SiO₂ Wafer ea Quartz Li-wafer tsa Quartz SiO₂ MEMS Mocheso 2″ 3″ 4″ 6″ 8″ 12″

Tlhaloso e Khutšoanyane:

Li-wafer tsa quartz li bapala karolo ea bohlokoa ho ntšetseng pele indasteri ea lisebelisoa tsa elektroniki, semiconductor le optics. Li fumaneha lifonong tse bohlale tse tataisang GPS ea hau, li kentsoe liteisheneng tsa motheo tse nang le maqhubu a phahameng tse matlafatsang marang-rang a 5G, 'me li kopantsoe le lisebelisoa tse etsang li-microchip tsa moloko o latelang, li-wafer tsa quartz lia hlokahala. Li-substrate tsena tse hloekileng haholo li nolofalletsa boqapi nthong e 'ngoe le e 'ngoe ho tloha ho khomphutha ea quantum ho ea ho li-photonics tse tsoetseng pele. Leha li nkiloe ho e 'ngoe ea liminerale tse ngata ka ho fetisisa Lefatšeng, li-wafer tsa quartz li entsoe ka maemo a ikhethang a ho nepahala le ts'ebetso.

Romella imeile ho rona

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Setšoantšo se qaqileng

wafer_quartz_wafer_4_inch_fused_silica_wafer_

Li-wafer tsa khalase tsa Silica le Optical Quartz tse kopantsoeng-2

Selelekela

Li-wafer tsa khalase tsa Silica le Optical Quartz tse kopantsoeng

Li-wafer tsa Quartz ke eng?

Li-wafer tsa quartz ke li-disc tse tšesaane, tse chitja tse entsoeng ka kristale ea quartz e entsoeng ka maiketsetso e hloekileng haholo. Li fumaneha ka bophara bo tloaelehileng bo pakeng tsa lisenthimithara tse 2 ho isa ho tse 12, hangata li-wafer tsa quartz li fapana ka botenya ho tloha ho 0.5 mm ho isa ho 6 mm. Ho fapana le quartz ea tlhaho, e etsang likristale tse sa tloaelehang tsa prismatic, quartz ea maiketsetso e lengoa tlas'a maemo a laboratori a laoloang ka thata, e hlahisang meaho ea kristale e tšoanang.

Boleng ba tlhaho ba di-wafer tsa quartz bo fana ka khanyetso e sa bapisoeng le dikhemikhale, ponaletso ya mahlo, le botsitso tlasa mocheso o phahameng le kgatello ya mechine. Dikarolo tsena di etsa hore di-wafer tsa quartz e be karolo ya motheo bakeng sa disebediswa tse nepahetseng tse sebediswang phetisong ya data, kutlong, dipalong le mahlaleng a thehilweng ho laser.

Litlhaloso tsa Wafer ea Quartz

Mofuta oa Quartz	4	6	8	12
Boholo
Bophara (senthimithara)	4	6	8	12
Botenya (mm)	0.05–2	0.25–5	0.3–5	0.4–5
Mamello ea bophara (lisenthimithara)	± 0.1	± 0.1	± 0.1	± 0.1
Mamello ea Botenya (mm)	E ka fetoloa	E ka fetoloa	E ka fetoloa	E ka fetoloa
Matlotlo a Optical
Letšoao la Refractive @365 nm	1.474698	1.474698	1.474698	1.474698
Letšoao la Refractive @546.1 nm	1.460243	1.460243	1.460243	1.460243
Letšoao la Refractive @1014 nm	1.450423	1.450423	1.450423	1.450423
Phetiso ea Ka Hare (1250–1650 nm)	>99.9%	>99.9%	>99.9%	>99.9%
Phetiso e Felletseng (1250–1650 nm)	>92%	>92%	>92%	>92%
Boleng ba Machining
TTV (Phetoho e Felletseng ea Botenya, µm)	<3	<3	<3	<3
Bophara (µm)	≤15	≤15	≤15	≤15
Bokaholimo bo sa tsitsang (nm)	≤1	≤1	≤1	≤1
Seqha (µm)	<5	<5	<5	<5
Matlotlo a 'Mele
Botenya (g/cm³)	2.20	2.20	2.20	2.20
Modulus ea Young (GPa)	74.20	74.20	74.20	74.20
Boima ba Mohs	6–7	6–7	6–7	6–7
Modulus ea ho Shea (GPa)	31.22	31.22	31.22	31.22
Karolelano ea Poisson	0.17	0.17	0.17	0.17
Matla a Khatello (GPa)	1.13	1.13	1.13	1.13
Matla a ho Tenyetseha (MPa)	49	49	49	49
Dielectric Constant (1 MHz)	3.75	3.75	3.75	3.75
Matlotlo a Thermal
Ntlha ea Khatello (10¹⁴.⁵ Pa·s)	1000°C	1000°C	1000°C	1000°C
Sebaka sa Annealing (10¹³ Pa·s)	1160°C	1160°C	1160°C	1160°C
Sebaka sa ho Nolofatsa (10⁷.⁶ Pa·s)	1620°C	1620°C	1620°C	1620°C

Litšebeliso tsa Li-wafer tsa Quartz

Li-wafer tsa Quartz li entsoe ka mokhoa o ikhethileng ho fihlela lits'ebetso tse boima liindastering tsohle ho kenyeletsoa:

Lisebelisoa tsa Elektroniki le tsa RF

Li-wafer tsa quartz ke tsa bohlokoa ho li-resonator tsa kristale ea quartz le li-oscillator tse fanang ka matšoao a oache bakeng sa li-smartphone, li-unit tsa GPS, lik'homphieutha le lisebelisoa tsa puisano tse se nang mohala.
Katoloso ea tsona ea mocheso o tlase le Q-factor e phahameng li etsa hore li-wafer tsa quartz li be tse phethahetseng bakeng sa lipotoloho tsa nako tse tsitsitseng haholo le li-filter tsa RF.

Lisebelisoa tsa Optoelectronics le Litšoantšo

Li-wafer tsa Quartz li fana ka phetiso e ntle ea UV le IR, e leng se etsang hore li be ntle bakeng sa lilense tsa optical, li-splitter tsa beam, lifensetere tsa laser le li-detector.
Ho hanyetsa ha tsona mahlaseling ho etsa hore li sebelisoe fisiks ea matla a mangata le lisebelisoa tsa sepakapaka.

Semiconductor le MEMS

Li-wafer tsa Quartz li sebetsa e le li-substrate bakeng sa lipotoloho tsa semiconductor tse nang le maqhubu a phahameng, haholo-holo lits'ebetsong tsa GaN le RF.
Ho MEMS (Micro-Electro-Mechanical Systems), di-wafer tsa quartz di fetola matshwao a mechini hore e be a motlakase ka phello ya piezoelectric, e leng se nolofalletsang di-sensor tse kang di-gyroscope le di-accelerometer.

Tlhahiso e Tsoetseng Pele le Lilaboratori

Li-wafer tsa quartz tse hloekileng haholo li sebelisoa haholo lilaboratoring tsa lik'hemik'hale, tsa bongaka, le tsa photonic bakeng sa lisele tsa optical, li-cuvettes tsa UV, le ho sebetsana le sampole ka mocheso o phahameng.
Ho lumellana ha tsona le tikoloho e feteletseng ho li etsa hore li lokele likamore tsa plasma le lisebelisoa tsa ho boloka.

Kamoo Li-wafer tsa Quartz li Etsoang Kateng

Ho na le litsela tse peli tsa mantlha tsa tlhahiso bakeng sa li-wafer tsa quartz:

Li-wafer tsa Quartz tse kopantsoeng

Li-wafer tsa quartz tse kopantsoeng li etsoa ka ho qhibilihisa li-granule tsa tlhaho tsa quartz ka khalase e sa fetoheng, ebe li seha le ho bentša boloko bo tiileng hore e be li-wafer tse tšesaane. Li-wafer tsena tsa quartz li fana ka:

Ponaletso e ikhethang ea UV
Mefuta e mengata ea ts'ebetso ea mocheso (>1100°C)
Khanyetso e ntle ea ho ts'oaroa ke mocheso

Li loketse lisebelisoa tsa lithography, lionto tsa mocheso o phahameng, le lifensetere tsa optical empa ha lia lokela lits'ebetso tsa piezoelectric ka lebaka la khaello ea tatellano ea kristale.

Li-wafer tsa Quartz tse holisitsoeng

Li-wafer tsa quartz tse holisitsoeng li lengoa ka mokhoa oa maiketsetso ho hlahisa likristale tse se nang sekoli tse nang le tataiso e nepahetseng ea lattice. Li-wafer tsena li entsoe bakeng sa lits'ebetso tse hlokang:

Likhutlo tse nepahetseng tsa ho seha (X-, Y-, Z-, AT-cut, jj.)
Li-oscillator tse nang le maqhubu a phahameng le li-filters tsa SAW
Li-polarizer tsa optical le lisebelisoa tse tsoetseng pele tsa MEMS

Ts'ebetso ea tlhahiso e kenyelletsa kholo ea peo ho li-autoclave, e lateloang ke ho seha, ho shebana le tsona, ho li annealing le ho li bentša.

Bafepedi ba ka Sehloohong ba Quartz Wafer

Bafepedi ba lefats'e ka bophara ba ikhethang ka li-wafer tsa quartz tse nepahetseng haholo ba kenyelletsa:

Heraeus(Jeremane) - quartz e kopantsoeng le e entsoeng ka maiketsetso
Shin-Etsu Quartz(Japane) – ditharollo tsa wafer tse hlwekileng haholo
WaferPro(USA) – di-wafer tsa quartz tse bophara bo boholo le di-substrate
Korth Kristalle(Jeremane) - di-wafer tsa kristale tse entsweng ka maiketsetso

Karolo e Ncha ea Li-wafer tsa Quartz

Li-wafer tsa Quartz li ntse li tsoela pele ho fetoha e le likarolo tsa bohlokoa libakeng tse ntseng li hlaha tsa theknoloji:

Miniaturization– Li-wafer tsa Quartz li etsoa ka mamello e thata bakeng sa ho kopanngoa ha lisebelisoa tse nyane.
Elektroniki ea Maqhubu a Phahameng– Meralo e mecha ea li-wafer tsa quartz e ntse e kenella libakeng tsa mmWave le THz bakeng sa 6G le radar.
Kutloisiso ea Moloko o Latelang– Ho tloha likoloing tse ikemetseng ho isa ho IoT ea indasteri, li-sensor tse thehiloeng ho quartz li ntse li ba bohlokoa le ho feta.

Lipotso tse botsoang khafetsa mabapi le li-wafer tsa quartz

1. Wafer ea quartz ke eng?

Wafer ea quartz ke diski e tšesaane, e bataletseng e entsoeng ka kristale ea silicon dioxide (SiO₂), eo hangata e hlahisoang ka boholo bo tloaelehileng ba semiconductor (mohlala, 2", 3", 4", 6", 8", kapa 12"). E tsebahala ka bohloeki ba eona bo phahameng, botsitso ba mocheso, le ponaletso ea optical, wafer ea quartz e sebelisoa e le substrate kapa mojari lits'ebetsong tse fapaneng tse nepahetseng joalo ka tlhahiso ea semiconductor, lisebelisoa tsa MEMS, litsamaiso tsa optical le lits'ebetso tsa vacuum.

2. Phapang ke efe pakeng tsa quartz le gel ea silica?

Quartz ke mofuta o tiileng oa kristale oa silicon dioxide (SiO₂), ha gel ea silica e le mofuta o se nang sebopeho le o nang le masoba oa SiO₂, o sebelisoang hangata e le desiccant ho monya mongobo.

Quartz e thata, e bonaletsang, 'me e sebelisoa lits'ebetsong tsa elektroniki, tsa mahlo le tsa indasteri.
Gel ea silica e hlaha e le lifaha tse nyane kapa li-granule 'me e sebelisoa haholo-holo bakeng sa taolo ea mongobo liphuthelong, lisebelisoa tsa elektroniki le polokelong.

3. Likristale tsa quartz li sebelisetsoa eng?

Likristale tsa quartz li sebelisoa haholo lisebelisoa tsa elektroniki le tsa optics ka lebaka la thepa ea tsona ea piezoelectric (li hlahisa tjhaja ea motlakase tlas'a khatello ea mechini). Litšebeliso tse tloaelehileng li kenyelletsa:

Li-oscillator le taolo ea maqhubu(mohlala, lioache tsa quartz, lioache, li-microcontroller)
Likarolo tsa mahlo(mohlala, lilense, lipoleiti tsa maqhubu, lifensetere)
Li-resonator le li-filtersho RF le disebediswa tsa puisano
Li-sensorbakeng sa khatello, ho potlaka, kapa matla
Tlhahiso ea semiconductore le li-substrate kapa lifensetere tsa ts'ebetso

4. Ke hobane'ng ha quartz e sebelisoa ka har'a li-microchip?

Quartz e sebelisoa lits'ebetsong tse amanang le microchip hobane e fana ka:

Botsitso ba mochesonakong ea lits'ebetso tsa mocheso o phahameng joalo ka ho hasana le ho annealing
Ho thibela motlakaseka lebaka la thepa ea eona ea dielectric
Khanyetso ea lik'hemik'haleho li-acid le li-solvent tse sebelisoang tlhahisong ea semiconductor
Ho nepahala ha tekanyole katoloso e tlase ea mocheso bakeng sa ho hokahanya lithography ka mokhoa o tšepahalang
Le hoja quartz ka boeona e sa sebelisoe e le thepa e sebetsang ea semiconductor (joalo ka silicon), e bapala karolo ea bohlokoa ea tšehetso tikolohong ea tlhahiso—haholo-holo liontong, likamoreng le li-substrate tsa photomask.

Mabapi le rona

XKH e ikhethile ka nts'etsopele ea theknoloji e phahameng, tlhahiso le thekiso ea khalase e khethehileng ea mahlo le thepa e ncha ea kristale. Lihlahisoa tsa rona li sebeletsa lisebelisoa tsa elektroniki tsa mahlo, lisebelisoa tsa elektroniki tsa bareki le sesole. Re fana ka likarolo tsa mahlo tsa Sapphire, likoahelo tsa lense ea mohala oa thekeng, Ceramics, LT, Silicon Carbide SIC, Quartz, le li-wafer tsa kristale tsa semiconductor. Ka boiphihlelo bo nang le boiphihlelo le lisebelisoa tsa sejoale-joale, re ipabola ts'ebetsong ea lihlahisoa tse seng tsa maemo a holimo, re ikemiselitse ho ba khoebo e etellang pele ea theknoloji e phahameng ea lisebelisoa tsa optoelectronic.