Li-nanometer bakeng sa liliba tsa quantum, ho fihlela ho 100 μm bakeng sa lisebelisoa tsa motlakase.

• Ho sebelisa lithethefatsi tse nang le lithethefatsi:E fetola mahloriso a mojari ka ho kenya litšila ka nepo.

• Boleng ba sebopeho:E tlameha ho fokotsa ho falla le khatello ea maikutlo e bakoang ke ho se lumellane ha lattice.

Liphephetso ho Heteroepitaxy

• Ho se tsamaisane ha lerako:Mohlala, ho se tshwane ha GaN le safire ka ~13%.

• Ho se tsamaisane ha katoloso ea mocheso:E ka baka ho petsoha nakong ea ho pholisa.

• Taolo e phethahetseng ea liphoso:E hloka likarolo tsa buffer, likarolo tse hlophisitsoeng, kapa likarolo tsa nucleation.

3. Kamoo Substrate le Epitaxy li Sebetsang Hammoho Kateng: Mehlala ea Lefatše la Sebele

Leseli la LED la GaN holim'a Sapphire

• Safira ha e theko e tlase ebile e thibela mocheso.

• Mealo ea li-buffer (AlN kapa GaN ea mocheso o tlase) e fokotsa ho se lumellane ha lattice.

• Liliba tse nang le li-quantum tse ngata (InGaN/GaN) li bopa sebaka se sebetsang se ntšang khanya.

• E fihlella bongata ba diphoso tse ka tlase ho 10⁸ cm⁻² le bokgoni bo phahameng ba kganya.

SiC Power MOSFET

• E sebelisa li-substrate tsa 4H-SiC tse nang le bokhoni bo phahameng ba ho senya.

• Mealo ea ho kheloha ha epitaxial (10–100 μm) e khetholla tekanyo ea motlakase.

• E fana ka tahlehelo e tlase ea conduction ea ~90% ho feta lisebelisoa tsa motlakase tsa silicon.

Lisebelisoa tsa RF tsa GaN-on-Silicon

• Li-substrate tsa silicon li fokotsa litšenyehelo 'me li lumella ho kopanngoa le CMOS.

• Mealo ea nucleation ea AlN le li-buffer tse entsoeng ka boenjiniere li laola khatello.

• E sebelisoa bakeng sa li-chip tsa 5G PA tse sebetsang maqhubung a maqhubu a millimeter.

4. Substrate khahlanong le Epitaxy: Liphapang tsa mantlha

5. Litheknoloji tsena li lebile hokae

Boholo bo Boholoanyane ba Wafer

• Si e fetohela ho lisenthimithara tse 12

• SiC e fetoha ho tloha ho lisenthimithara tse 6 ho ea ho lisenthimithara tse 8 (phokotso e kholo ea litšenyehelo)

• Bophara bo boholo bo ntlafatsa phallo ea motlakase le ho fokotsa litšenyehelo tsa sesebelisoa

Heteroepitaxy e Theko e Tlase

GaN-on-Si le GaN-on-saphire li ntse li fumana matla a ho hohela e le mekhoa e meng ea ho sebelisa lintho tse turang tsa tlhaho tsa GaN.

Mekhoa e Tsoetseng Pele ea ho Seha le ho Hola

• Ho seha ka serame ho ka fokotsa tahlehelo ea SiC kerf ho tloha ho ~75% ho isa ho ~50%.

• Meralo e ntlafalitsoeng ea sebōpi e eketsa chai ea SiC le ho tšoana.

Kopanyo ea Mesebetsi ea Optical, Power, le RF

Epitaxy e nolofalletsa liliba tsa quantum, li-superlattice, le likarolo tse thata tse hlokahalang bakeng sa li-photonics tse kopantsoeng nakong e tlang le lisebelisoa tsa motlakase tse sebetsang hantle haholo.

Qetello

Li-substrate le epitaxy li bopa mokokotlo oa theknoloji oa li-semiconductor tsa sejoale-joale. Substrate e beha motheo oa 'mele, oa mocheso le oa kristale, ha lera la epitaxial le hlalosa mesebetsi ea motlakase e nolofalletsang ts'ebetso e tsoetseng pele ea sesebelisoa.

Ha tlhoko e ntse e hola bakeng samatla a phahameng, maqhubu a phahameng, le bokgoni bo phahamenglitsamaiso—ho tloha likoloing tsa motlakase ho ea litsing tsa data—mahlale ana a mabeli a tla tsoela pele ho fetoha hammoho. Mekhoa e mecha ea boholo ba wafer, taolo ea liphoso, heteroepitaxy, le kholo ea kristale e tla bopa moloko o latelang oa thepa ea semiconductor le meralo ea lisebelisoa.