Silicon Carbide Ceramics vs. Semiconductor Silicon Carbide: Thepa e le 'Ngoe e nang le Liphello tse peli tse ikhethang

1. Divergent Hloeko Litlhokahalo bakeng sa Raw Materials

 

Ceramic-grade SiC e na le litlhoko tse fokolang tsa bohloeki bakeng sa lijo tsa eona tsa phofo. Ka tloaelo, lihlahisoa tsa boemo ba khoebo tse nang le bohloeki ba 90% -98% li ka finyella litlhoko tse ngata tsa kopo, le hoja li-ceramics tsa sebopeho se phahameng li ka hloka bohloeki ba 98% -99.5% (mohlala, SiC e kopantsoeng le karabelo e hloka likahare tsa silicon tse sa lefelloeng). E mamella litšila tse itseng 'me ka linako tse ling ka boomo e kenyelletsa lithuso tsa sintering tse kang aluminium oxide (Al₂O₃) kapa yttrium oxide (Y₂O₃) ho ntlafatsa ts'ebetso ea sintering, mocheso o tlase oa sintering, le ho ntlafatsa boleng ba sehlahisoa sa ho qetela.

 

Semiconductor-grade SiC e hloka maemo a haufi-ufi a bohloeki. Substrate-grade single crystal SiC e hloka ≥99.9999% (6N) bohloeki, ka lisebelisoa tse ling tsa boemo bo phahameng tse hlokang bohloeki ba 7N (99.99999%). Epitaxial layers e tlameha ho boloka botsitso ba litšila bo ka tlase ho 10¹⁶ atoms/cm³ (haholo-holo ho qoba litšila tse tebileng joalo ka B, Al, le V). Esita le lits'ila tse kang tšepe (Fe), aluminium (Al), kapa boron (B) li ka ama thepa ea motlakase haholo ka ho etsa hore motho ea tsamaisang thepa a hasane, a fokotse matla a masimo a senyehang, 'me qetellong a sekisetse ts'ebetso ea lisebelisoa le ho tšepahala, ho hloka taolo e tiileng ea ho se hloeke.

 

Silicon carbide semiconductor lintho tse bonahalang

 

2. Mehaho le Boleng bo Ikhethileng ba Crystal

 

SiC ea Ceramic-grade e fumaneha haholo e le phofo ea polycrystalline kapa 'mele e sintered e entsoeng ka li-microcrystals tse ngata tse sa reroang tsa SiC. Boitsebiso bo ka 'na ba e-na le li-polytypes tse ngata (mohlala, α-SiC, β-SiC) ntle le taolo e tiileng holim'a li-polytypes tse itseng, ho e-na le ho hatisoa ka bongata ba thepa le ho tšoana. Sebopeho sa eona se ka hare se na le meeli e mengata ea lijo-thollo le li-pores tse nyenyane haholo, 'me e ka' na ea e-ba le lithuso tsa ho sintering (mohlala, Al₂O₃, Y₂O₃).

 

Semiconductor-grade SiC e tlameha ho ba li-substrates tsa kristale e le 'ngoe kapa likarolo tsa epitaxial tse nang le mehaho ea kristale e laetsoeng haholo. E hloka li-polytypes tse khethehileng tse fumanoang ka mekhoa e nepahetseng ea ho hōla ha kristale (mohlala, 4H-SiC, 6H-SiC). Thepa ea motlakase joalo ka motsamao oa elektrone le bandgap e na le kutloelo-bohloko haholo khethong ea mofuta oa polytype, e hlokang taolo e tiileng. Hajoale, 4H-SiC e laola 'maraka ka lebaka la thepa ea eona e phahameng ea motlakase e kenyelletsang motsamao o phahameng oa sepalangoang le matla a masimo a senyehileng, e etsang hore e be e loketseng lisebelisoa tsa motlakase.

 

3. Ho rarahana ha Ts'ebetso Papiso

 

SiC-grade ea Ceramic e sebelisa mekhoa e batlang e le bonolo ea ho etsa (ho lokisa phofo → ho etsa → ho sila), e tšoanang le "ho etsa litene." Mokhoa ona o kenyelletsa:

 

• Ho kopanya phofo ea SiC ea boemo ba khoebo (hangata e boholo ba micron) le li-binders
• Ho theha ka ho tobetsa
• Mocheso o phahameng oa sintering (1600-2200 ° C) ho fihlela densification ka phallo ea likaroloana.
  Lisebelisoa tse ngata li ka khotsofatsoa ke ho feta 90%. Ts'ebetso eohle ha e hloke taolo e nepahetseng ea kholo ea kristale, ho e-na le hoo, e shebane le ho theha le ho ts'oana ha sintering. Melemo e kenyelletsa ho feto-fetoha ha ts'ebetso bakeng sa libopeho tse rarahaneng, leha ho na le litlhoko tse tlase tsa bohloeki.

 

Semiconductor-grade SiC e kenyelletsa mekhoa e rarahaneng haholo (ho lokisoa ha phofo e phahameng → khōlo e le 'ngoe ea kristale ea substrate → epitaxial wafer deposition → thepa ea thepa). Mehato ea bohlokoa e kenyelletsa:

 

• Ho lokisoa ha substrate haholo-holo ka mokhoa oa ho tsamaisa mouoane oa 'mele (PVT).
• Sublimation ea phofo ea SiC maemong a feteletseng (2200-2400 ° C, vacuum e phahameng)
• Taolo e nepahetseng ea li-gradients tsa mocheso (± 1 ° C) le litekanyetso tsa khatello
• Khōlo ea Epitaxial layer ka tšebeliso ea mouoane oa lik'hemik'hale (CVD) ho theha likarolo tse teteaneng, tse nang le doped (hangata tse 'maloa ho isa ho mashome a microns)
  Ts'ebetso eohle e hloka tikoloho e hloekileng haholo (mohlala, likamore tsa bohloeki tsa Sehlopha sa 10) ho thibela tšilafalo. Litšobotsi li kenyelletsa ts'ebetso e nepahetseng ka ho fetesisa, e hlokang taolo holim'a libaka tsa mocheso le sekhahla sa phallo ea khase, ka litlhoko tse thata bakeng sa bohloeki ba thepa e tala (> 99.9999%) le ho rarahana ha lisebelisoa.

 

4. Phapang e Bohlokoa ea Litšenyehelo le Mekhoa ea 'Maraka

 

Likarolo tsa Ceramic-grade SiC:

• Lintho tse tala: Phofo ea boemo ba khoebo
• Mekhoa e batlang e le bonolo
• Litšenyehelo tse tlase: Ke likete ho isa ho mashome a likete RMB ka tone
• Lisebelisoa tse pharaletseng: li-Abrasives, li-refractories, le liindasteri tse ling tse sa tsotelleng litšenyehelo

 

Likarolo tsa Semiconductor-grade SiC:

• Lipotoloho tse telele tsa kholo ea substrate
• Ho phephetsa ho laola sekoli
• Litefiso tse tlase tsa lihlahisoa
• Litšenyehelo tse phahameng: Lidolara tse likete ka 6-inch substrate
• Limmaraka tse tsepamisitsoeng: Lisebelisoa tsa elektroniki tse sebetsang hantle joalo ka lisebelisoa tsa motlakase le likarolo tsa RF
  Ka nts'etsopele e potlakileng ea likoloi tse ncha tsa matla le likhokahano tsa 5G, tlhoko ea 'maraka e ntse e hola haholo.

 

5. Maemo a fapaneng a Kopo

 

Ceramic-grade SiC e sebetsa e le "mosebetsi oa liindasteri" haholo-holo bakeng sa lits'ebetso tsa meralo. E sebelisa thepa ea eona e ntle haholo ea mochini (bothata bo phahameng, ho hanyetsa ho roala) le thepa ea mocheso (ho hanyetsa mocheso o phahameng, ho hanyetsa oxidation), e sebetsa hantle ho:

 

• Li-abrasives (mabili a sila, sandpaper)
• Li-refractories (lisela tse nang le mocheso o phahameng oa mocheso)
• Likarolo tsa ho roala/tse thibelang ho bola ('mele oa pompo, masela a lipeipi)

 

Likarolo tsa sebopeho sa silicon carbide ceramic

 

Semiconductor-grade SiC e sebetsa e le "elite ea elektroniki," e sebelisa thepa ea eona e pharalletseng ea semiconductor ho bonts'a melemo e ikhethang lisebelisoa tsa elektroniki:

 

• Lisebelisoa tsa motlakase: Li-inverters tsa EV, li-converter tsa grid (ho ntlafatsa katleho ea phetoho ea matla)
• Lisebelisoa tsa RF: Liteishene tsa motheo tsa 5G, lisebelisoa tsa radar (tse nolofalletsang maqhubu a phahameng a ho sebetsa)
• Optoelectronics: Lisebelisoa tsa substrate bakeng sa li-LED tse putsoa

 

200-millimeter SiC epitaxial wafer

 

Boemo	Ceramic-grade SiC	Semiconductor-grade SiC
Sebopeho sa Crystal	Polycrystalline, polytypes tse ngata	kristale e le 'ngoe, li-polytypes tse khethiloeng ka thata
Tsepamiso ea Ts'ebetso	Densification le taolo sebopeho	Boleng ba kristale le taolo ea thepa ea motlakase
Ts'ebetso ea Bohlokoa	Matla a mechine, ho hanyetsa kutu, botsitso ba mocheso	Thepa ea motlakase (bandgap, sebaka sa ho senya, joalo-joalo)
Maemo a Kopo	Likarolo tsa sebopeho, likarolo tse sa tsitsang, likarolo tse phahameng tsa mocheso	Lisebelisoa tse matla haholo, lisebelisoa tse phahameng tsa maqhubu, lisebelisoa tsa optoelectronic
Litšenyehelo Bakhanni	Ho feto-fetoha ha mokhoa, litšenyehelo tsa thepa e tala	Sekhahla sa kholo ea kristale, ho nepahala ha lisebelisoa, bohloeki ba thepa e tala

 

Ka bokhutšoanyane, phapang ea mantlha e bakoa ke merero ea bona e fapaneng ea ts'ebetso: SiC ea ceramic-grade e sebelisa "sebopeho (sebopeho)" ha SiC ea semiconductor-grade e sebelisa "thepa (motlakase)." Ea pele e phehella ts'ebetso e theko e boima ea mochini / mocheso, athe ea morao-rao e emela tlhōrō ea thekenoloji ea ho lokisetsa thepa e le lisebelisoa tse phahameng tsa bohloeki, tse nang le kristale e le 'ngoe. Leha e arolelana tšimoloho ea lik'hemik'hale tse tšoanang, SiC ea ceramic-grade le semiconductor-grade e bonts'a phapang e hlakileng ea bohloeki, sebopeho sa kristale le lits'ebetso tsa tlhahiso - empa ka bobeli li kenya letsoho haholo tlhahisong ea indasteri le tsoelo-pele ea theknoloji libakeng tsa bona tse fapaneng.