Silicon Wafers vs. Glass Wafers: Ha e le Hantle re Hloekisa Eng? Ho tloha ho Material Essence ho ea ho Mekhoa ea ho Hloekisa e Thehiloeng ka Ts'ebetso

Le hoja li-wafers tsa silicon le tsa khalase li arolelana sepheo se le seng sa ho "hloekisoa," mathata le mekhoa ea ho hlōleha eo ba tobanang le eona nakong ea ho hloekisa li fapane haholo. Phapang ena e bakoa ke thepa ea tlhaho ea tlhaho le litlhoko tsa silicon le khalase, hammoho le "filosofi" e ikhethang ea ho hloekisa e tsamaisoang ke likopo tsa bona tsa ho qetela.

Pele, a re hlakiseng: Hantle-ntle re hloekisa eng? Ke lintho life tse silafatsang tse amehang?

Litšila li ka aroloa ka mekhahlelo e mene:

1. Lintho tse Silafatsang

   • Lerōle, likaroloana tsa tšepe, likaroloana tsa organic, likaroloana tsa abrasive (ho tloha ts'ebetsong ea CMP), joalo-joalo.

   • Lintho tsena tse silafatsang li ka baka mefokolo ea mohlala, joalo ka li-shorts kapa li-circuits tse bulehileng.

2. Lintho Tse Silafatsang Likokoana-hloko

   • E kenyelletsa masala a photoresist, li-additives tsa resin, oli ea letlalo la motho, masala a solvent, joalo-joalo.

   • Lintho tse silafatsang tsa lintho tse phelang li ka etsa limaske tse sitisang etching kapa ho kenngoa ha ion le ho fokotsa ho khomarela lifilimi tse ling tse tšesaane.

3. Lintho tse silafatsang tsa Ion tsa Metal

   • Tšepe, koporo, sodium, potasiamo, calcium, joalo-joalo, tseo haholo-holo li tsoang ho lisebelisoa, lik'hemik'hale le ho kopana le batho.

   • Ho li-semiconductors, li-ion tsa tšepe ke litšila tse "bolaeang", tse hlahisang matla a matla sehlopheng se hanetsoeng, se eketsang ho lutla ha hona joale, ho khutsufatsa bophelo ba mojari, le ho senya thepa ea motlakase haholo. Ka khalase, li ka ama boleng le ho khomarela lifilimi tse tšesaane tse latelang.

4. Native Oxide Layer

   • Bakeng sa li-wafers tsa silicon: Lera le tšesaane la silicon dioxide (Native Oxide) ka tlhaho le hlaha holim'a moea. Botenya le ho tšoana ha lera lena la oxide ho thata ho le laola, 'me le tlameha ho tlosoa ka ho feletseng nakong ea ho etsoa ha mehaho ea bohlokoa e kang li-oxide tsa heke.

   • Bakeng sa likhalase tsa khalase: Khalase ka boeona ke sebopeho sa marang-rang sa silika, kahoo ha ho na taba ea "ho tlosa lesela la tlhaho la oxide." Leha ho le joalo, bokaholimo bo ka 'na ba fetoloa ka lebaka la tšilafalo, 'me lera lena le hloka ho tlosoa.

I. Lipakane Tsa Sehlooho: Phapang Pakeng Tsa Ts'ebetso ea Motlakase le Phethahatso ea 'Mele

• Li-wafers tsa silicon

  • Sepheo sa mantlha sa ho hloekisa ke ho netefatsa ts'ebetso ea motlakase. Litlhaloso hangata li kenyelletsa lipalo tse thata tsa likaroloana le boholo (mohlala, likaroloana ≥0.1μm li tlameha ho tlosoa hantle), likhakanyo tsa ione tsa tšepe (mohlala, Fe, Cu li tlameha ho laoloa ho ≤10¹⁰ liathomo/cm² kapa ka tlase), le maemo a masalela a lintho tse phelang. Esita le tšilafalo ea microscopic e ka lebisa ho lifupi tsa potoloho, maqhubu a lutla, kapa ho hlōleha ha heke oxide integrity.

• Li-wafers tsa Khalase

  • Joaloka li-substrates, litlhoko tsa mantlha ke phetheho ea 'mele le botsitso ba lik'hemik'hale. Litlhaloso li shebana le likarolo tsa maemo a macro joalo ka ho ba sieo ha mengoapo, matheba a sa tlosoeng, le ho hlokomela boteng ba bokaholimo le jiometri. Sepheo sa ho hloekisa ke haholo-holo ho netefatsa bohloeki ba pono le ho khomarela hantle bakeng sa mekhoa e latelang e kang ho roala.

II. Sebopeho sa Boitsebiso: Phapano ea Motheo Pakeng tsa Crystalline le Amorphous

• Silicone

  • Silicon ke thepa ea kristale, 'me bokaholimo ba eona ka tlhaho bo holisa silicon dioxide (SiO₂) oxide layer e sa ts'oaneng. Lera lena la oxide le beha kotsi ts'ebetsong ea motlakase 'me le tlameha ho tlosoa ka botlalo le ka mokhoa o ts'oanang.

• Khalase

  • Khalase ke marang-rang a silika a amorphous. Boitsebiso ba eona bo bongata bo tšoana ka sebopeho le lera la silicon oxide ea silicon, e bolelang hore e ka kenngoa ka potlako ke hydrofluoric acid (HF) hape e ka hlaseloa habonolo ke khoholeho e matla ea alkali, e lebisang ho eketseha ha holimo kapa ho senyeha. Phapang ena ea mantlha e bolela hore ho hloekisoa ha silicon wafer ho ka mamella khanya, e laoloang ho tlosa litšila, ha ho hloekisoa ha khalase ho lokela ho etsoa ka hloko e feteletseng ho qoba ho senya thepa ea motheo.

III. Papiso ea Litharollo tsa ho Hloekisa

Ho ipapisitsoe le lipheo le litšobotsi tse boletsoeng ka holimo, litharollo tsa ho hloekisa tsa silicon le likhalase tsa khalase lia fapana:

• Mokhoa oa ho Hloekisa Sephaephe sa Khalase

  • Hona joale, boholo ba lik'hemik'hale tse sebetsanang le likhalase li sebelisa mekhoa ea ho hloekisa e itšetlehileng ka litšobotsi tsa lisebelisoa tsa khalase, tse itšetlehileng haholo ka lisebelisoa tse fokolang tsa ho hloekisa alkaline.

  • Litšobotsi tsa Moemeli oa ho Hloekisa:Lisebelisoa tsena tse khethehileng tsa ho hloekisa hangata li na le alkaline e fokolang, e nang le pH e ka bang 8-9. Hangata li na le li-surfactants (mohlala, alkyl polyoxyethylene ether), lisebelisoa tsa tšepe tse chelating (mohlala, HEDP), le lithuso tsa ho hloekisa ka manyolo, tse etselitsoeng ho etsa emulsify le ho senya lintho tse silafatsang tse kang oli le menoana ea menoana, ha li ntse li senya hanyenyane matrix a khalase.

  • Phallo ea Ts'ebetso:Mokhoa o tloaelehileng oa ho hloekisa o kenyelletsa ho sebelisa motsoako o khethehileng oa lisebelisoa tse fokolang tsa alkaline ho hloekisa mocheso ho tloha mocheso oa kamore ho ea ho 60 ° C, ho kopantsoe le ho hloekisa ka ultrasonic. Ka mor'a ho hloekisoa, li-wafers li na le mehato e mengata ea ho hlatsoa ka metsi a hloekileng le ho omisoa ha bonolo (mohlala, ho phahamisa butle kapa IPA vapor drying). Ts'ebetso ena e kopana hantle le litlhoko tsa sephaphatha sa khalase bakeng sa bohloeki ba pono le bohloeki bo akaretsang.

• Silicon Wafer Cleaning Process

  • Bakeng sa ts'ebetso ea semiconductor, li-wafers tsa silicon hangata li hloekisoa ka mokhoa o tloaelehileng oa RCA, e leng mokhoa o sebetsang hantle haholo oa ho hloekisa o khonang ho sebetsana le mefuta eohle ea litšila, ho netefatsa hore litlhoko tsa ts'ebetso ea motlakase bakeng sa lisebelisoa tsa semiconductor lia fihlelleha.

IV. Ha Glass e Kopana le Maemo a Phahameng a "Bohloeki".

Ha li-wafers tsa khalase li sebelisoa lits'ebetsong tse hlokang palo e thata ea likaroloana le maemo a ion a tšepe (mohlala, joalo ka li-substrates tse sebetsang ka har'a semiconductor kapa bakeng sa libaka tse ntle tse tšesaane tsa ho beha filimi), ts'ebetso ea ho hloekisa kahare e kanna ea se sa lekana. Tabeng ena, ho ka sebelisoa melao-motheo ea ho hloekisa semiconductor, ho hlahisa leano le fetotsoeng la ho hloekisa RCA.

Moko-taba oa leano lena ke ho hlapolla le ho ntlafatsa maemo a tloaelehileng a ts'ebetso ea RCA ho amohela mofuta o bobebe oa khalase:

• Ho Tlosa Tšilafalo ea Likokoana-hloko:Litharollo tsa SPM kapa metsi a batang haholo a ozone a ka sebelisoa ho bolisa litšila tsa tlhaho ka oxidation e matla.

• Ho Tlosa Karolo:Tharollo ea SC1 e hlapollotsoeng haholo e sebelisoa maemong a mocheso a tlase le linako tse khuts'oane tsa kalafo ho sebelisa ts'ebetso ea eona ea "electrostatic repulsion" le "micro-etching" ho tlosa likaroloana, ha e ntse e fokotsa ho bola ha khalase.

• Ho tlosoa ha tšepe ea tšepe:Tharollo e hlapolotsoeng ea SC2 kapa litharollo tse bonolo tsa dilute hydrochloric acid/dilute nitric acid li sebelisoa ho tlosa litšila tsa tšepe ka chelation.

• Lithibelo tse thata:DHF (di-ammonium fluoride) e tlameha ho qojoa ka ho feletseng ho thibela ho bola ha karoloana ea khalase.

Ts'ebetsong eohle e fetotsoeng, ho kopanya theknoloji ea megasonic ho ntlafatsa haholo ts'ebetso ea ho tlosoa ha likaroloana tsa nano-size 'me e bonolo haholoanyane holim'a metsi.

Qetello

Mekhoa ea ho hloekisa ea li-silicone le li-wafers tsa khalase ke phello e ke keng ea qojoa ea boenjiniere ba morao-rao ho latela litlhoko tsa bona tsa ho qetela tsa kopo, thepa ea thepa, le litšobotsi tsa 'mele le tsa lik'hemik'hale. Ho hloekisa sephaephe sa silicon ho batla "bohloeki ba boemo ba athomo" bakeng sa ts'ebetso ea motlakase, ha ho hloekisa sephaephe sa khalase ho shebane le ho fihlela libaka tsa 'mele tse "phethehileng, tse sa senyehang". Ha li-wafers tsa khalase li ntse li sebelisoa haholo lits'ebetsong tsa semiconductor, lits'ebetso tsa tsona tsa ho hloekisa li tla fetoha ho feta ho hloekisoa ha alkaline e fokolang ea setso, ho hlahisa litharollo tse ntlafalitsoeng, tse ikhethileng joalo ka ts'ebetso ea RCA e fetotsoeng ho fihlela litekanyetso tse phahameng tsa bohloeki.