Sekoahelo sa terei ea ceramic ea Silicon carbide Silicon carbide ceramic tube e fana ka ts'ebetso e ikhethileng ea ho sintering mochesong o phahameng
Likarolo tse ka sehloohong:
1. Terei ea ceramic ea silicon carbide
- Ho thatafala ho hoholo le ho hanyetsa ho tsofala: ho thatafala ho batla ho lekana le daemane, mme ho ka mamella ho tsofala ha mechine ha ho sebetsoa ka wafer nako e telele.
- Ho tsamaisa mocheso ka potlako le ho fokotsa ho eketseha ha mocheso: ho phatloha ha mocheso ka potlako le botsitso ba litekanyo, ho qoba ho fetoha ho bakoang ke khatello ea mocheso.
- Bophara bo phahameng le qetello ea bokaholimo: Bophara ba bokaholimo bo fihla boemong ba micron, ho netefatsa hore wafer le disk lia kopana ka botlalo, ho fokotsa tšilafalo le tšenyo.
Ho tsitsa ha lik'hemik'hale: Ho hanyetsa mafome ka matla, ho loketse bakeng sa ho hlwekisa ka metsi le ho tjhesa ha ho etsoa di-semiconductor.
2. Phaephe ea ceramic ea silicon carbide
- Ho hanyetsa mocheso o phahameng: E ka sebetsa tikolohong e phahameng ea mocheso o fetang 1600°C nako e telele, e loketse ts'ebetso ea mocheso o phahameng oa semiconductor.
Ho hanyetsa mafome hantle haholo: ho hanela li-acid, li-alkali le mefuta e fapaneng ea lik'hemik'hale tse qhibilihang, tse loketseng tikoloho e thata ea ts'ebetso.
- Ho thatafala ho hoholo le ho hanyetsa ho tsofala: ho hanela khoholeho ea likaroloana le ho tsofala ha mechini, ho eketsa bophelo ba ts'ebeletso.
- Ho tsamaisa mocheso ka potlako le ho fokotsa ho phalla ha mocheso ka potlako: ho tsamaisa mocheso ka potlako le botsitso ba tekanyo, ho fokotsa ho fetoha kapa ho petsoha ho bakoang ke khatello ea mocheso.
Paramethara ea Sehlahisoa:
Paramethara ea terei ea ceramic ea silicon carbide:
| (Thepa ea thepa) | (Yuniti) | (e bonolo) | |
| (Dikahare tsa SiC) | (Boima)% | >99 | |
| (Boholo bo tloaelehileng ba lijo-thollo) | micron | 4-10 | |
| (Botebo) | kg/dm3 | >3.14 | |
| (Ho bonahala eka ho na le masoba a manyane) | Vo1% | <0.5 | |
| (Bothata ba Vickers) | HV 0.5 | GPa | 28 |
| *() Matla a ho kokobela* (lintlha tse tharo) | 20ºC | MPa | 450 |
| (Matla a khatello) | 20ºC | MPa | 3900 |
| (Modulus ea Elastic) | 20ºC | GPa | 420 |
| (Bothata ba ho robeha) | MPa/m'% | 3.5 | |
| (Ho tsamaisa mocheso) | 20°ºC | Bophahamo/(m*K) | 160 |
| (Ho hanyetsa) | 20°ºC | Ohm.cm | 106-108 |
(Koefficient ea katoloso ea mocheso) | a(RT**...80ºC) | K-1*10-6 | 4.3 |
(Mocheso o phahameng ka ho fetisisa o sebetsang) | oºC | 1700 | |
Paramethara ea tube ea ceramic ea silicon carbide:
| Lintho | Index |
| α-SIC | 99% metsotso |
| Ho bonahala eka ho na le masoba | 16% e phahameng |
| Bongata ba Bongata | 2.7g/cm3 motsotso |
| Matla a ho Koba Mochesong o Phahameng | 100 Mpa mets |
| Katoloso ea Thermal e sebetsang hantle | K-1 4.7x10 -6 |
| Coefficient ea Thermal Conductivity (1400ºC) | 24 W/mk |
| Mocheso o Sebetsang o Phahameng | 1650ºC |
Likopo tse ka sehloohong:
1. Poleiti ea ceramic ea silicon carbide
- Ho seha le ho polisha ka wafer: ho sebetsa e le sethala sa ho jara ho netefatsa ho nepahala le botsitso bo phahameng nakong ea ho seha le ho polisha.
- Ts'ebetso ea Lithography: Wafer e tsitsitse mochining oa lithography ho netefatsa hore e behiloe ka nepo haholo nakong ea ho pepesehela.
- Ho polisha Mekaniki ea Lik'hemik'hale (CMP): e sebetsa e le sethala sa tšehetso bakeng sa li-pad tsa ho polisha, e fanang ka khatello e ts'oanang le kabo ea mocheso.
2. Phaephe ea ceramic ea silicon carbide
- Tube ea sebōpi sa mocheso o phahameng: e sebelisetsoa lisebelisoa tsa mocheso o phahameng joalo ka sebōpi sa ho hasana le sebōpi sa oxidation ho jara li-wafer bakeng sa kalafo ea ts'ebetso ea mocheso o phahameng.
- Ts'ebetso ea CVD/PVD: E le tube e behelang ka phapusing ea karabelo, e hanelang mocheso o phahameng le likhase tse senyang.
- Lisebelisoa tsa lisebelisoa tsa semiconductor: bakeng sa li-heat exchanger, liphaephe tsa khase, jj., ho ntlafatsa katleho ea taolo ea mocheso ea lisebelisoa.
XKH e fana ka mefuta e felletseng ea lits'ebeletso tse ikhethileng bakeng sa literei tsa ceramic tsa silicon carbide, likopi tsa ho hula le lipeipi tsa ceramic tsa silicon carbide. Literei tsa ceramic tsa silicon carbide le lipeipi tsa ho hula, XKH e ka fetoloa ho latela litlhoko tsa bareki tsa boholo bo fapaneng, libopeho le ho ba thata ha bokaholimo, 'me ea tšehetsa kalafo e khethehileng ea ho roala, ea ntlafatsa ho hanyetsa ho tsofala le ho hanyetsa ho bola; Bakeng sa lipeipi tsa ceramic tsa silicon carbide, XKH e ka fetola mefuta e fapaneng ea bophara ba ka hare, bophara ba ka ntle, bolelele le sebopeho se rarahaneng (joalo ka tube e bōpehileng joaloka tube kapa tube e nang le masoba), 'me ea fana ka ho bentša, ho roala ho thibelang oxidation le mekhoa e meng ea kalafo ea bokaholimo. XKH e netefatsa hore bareki ba ka sebelisa melemo e felletseng ea ts'ebetso ea lihlahisoa tsa ceramic tsa silicon carbide ho fihlela litlhoko tse hlokang tlhokomelo tsa masimo a tlhahiso a maemo a holimo joalo ka li-semiconductor, li-LED le li-photovoltaics.
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