Ho holisa karolo e 'ngoe ea liathomo tsa silicon holim'a silicon wafer substrate ho na le melemo e mengata:
Ts'ebetsong ea silicon ea CMOS, kholo ea epitaxial (EPI) holim'a substrate ea wafer ke mohato oa bohlokoa oa ts'ebetso.
1. Ho ntlafatsa boleng ba kristale
Litšila le litšila tsa pele tsa karoloana: Nakong ea ts'ebetso ea tlhahiso, substrate ea wafer e kanna ea ba le mefokolo le litšila tse itseng. Khōlo ea epitaxial layer e ka hlahisa lera la silicon ea boleng bo phahameng ba monocrystalline e nang le likhahla tse fokolang tsa bokooa le litšila holim'a substrate, e leng ea bohlokoa bakeng sa ho etsoa ha lisebelisoa tse latelang.
Sebopeho sa kristale se sa tšoaneng: Khōlo ea Epitaxial e tiisa sebopeho sa kristale se ts'oanang, ho fokotsa tšusumetso ea meeli ea lijo-thollo le mefokolo ea thepa ea substrate, kahoo e ntlafatsa boleng ba kristale ka kakaretso ea sephaphatha.
2, ntlafatsa ts'ebetso ea motlakase.
Ho ntlafatsa litšobotsi tsa sesebelisoa: Ka ho holisa lera la epitaxial holim'a substrate, mohopolo oa doping le mofuta oa silicon o ka laoloa ka nepo, oa ntlafatsa ts'ebetso ea motlakase ea sesebelisoa. Ka mohlala, doping ea epitaxial layer e ka lokisoa hantle ho laola motlakase oa monyako oa MOSFET le likarolo tse ling tsa motlakase.
Ho fokotsa ho lutla ha hona joale: Epitaxial layer ea boleng bo holimo e na le sekoli se tlase, se thusang ho fokotsa ho lutla ha hona joale ho lisebelisoa, ka hona ho ntlafatsa ts'ebetso le ts'epahalo ea sesebelisoa.
3, ntlafatsa ts'ebetso ea motlakase.
Ho Fokotsa Boholo ba Tšobotsi: Likarolong tse nyane tsa ts'ebetso (joalo ka 7nm, 5nm), boholo ba lisebelisoa bo ntse bo tsoela pele ho honyela, bo hlokang lisebelisoa tse hloekisitsoeng le tsa boleng bo holimo. Theknoloji ea kholo ea Epitaxial e ka finyella litlhoko tsena, e tšehetsa tlhahiso ea li-circuits tse kopantsoeng tse sebetsang hantle le tse phahameng haholo.
Ho ntlafatsa Voltage ea ho senya: Likarolo tsa Epitaxial li ka etsoa ka li-voltage tse phahameng, tse bohlokoa bakeng sa ho etsa lisebelisoa tse matla le tse matla haholo. Ka mohlala, lisebelisoa tsa matla, li-epitaxial layers li ka ntlafatsa matla a ho senyeha ha mochine, ho eketsa sebaka se sireletsehileng sa ts'ebetso.
4, Tšebelisano ea Ts'ebetso le Mehaho ea Multilayer
Multilayer Structures: Theknoloji ea kholo ea Epitaxial e lumella ho hola ha meaho ea li-multilayer holim'a li-substrates, tse nang le likarolo tse fapaneng tse nang le mefuta le mefuta e fapaneng ea li-doping. Sena se molemo haholo bakeng sa ho etsa lisebelisoa tse rarahaneng tsa CMOS le ho thusa ho kopanya likarolo tse tharo.
Tšebelisano: Ts'ebetso ea kholo ea epitaxial e lumellana haholo le mekhoa ea tlhahiso ea CMOS e teng, e etsa hore ho be bonolo ho kenyelletsa mesebetsi ea morao-rao ea tlhahiso ea mosebetsi ntle le tlhokahalo ea liphetoho tse kholo ho mela ea ts'ebetso.
Kakaretso: Ts'ebeliso ea kholo ea epitaxial lits'ebetsong tsa silicon ea CMOS e ikemiselitse haholo ho ntlafatsa boleng ba kristale ea kristale, ho ntlafatsa ts'ebetso ea motlakase ea sesebelisoa, ho ts'ehetsa li-node tsa ts'ebetso e tsoetseng pele, le ho fihlela litlhoko tsa ts'ebetso e phahameng ea ts'ebetso le ts'ebetso e phahameng e kopaneng ea potoloho. Theknoloji ea kholo ea Epitaxial e lumella taolo e nepahetseng ea doping ea thepa le sebopeho, ho ntlafatsa tshebetso ka kakaretso le ho tšepahala ha lisebelisoa.
Nako ea poso: Oct-16-2024