Sekepe sa Silicon Carbide Cantilever (Sekepe sa SiC Cantilever)

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Likaroloana

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Kakaretso ea Sehlahisoa

Sepekere sa cantilever sa silicon carbide, se entsoeng ka silicon carbide e nang le ts'ebetso e phahameng (RBSiC), ke karolo ea bohlokoa e sebelisoang lits'ebetsong tsa ho kenya le ho sebetsana le wafer bakeng sa lits'ebetso tsa semiconductor le photovoltaic.
Ha li bapisoa le li-paddle tsa quartz kapa tsa graphite tsa setso, li-paddle tsa SiC cantilever li fana ka matla a holimo a mechini, ho thatafala ho hoholo, katoloso e tlase ea mocheso, le ho hanyetsa ho bola ho ikhethang. Li boloka botsitso bo botle ba sebopeho tlas'a mocheso o phahameng, li fihlela litlhoko tse thata tsa boholo bo boholo ba li-wafer, bophelo bo bolelele ba tšebeletso, le tšilafalo e tlase haholo.

Ka ntshetsopele e tswelang pele ya ditshebetso tsa semiconductor ho ya ho bophara bo boholo ba wafer, phallo e phahameng, le ditikoloho tse hlwekileng tsa tshebetso, di-paddle tsa SiC cantilever di nkile sebaka sa thepa e tlwaelehileng butle-butle, e leng kgetho e kgethwang bakeng sa dionto tsa ho hasanya, LPCVD, le disebediswa tse amanang le tsona tsa mocheso o phahameng.

Likarolo tsa Sehlahisoa

Botsitso bo Hlollang ba Mocheso o Phahameng
- E sebetsa ka mokhoa o tšepahalang ho 1000–1300℃ ntle le ho fetoha.
- Mocheso o phahameng ka ho fetisisa oa tšebeletso o fihlang ho 1380℃.
Bokgoni bo Phahameng ba ho Jara Moroalo
- Matla a kobehang ho fihlela ho 250–280 MPa, a phahame haholo ho feta di-quartz paddles.
- E khona ho sebetsana le li-wafer tse bophara bo boholo (300 mm ho ea holimo).
Bophelo bo Atolositsoeng ba Tšebeletso le Tlhokomelo e Tlase
- Koefficient e tlase ea katoloso ea mocheso (4.5 × 10⁻⁶ K⁻¹), e tsamaellanang hantle le thepa ea ho koahela ea LPCVD.
- E fokotsa mapetso le ho petsoha ho bakoang ke khatello ea maikutlo, e eketsa haholo linako tsa ho hloekisa le ho hlokomela.
Khanyetso ea ts'enyeho le Bohloeki
- Ho hanyetsa hantle li-acid le alkali.
- Sebopeho se teteaneng sa micros se nang le masoba a bulehileng <0.1%, se fokotsa tlhahiso ea likaroloana le ho lokolloa ha litšila.
Moralo o Tsamaellanang le Boiketsetso
- Jeometri e tsitsitseng ea karolo e tšekaletseng e nang le ho nepahala ho phahameng.
- E hokahana ka mokhoa o se nang sekoli le litsamaiso tsa ho kenya le ho jarolla li-wafer tsa robotic, e leng se nolofalletsang tlhahiso e iketsang ka botlalo.

Thepa ea 'Mele le ea Lik'hemik'hale

Ntho	Yuniti	Lintlha
Mocheso o Phahameng oa Tšebeletso	℃	1380
Botenya	g/cm³	3.04 – 3.08
Ho Bula Methapo	%	< 0.1
Matla a ho Koba	MPa	250 (20℃), 280 (1200℃)
Modulus ea Elasticity	GPa	330 (20℃), 300 (1200℃)
Ho khanna ha mocheso	W/m·K	45 (1200℃)
Coefficient ea Katoloso ea Thermal	K⁻¹×10⁻⁶	4.5
Boima ba Vickers	HV2	≥ 2100
Khanyetso ea Asiti/Alkaline	-	E babatsehang

Bolelele bo tloaelehileng:2378 mm, 2550 mm, 2660 mm
Litekanyo tse ikhethileng lia fumaneha ha ho kopuoa

Likopo

Indasteri ea Semiconductor
- LPCVD (Ho tlosoa ha mouoane oa lik'hemik'hale tse nang le khatello e tlase)
- Mekhoa ea ho hasana (phosphorus, boron, jj.)
- Ho qhibilihisa mocheso ka mocheso
Indasteri ea Photovoltaic
- Ho ata le ho koahela ha wafer ea polysilicon le monocrystalline
- Ho annealing le ho passivation ka mocheso o phahameng
Masimo a Mang
- Libaka tse senyang tse nang le mocheso o phahameng
- Mekhoa ea ho sebetsana le wafer e nepahetseng e hlokang bophelo bo bolelele ba ts'ebeletso le tšilafalo e tlase

Melemo ea Bareki

Litšenyehelo tsa Ts'ebetso tse Fokolitsoeng– Nako e telele ea bophelo ha e bapisoa le li-paddle tsa quartz, e fokotsa nako ea ho se sebetse le makhetlo a ho nkela sebaka.
Tlhahiso e Phahameng– Tšilafalo e tlase haholo e netefatsa bohloeki ba bokaholimo ba wafer le ho fokotsa sekhahla sa liphoso.
Bopaki ba Bokamoso– E lumellana le boholo bo boholo ba wafer le lits'ebetso tsa semiconductor tsa moloko o latelang.
Tlhahiso e Ntlafetseng- E lumellana ka botlalo le litsamaiso tsa othomathike tsa roboto, tse tšehetsang tlhahiso ea bongata bo phahameng.

Lipotso Tse Botsoang Khafetsa - Sekepe sa Silicon Carbide Cantilever

P1: Sekotwana sa cantilever sa silicon carbide ke eng?
K: Ke karolo ea tšehetso le ts'ebetso ea wafer e entsoeng ka silicon carbide e kopantsoeng le karabelo (RBSiC). E sebelisoa haholo liontong tsa ho hasana, LPCVD, le lits'ebetsong tse ling tsa semiconductor le photovoltaic tsa mocheso o phahameng.

P2: Ke hobane'ng ha u khetha SiC ho feta li-quartz paddles?
A: Ha ho bapisoa le li-paddle tsa quartz, li-paddle tsa SiC li fana ka:

Matla a phahameng a mechini le bokgoni ba ho jara mojaro
Ho ba le botsitso bo betere ba mocheso mochesong o fihlang ho 1380℃
Bophelo ba tšebeletso bo bolelele haholo le lipotoloho tse fokotsehileng tsa tlhokomelo
Kotsi e tlase ea tlhahiso ea likaroloana le tšilafalo
Ho lumellana le boholo bo boholo ba wafer (300 mm le ho feta)

P3: Sekepe sa SiC cantilever se ka tšehetsa boholo bofe ba wafer?
A: Li-paddle tse tloaelehileng lia fumaneha bakeng sa litsamaiso tsa onto tsa 2378 mm, 2550 mm, le 2660 mm. Litekanyo tse ikhethileng lia fumaneha ho tšehetsa li-wafer tse fihlang ho 300 mm le ho feta.

Mabapi le rona

XKH e ikhethile ka nts'etsopele ea theknoloji e phahameng, tlhahiso le thekiso ea khalase e khethehileng ea mahlo le thepa e ncha ea kristale. Lihlahisoa tsa rona li sebeletsa lisebelisoa tsa elektroniki tsa mahlo, lisebelisoa tsa elektroniki tsa bareki le sesole. Re fana ka likarolo tsa mahlo tsa Sapphire, likoahelo tsa lense ea mohala oa thekeng, Ceramics, LT, Silicon Carbide SIC, Quartz, le li-wafer tsa kristale tsa semiconductor. Ka boiphihlelo bo nang le boiphihlelo le lisebelisoa tsa sejoale-joale, re ipabola ts'ebetsong ea lihlahisoa tse seng tsa maemo a holimo, re ikemiselitse ho ba khoebo e etellang pele ea theknoloji e phahameng ea lisebelisoa tsa optoelectronic.