Wafer ea Khalase ea Quartz JGS1 JGS2 BF33 Wafer 8inch 12inch 725 ± 25 um Kapa e etselitsoeng uena
Tlhaloso
| Tse khethehileng | 4" | 6" | 8" | 10" | 12” |
| Bophara | 100mm | 150mm | 200mm | 250mm | 300mm |
| Botenya | 0.10mm | 0.30mm | 0.40mm | 0.50mm | 0.50mm |
| Folete ea Pele | 32.5mm | 47.5mm / 57.5mm / Notch | Notch | Notch | Notch |
| LTV (5mmx5mm) | < 0.5um | < 0.5um | < 0.5um | < 0.5um | < 0.5um |
| TTV | < 2um | < 3um | <3um | <10um | <10um |
| Seqha | ±20um | ±30um | ±40um | ±40um | ±40um |
| Koahela | ≤ 30um | ≤ 40um | ≤ 70um | ≤ 80um | ≤ 80um |
| Ho potoloha moeli | E lumellana le SEMI M1.2 Standard/sheba IEC62276 | ||||
| Mofuta oa Bokaholimo | Lehlakore le le Leng le bentšitsoeng / Mahlakore a Mabeli a bentšitsoeng | ||||
| Lehlakore le bentšitsoeng Ra | Ra≤1nm | ||||
| Mekhoa ea ho Lahla ka Morao | Ra 0.2-0.7um kapa e etselitsoeng motho ka mong | ||||
Tafole ea liparamente tsa Wafer ea Khalase ea Quartz JGS1 JGS2 BF33
Kopo
Li-wafer tsa khalase tsa Quartz tse entsoeng ka JGS1, JGS2, le BF33 li sebelisoa haholo indastering e fapaneng e nang le nepahalo e phahameng. Li-wafer tsena li loketse tlhahiso ea semiconductor, ho kenyeletsoa le li-substrate tsa photomask le li-optics tsa boemo ba wafer. Li boetse li loketse likarolo tsa optical, lasers le li-sensor liindastering tse kang tsa puisano, tsa lifofane le tsa bongaka. Ho tsitsa ha tsona ho phahameng ha mocheso le ho hanyetsa ho thothomela ha mocheso ho li etsa hore li be tse phethahetseng bakeng sa libaka tse feteletseng tsa mocheso, ha phetisetso ea tsona e ikhethang e le ea bohlokoa bakeng sa li-optics tsa ultraviolet (UV) le infrared (IR).
Matlo
Mefuta ea Lintho:
JGS1: Phetiso e phahameng ea UV, e ntle haholo bakeng sa lits'ebetso tsa khanya ea ultraviolet.
JGS2: Phetiso e leka-lekaneng ho pholletsa le mefuta ea UV, e bonahalang, le ea infrared, e loketse tšebeliso e akaretsang ea optical.
BF33: Khalase ea Borosilicate e nang le khanyetso e phahameng ea lik'hemik'hale le ho tšoarella ha mocheso. Likhetho tsa Boholo:
E fumaneha ka boholo bo tloaelehileng ba li-wafer tsa lisenthimithara tse 8 le tse 12.
Boholo bo ikhethileng bo ka etsoa ho latela litlhoko tse itseng. Botenya:
Botenya bo tloaelehileng ke 725 ± 25 μm.
Botenya bo ka fetoloang bo fumaneha ho fihlela litlhoko tse fapaneng tsa indasteri.
Thepa ea Thermal:
Ho tsitsa ho babatsehang ha mocheso, ho loketse ho sebelisoa libakeng tse nang le mocheso o phahameng.
Ho hanyetsa ho hoholo ha mocheso.
Khanyetso ea Lik'hemik'hale:
Ho hanyetsa ka matla mafome a bakoang ke li-acid, alkali le lik'hemik'hale tse ngata, haholo-holo ho BF33.
Matlotlo a Optical:
Li-wafer tsa JGS1 le JGS2 li fana ka phetiso e phahameng ea optical maemong a ultraviolet (UV), visible, le infrared (IR).
E loketse likarolo tse nepahetseng tsa optical, photonics, le lits'ebetso tsa laser.
Boleng ba Bokaholimo:
Bophahamo bo phahameng le boreledi, ho netefatsa ho nepahala ha tlhahiso ea lisebelisoa tsa semiconductor le optical.
Matlotlo ana a etsa hore li-wafer tsa JGS1, JGS2, le BF33 li be le mekhoa e mengata le e tšepahalang bakeng sa lits'ebetso tse sebetsang hantle ho pholletsa le liindasteri tse kang optics, elektroniki le li-semiconductor.
Kakaretso
Li-wafer tsa khalase tsa Quartz tse entsoeng ka JGS1, JGS2, le BF33 li fana ka ts'ebetso e ikhethang ho pholletsa le mefuta e fapaneng ea lits'ebetso tse hlokang tlhokomelo. Li fumaneha ka boholo bo tloaelehileng ba lisenthimithara tse 8 le lisenthimithara tse 12 ka botenya ba 725 ± 25 μm, li-wafer tsena le tsona li ka fetoloa ho fihlela litlhoko tse itseng. JGS1 le JGS2 li fana ka phetiso e phahameng ea optical maemong a UV, a bonahalang, le a IR, ha BF33 e fana ka khanyetso e ntle ea lik'hemik'hale le botsitso ba mocheso. Ka ho ba sephara le boreleli bo phahameng ba bokaholimo, li-wafer tsena li loketse liindasteri tse nepahetseng joalo ka li-semiconductor, optics le photonics, ho netefatsa ho tšepahala le ho tšoarella libakeng tse feteletseng le lits'ebetsong tsa bohlokoa.
Setšoantšo se qaqileng





