mofuta oa p 4H/6H-P 3C-N TYPE SIC substrate 4inch 〈111〉± 0.5°Zero MPD
4H/6H-P Mofuta oa SiC Composite Substrates Tafole ea liparamente tse tloaelehileng
4 Silicone bophara ba lisenthimitharaKarolo e ka tlase ea Carbide (SiC) Tlhaloso
| Sehlopha | Tlhahiso ea MPD ha e eo Sehlopha (Z) Sehlopha) | Tlhahiso e Tloaelehileng Sehlopha (P) Sehlopha) | Sehlopha sa Mashano (D Sehlopha) | ||
| Bophara | 99.5 mm ~ 100.0 mm | ||||
| Botenya | 350 μm ± 25 μm | ||||
| Boikutlo ba Wafer | Mothati o sa sebetseng: 2.0°-4.0° ho ya ho [11]20] ± 0.5° bakeng sa 4H/6H-P, Omothapo oa n:〈111〉± 0.5° bakeng sa 3C-N | ||||
| Botebo ba Micropipe | 0 cm-2 | ||||
| Ho hanyetsa | mofuta oa p 4H/6H-P | ≤0.1 Ωꞏcm | ≤0.3 Ωꞏcm | ||
| mofuta oa n 3C-N | ≤0.8 mΩꞏcm | ≤1 m Ωꞏcm | |||
| Boikutlo ba Motheo bo bataletseng | 4H/6H-P | - {1010} ± 5.0° | |||
| 3C-N | - {110} ± 5.0° | ||||
| Bolelele ba Sephara ba Motheo | 32.5 mm ± 2.0 mm | ||||
| Bolelele ba Bobedi bo Sephara | 18.0 mm ± 2.0 mm | ||||
| Boikutlo bo Bobedi bo bataletseng | Silicon e shebile holimo: 90° CW. ho tloha Prime flat±5.0° | ||||
| Ho se kenyeletsoe ha Moeli | 3 mm | 6 mm | |||
| LTV/TTV/Seqha/Sekotwana | ≤2.5 μm/≤5 μm/≤15 μm/≤30 μm | ≤10 μm/≤15 μm/≤25 μm/≤40 μm | |||
| Ho ba le makukuno | Ra≤1 nm ea Poland | ||||
| CMP Ra≤0.2 nm | Ra≤0.5 nm | ||||
| Mapetso a Moeli ka Leseli le Matla a Phahameng | Ha ho letho | Bolelele bo bokellaneng ≤ 10 mm, bolelele bo le bong ≤2 mm | |||
| Lipoleiti tsa Hex ka Leseli le Phahameng la Matla | Sebaka se bokellaneng ≤0.05% | Sebaka se bokellaneng ≤0.1% | |||
| Libaka tsa Polytype ka Leseli le Matla a Phahameng | Ha ho letho | Sebaka se bokellaneng ≤3% | |||
| Ho kenyeletsoa ha Khabone e Bonahalang | Sebaka se bokellaneng ≤0.05% | Sebaka se bokellaneng ≤3% | |||
| Ho ngoatheloa ha bokaholimo ba Silicon ke Leseli le Matla a Phahameng | Ha ho letho | Bolelele bo bokellaneng ≤1 × bophara ba wafer | |||
| Li-chips tsa Edge tse Phahameng ka Matla a Phahameng | Ha ho letho le dumelletsweng bophara le botebo ba ≥0.2mm | 5 e lumelletsoe, ≤1 mm ka 'ngoe | |||
| Tšilafalo ea Bokaholimo ba Silicon ka Matla a Phahameng | Ha ho letho | ||||
| Sephutheloana | Cassette ea wafer e nang le li-wafer tse ngata kapa setshelo se le seng sa wafer | ||||
Lintlha:
※Meeli ea liphoso e sebetsa holim'a wafer eohle ntle le sebaka se ka thoko ho moeli. # Mengoapo e lokela ho hlahlojoa sefahlehong sa Si feela.
Substrate ea P-type 4H/6H-P 3C-N ea 4-inch SiC e nang le 〈111〉± 0.5° orientation le Zero MPD grade e sebelisoa haholo lits'ebetsong tsa elektroniki tse sebetsang hantle. Ho tsamaisa mocheso hantle le motlakase o phahameng ho etsa hore e be ntle bakeng sa lisebelisoa tsa elektroniki tsa motlakase, joalo ka li-switch tsa motlakase o phahameng, li-inverter le li-converter tsa motlakase, tse sebetsang maemong a feteletseng. Ho feta moo, ho hanyetsa substrate mochesong o phahameng le mafome ho netefatsa ts'ebetso e tsitsitseng libakeng tse thata. 〈111〉± 0.5° orientation e nepahetseng e ntlafatsa ho nepahala ha tlhahiso, e etsa hore e lokele lisebelisoa tsa RF le lits'ebetso tsa maqhubu a phahameng, joalo ka litsamaiso tsa radar le lisebelisoa tsa puisano tse se nang mohala.
Melemo ea li-substrate tsa mofuta oa N SiC tse kopaneng e kenyelletsa:
1. Ho Tsamaisa Mocheso o Phahameng: Ho qhala mocheso ka katleho, ho etsa hore o lokele dibaka tse nang le mocheso o phahameng le ditshebediso tse nang le matla a mangata.
2. Motlakase o Senyehileng ka ho Fetisisa: E netefatsa ts'ebetso e tšepahalang lits'ebetsong tsa motlakase o phahameng joalo ka li-converter tsa motlakase le li-inverter.
3. Lefeela la MPD (Micro Pipe Defect): E netefatsa diphoso tse fokolang, e fana ka botsitso le tshepahalo e phahameng disebedisweng tsa bohlokwa tsa elektroniki.
4. Ho Hanela Tshenyo: E tšoarella dibakeng tse thata, e netefatsa tshebetso ya nako e telele maemong a thata.
5. 〈111〉± 0.5° Tataiso e Nepahetseng: E dumella ho lekalekana ho nepahetseng nakong ya tlhahiso, e ntlafatsa tshebetso ya sesebediswa ditshebedisong tsa maqhubu a hodimo le tsa RF.
Ka kakaretso, substrate ea P-type 4H/6H-P 3C-N ea 4-inch SiC e nang le tataiso ea 〈111〉± 0.5° le sehlopha sa Zero MPD ke thepa e sebetsang hantle e loketseng lits'ebetso tse tsoetseng pele tsa elektroniki. Tsamaiso ea eona e ntle ea mocheso le motlakase o phahameng oa ho senyeha li etsa hore e be e phethahetseng bakeng sa lisebelisoa tsa motlakase tse kang li-switch tsa motlakase o phahameng, li-inverter le li-converter. Sehlopha sa Zero MPD se netefatsa liphoso tse fokolang, se fana ka ts'epo le botsitso lisebelisoa tsa bohlokoa. Ho feta moo, ho hanyetsa ha substrate ho ts'enyeho le mocheso o phahameng ho netefatsa ho tšoarella libakeng tse thata. 〈111〉± 0.5° e nepahetseng e lumella ho lumellana hantle nakong ea tlhahiso, e leng se etsang hore e tšoanelehe haholo bakeng sa lisebelisoa tsa RF le lits'ebetso tsa maqhubu a phahameng.
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