Filimi ea SICOI (Silicon Carbide holim'a Insulator) Li-wafers SiC Filimi holim'a Silicon

SICOI (Silicon Carbide hodima Insulator) Wafers SiC Film ON Silicon Setšoantšo se Hlahisitsoeng

Tlhaloso e Khutšoanyane:

Li-wafer tsa Silicon Carbide on Insulator (SICOI) ke li-substrate tsa moloko o latelang tsa semiconductor tse kopanyang thepa e phahameng ea 'mele le ea elektroniki ea silicon carbide (SiC) le litšobotsi tse ikhethang tsa ho itšehla thajana tsa lera la buffer le sireletsang mocheso, joalo ka silicon dioxide (SiO₂) kapa silicon nitride (Si₃N₄). Wafer e tloaelehileng ea SICOI e na le lera le lesesaane la epitaxial SiC, filimi e sireletsang mocheso e mahareng, le substrate ea motheo e tšehetsang, e ka bang silicon kapa SiC.

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Ho hlahisoa ha li-wafer tsa Silicon Carbide holim'a Insulator (SICOI)

Sebopeho sena se kopaneng se entsoe ho fihlela litlhoko tse thata tsa lisebelisoa tsa elektroniki tse matla haholo, maqhubu a phahameng le mocheso o phahameng. Ka ho kenyelletsa lera le sireletsang mocheso, li-wafer tsa SICOI li fokotsa bokhoni ba likokoana-hloko le ho thibela maqhubu a ho lutla, ka hona li netefatsa maqhubu a holimo a ts'ebetso, ts'ebetso e betere, le taolo e ntlafetseng ea mocheso. Melemo ena e li etsa hore li be tsa bohlokoa haholo makaleng a kang likoloi tsa motlakase, meralo ea motheo ea puisano ea 5G, litsamaiso tsa lifofane, lisebelisoa tsa elektroniki tsa RF tse tsoetseng pele, le mahlale a sensor a MEMS.

Molao-motheo oa Tlhahiso ea Li-wafer tsa SICOI

Li-wafer tsa SICOI (Silicon Carbide on Insulator) li etsoa ka sesebelisoa se tsoetseng pelemokhoa oa ho kopanya le ho tšesaane ha wafer:

Kholo ea SiC Substrate– Sejana sa boleng bo holimo sa SiC sa kristale e le 'ngoe (4H/6H) se lokisitsoe e le thepa ea mofani.
Ho kenya mocheso oa lera ka har'a mocheso– Filimi e thibelang mocheso (SiO₂ kapa Si₃N₄) e thehoa holim'a wafer ea carrier (Si kapa SiC).
Tlamo ea Wafer– Wafer ea SiC le wafer ea carrier li hokahantsoe hammoho tlas'a mocheso o phahameng kapa thuso ea plasma.
Ho seta le ho polisha– Wafer ea mofani oa SiC e fokotsoa ho ba li-micrometer tse 'maloa' me ea bentšitsoe ho fihlela bokaholimo bo boreleli ba athomo.
Tlhahlobo ea ho Qetela– Wafer e tlatsitsoeng ea SICOI e lekoa bakeng sa ho lekana ha botenya, ho ba thata ha bokaholimo, le ts'ebetso ea ho futhumatsa.

Ka mokhoa ona,lera le lesesaane le sebetsang la SiCe nang le thepa e ntle ea motlakase le ea mocheso e kopantsoe le filimi e sireletsang mocheso le substrate ea tšehetso, e leng se etsang sethala se sebetsang hantle bakeng sa lisebelisoa tsa motlakase le tsa RF tsa moloko o latelang.

Melemo ea Bohlokoa ea Li-wafer tsa SICOI

Sehlopha sa Likarolo	Litšobotsi tsa Tekheniki	Melemo ea Bohlokoa
Sebopeho sa Thepa	Lera le sebetsang la 4H/6H-SiC + filimi e sireletsang mocheso (SiO₂/Si₃N₄) + Si kapa mojari oa SiC	E fihlella karohano e matla ea motlakase, e fokotsa tšitiso ea likokoana-hloko
Matlo a Motlakase	Matla a ho senyeha ho hoholo (>3 MV/cm), tahlehelo e tlase ea dielectric	E ntlafalitsoe bakeng sa ts'ebetso ea motlakase o phahameng le maqhubu a phahameng
Matlotlo a Thermal	Ho tsamaisa mocheso ho fihlela ho 4.9 W/cm·K, ho tsitsitse kaholimo ho 500°C	Ho qhala mocheso ka katleho, ts'ebetso e ntle haholo tlas'a meroalo e matla ea mocheso
Matlotlo a Mekaniki	Ho thatafala ho feteletseng (Mohs 9.5), coefficient e tlase ea katoloso ea mocheso	E tiile khahlanong le khatello ea maikutlo, e ntlafatsa bophelo ba sesebelisoa
Boleng ba Bokaholimo	Bokaholimo bo boreleli haholo (Ra <0.2 nm)	E khothalletsa epitaxy e se nang sekoli le tlhahiso ea lisebelisoa tse tšepahalang
Ho kenya mocheso	Resistivity >10¹⁴ Ω·cm, phallo e tlase ea ho lutla	Ts'ebetso e tšepahalang ho RF le lits'ebetso tsa ho itšehla thajana tse nang le motlakase o phahameng
Boholo le ho iketsetsa	E fumaneha ka mefuta ea lisenthimithara tse 4, 6, le 8; Botenya ba SiC 1–100 μm; insulation 0.1–10 μm	Moralo o tenyetsehang bakeng sa litlhoko tse fapaneng tsa kopo

Libaka tsa Bohlokoa tsa Kopo

Lefapha la Kopo	Linyeoe tse Tloaelehileng tsa Tšebeliso	Melemo ea Tshebetso
Matla a Elektroniki	Li-inverter tsa motlakase oa motlakase, liteishene tsa ho tjhaja, lisebelisoa tsa motlakase tsa indasteri	Motlakase o phahameng oa ho senyeha, tahlehelo e fokotsehileng ea ho chencha
RF le 5G	Li-amplifier tsa matla a seteishene sa motheo, likarolo tsa maqhubu a millimeter	Likokoana-hloko tse tlase, li tšehetsa ts'ebetso ea mefuta ea GHz
Li-sensor tsa MEMS	Li-sensor tsa khatello ea tikoloho e thata, MEMS ea boemo ba ho tsamaea	Ho tsitsa ha mocheso ho phahameng, ho hanela mahlaseli
Lifofane le Tšireletso	Lipuisano tsa sathelaete, li-module tsa matla a li-avionic	Ho tšepahala mochesong o feteletseng le ho pepesehela mahlaseli a kotsi
Gridi e Bohlale	Li-converter tsa HVDC, li-circuit breaker tsa boemo bo tiileng	Ho kenya mocheso o phahameng ho fokotsa tahlehelo ea matla
Lisebelisoa tsa Optoelectronics	Mabone a UV, li-substrate tsa laser	Boleng bo phahameng ba kristale bo tšehetsa tlhahiso e ntle ea leseli

Tlhahiso ea 4H-SiCOI

Tlhahiso ea li-wafer tsa 4H-SiCOI e finyelloa kamekhoa ea ho kopanya le ho tšesaane ha wafer, e nolofalletsang li-interface tsa boleng bo holimo tsa ho thibela mocheso le likarolo tse sebetsang tsa SiC tse se nang sekoli.

a: Sekema sa tlhahiso ea sethala sa thepa sa 4H-SiCOI.
bSetšoantšo sa wafer ea 4H-SiCOI ea lisenthimithara tse 4 e sebelisang ho kopanya le ho tšesaane; libaka tse nang le sekoli li tšoailoe.
c: Tlhaloso ea ho tšoana ha botenya ba substrate ea 4H-SiCOI.
dSetšoantšo sa mahlo sa die ea 4H-SiCOI.
e: Phallo ea ts'ebetso bakeng sa ho etsa resonator ea microdisk ea SiC.
f: SEM ea resonator ea microdisk e phethiloeng.
gSEM e hodisitsweng e bontsha lehlakore la resonator; setshwantsho sa AFM se bontsha boreledi ba bokahodimo ba nanoscale.
h: SEM e nang le karolo e tšekaletseng e bonts'ang bokaholimo bo ka holimo bo bōpehileng joaloka parabola.

Lipotso Tse Botsoang Khafetsa mabapi le Li-wafer tsa SICOI

P1: Ke melemo efe eo di-wafer tsa SICOI di nang le yona ho feta di-wafer tsa setso tsa SiC?
A1: Ho fapana le di-substrate tse tloaelehileng tsa SiC, di-wafer tsa SICOI di kenyelletsa lera le thibelang mocheso le fokotsang bokgoni ba dikokonyana le maqhubu a ho dutla, e leng se lebisang bokgoning bo phahameng, karabelo e betere ya maqhubu, le tshebetso e phahameng ya mocheso.

P2: Ke boholo bofe ba wafer bo fumanehang hangata?
A2: Li-wafer tsa SICOI hangata li hlahisoa ka mekhoa ea lisenthimithara tse 4, lisenthimithara tse 6 le lisenthimithara tse 8, ka SiC e ikhethileng le botenya ba lera la ho thibela mocheso bo fumanehang ho latela litlhoko tsa sesebelisoa.

P3: Ke liindasteri life tse ruang molemo haholo ho li-wafer tsa SICOI?
A3: Liindasteri tsa bohlokoa li kenyelletsa lisebelisoa tsa motlakase bakeng sa likoloi tsa motlakase, lisebelisoa tsa elektroniki tsa RF bakeng sa marang-rang a 5G, MEMS bakeng sa li-sensor tsa lifofane, le lisebelisoa tsa optoelectronic tse kang li-LED tsa UV.

P4: Lera la ho thibela mocheso le ntlafatsa tshebetso ya sesebediswa jwang?
A4: Filimi e sireletsang mocheso (SiO₂ kapa Si₃N₄) e thibela ho dutla ha motlakase mme e fokotsa puisano ya motlakase, e nolofalletsang ho mamella motlakase o phahameng, ho fetola mocheso ka tsela e sebetsang hantle, le ho fokotsa tahlehelo ya mocheso.

P5: Na di-wafer tsa SICOI di loketse tshebediso ya mocheso o phahameng?
A5: E, ka ho tsamaisa mocheso o phahameng le khanyetso e fetang 500°C, li-wafer tsa SICOI li etselitsoe ho sebetsa ka mokhoa o tšepahalang tlas'a mocheso o feteletseng le libakeng tse thata.

P6: Na li-wafer tsa SICOI li ka fetoloa?
A6: Ehlile. Bahlahisi ba fana ka meralo e etselitsoeng botenya bo itseng, maemo a doping, le metsoako ea substrate ho fihlela lipatlisiso tse fapaneng le litlhoko tsa indasteri.

E fetileng: Mochini oa ho Seha terata ea Taemane bakeng sa SiC | Sapphire | Quartz | Khalase

E 'ngoe: Mochini oa ho Saha oa Taemane oa Lithapo tse Ngata bakeng sa Lisebelisoa tsa SiC Sapphire tse Thata haholo