Sebopeho sa Sapphire Substrate PSS 2inch 4inch 6inch ICP dry etching e ka sebelisoa bakeng sa lichifi tsa LED.
Sebopeho sa mantlha
1. Litšobotsi tsa thepa: Thepa ea substrate ke sapphire e le 'ngoe ea kristale (Al₂O₃), e nang le boima bo phahameng, ho hanyetsa mocheso o phahameng le botsitso ba lik'hemik'hale.
2. Sebopeho sa sefahleho: Bokaholimo bo entsoe ka photolithography le ho kenngoa ka har'a mekhoa ea nakoana ea micro-nano, e kang li-cones, pyramids kapa hexagonal arrays.
3. Ts'ebetso ea Optical: Ka sebopeho sa sebopeho sa holim'a metsi, khanya eohle ea khanya ho sebopeho e fokotsehile, 'me katleho ea ho ntša leseli e ntlafatsoa.
4. Ts'ebetso ea mocheso: Sapphire substrate e na le conductivity e ntle ea mocheso, e loketseng lisebelisoa tse phahameng tsa LED.
5. Litlhaloso tsa boholo: Boholo bo tloaelehileng ke 2 inches (50.8mm), 4 inches (100mm) le 6 inches (150mm).
Libaka tsa kopo tse ka sehloohong
1. Tlhahiso ea LED:
Ts'ebetso e ntlafalitsoeng ea ho ntšoa ha leseli: PSS e fokotsa tahlehelo ea leseli ka moralo oa paterone, e ntlafatsa haholo khanya ea LED le katleho e khanyang.
Boleng bo ntlafetseng ba ho hōla ha epitaxial: Sebopeho se entsoeng ka mokhoa o hlophisitsoeng se fana ka motheo o ntlafetseng oa kholo ea GaN epitaxial layers le ho ntlafatsa ts'ebetso ea LED.
2. Laser Diode (LD) :
Li-lasers tsa matla a phahameng: The conductivity e phahameng ea mocheso le botsitso ba PSS li loketse matla a phahameng a laser diode, ho ntlafatsa tshebetso ea ho senya mocheso le ho tšepahala.
Moepo o tlase oa hona joale: Ntlafatsa kholo ea epitaxial, fokotsa sekhahla sa laser diode, 'me u ntlafatse katleho.
3. Photodetector:
Kutloelo-bohloko e phahameng: Phatlalatso ea khanya e phahameng le sekoli se tlase sa PSS se ntlafatsa kutloisiso le lebelo la karabo ea photodetector.
Wide spectral response: e loketse bakeng sa ho fumanoa ke photoelectric ho ultraviolet ho ea sebakeng se bonahalang.
4. Lisebelisoa tsa elektroniki:
Ho hanyetsa motlakase o phahameng: Setsi se phahameng sa Sapphire le botsitso ba mocheso li loketse lisebelisoa tse phahameng tsa motlakase.
Phallo e sebetsang hantle ea mocheso: Ts'ebetso e phahameng ea mocheso e ntlafatsa ts'ebetso ea ho tima mocheso oa lisebelisoa tsa motlakase le ho lelefatsa bophelo ba ts'ebeletso.
5. Lisebelisoa tsa Rf:
Ts'ebetso e phahameng ea maqhubu: Tahlehelo e tlase ea dielectric le botsitso bo phahameng ba mocheso oa PSS li loketse lisebelisoa tse phahameng tsa RF.
Lerata le tlase: Botebo bo phahameng le sekoli se tlase se fokotsa lerata la sesebelisoa le ho ntlafatsa boleng ba lets'oao.
6. Li-biosensor:
Ho lemoha kutlo e phahameng: Phetiso ea khanya e phahameng le botsitso ba lik'hemik'hale tsa PSS li loketse li-biosensor tse phahameng tsa kutlo.
Biocompatibility: Biocompatibility ea safire e etsa hore e tšoanelehe bakeng sa lits'ebetso tsa bongaka le biodetection.
Sapphire substrate (PSS) e nang le mokhoa oa GaN epitaxial:
Paterone ea sapphire substrate (PSS) ke sebaka se loketseng bakeng sa kholo ea epitaxial ea GaN (gallium nitride). Letlapa le sa fetoheng la safire le haufi le GaN, e ka fokotsang ho se lumellane ha letlapa le likoli ho kholo ea epitaxial. Sebopeho sa micro-nano sa sebaka sa PSS ha se ntlafatse feela bokhoni ba ho ntša leseli, empa hape se ntlafatsa boleng ba kristale ea GaN epitaxial layer, kahoo e ntlafatsa ts'ebetso le ho tšepahala ha LED.
Litekanyetso tsa tekheniki
| Ntho | Sebopeho sa Sapphire Substrate(2~6inch) | ||
| Diameter | 50.8 ± 0.1 limilimithara | 100.0 ± 0.2 limilimithara | 150.0 ± 0.3 limilimithara |
| Botenya | 430 ± 25μm | 650 ± 25μm | 1000 ± 25μm |
| Boemo ba Bokaholimo | C-plane (0001) off-angle ho ea ho M-axis (10-10) 0.2 ± 0.1° | ||
| C-plane (0001) off-angle e lebang A-axis (11-20) 0 ± 0.1° | |||
| Maemo a Motheo a Flat | A-Plane (11-20) ± 1.0° | ||
| Bolelele ba Phatlalatso ba Pele | 16.0 ± 1.0 limilimithara | 30.0 ± 1.0 limilimithara | 47.5 ± 2.0 limilimithara |
| R-Sefofane | 9-o'clock | ||
| Qetello ea Bokaholimo bo ka Pele | Paterone | ||
| Back Surface Finish | SSP:Fatše-ntle,Ra=0.8-1.2um; DSP: Epi e bentšitsoeng, Ra<0.3nm | ||
| Laser Mark | Lehlakore le ka morao | ||
| TTV | ≤8μm | ≤10μm | ≤20μm |
| KOBANE | ≤10μm | ≤15μm | ≤25μm |
| TLHOKOMELO | ≤12μm | ≤20μm | ≤30μm |
| Kenyelletso ea Edge | ≤2 limilimithara | ||
| Tlhaloso ea Paterone | Sebopeho sa Sebopeho | Dome, Cone, Phiramide | |
| Bophahamo ba Mohlala | 1.6 ~ 1.8μm | ||
| Paterone Diameter | 2.75 ~ 2,85μm | ||
| Sebaka sa Mohlala | 0.1~0.3μm | ||
XKH e sebetsa ka ho khetheha ho fana ka li-substrates tsa safire tsa boleng bo phahameng, tse entsoeng ka mokhoa o hlophisitsoeng (PSS) tse nang le ts'ehetso ea tekheniki le tšebeletso ea morao-rao ea thekiso ho thusa bareki ho finyella mekhoa e metle tšimong ea LED, pontšo le optoelectronics.
1. Phepelo ea boleng bo phahameng ba PSS: Li-substrates tsa safire tse entsoeng ka mohlala ka boholo bo fapaneng (2 ", 4 ", 6 ") ho finyella litlhoko tsa lisebelisoa tsa LED, pontšo le optoelectronic.
2. Moralo o ikhethileng: Iketsetse sebopeho sa micro-nano (joalo ka khoune, piramite kapa li-hexagonal array) ho latela litlhoko tsa bareki ho ntlafatsa ts'ebetso ea ho ntša leseli.
3. Tšehetso ea tekheniki: Fana ka moralo oa kopo ea PSS, ts'ebetso ea ts'ebetso le lipuisano tsa tekheniki ho thusa bareki ho ntlafatsa ts'ebetso ea sehlahisoa.
4. Tšehetso ea kholo ea Epitaxial: PSS e tsamaellanang le thepa ea GaN epitaxial e fanoa ho netefatsa kholo ea boleng bo phahameng ba epitaxial layer.
5. Teko le setifikeiti: Fana ka tlaleho ea tlhahlobo ea boleng ba PSS ho netefatsa hore lihlahisoa li finyella litekanyetso tsa indasteri.
Setšoantšo se qaqileng
