SiC Ceramic Fork Arm / End Effector - Ts'ebetso e tsoetseng pele e nepahetseng bakeng sa Tlhahiso ea Semiconductor

SiC Ceramic Fork Arm / End Effector - Advanced Precision Handling for Semiconductor Manufacturing Image Featured

Tlhaloso e Khutšoanyane:

The SiC Ceramic Fork Arm, eo hangata e bitsoang Ceramic End Effector, ke karolo ea ts'ebetso e nepahetseng ea ts'ebetso e phahameng e etselitsoeng ho tsamaisa liphaephe, ho tsamaisana le maemo liindastering tsa theknoloji e phahameng, haholo-holo ka har'a tlhahiso ea semiconductor le photovoltaic. E entsoe ka li-ceramics tsa silicon carbide tse hloekileng haholo, karolo ena e kopanya matla a ikhethang a mochini, katoloso ea mocheso o tlase haholo, le ho hanyetsa ho hoholo ha mocheso le kutu.

Re romelle lengolo-tsoibila

Likaroloana

Setšoantšo se qaqileng

Tlhaloso ea Sehlahisoa

Ho fapana le lisebelisoa tsa khale tse entsoeng ka aluminium, tšepe e sa hloekang, kapa esita le quartz, lisebelisoa tsa ho qetela tsa ceramic tsa SiC li fana ka ts'ebetso e ke keng ea lekanngoa likamoreng tsa vacuum, likamore tse hloekisang le libakeng tse thata tsa ts'ebetso, e leng se etsang hore e be karolo ea bohlokoa ea moloko o latelang oa liroboto. Ka tlhokahalo e ntseng e eketseha ea tlhahiso e se nang tšilafalo le mamello e matla ea ho etsa li-chipmaking, ts'ebeliso ea lisebelisoa tsa ho qetela tsa ceramic e fetoha maemo a indasteri ka potlako.

Molao-motheo oa Tlhahiso

Thepa eaSiC Ceramic End Effecterse kenyelletsa letoto la lits'ebetso tse phahameng tse nepahetseng, tse hloekileng tse netefatsang ts'ebetso le ho tšoarella. Hangata ho sebelisoa mekhoa e 'meli e meholo:

Reaction-Bonded Silicon Carbide (RB-SiC)

Ts'ebetsong ena, preform e entsoeng ka silicon carbide powder le binder e kenngoa ka silicon e qhibilihisitsoeng ka mocheso o phahameng (~ 1500 ° C), e sebetsanang le khabone e setseng ho etsa motsoako o teteaneng, o thata oa SiC-Si. Mokhoa ona o fana ka taolo e ntle ka ho fetisisa ea li-dimensional mme o na le litšenyehelo tse ngata bakeng sa tlhahiso e kholo.

Pressureless Sintered Silicon Carbide (SSiC)

SSiC e entsoe ka sintering ultra-fine, high-purity SiC powder ka mocheso o phahameng ka ho fetisisa (> 2000 ° C) ntle le ho sebelisa li-additives kapa mohato o tlamang. Sena se fella ka sehlahisoa se nang le boholo ba 100% le thepa e phahameng ka ho fetisisa ea mochine le ea mocheso e fumanehang har'a lisebelisoa tsa SiC. E nepahetse bakeng sa lits'ebetso tsa ho sebetsana le li-wafer tse bohlokoa haholo.

Kamora ho sebetsa

Precision CNC Machining: Finyella flatness phahameng le parallelism.
Qetello ea Bokaholimo: Ho belisoa ha daemane ho fokotsa bokhohla ba bokaholimo ho <0.02 µm.
Tlhahlobo: Optical interferometry, CMM, le liteko tse sa senyeheng li sebelisoa ho netefatsa karolo ka 'ngoe.

Mehato ena e tiisa hore hoSiC end effectore fana ka ts'ebetso e nepahetseng ea ho beoa ha wafer, polane e ntle haholo, le tlhahiso e fokolang ea likaroloana.

Lintlha tsa Bohlokoa le Melemo

Sebopeho	Tlhaloso
Matla a Phahameng ka ho Fetisisa	Vickers hardness> 2500 HV, ho hanyetsa ho apara le ho phunya.
Katoloso e Tlase ea Mocheso	CTE ~4.5×10⁻⁶/K, e nolofalletsang botsitso ba dimensional paesekeleng e futhumetseng.
Boikemisetso ba Lik'hemik'hale	E hanyetsana le HF, HCl, likhase tsa plasma, le lintho tse ling tse senyang.
E Hlollang ka ho Fetisisa Thermal Shock Resistance	E loketse ho futhumala ka potlako / pholile ka har'a vacuum le lisebelisoa tsa sebōpi.
Ho Tiea ho Holimo le Matla	E tšehetsa matsoho a fork a malelele a cantilevered ntle le ho kheloha.
Khase e Tlase	E loketse maemo a ultra-high vacuum (UHV).
ISO Class 1 Kamore e Hloekileng e Lokisitsoe	Ts'ebetso e sa hlokeng likaroloana e netefatsa botšepehi ba wafer.

Lisebelisoa

SiC Ceramic Fork Arm / End Effector e sebelisoa haholo liindastering tse hlokang ho nepahala ho feteletseng, bohloeki le ho hanyetsa lik'hemik'hale. Maemo a bohlokoa a ts'ebeliso a kenyelletsa:

Tlhahiso ea Semiconductor

Ho kenya / ho laolla sephaphatha ka deposition (CVD, PVD), etching (RIE, DRIE), le lits'ebetso tsa ho hloekisa.
Sepalangoang sa liroboto pakeng tsa FOUPs, lik'hasete, le lisebelisoa tsa ho sebetsa.
Ho sebetsana le mocheso o phahameng nakong ea ho sebetsa ha mocheso kapa ho phunya.

Tlhahiso ea Lisele tsa Photovoltaic

Lipalangoang tse bobebe tsa li-wafers tsa silicon tse senyehang kapa li-solar substrates meleng e ikemetseng.

Indasteri ea Flat Panel Display (FPD).

Ho tsamaisa liphanele tse kholo tsa khalase kapa li-substrates libakeng tsa tlhahiso ea OLED / LCD.

Motsoako oa Semiconductor / MEMS

E sebelisoa meleng ea tlhahiso ea GaN, SiC, le MEMS moo taolo ea tšilafalo le ho nepahala ha maemo ho leng bohlokoa.

Karolo ea eona ea ho qetela e bohlokoa haholo ho netefatsa hore ts'ebetso ha e na sekoli, e tsitsitseng nakong ea ts'ebetso e hlokolosi.

Bokhoni ba ho Itloaetsa

Re fana ka tlhophiso e pharalletseng ho fihlela litlhoko tse fapaneng tsa lisebelisoa le ts'ebetso:

Moqapi oa Fork: Mehaho ea li-prong tse peli, ea menoana e mengata, kapa ea mekhahlelo e arohaneng.
Wafer Size Compatibility: Ho tloha ho 2" ho isa ho 12" li-wafers.
Mounting Interfaces: E lumellana le matsoho a robotic a OEM.
Botenya & Mamello ea Bokaholimo: Bophahamo ba boemo ba Micron le ho pota-pota ho fumaneha.
Likarolo tsa Anti-Slip: Mekhabiso e ka holimo ea boikhethelo kapa lirafshoa bakeng sa ho ts'oara ka sephaphatha ka mokhoa o sireletsehileng.

Emong le emongmoetsi oa ho qetela oa ceramice hlophisitsoe hammoho le bareki ho netefatsa hore e lekana hantle ka liphetoho tse nyane tsa lisebelisoa.

Lipotso tse atisang ho botsoa (FAQ)

Q1: SiC e betere ho feta quartz joang bakeng sa ts'ebeliso ea phello ea ho qetela?
A1:Le hoja quartz e atisa ho sebelisoa bakeng sa bohloeki ba eona, ha e na matla a mochine 'me e atisa ho robeha ka tlas'a mojaro kapa mocheso oa mocheso. SiC e fana ka matla a phahameng, ho hanyetsa ho roala, le botsitso ba mocheso, ho fokotsa haholo kotsi ea ho senya nako le ho senyeha ha sephaphatha.

Q2: Na letsoho lee la fereko la ceramic le lumellana le lisebelisoa tsohle tsa liroboto?
A2:Ee, lisebelisoa tsa rona tsa ho qetela tsa ceramic li tsamaisana le lits'ebetso tse kholo tsa ho sebetsana le li-wafer mme li ka ikamahanya le mefuta ea hau ea liroboto tse nang le metako e nepahetseng ea boenjiniere.

Q3: Na e ka sebetsana le li-wafers tse 300 mm ntle le ho loana?
A3:Ruri. Ho tiea ho hoholo ha SiC ho lumella matsoho a masesaane, a malelele a fereko ho ts'oara liphaephe tse 300 mm ka mokhoa o sireletsehileng ntle le ho sisinyeha kapa ho kheloha nakong ea ho sisinyeha.

Q4: Bophelo bo tloaelehileng ba tšebeletso ea SiC ceramic end effector ke bofe?
A4:Ka tšebeliso e nepahetseng, phello ea ho qetela ea SiC e ka nka nako e telele ea 5 ho ea ho 10 ho feta mefuta e tloaelehileng ea quartz kapa aluminium, ka lebaka la ho hanyetsa ha eona ho matla ha mocheso le khatello ea mochine.

Q5: Na o fana ka lits'ebeletso tse ling kapa litšebeletso tsa prototyping tse potlakileng?
A5:Ee, re ts'ehetsa tlhahiso e potlakileng ea sampole mme re fana ka lits'ebeletso tse ncha tse ipapisitseng le lits'oants'o tsa CAD kapa likarolo tse entsoeng ka morao ho lisebelisoa tse teng.

Mabapi le rona

XKH e sebetsa ka ho khetheha ho nts'etsopele ea theknoloji e phahameng, tlhahiso, le thekiso ea likhalase tse khethehileng tsa optical le lisebelisoa tse ncha tsa kristale. Lihlahisoa tsa rona li fana ka lisebelisoa tsa elektroniki tsa optical, lisebelisoa tsa elektroniki tsa bareki le sesole. Re fana ka lisebelisoa tsa mahlo tsa Sapphire, likoahelo tsa lense tsa mohala oa thekeng, Ceramics, LT, Silicon Carbide SIC, Quartz, le liphaphatha tsa kristale tsa semiconductor. Ka boitseanape bo nang le boiphihlelo le lisebelisoa tse tsoetseng pele, re ipabola ts'ebetsong ea lihlahisoa tse sa tloaelehang, ka sepheo sa ho ba khoebo e etelletseng pele ea theknoloji e phahameng ea optoelectronic.