Kamano pakeng tsa lifofane tsa kristale le sebopeho sa kristale.

Lifofane tsa kristale le sebopeho sa kristale ke mehopolo e 'meli ea mantlha ho crystallography, e amanang haufi-ufi le sebopeho sa kristale ho thekenoloji ea potoloho e kopaneng ea silicon.

1.Tlhaloso le Thepa ea Crystal Orientation

Leseli la kristale le emela tsela e ikhethileng ka har'a kristale, eo hangata e hlahisoang ka li-indices tsa kristale. Mokhoa oa kristale o hlalosoa ka ho hokahanya lintlha leha e le life tse peli tsa lattice ka har'a mohaho oa kristale, 'me o na le litšobotsi tse latelang: mokhoa o mong le o mong oa kristale o na le palo e sa lekanyetsoang ea lintlha tsa lesela; mokhoa o le mong oa kristale o ka ba le mekhoa e mengata e tšoanang ea kristale e etsang lelapa le shebaneng le kristale; Lelapa le shebaneng le kristale le koahela lintlha tsohle tse ka har'a kristale.

Bohlokoa ba chebahalo ea kristale bo ho ho bonts'a tlhophiso ea tataiso ea liathomo ka har'a kristale. Mohlala, sebopeho sa kristale sa [111] se emela tataiso e ikhethileng moo likhakanyo tsa likhakanyo tsa lilepe tse tharo tse hokahanyang e leng 1: 1: 1.

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2. Tlhaloso le Thepa ea Crystal Planes

Sefofane sa kristale ke sefofane sa tlhophiso ea athomo ka har'a kristale, e emeloang ke li-indices tsa kristale plane (Miller indices). Ka mohlala, (111) e bontša hore li-reciprocals tsa li-intercepts tsa sefofane sa kristale holim'a lilepe tse hokahanyang li ka karolelano ea 1: 1: 1. Sefofane sa kristale se na le thepa e latelang: sefofane se seng le se seng sa kristale se na le palo e sa lekanyetsoang ea lintlha tsa lattice; sefofane se seng le se seng sa kristale se na le palo e sa lekanyetsoang ea lifofane tse bapileng tse etsang lelapa la sefofane sa kristale; lelapa la sefofane sa kristale le koahela kristale eohle.

Boikemisetso ba li-indices tsa Miller bo kenyelletsa ho nka likhahla tsa sefofane sa kristale holima axis e 'ngoe le e' ngoe, ho fumana li-reciprocals tsa bona, le ho li fetolela ho palo e nyane ka ho fetisisa ea palo e felletseng. Mohlala, sefofane sa (111) sa kristale se na le li-intercepts ho lilepe tsa x, y, le z ka karolelano ea 1:1:1.

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3. Kamano Pakeng tsa Crystal Planes le Crystal Orientation

Lifofane tsa kristale le sebopeho sa kristale ke mekhoa e 'meli e fapaneng ea ho hlalosa sebopeho sa geometri sa kristale. Crystal orientation e bolela ho hlophisoa ha liathomo ka lehlakoreng le itseng, ha sefofane sa kristale se bolela tlhophiso ea liathomo sefofaneng se itseng. Tsena tse peli li na le mangolo a itseng, empa li emela maikutlo a fapaneng a 'mele.

Kamano ea bohlokoa: Vector e tloaelehileng ea sefofane sa kristale (ke hore, vector perpendicular ho sefofane seo) e lumellana le chebahalo ea kristale. Mohlala, vector e tloaelehileng ea sefofane sa kristale sa (111) se lumellana le [111] orientation ea kristale, ho bolelang hore tlhophiso ea athomo ho latela tataiso ea [111] e ipapisitse le sefofane seo.

Lits'ebetsong tsa semiconductor, khetho ea lifofane tsa kristale e ama haholo ts'ebetso ea sesebelisoa. Ka mohlala, ho li-semiconductors tse thehiloeng ho silicon, lifofane tsa kristale tse sebelisoang hangata ke lifofane tsa (100) le (111) hobane li na le litokisetso tse fapaneng tsa athomo le mekhoa ea ho tlamahane ka litsela tse fapaneng. Thepa e kang motsamao oa elektrone le matla a holim'a metsi a fapana ka lifofane tse fapaneng tsa kristale, tse susumetsang ts'ebetso le ts'ebetso ea kholo ea lisebelisoa tsa semiconductor.

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4. Likopo tse Sebetsang ho Mekhoa ea Semiconductor

Tlhahisong ea semiconductor e thehiloeng ho silicon, ho sebelisoa kristale le lifofane tsa kristale ka likarolo tse ngata:

Khōlo ea Crystal: Likristale tsa semiconductor li atisa ho lengoa ho latela mekhoa e itseng ea kristale. Likristale tsa silicon hangata li hola ho latela maemo a [100] kapa [111] hobane botsitso le tlhophiso ea athomo maemong ana li molemong oa kholo ea kristale.

Ts'ebetso ea ho Etching: Ho etching e kolobileng, lifofane tse fapaneng tsa kristale li na le litheko tse fapaneng tsa etching. Mohlala, litefiso tsa ho qoelisoa lifofaneng tsa (100) le (111) tsa silicon lia fapana, tse bakang litlamorao tsa anisotropic etching.

Litšobotsi tsa Sesebelisoa: Ho tsamaea ha elektrone ho lisebelisoa tsa MOSFET ho angoa ke sefofane sa kristale. Ka tloaelo, motsamao o phahame sefofaneng sa (100), ke ka lebaka leo li-MOSFET tsa sejoale-joale tse thehiloeng ho silicon li sebelisang li-wafers (100).

Ka kakaretso, lifofane tsa kristale le li-orientation tsa kristale ke mekhoa e 'meli ea bohlokoa ea ho hlalosa sebopeho sa likristale ho crystallography. Crystal orientation e emela thepa ea tataiso ka har'a kristale, ha lifofane tsa kristale li hlalosa lifofane tse ikhethileng ka har'a kristale. Likhopolo tsena tse peli li amana haufi-ufi tlhahisong ea semiconductor. Khetho ea lifofane tsa kristale e ama ka kotloloho thepa ea 'mele le ea lik'hemik'hale, athe sebopeho sa kristale se susumetsa kholo ea kristale le mekhoa ea ho e lokisa. Ho utloisisa kamano lipakeng tsa lifofane tsa kristale le li-orientation ho bohlokoa bakeng sa ho ntlafatsa lits'ebetso tsa semiconductor le ho ntlafatsa ts'ebetso ea sesebelisoa.


Nako ea poso: Oct-08-2024