Ts'ebetso ea TVG holim'a wafer ea quartz ea safire BF33

Melemo ea TGV (Through Glass Via) e bonahala haholo-holo ho:

1) Litšobotsi tse ntle tsa motlakase tse nang le maqhubu a phahameng. Thepa ea khalase ke thepa ea insulator, constant ea dielectric e ka ba karolo ea 1/3 feela ea thepa ea silicon, ntlha ea tahlehelo e tlase ka makhetlo a 2-3 ho feta thepa ea silicon, e leng se etsang hore tahlehelo ea substrate le litlamorao tsa likokoana-hloko li fokotsehe haholo ho netefatsa botšepehi ba lets'oao le fetisoang;

(2) Ho bonolo ho fumana substrate e kgolo le e tshesane haholo ya khalase. Re ka fana ka Sapphire, Quartz, Corning, le SCHOTT mme bahlahisi ba bang ba khalase ba ka fana ka khalase ya phanele e kgolo haholo (>2m × 2m) le e tshesane haholo (<50µm) le thepa ya khalase e tenyetsehang haholo.

3) Litšenyehelo tse tlase. Rua molemo ho phihlello e bonolo ea khalase e kholo e tšesaane haholo, 'me ha e hloke ho beoa ha likarolo tse sireletsang mocheso, litšenyehelo tsa tlhahiso ea poleiti ea adaptara ea khalase ke hoo e ka bang 1/8 feela ea poleiti ea adaptara e thehiloeng ho silicon;

4) Ts'ebetso e bonolo. Ha ho hlokahale hore ho bewe lera le sireletsang mocheso holim'a substrate le leboteng le ka hare la TGV (Through Glass Via), 'me ha ho hlokahale ho tšesaane poleiting ea adaptara e tšesaane haholo;

(5) Ho tsitsa ho matla ha mechini. Esita le ha botenya ba poleiti ea adaptara bo le ka tlase ho 100µm, warppage e ntse e le nyane;

6) Mefuta e mengata ea lits'ebetso. Ntle le litebello tse ntle tsa ts'ebeliso tšimong ea maqhubu a phahameng, e le thepa e bonaletsang, e ka boela ea sebelisoa tšimong ea kopanyo ea sistimi ea optoelectronic, ho se kene moea le melemo ea ho hanyetsa mafome e etsa hore substrate ea khalase tšimong ea encapsulation ea MEMS e be le bokhoni bo boholo.

Hona jwale, khamphani ya rona e fana ka theknoloji ya TGV (Through Glass Via) ya khalase e kenang ka masoba, e ka hlophisa tshebetso ya thepa e kenang le ho fana ka sehlahiswa ka kotloloho. Re ka fana ka Sapphire, Quartz, Corning, le SCHOTT, BF33 le digalase tse ding. Haeba o na le tlhoko, o ka ikopanya le rona ka kotloloho neng kapa neng! Rea u amohela potso!