Sebopeho sa Sapphire Substrate PSS 2inch 4inch 6inch ICP dry etching e ka sebelisoa bakeng sa lichifi tsa LED.
Sebopeho sa mantlha
1. Litšobotsi tsa thepa: Thepa ea substrate ke sapphire e le 'ngoe ea kristale (Al₂O₃), e nang le boima bo phahameng, ho hanyetsa mocheso o phahameng le botsitso ba lik'hemik'hale.
2. Sebopeho sa sefahleho: Bokaholimo bo entsoe ka photolithography le ho kenngoa ka har'a mekhoa ea nakoana ea micro-nano, e kang li-cones, pyramids kapa hexagonal arrays.
3. Ts'ebetso ea Optical: Ka sebopeho sa sebopeho sa holim'a metsi, khanya eohle ea khanya ho sebopeho e fokotsehile, 'me katleho ea ho ntša leseli e ntlafatsoa.
4. Ts'ebetso ea mocheso: Sapphire substrate e na le conductivity e ntle ea mocheso, e loketseng lisebelisoa tse phahameng tsa LED.
5. Litlhaloso tsa boholo: Boholo bo tloaelehileng ke 2 inches (50.8mm), 4 inches (100mm) le 6 inches (150mm).
Libaka tsa kopo tse ka sehloohong
1. Tlhahiso ea LED:
Ts'ebetso e ntlafalitsoeng ea ho ntšoa ha leseli: PSS e fokotsa tahlehelo ea leseli ka moralo oa paterone, e ntlafatsa haholo khanya ea LED le katleho e khanyang.
Boleng bo ntlafetseng ba ho hōla ha epitaxial: Sebopeho se entsoeng ka mokhoa o hlophisitsoeng se fana ka motheo o ntlafetseng oa kholo ea GaN epitaxial layers le ho ntlafatsa ts'ebetso ea LED.
2. Laser Diode (LD) :
Li-lasers tsa matla a phahameng: The conductivity e phahameng ea mocheso le botsitso ba PSS li loketse matla a phahameng a laser diode, ho ntlafatsa tshebetso ea ho senya mocheso le ho tšepahala.
Moepo o tlase oa hona joale: Ntlafatsa kholo ea epitaxial, fokotsa sekhahla sa laser diode, 'me u ntlafatse katleho.
3. Photodetector:
Kutloelo-bohloko e phahameng: Phatlalatso ea khanya e phahameng le sekoli se tlase sa PSS se ntlafatsa kutloisiso le lebelo la karabo ea photodetector.
Wide spectral response: e loketse bakeng sa ho fumanoa ke photoelectric ho ultraviolet ho ea sebakeng se bonahalang.
4. Lisebelisoa tsa elektroniki:
Ho hanyetsa motlakase o phahameng: Setsi se phahameng sa Sapphire le botsitso ba mocheso li loketse lisebelisoa tse phahameng tsa motlakase.
Phallo e sebetsang hantle ea mocheso: Ts'ebetso e phahameng ea mocheso e ntlafatsa ts'ebetso ea ho tima mocheso oa lisebelisoa tsa motlakase le ho lelefatsa bophelo ba ts'ebeletso.
5. Lisebelisoa tsa Rf:
Ts'ebetso e phahameng ea maqhubu: Tahlehelo e tlase ea dielectric le botsitso bo phahameng ba mocheso oa PSS li loketse lisebelisoa tse phahameng tsa RF.
Lerata le tlase: Botebo bo phahameng le sekoli se tlase se fokotsa lerata la sesebelisoa le ho ntlafatsa boleng ba lets'oao.
6. Li-biosensor:
Ho lemoha kutlo e phahameng: Phetiso ea khanya e phahameng le botsitso ba lik'hemik'hale tsa PSS li loketse li-biosensor tse phahameng tsa kutlo.
Biocompatibility: Biocompatibility ea safire e etsa hore e tšoanelehe bakeng sa lits'ebetso tsa bongaka le biodetection.
Sapphire substrate (PSS) e nang le mokhoa oa GaN epitaxial:
Paterone ea sapphire substrate (PSS) ke sebaka se loketseng bakeng sa kholo ea epitaxial ea GaN (gallium nitride). Letlapa le sa fetoheng la safire le haufi le GaN, le ka fokotsang ho se lumellane ha letlapa le bofokoli ba kholo ea epitaxial. Sebopeho sa micro-nano sa sebaka sa PSS ha se ntlafatse feela bokhoni ba ho ntša leseli, empa hape se ntlafatsa boleng ba kristale ea GaN epitaxial layer, kahoo e ntlafatsa ts'ebetso le ho tšepahala ha LED.
Litekanyetso tsa tekheniki
| Ntho | Sebopeho sa Sapphire Substrate(2~6inch) | ||
| Diameter | 50.8 ± 0.1 limilimithara | 100.0 ± 0.2 limilimithara | 150.0 ± 0.3 limilimithara |
| Botenya | 430 ± 25μm | 650 ± 25μm | 1000 ± 25μm |
| Boemo ba Bokaholimo | C-plane (0001) off-angle ho ea ho M-axis (10-10) 0.2 ± 0.1° | ||
| C-plane (0001) off-angle e lebang A-axis (11-20) 0 ± 0.1° | |||
| Maemo a mantlha a Flat | A-Plane (11-20) ± 1.0° | ||
| Bolelele ba Phatlalatso ba Pele | 16.0 ± 1.0 limilimithara | 30.0 ± 1.0 limilimithara | 47.5 ± 2.0 limilimithara |
| R-Sefofane | 9-o'clock | ||
| Qetello ea Bokaholimo bo ka Pele | Paterone | ||
| Back Surface Finish | SSP:Fatše-ntle,Ra=0.8-1.2um; DSP: Epi e bentšitsoeng, Ra<0.3nm | ||
| Laser Mark | Lehlakore le ka morao | ||
| TTV | ≤8μm | ≤10μm | ≤20μm |
| KOBANE | ≤10μm | ≤15μm | ≤25μm |
| TLHOKOMELO | ≤12μm | ≤20μm | ≤30μm |
| Kenyelletso ea Edge | ≤2 limilimithara | ||
| Tlhaloso ea Paterone | Sebopeho sa Sebopeho | Dome, Cone, Phiramide | |
| Bophahamo ba Mohlala | 1.6 ~ 1.8μm | ||
| Paterone Diameter | 2.75 ~ 2,85μm | ||
| Sebaka sa Mohlala | 0.1~0.3μm | ||
XKH e sebetsa ka ho khetheha ho fana ka li-substrates tsa safire tsa boleng bo phahameng, tse entsoeng ka mokhoa o hlophisitsoeng (PSS) tse nang le ts'ehetso ea tekheniki le tšebeletso ea morao-rao ea thekiso ho thusa bareki ho finyella mekhoa e metle tšimong ea LED, pontšo le optoelectronics.
1. Phepelo ea boleng bo phahameng ba PSS: Li-substrates tsa safire tse entsoeng ka mohlala ka boholo bo fapaneng (2 ", 4 ", 6 ") ho finyella litlhoko tsa lisebelisoa tsa LED, pontšo le optoelectronic.
2. Moralo o ikhethileng: Iketsetse sebopeho sa micro-nano (joalo ka khoune, piramite kapa li-hexagonal array) ho latela litlhoko tsa bareki ho ntlafatsa ts'ebetso ea ho ntša leseli.
3. Tšehetso ea tekheniki: Fana ka moralo oa kopo ea PSS, ts'ebetso ea ts'ebetso le lipuisano tsa tekheniki ho thusa bareki ho ntlafatsa ts'ebetso ea sehlahisoa.
4. Tšehetso ea kholo ea Epitaxial: PSS e tsamaellanang le thepa ea GaN epitaxial e fanoa ho netefatsa kholo ea boleng bo phahameng ba epitaxial layer.
5. Teko le setifikeiti: Fana ka tlaleho ea tlhahlobo ea boleng ba PSS ho netefatsa hore lihlahisoa li finyella litekanyetso tsa indasteri.
Setšoantšo se qaqileng
