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Sejana sa SiC Epitaxial bakeng sa Lisebelisoa tsa Matla – 4H-SiC, mofuta oa N, Botenya bo Fokolang

Sejana sa SiC Epitaxial bakeng sa Lisebelisoa tsa Matla – 4H-SiC, mofuta oa N, Botenya bo Tlase ba Sekoli Setšoantšo se Hlahisitsoeng
  • Sejana sa SiC Epitaxial bakeng sa Lisebelisoa tsa Matla – 4H-SiC, mofuta oa N, Botenya bo Fokolang
  • Sejana sa SiC Epitaxial bakeng sa Lisebelisoa tsa Matla – 4H-SiC, mofuta oa N, Botenya bo Fokolang
  • Sejana sa SiC Epitaxial bakeng sa Lisebelisoa tsa Matla – 4H-SiC, mofuta oa N, Botenya bo Fokolang

Tlhaloso e Khutšoanyane:

SiC Epitaxial Wafer ke motheo oa lisebelisoa tsa sejoale-joale tsa semiconductor tse sebetsang hantle, haholo-holo tse etselitsoeng ts'ebetso ea matla a phahameng, maqhubu a phahameng le mocheso o phahameng. Ka bokhutšoanyane bakeng sa Silicon Carbide Epitaxial Wafer, SiC Epitaxial Wafer e na le lera la boleng bo holimo, le lesesaane la SiC epitaxial le holisitsoeng holim'a substrate e kholo ea SiC. Tšebeliso ea theknoloji ea SiC Epitaxial Wafer e ntse e atoloha ka potlako likoloing tsa motlakase, li-grid tse bohlale, litsamaisong tsa matla a nchafatsoang, le lifofaneng ka lebaka la thepa ea eona e phahameng ea 'mele le ea elektroniki ha e bapisoa le li-wafer tse tloaelehileng tse thehiloeng ho silicon.


Likaroloana

Setšoantšo se qaqileng

SiC Epitaxial Wafer-4
SiC Epitaxial Wafer-6 - 副本

Selelekela

SiC Epitaxial Wafer ke motheo oa lisebelisoa tsa sejoale-joale tsa semiconductor tse sebetsang hantle, haholo-holo tse etselitsoeng ts'ebetso ea matla a phahameng, maqhubu a phahameng le mocheso o phahameng. Ka bokhutšoanyane bakeng sa Silicon Carbide Epitaxial Wafer, SiC Epitaxial Wafer e na le lera la boleng bo holimo, le lesesaane la SiC epitaxial le holisitsoeng holim'a substrate e kholo ea SiC. Tšebeliso ea theknoloji ea SiC Epitaxial Wafer e ntse e atoloha ka potlako likoloing tsa motlakase, li-grid tse bohlale, litsamaisong tsa matla a nchafatsoang, le lifofaneng ka lebaka la thepa ea eona e phahameng ea 'mele le ea elektroniki ha e bapisoa le li-wafer tse tloaelehileng tse thehiloeng ho silicon.

Melao-motheo ea Tlhahiso ea SiC Epitaxial Wafer

Ho theha SiC Epitaxial Wafer ho hloka ts'ebetso e laoloang haholo ea ho beoa ha mouoane oa lik'hemik'hale (CVD). Lera la epitaxial hangata le lengoa holim'a substrate ea monocrystalline SiC ho sebelisoa likhase tse kang silane (SiH₄), propane (C₃H₈), le haeterojene (H₂) mochesong o fetang 1500°C. Kholo ena ea epitaxial ea mocheso o phahameng e netefatsa ho lumellana hantle ha kristale le liphoso tse fokolang lipakeng tsa lera la epitaxial le substrate.

Ts'ebetso ena e kenyelletsa mekhahlelo e 'maloa ea bohlokoa:

  1. Tokisetso ea Substrate: Sekwahelo sa motheo sa SiC se hlwekisitswe mme se bentshitswe hore se be boreledi ba athomo.

  2. Kgolo ea CVD: Ka har'a reactor e hloekileng haholo, likhase li arabela ho beha lera la SiC la kristale e le 'ngoe holim'a substrate.

  3. Taolo ea ho sebelisa lithethefatsi: Ho sebelisa doping ea mofuta oa N kapa oa P ho hlahisoa nakong ea epitaxy ho fihlela litšobotsi tsa motlakase tse lakatsehang.

  4. Tlhahlobo le Metrology: Optical microscopy, AFM, le X-ray diffraction di sebediswa ho netefatsa botenya ba lera, mahloriso a doping, le bongata ba diphoso.

Wafer e 'ngoe le e 'ngoe ea SiC Epitaxial e hlokomeloa ka hloko ho boloka mamello e tiileng mabapi le ho tšoana ha botenya, ho ba sephara ha bokaholimo, le ho hanyetsa. Bokhoni ba ho lokisa liparamente tsena bo bohlokoa bakeng sa li-MOSFET tse nang le motlakase o phahameng, li-diode tsa Schottky, le lisebelisoa tse ling tsa motlakase.

Tlhaloso

Paramethara Tlhaloso
Lihlopha Saense ea Lisebelisoa, Li-substrate tsa kristale e le 'Ngoe
Mofuta oa Polytype 4H
Ho sebelisa lithethefatsi Mofuta oa N
Bophara 101 mm
Mamello ea bophara ± 5%
Botenya 0.35 mm
Mamello ea Botenya ± 5%
Bolelele ba Sephara ba Motheo 22 mm (± 10%)
TTV (Phetoho ea Botenya Bohle) ≤10 µm
Koahela ≤25 µm
FWHM ≤30 Arc-sec
Qetello ea Bokaholimo Rq ≤0.35 nm

Litšebeliso tsa SiC Epitaxial Wafer

Lihlahisoa tsa SiC Epitaxial Wafer li bohlokoa haholo makaleng a mangata:

  • Likoloi tsa Motlakase (li-EV): Lisebelisoa tse thehiloeng ho SiC Epitaxial Wafer li eketsa katleho ea powertrain le ho fokotsa boima ba 'mele.

  • Matla a Nchafatsoang: E sebelisoa ho li-inverter bakeng sa litsamaiso tsa matla a letsatsi le a moea.

  • Phepelo ea Matla ea Liindasteri: E nolofalletsa ho fetola maqhubu a phahameng, mocheso o phahameng ka tahlehelo e tlase.

  • Lifofane le Tšireletso: E loketse libaka tse thata tse hlokang li-semiconductor tse matla.

  • Liteishene tsa Motheo tsa 5G: Likarolo tsa SiC Epitaxial Wafer li tšehetsa matla a mangata bakeng sa lits'ebetso tsa RF.

SiC Epitaxial Wafer e nolofalletsa meralo e menyenyane, ho fetola ka potlako, le bokgoni bo phahameng ba ho fetola matla ha ho bapiswa le di-wafer tsa silicon.

Melemo ea SiC Epitaxial Wafer

Theknoloji ea SiC Epitaxial Wafer e fana ka melemo e meholo:

  1. Motlakase o Phahameng oa ho Aroha: E mamella motlakase o phahameng ho feta Si wafers ka makhetlo a 10.

  2. Ho khanna ha mocheso: SiC Epitaxial Wafer e qhala mocheso kapele, e dumella disebediswa ho sebetsa ka mokgwa o phodileng le o tshepahalang haholoanyane.

  3. Lebelo le Phahameng la ho Fetola: Tahlehelo e tlase ea ho fetola e nolofalletsa bokhoni bo phahameng le ho fokotsa matla a motlakase.

  4. Lekhalo le Sephara: E netefatsa botsitso maemong a phahameng a motlakase le mocheso.

  5. Matla a Lintho tse bonahalang: SiC ha e sebetse ka lik'hemik'hale ebile e matla ka mechini, e loketse lits'ebetso tse boima.

Melemo ena e etsa hore SiC Epitaxial Wafer e be thepa e kgethwang bakeng sa moloko o latelang wa di-semiconductor.

Lipotso Tse Botsoang Khafetsa: SiC Epitaxial Wafer

P1: Phapang ke efe pakeng tsa wafer ea SiC le Wafer ea SiC Epitaxial?
Wafer ea SiC e bolela substrate e kholo, ha Wafer ea SiC Epitaxial e kenyelletsa lera le holisitsoeng ka mokhoa o khethehileng le sebelisoang tlhahisong ea lisebelisoa.

P2: Ke botenya bofe bo fumanehang bakeng sa mekhahlelo ea SiC Epitaxial Wafer?
Hangata di-layer tsa Epitaxial di tloha ho di-micrometer tse mmalwa ho isa ho tse fetang 100 μm, ho itshetlehile ka ditlhoko tsa tshebediso.

P3: Na SiC Epitaxial Wafer e loketse libaka tse nang le mocheso o phahameng?
E, SiC Epitaxial Wafer e ka sebetsa maemong a ka hodimo ho 600°C, e sebetsa hantle ho feta silicon haholo.

P4: Ke hobane'ng ha ho ba le sekoli se lekaneng ho SiC Epitaxial Wafer?
Bongata ba sekoli bo tlase bo ntlafatsa ts'ebetso le tlhahiso ea sesebelisoa, haholo-holo bakeng sa lits'ebetso tsa motlakase o phahameng.

P5: Na di-wafer tsa mofuta wa N le P tsa SiC Epitaxial Wafers di a fumaneha?
E, mefuta ena ka bobeli e hlahisoa ka ho sebelisa taolo e nepahetseng ea khase ea dopant nakong ea ts'ebetso ea epitaxial.

P6: Ke boholo bofe ba wafer bo tloaelehileng bakeng sa SiC Epitaxial Wafer?
Bophara bo tloaelehileng bo kenyelletsa lisenthimithara tse 2, lisenthimithara tse 4, lisenthimithara tse 6, le lisenthimithara tse 8 tse ntseng li eketseha bakeng sa tlhahiso ea bophahamo bo phahameng.

P7: SiC Epitaxial Wafer e ama litšenyehelo le katleho joang?
Le hoja qalong e le theko e boima ho feta silicon, SiC Epitaxial Wafer e fokotsa boholo ba sistimi le tahlehelo ea matla, e ntlafatsa katleho ea litšenyehelo ka nako e telele.

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