Sefate sa TTV, Seqha, Warp, le Li Lekanngoa Joang?

.Bukana

1. Mehopolo ea Bohlokoa le Litekanyo​​

2. Mekhoa ea ho Lekanya​​

3.​​Ts'ebetso ea Lintlha le Liphoso​​

4. Litlamorao tsa Ts'ebetso​

Tlhahisong ea semiconductor, ho tšoana ha botenya le ho batalla ha bokaholimo ba li-wafer ke lintlha tsa bohlokoa tse amang chai ea ts'ebetso. Liparamente tsa bohlokoa tse kang Total Thickness Variation (TTV), Bow (arcuate warpage), Warp (global warpage), le Microwarp (nano-topography) li ama ka kotloloho ho nepahala le botsitso ba lits'ebetso tsa mantlha joalo ka ho tsepamisa maikutlo ho photolithography, chemical mechanical polishing (CMP), le thin-film deposition.

Mehopolo ea Motheo le Litekanyo

TTV (Phetoho e Felletseng ea Botenya)​

Mekhoa ea ho lekanya

1. Mekhoa ea ho Lekanya TTV​​

• Profilometry ea Bokaholimo bo habeli
• Fizeau Interferometry:E sebelisa likhoele tsa tšitiso pakeng tsa sefofane sa litšupiso le bokaholimo ba wafer. E loketse libaka tse boreleli empa e lekanyelitsoe ke li-wafer tse kobehileng haholo.
• Interferometry ea ho Sekena Leseli le Lesoeu (SWLI):E lekanya bophahamo bo felletseng ka lienfelopo tsa leseli tse sa utloahaleng hantle. E sebetsa hantle bakeng sa libaka tse kang mehato empa e thibetsoe ke lebelo la ho skena ka mechine.
• Mekhoa ea ho Koalla:Finyella qeto ea sub-micron ka melao-motheo ea pinhole kapa ea ho hasana. E loketse libaka tse thata kapa tse bonaletsang empa e lieha ka lebaka la ho skena ntlha ka ntlha.
• Triangulation ea Laser:Karabelo e potlakileng empa e sekametse tahlehelong ea ho nepahala ho tsoa ho liphetoho tsa ho bonahatsa bokaholimo.

• Sehokelo sa Phetiso/Pontšo
• Disensor tsa Bokgoni ba Dihlooho tse pedi: Sebaka se lekanang sa disensor mahlakoreng ka bobedi se lekanya botenya jwalo ka T = L – d₁ – d₂ (L = sebaka sa motheo). E potlakile empa e na le kutlwisiso e tebileng hodima thepa ya thepa.
• Ellipsometry/Spectroscopic Reflectometry: E sekaseka dikamano tsa matter tse bobebe bakeng sa botenya ba filimi e tshesane empa e sa lokela TTV e kgolo.

2. Tekanyo ea Seqha le ho Koba

• Li-Array tsa Capacitance tsa Multi-Probe: Tšoara data ea bophahamo ba tšimo e felletseng sethaleng se jereng moea bakeng sa kaho e potlakileng ea 3D.
• Ponelopele ea Leseli le Hahiloeng​​: Ho etsa profiling ea 3D ka lebelo le phahameng ho sebelisoa sebopeho sa optical.
• Interferometry e Tlase ea NA: 'Mapa oa bokaholimo o nang le qeto e phahameng empa o ama ho thothomela.

3. Tekanyo ea Microwarp

• Tlhahlobo ea Maqhubu a Sebaka:

1. Fumana topography ea bokaholimo bo nang le qeto e phahameng.
2. Bongata ba matla a spectral a ho bala (PSD) ka 2D FFT.
3. Kenya difilthara tsa bandpass (mohlala, 0.5–20 mm) ho arola maqhubu a bohlokwa.
4. Bala boleng ba RMS kapa PV ho tsoa ho data e sefiloeng.

• Ketsiso ea Vacuum Chuck​:Litlamorao tsa ho tiisa tsa lefatše la sebele nakong ea lithography.

Ts'ebetso ea Lintlha le Mehloli ea Liphoso

Tsamaiso ea Mosebetsi​​

• TV:Lokisa likhokahano tsa bokaholimo bo ka pele/bo ka morao, bala phapang ea botenya, 'me u tlose liphoso tsa tsamaiso (mohlala, ho kheloha ha mocheso).
• .Seqha/Sekoahelo:Kenya sebaka sa LSQ ho data ya bophahamo; Seqha = masalla a ntlha e bohareng, Warp = masalla a tlhoro ho ya phuleng.
• .Microwarp:Sefa maqhubu a sebaka, bala lipalo-palo (RMS/PV).

Mehloli ea Liphoso tsa Bohlokoa

• Mabaka a Tikoloho:Ho thothomela (ho bohlokoa bakeng sa interferometry), pherekano ea moea, ho kheloha ha mocheso.
• Meeli ea Sensor:Lerata la mokhahlelo (interferometry), liphoso tsa ho lekanya bolelele ba maqhubu (confocal), likarabo tse itšetlehileng ka thepa (capacitance).
• Ho Tšoara Wafer:Ho se tsamaisane hantle ha lehlakore le ka thoko, ho se nepahale ha sethala sa motsamao ha ho rokelloa.

Tšusumetso ho Bohlokoa ba Ts'ebetso​​​​

• Lithography:Microwarp ea lehae e fokotsa DOF, e leng se bakang phetoho ea CD le liphoso tsa overlay.
• CMP​​:Ho se leka-lekane ha TTV qalong ho lebisa kgatellong e sa lekanang ya ho bentsha.
• Tlhahlobo ea Khatello ea Kelello:Phetoho ea Seqha/Warp e senola boitšoaro ba khatello ea mocheso/mechanical.
• Sephutheloana:TTV e feteletseng e baka likheo lihokelong tsa ho kopanya.

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