Li-wafer tsa Silicon khahlanong le Li-wafer tsa Khalase: Ha e le Hantle re Hloekisa Eng? Ho tloha Bohlokoa ba Lintho ho ea Litharollong tsa Tlhoekiso tse Thehiloeng ho Ts'ebetso

Leha di-wafer tsa silicon le tsa khalase di arolelana sepheo se le seng sa ho "hloekiswa," diphephetso le mekgwa ya ho hloleha eo di tobanang le yona nakong ya ho hlwekisa di fapane haholo. Phapang ena e hlaha ka lebaka la thepa ya tlhaho le ditlhoko tsa tlhaloso ya silicon le khalase, hammoho le "filosofi" e ikgethang ya ho hlwekisa e susumetswang ke ditshebediso tsa tsona tsa ho qetela.

Taba ea pele, ha re hlakiseng: Hantle-ntle re hloekisa eng? Ke lintho life tse silafatsang tse amehang?

Lintho tse silafatsang li ka aroloa ka lihlopha tse 'ne:

1. Litšila tsa Likaroloana

   • Lerōle, likaroloana tsa tšepe, likaroloana tsa tlhaho, likaroloana tse khorofo (ho tsoa ts'ebetsong ea CMP), jj.

   • Litšila tsena li ka baka liphoso tsa paterone, joalo ka li-short circuits kapa li-open circuits.

2. Litšila tsa tlhaho

   • E kenyelletsa masalla a photoresist, li-additives tsa resin, oli ea letlalo la motho, masalla a solvent, jj.

   • Litšila tsa tlhaho li ka etsa limaske tse sitisang ho hlaba kapa ho kenngoa ha li-ion le ho fokotsa ho khomarela ha lifilimi tse ling tse tšesaane.

3. Litšila tsa Ion tsa Tšepe

   • Tšepe, koporo, sodium, potasiamo, calcium, jj., tse tswang haholo-holo disebedisweng, dikhemikhaleng le ho kopana le batho.

   • Ho di-semiconductor, di-ion tsa tshepe ke ditshila tse "bolayang", tse hlahisang maemo a matla mothapong o hanetsweng, tse eketsang mothapo wa ho dutla, tse kgutsufatsang nako ya bophelo ba motshwari, le ho senya thepa ya motlakase haholo. Khalaseng, di ka ama boleng le kgomarelo ya difilimi tse tshesane tse latelang.

4. Lera la Oxide la Tlhaho

   • Bakeng sa di-wafer tsa silicon: Lera le lesesaane la silicon dioxide (Native Oxide) le hlaha ka tlhaho hodima metsi a lehodimo. Botenya le ho tshwana ha lera lena la oxide ho thata ho le laola, mme le tlameha ho tloswa ka botlalo nakong ya ho etswa ha meaho ya bohlokwa jwalo ka di-oxide tsa heke.

   • Bakeng sa di-wafer tsa khalase: Khalase ka boyona ke sebopeho sa marangrang a silica, kahoo ha ho na bothata ba "ho tlosa lera la tlhaho la oxide." Leha ho le jwalo, bokaholimo bo ka be bo fetotswe ka lebaka la tšilafalo, mme lera lena le hloka ho tloswa.

I. Lipakane tsa Bohlokoa: Phapang Pakeng tsa Tshebetso ea Motlakase le Phethahatso ea 'Mele

• Li-wafer tsa Silicone

  • Sepheo sa mantlha sa ho hlwekisa ke ho netefatsa tshebetso ya motlakase. Dintlha tse hlalosang hangata di kenyeletsa palo e tiileng ya dikarolwana le boholo (mohlala, dikarolwana tse ≥0.1μm di lokela ho tloswa ka katleho), mahloriso a di-ion tsa tshepe (mohlala, Fe, Cu di lokela ho laolwa ho ≤10¹⁰ diathomo/cm² kapa ka tlase), le maemo a masalla a tlhaho. Esita le tshilafatso ya microscopic e ka lebisa ho di-circuit shorts, maqhubu a ho dutla, kapa ho hloleha ha botšepehi ba oxide ya heke.

• Li-wafer tsa khalase

  • Jwalo ka di-substrate, ditlhoko tsa mantlha ke phetheho ya mmele le botsitso ba dikhemikhale. Dintlha tse hlalosang di shebane le dintlha tsa maemo a macro tse kang ho se be le mengwapo, matheba a sa tlosweng, le tlhokomelo ya bokahodimo ba pele le jiometri. Sepheo sa ho hlwekisa ke ho netefatsa bohloeki ba pono le ho kgomarela hantle bakeng sa ditshebetso tse latelang tse kang ho penta.

II. Tlhaho ea Lintho: Phapang ea Motheo Pakeng tsa Crystalline le Amorphous

• Silicone

  • Silicone ke thepa e kang kristale, 'me bokaholimo ba eona ka tlhaho bo holisa lera la oxide le sa lekanang la silicon dioxide (SiO₂). Lera lena la oxide le beha kotsi ts'ebetsong ea motlakase 'me le tlameha ho tlosoa ka botlalo le ka mokhoa o ts'oanang.

• Khalase

  • Khalase ke marangrang a silica a sa fetoheng. Thepa ea eona e kholo e tšoana ka sebopeho le lera la silicon oxide, ho bolelang hore e ka qojoa kapele ke hydrofluoric acid (HF) 'me e boetse e kotsing ea ho khoholeha ha alkaline e matla, e leng se lebisang keketsehong ea ho ba makukuno kapa ho fetoha ha sebopeho. Phapang ena ea motheo e laela hore ho hloekisoa ha silicon wafer ho ka mamella ho qojoa ho bobebe, ho laoloang ho tlosa litšila, ha ho hloekisoa ha khalase wafer ho tlameha ho etsoa ka hloko e kholo ho qoba ho senya thepa ea motheo.

III. Papiso ea Litharollo tsa ho Hloekisa

Ho latela lipheo tse boletsoeng ka holimo le litšobotsi tsa thepa, litharollo tsa ho hloekisa bakeng sa li-wafer tsa silicon le khalase lia fapana:

• Mokhoa oa ho Hloekisa Wafer ea Khalase

  • Hona jwale, difeme tse ngata tsa ho sebetsana le khalase di sebedisa mekgwa ya ho hlwekisa e itshetlehileng hodima dibopeho tsa thepa ya khalase, di itshetlehile haholo-holo ka disebediswa tse fokolang tsa ho hlwekisa tsa alkaline.

  • Litšobotsi tsa Moemeli oa ho Hloekisa:Lisebelisoa tsena tse khethehileng tsa ho hloekisa hangata li na le alkaline e fokolang, ka pH e ka bang 8-9. Hangata li na le li-surfactants (mohlala, alkyl polyoxyethylene ether), lisebelisoa tsa chelating tsa tšepe (mohlala, HEDP), le lithuso tsa ho hloekisa tsa tlhaho, tse etselitsoeng ho emulsify le ho bolisa litšila tsa tlhaho tse kang oli le menoana ea menoana, ha li ntse li senya hanyane matrix ea khalase.

  • Phallo ea Ts'ebetso:Mokhoa o tloaelehileng oa ho hloekisa o kenyelletsa ho sebelisa motsoako o itseng oa lisebelisoa tse fokolang tsa ho hloekisa tsa alkaline mochesong o tlohang mochesong oa kamore ho isa ho 60°C, hammoho le ho hloekisa ka ultrasound. Kamora ho hloekisa, li-wafer li feta mehatong e mengata ea ho hlatsoa ka metsi a hloekileng le ho omisa butle (mohlala, ho phahamisa butle kapa ho omisa ka mouoane oa IPA). Ts'ebetso ena e fihlela litlhoko tsa wafer ea khalase bakeng sa bohloeki ba pono le bohloeki bo akaretsang.

• Mokhoa oa ho Hloekisa Silicon Wafer

  • Bakeng sa ts'ebetso ea semiconductor, li-wafer tsa silicon hangata li hloekisoa ka mokhoa o tloaelehileng oa RCA, e leng mokhoa o sebetsang hantle oa ho hloekisa o khonang ho sebetsana le mefuta eohle ea litšila ka mokhoa o hlophisehileng, ho netefatsa hore litlhoko tsa ts'ebetso ea motlakase bakeng sa lisebelisoa tsa semiconductor lia fihlelleha.

IV. Ha Khalase e Finyella Maemo a Phahameng a “Bohloeki”

Ha di-wafer tsa khalase di sebediswa ditshebedisong tse hlokang palo e tiileng ya dikarolwana le maemo a di-ion tsa tshepe (mohlala, e le di-substrate ditshebetsong tsa semiconductor kapa bakeng sa bokahodimo bo botle ba ho bewa ha filimi e tshesane), tshebetso ya ho hlwekisa ya ka hare e kanna ya se hlole e lekana. Tabeng ena, melaomotheo ya ho hlwekisa ya semiconductor e ka sebediswa, ho hlahisa leano la ho hlwekisa la RCA le fetotsweng.

Motheo oa leano lena ke ho fokotsa le ho ntlafatsa liparamente tse tloaelehileng tsa ts'ebetso ea RCA ho amohela tlhaho e bonolo ea khalase:

• Ho Tloswa ha Ditshila tsa Dintho tse Phelang:Litharollo tsa SPM kapa metsi a bonolo a ozone li ka sebelisoa ho bolisa litšila tsa tlhaho ka oxidation e matla.

• Ho Tloswa ha Dikarolwana:Tharollo ea SC1 e hlapolotsoeng haholo e sebelisoa maemong a tlaase a mocheso le linako tse khutšoanyane tsa kalafo ho sebelisa matla a eona a ho leleka ka motlakase le litlamorao tse nyane tsa ho hlaba ho tlosa likaroloana, ha ka nako e ts'oanang e fokotsa mafome khalaseng.

• Ho Tlosa Ion ea Tšepe:Tharollo e hlapolotsoeng ea SC2 kapa litharollo tse bonolo tsa hydrochloric acid/dilute nitric acid li sebelisoa ho tlosa litšila tsa tšepe ka chelation.

• Lithibelo tse Tiileng:DHF (di-ammonium fluoride) e lokela ho qojoa ka ho feletseng ho thibela ho bola ha substrate ea khalase.

Mokgweng wohle o fetotsweng, ho kopanya theknoloji ya megasonic ho ntlafatsa haholo bokgoni ba ho tlosa dikarolwana tse nyane mme ho bonolo le ho feta hodima bokahodimo.

Qetello

Mekhoa ea ho hloekisa li-wafer tsa silicon le khalase ke sephetho se ke keng sa qojoa sa boenjiniere bo fapaneng ho latela litlhoko tsa tsona tsa ho qetela tsa ts'ebeliso, thepa ea thepa, le litšobotsi tsa 'mele le tsa lik'hemik'hale. Ho hloekisa li-wafer tsa silicon ho batla "bohloeki ba athomo" bakeng sa ts'ebetso ea motlakase, ha ho hloekisa li-wafer tsa khalase ho shebana le ho fihlela libaka tsa 'mele tse "phethahetseng, tse sa senyehang". Ha li-wafer tsa khalase li ntse li sebelisoa ka ho eketsehileng lits'ebetsong tsa semiconductor, mekhoa ea tsona ea ho hloekisa e tla fetoha ka tsela e ke keng ea qojoa ho feta ho hloekisa alkaline e fokolang ea setso, ho nts'etsapele litharollo tse ntlafalitsoeng haholoanyane, tse ikhethileng joalo ka ts'ebetso ea RCA e fetotsoeng ho fihlela maemo a holimo a bohloeki.