English

SiC Epitaxial Wafer bakeng sa Lisebelisoa tsa Matla - 4H-SiC, mofuta oa N, Boikoetliso bo fokolang

SiC Epitaxial Wafer bakeng sa Lisebelisoa tsa Matla - 4H-SiC, N-type, Low Defect Density Featured Image
  • SiC Epitaxial Wafer bakeng sa Lisebelisoa tsa Matla - 4H-SiC, mofuta oa N, Boikoetliso bo fokolang
  • SiC Epitaxial Wafer bakeng sa Lisebelisoa tsa Matla - 4H-SiC, mofuta oa N, Boikoetliso bo fokolang
  • SiC Epitaxial Wafer bakeng sa Lisebelisoa tsa Matla - 4H-SiC, mofuta oa N, Boikoetliso bo fokolang

Tlhaloso e Khutšoanyane:

SiC Epitaxial Wafer e bohareng ba lisebelisoa tsa semiconductor tsa morao-rao tse sebetsang hantle haholo, haholo-holo tse etselitsoeng ts'ebetso ea matla a phahameng, maqhubu a phahameng le mocheso o phahameng. E khuts'oane bakeng sa Silicon Carbide Epitaxial Wafer, SiC Epitaxial Wafer e na le SiC epitaxial layer ea boleng bo holimo, e tšesaane e holisitsoeng holim'a substrate e ngata ea SiC. Tšebeliso ea theknoloji ea SiC Epitaxial Wafer e ntse e eketseha ka potlako likoloing tsa motlakase, li-grids tse bohlale, lisebelisoa tsa matla a tsosolositsoeng, le sebaka sa sefofane ka lebaka la thepa ea eona e phahameng ea 'mele le ea elektronike ha e bapisoa le liphaphatha tse tloaelehileng tsa silicon.


Likaroloana

Setšoantšo se qaqileng

SiC Epitaxial Wafer-4
SiC Epitaxial Wafer-6 - 副本

Selelekela

SiC Epitaxial Wafer e bohareng ba lisebelisoa tsa semiconductor tsa morao-rao tse sebetsang hantle haholo, haholo-holo tse etselitsoeng ts'ebetso ea matla a phahameng, maqhubu a phahameng le mocheso o phahameng. E khuts'oane bakeng sa Silicon Carbide Epitaxial Wafer, SiC Epitaxial Wafer e na le SiC epitaxial layer ea boleng bo holimo, e tšesaane e holisitsoeng holim'a substrate e ngata ea SiC. Tšebeliso ea theknoloji ea SiC Epitaxial Wafer e ntse e eketseha ka potlako likoloing tsa motlakase, li-grids tse bohlale, lisebelisoa tsa matla a tsosolositsoeng, le sebaka sa sefofane ka lebaka la thepa ea eona e phahameng ea 'mele le ea elektronike ha e bapisoa le liphaphatha tse tloaelehileng tsa silicon.

Melao-motheo ea Boqapi ea SiC Epitaxial Wafer

Ho theha SiC Epitaxial Wafer ho hloka ts'ebetso e laoloang haholo ea mouoane oa lik'hemik'hale (CVD). Epitaxial layer e atisa ho lengoa holim'a substrate ea monocrystalline SiC e sebelisa likhase tse kang silane (SiH₄), propane (C₃H₈), le hydrogen (H₂) mocheso o fetang 1500 ° C. Khōlo ena e phahameng ea mocheso oa epitaxial e tiisa ho lumellana ho babatsehang ha kristale le mefokolo e fokolang pakeng tsa epitaxial layer le substrate.

Tshebetso ena e kenyelletsa mekhahlelo e mengata ea bohlokoa:

  1. Tokiso ea Substrate: Sephaphatha sa SiC sa motheo sea hloekisoa le ho belisoa hore e be boreleli ba athomo.

  2. Khōlo ea CVD: Ka setsing se phahameng sa bohloeki, likhase li arabela ho beha lesela le le leng la kristale la SiC holim'a substrate.

  3. Taolo ea Doping: Doping ea mofuta oa N kapa P e hlahisoa nakong ea epitaxy ho finyella thepa ea motlakase e lakatsehang.

  4. Tlhahlobo le Metrology: Ho sebelisoa ha microscopy ea Optical, AFM, le X-ray diffraction ho netefatsa botenya ba lera, mahloriso a doping le bofokoli.

SiC Epitaxial Wafer e 'ngoe le e' ngoe e behiloe leihlo ka hloko ho boloka mamello e tiileng ka ho lekana ha botenya, ho bata ha bokaholimo le ho hanyetsa. Bokhoni ba ho hlophisa liparamente tsena hantle bo bohlokoa bakeng sa li-MOSFET tse matla a phahameng, li-Schottky diode le lisebelisoa tse ling tsa motlakase.

Tlhaloso

Paramethara Tlhaloso
Lihlopha Saense ea Lisebelisoa, Li-substrates tse le 'ngoe tsa Crystal
Polytype 4H
Doping Mofuta oa N
Diameter 101 limilimithara
Mamello ea Diameter ± 5%
Botenya 0.35 limilimithara
Botenya Mamello ± 5%
Bolelele ba Phatlalatso ba Pele 22 mm (± 10%)
TTV (Total Thickness Variation) ≤10 µm
Warp ≤25µm
FWHM ≤30 Arc-sec
Surface Finish Rq ≤0.35 nm

Lisebelisoa tsa SiC Epitaxial Wafer

Lihlahisoa tsa SiC Epitaxial Wafer li bohlokoa haholo makaleng a mangata:

  • Likoloi tsa Motlakase (EVs): Lisebelisoa tse thehiloeng ho SiC Epitaxial Wafer li eketsa katleho ea matla le ho fokotsa boima ba 'mele.

  • Matla a Tsosolositsoeng: E sebelisoa ka li-inverters bakeng sa lisebelisoa tsa matla a letsatsi le moea.

  • Lisebelisoa tsa Matla a Liindasteri: E nolofalletsa ho feto-fetoha ha maemo a holimo, mocheso o phahameng ka tahlehelo e tlase.

  • Sepakapaka le Tšireletso: E loketse tikoloho e thata e hlokang li-semiconductors tse matla.

  • 5G Base Stations: Likarolo tsa SiC Epitaxial Wafer li tšehetsa matla a phahameng a matla bakeng sa likopo tsa RF.

SiC Epitaxial Wafer e thusa meralo e kopaneng, ho fetoha ka potlako, le ts'ebetso e phahameng ea phetolo ea matla ha e bapisoa le li-wafers tsa silicon.

Melemo ea SiC Epitaxial Wafer

Theknoloji ea SiC Epitaxial Wafer e fana ka melemo ea bohlokoa:

  1. Motlakase o phahameng oa ho senya: E mamella voltages ho fihla ho makhetlo a 10 ho feta li-wafers tsa Si.

  2. Thermal Conductivity: SiC Epitaxial Wafer e tlosa mocheso ka potlako, e lumella lisebelisoa hore li sebetse ka mokhoa o pholileng le ka botšepehi haholoanyane.

  3. Ho Fetola Mabelo a Phahameng: Litahlehelo tse tlase tsa switching li nolofalletsa katleho e phahameng le miniaturization.

  4. Bandgap e pharaletseng: E netefatsa botsitso ho li-voltages tse phahameng le mocheso.

  5. Matla a Lintho: SiC ha e sebetse ka lik'hemik'hale 'me e matla ka mochini, e loketse lits'ebetso tse batloang haholo.

Melemo ena e etsa hore SiC Epitaxial Wafer e be thepa ea khetho bakeng sa moloko o latelang oa li-semiconductors.

FAQ: SiC Epitaxial Wafer

Q1: Phapano ke efe pakeng tsa sephaphatha sa SiC le SiC Epitaxial Wafer?
Sesepa sa SiC se bua ka substrate e ngata, ha SiC Epitaxial Wafer e kenyelletsa lesela le holisitsoeng ka ho khetheha le sebelisoang ho etsa lisebelisoa.

Q2: Ke botenya bofe bo fumanehang bakeng sa likarolo tsa SiC Epitaxial Wafer?
Likarolo tsa Epitaxial hangata li tloha ho li-micrometer tse seng kae ho ea ho tse fetang 100 μm, ho latela litlhoko tsa kopo.

Q3: Na SiC Epitaxial Wafer e loketse maemo a mocheso o phahameng?
E, SiC Epitaxial Wafer e ka sebetsa maemong a ka holimo ho 600 ° C, e feta silicon haholo.

Q4: Ke hobane'ng ha sekhahla sa bokooa se le bohlokoa ho SiC Epitaxial Wafer?
Bophahamo bo tlase bo ntlafatsa ts'ebetso le tlhahiso ea sesebelisoa, haholo bakeng sa lits'ebetso tsa motlakase o phahameng.

Q5: Na li-SiC Epitaxial Wafers tsa mofuta oa N le P li fumaneha ka bobeli?
E, mefuta ena ka bobeli e hlahisoa ho sebelisoa taolo e nepahetseng ea khase ea dopant nakong ea ts'ebetso ea epitaxial.

Q6: Ke mefuta efe ea liphaephe e tloaelehileng bakeng sa SiC Epitaxial Wafer?
Li-diameter tse tloaelehileng li kenyelletsa 2-inch, 4-inch, 6-inch, le lisenthimithara tse 8 tse ntseng li eketseha bakeng sa tlhahiso ea boleng bo phahameng.

Q7: SiC Epitaxial Wafer e ama litšenyehelo le katleho joang?
Le hoja qalong e ne e le theko e boima ho feta silicon, SiC Epitaxial Wafer e fokotsa boholo ba tsamaiso le tahlehelo ea matla, e ntlafatsa katleho ea litšenyehelo ka nako e telele.

  • E fetileng:
  • E 'ngoe:

    • Lihlahisoa tse Amanang

    Ngola molaetsa wa hao mona mme o re romele wona
    Tobetsa Enter ho batla kapa ESC ho koala