Silicon carbide (SiC) ke motsoako o ikhethang o ka fumanoang indastering ea semiconductor le lihlahisoa tse tsoetseng pele tsa letsopa. Hangata sena se lebisa pherekanong har'a batho ba tloaelehileng ba ka 'nang ba li fosa e le mofuta o tšoanang oa sehlahisoa. Ha e le hantle, leha e arolelana metsoako e tšoanang ea lik'hemik'hale, SiC e iponahatsa e le li-ceramic tse tsoetseng pele tse sa tsofaleng kapa li-semiconductor tse sebetsang hantle haholo, li bapala likarolo tse fapaneng ka ho felletseng lits'ebetsong tsa indasteri. Ho na le phapang e kholo lipakeng tsa thepa ea SiC ea sehlopha sa ceramic le ea sehlopha sa semiconductor mabapi le sebopeho sa kristale, lits'ebetso tsa tlhahiso, litšobotsi tsa ts'ebetso, le masimo a ts'ebeliso.
- Litlhoko tsa ho Hloeka ho Fapaneng bakeng sa Lisebelisoa tse Tala
SiC ea boleng ba ceramic e na le litlhoko tse bonolo tsa bohloeki bakeng sa phepelo ea eona ea phofo. Ka tloaelo, lihlahisoa tsa boleng ba khoebo tse nang le bohloeki ba 90%-98% li ka fihlela litlhoko tse ngata tsa ts'ebeliso, leha li-ceramic tsa sebopeho tse sebetsang hantle li ka hloka bohloeki ba 98%-99.5% (mohlala, SiC e kopantsoeng le karabelo e hloka dikahare tse laoloang tsa silicon e lokolohileng). E mamella litšila tse itseng ka boomo 'me ka linako tse ling e kenyelletsa ka boomo lithuso tsa ho sintering joalo ka aluminium oxide (Al₂O₃) kapa yttrium oxide (Y₂O₃) ho ntlafatsa ts'ebetso ea sintering, ho fokotsa mocheso oa sintering, le ho ntlafatsa bongata ba sehlahisoa sa ho qetela.
SiC ea sehlopha sa semiconductor e hloka maemo a hloekileng a batlang a phethahetse. SiC ea kristale e le 'ngoe ea sehlopha sa substrate e hloka bohloeki ba ≥99.9999% (6N), ka lits'ebetso tse ling tsa maemo a holimo li hloka bohloeki ba 7N (99.99999%). Mealo ea Epitaxial e tlameha ho boloka maemo a litšila a ka tlase ho liathomo tsa 10¹⁶/cm³ (haholo-holo ho qoba litšila tse tebileng joalo ka B, Al, le V). Esita le litšila tse setseng tse kang tšepe (Fe), aluminium (Al), kapa boron (B) li ka ama thepa ea motlakase hampe ka ho baka ho hasana ha carrier, ho fokotsa ho senyeha ha matla a tšimo, 'me qetellong ho behella ts'ebetso le ts'epo ea sesebelisoa kotsing, ho hloka taolo e thata ea litšila.
Thepa ea semiconductor ea silicon carbide
- Meaho le Boleng bo Ikhethang ba Crystal
SiC ea sehlopha sa ceramic e teng haholo-holo e le phofo ea polycrystalline kapa 'mele e sintered e entsoeng ka li-microcrystals tse ngata tsa SiC tse shebaneng ka mokhoa o sa reroang. Thepa e ka ba le li-polytype tse ngata (mohlala, α-SiC, β-SiC) ntle le taolo e tiileng holim'a li-polytype tse itseng, ho e-na le hoo e totobatsa ho teteana ha thepa ka kakaretso le ho tšoana. Sebopeho sa eona sa kahare se na le meeli e mengata ea lijo-thollo le masoba a manyane, 'me e ka ba le lithuso tsa ho sintering (mohlala, Al₂O₃, Y₂O₃).
SiC ea sehlopha sa semiconductor e tlameha ho ba li-substrate tsa kristale e le 'ngoe kapa likarolo tsa epitaxial tse nang le meaho ea kristale e hlophisitsoeng hantle. E hloka li-polytype tse itseng tse fumanoeng ka mekhoa e nepahetseng ea kholo ea kristale (mohlala, 4H-SiC, 6H-SiC). Litšobotsi tsa motlakase tse kang ho tsamaea ha li-electron le bandgap lia ameha haholo khethong ea li-polytype, li hloka taolo e tiileng. Hajoale, 4H-SiC e busa 'marakeng ka lebaka la litšobotsi tsa eona tse phahameng tsa motlakase ho kenyeletsoa ho tsamaea ha carrier e phahameng le matla a tšimo a ho senyeha, e leng se etsang hore e be e loketseng lisebelisoa tsa motlakase.
- Papiso ea ho rarahana ha Ts'ebetso
SiC ea sehlopha sa ceramic e sebelisa mekhoa e bonolo ea tlhahiso (ho lokisa phofo → ho etsa → ho sila), e ts'oanang le "ho etsa litene." Ts'ebetso ena e kenyelletsa:
- Ho kopanya phofo ea SiC ea boemo ba khoebo (hangata e boholo ba micron) le li-binder
- Ho theha ka ho tobetsa
- Ho sintering ka mocheso o phahameng (1600-2200°C) ho fihlela ho tiea ha likaroloana ka ho hasana ha tsona
Bongata ba lits'ebetso li ka khotsofatsoa ka bongata ba >90%. Ts'ebetso eohle ha e hloke taolo e nepahetseng ea kholo ea kristale, ho e-na le hoo e shebane le ho theha le ho tsitsa ha botsitso. Melemo e kenyelletsa ho tenyetseha ha ts'ebetso bakeng sa libopeho tse rarahaneng, leha ho na le litlhoko tse tlase tsa bohloeki.
SiC ea sehlopha sa semiconductor e kenyelletsa lits'ebetso tse rarahaneng haholo (ho lokisoa ha phofo e hloekileng haholo → kholo ea substrate ea kristale e le 'ngoe → ho beoa ha wafer ea epitaxial → tlhahiso ea sesebelisoa). Mehato ea bohlokoa e kenyelletsa:
- Ho lokisa substrate haholo-holo ka mokhoa oa ho tsamaisa mouoane oa 'mele (PVT)
- Ho kenngoa ha phofo ea SiC tlas'a maemo a feteletseng (2200-2400°C, vacuum e ngata)
- Taolo e nepahetseng ea li-gradient tsa mocheso (±1°C) le liparamente tsa khatello
- Kgolo ya lera la Epitaxial ka ho kenya mouoane wa dikhemikhale (CVD) ho theha lera le teteaneng ka ho lekana, le nang le doped (hangata di-micron tse mmalwa ho isa ho tse mashome)
Tshebetso yohle e hloka dibaka tse hlwekileng haholo (mohlala, dikamore tsa ho hlwekisa tsa Sehlopha sa 10) ho thibela tshilafatso. Dibopeho di kenyeletsa ho nepahala ho feteletseng ha tshebetso, ho hlokang taolo hodima masimo a mocheso le sekgahla sa phallo ya kgase, ka ditlhoko tse thata bakeng sa bohloeki ba thepa e tala (>99.9999%) le boqhetseke ba disebediswa.
- Liphapang tse Bohlokoa tsa Litšenyehelo le Mekhoa ea 'Maraka
Likarolo tsa SiC ea boleng ba ceramic:
- Lisebelisoa tse tala: Phofo ea boleng ba khoebo
- Mekhoa e bonolo haholo
- Theko e tlase: Likete ho isa ho mashome a likete RMB ka tonne
- Lisebelisoa tse pharaletseng: Li-abrasives, li-refractories, le liindasteri tse ling tse nang le litšenyehelo tse tlase
Likarolo tsa SiC ea sehlopha sa semiconductor:
- Mekhahlelo e telele ea kholo ea substrate
- Taolo ea liphoso e phephetsang
- Litefiso tse tlase tsa chai
- Litšenyehelo tse phahameng: Likete tsa USD ka substrate ea lisenthimithara tse 6
- Limmaraka tse shebaneng le tsona: Lisebelisoa tsa elektroniki tse sebetsang hantle joalo ka lisebelisoa tsa motlakase le likarolo tsa RF
Ka ntshetsopele e potlakileng ya dikoloi tse ntjha tsa eneji le dikgokahano tsa 5G, tlhokeho ya mmaraka e ntse e hola ka potlako.
- Maemo a Ts'ebeliso a Fapaneng
SiC ea boleng ba ceramic e sebetsa e le "pere ea indasteri" haholo-holo bakeng sa lits'ebetso tsa meaho. Ha e sebelisa litšobotsi tsa eona tse ntle tsa mechini (ho thatafala ho phahameng, ho hanyetsa ho tsofala) le litšobotsi tsa mocheso (ho hanyetsa mocheso o phahameng, ho hanyetsa oxidation), e ipabola ka:
- Li-abrasives (mabili a silang, sandpaper)
- Dintho tse halefisang (masela a ontong a mocheso o phahameng)
- Likarolo tse hanelang ho tsofala/ho bola (mebele ea pompo, masela a liphaephe)
Likarolo tsa sebopeho sa ceramic tsa silicon carbide
SiC ea sehlopha sa semiconductor e sebetsa e le "sehlopha se phahameng sa elektroniki," e sebelisa thepa ea eona e pharaletseng ea semiconductor ea bandgap ho bontša melemo e ikhethang lisebelisoa tsa elektroniki:
- Lisebelisoa tsa motlakase: Li-inverter tsa motlakase oa ...
- Lisebelisoa tsa RF: Liteishene tsa motheo tsa 5G, litsamaiso tsa radar (ho nolofalletsa maqhubu a phahameng a ts'ebetso)
- Lisebelisoa tsa Optoelectronics: Thepa ea substrate bakeng sa mabone a maputsoa a LED
Wafer ea epitaxial ea SiC ea limilimithara tse 200
| Tekanyo | SiC ea sehlopha sa letsopa | SiC ea sehlopha sa semiconductor |
| Sebopeho sa kristale | Polycrystalline, mefuta e mengata ea polycrystalline | Kristale e le 'ngoe, li-polytype tse khethiloeng ka tieo |
| Tsepamiso ea Ts'ebetso | Ho tsitsisa le ho laola sebopeho | Boleng ba kristale le taolo ea thepa ea motlakase |
| Bohlokoa ba Tshebetso | Matla a mechini, ho hanyetsa mafome, botsitso ba mocheso | Matlotlo a motlakase (lekhalo la leqhubu, tšimo ea ho senyeha, jj.) |
| Maemo a Kopo | Likarolo tsa sebopeho, likarolo tse sa tsofaleng, likarolo tse mocheso o phahameng | Lisebelisoa tse nang le matla a phahameng, lisebelisoa tse nang le maqhubu a phahameng, lisebelisoa tsa optoelectronic |
| Bakhanni ba Litšenyehelo | Ho tenyetseha ha ts'ebetso, litšenyehelo tsa thepa e tala | Sekhahla sa kholo ea kristale, ho nepahala ha lisebelisoa, bohloeki ba thepa e tala |
Ka bokhutšoanyane, phapang ea mantlha e bakoa ke merero ea tsona e ikhethang ea ts'ebetso: SiC ea sehlopha sa ceramic e sebelisa "sebopeho (sebopeho)" ha SiC ea sehlopha sa semiconductor e sebelisa "thepa (ea motlakase)." Ea pele e phehella ts'ebetso ea mechini/mocheso e theko e tlase, ha ea morao e emela sehlohlolo sa theknoloji ea ho lokisa thepa e le thepa e hloekileng haholo, e sebetsang ka kristale e le 'ngoe. Leha e arolelana tšimoloho e tšoanang ea lik'hemik'hale, SiC ea sehlopha sa ceramic le ea sehlopha sa semiconductor li bontša liphapang tse hlakileng tsa bohloeki, sebopeho sa kristale, le lits'ebetso tsa tlhahiso - leha ho le joalo ka bobeli li etsa menehelo e kholo tlhahisong ea indasteri le tsoelo-peleng ea theknoloji libakeng tsa tsona tse fapaneng.
XKH ke kgwebo ya theknoloji e phahameng e ikgethileng ka ho etsa R&D le tlhahiso ya thepa ya silicon carbide (SiC), e fanang ka ntshetsopele e ikgethileng, ho sebetsa ka nepo, le ditshebeletso tsa kalafo ya bokahodimo ho tloha ho diseramike tsa SiC tse hlwekileng haholo ho isa ho dikristale tsa SiC tsa semiconductor-grade. Ka ho sebedisa mahlale a ho lokisa a tswetseng pele le mela e bohlale ya tlhahiso, XKH e fana ka dihlahiswa le ditharollo tsa SiC tse ka fetolwang (bohloeki ba 90%-7N) le tse laolwang ke sebopeho (polycrystalline/single-crystalline) bakeng sa bareki ba semiconductor, matla a matjha, difofane le masimo a mang a sejoale-joale. Dihlahiswa tsa rona di fumana ditshebediso tse pharaletseng disebedisweng tsa semiconductor, dikoloi tsa motlakase, puisano ya 5G le diindasteri tse amanang le tsona.
Tse latelang ke disebediswa tsa ceramic tsa silicon carbide tse hlahisitsweng ke XKH.
Nako ea poso: Phupu-30-2025