Ts'ebetso ea TVG ho quartz sapphire BF33 wafer Glass wafer e punching
Melemo ea TGV(Ka Glass Via) e bonahala haholo ho:
1) Litšobotsi tse ntle tsa motlakase tse phahameng haholo. Lisebelisoa tsa khalase ke lisebelisoa tsa insulator, kamehla dielectric e ka bang 1/3 feela ea thepa ea silicon, ntlha ea tahlehelo ke litaelo tse 2-3 tsa boholo bo tlase ho feta thepa ea silicon, e leng se etsang hore tahlehelo ea substrate le liphello tsa likokoana-hloko li fokotsehe haholo ho netefatsa hore botšepehi ba pontšo e fetisitsoeng;
(2) Boholo bo boholo le karolo e nyane ea khalase e tšesaane ho bonolo ho e fumana. Re ka fana ka Sapphire, Quartz, Corning, le SCHOTT le bahlahisi ba bang ba likhalase ba ka fana ka boholo bo boholo (> 2m × 2m) le khalase e tšesaane haholo (<50µm) le lisebelisoa tsa khalase tse tšesaane haholo.
3) Theko e tlaase. Ho rua molemo ho tsoa ho phihlello e bonolo ea khalase ea boholo bo boholo bo tšesaane haholo, 'me ha e hloke hore ho behoe likarolo tsa insulating, theko ea tlhahiso ea poleiti ea adaptara ea khalase e ka ba 1/8 feela ea poleiti ea adaptara e thehiloeng ka silicon;
4) Mokhoa o bonolo. Ha ho na tlhoko ea ho kenya lera le sireletsang holim'a karolo e ka tlaase ea lerako le lebota le ka hare la TGV(Ka Glass Via), 'me ha ho hlokahale hore ho be le ho sesa ho pate ea adaptara e tšesaane haholo;
(5) Botsitso bo matla ba mechine. Le ha botenya ba poleiti ea adaptara bo ka tlase ho 100µm, warpage e ntse e le nyane;
6) Mefuta e mengata ea lisebelisoa. Ho phaella ho tebello e ntle ea kopo tšimong ea maqhubu a phahameng, e le ntho e bonahalang, e ka boela ea sebelisoa tšimong ea ho kopanya tsamaiso ea optoelectronic, airtightness le melemo ea ho hanyetsa kutu ho etsa hore khalase ea khalase tšimong ea MEMS encapsulation e be le bokhoni bo boholo.
Hajoale, k'hamphani ea rona e fana ka khalase ea TGV (Ka Glass Via) ka theknoloji ea lesoba, e ka hlophisa ts'ebetso ea lisebelisoa tse kenang le ho fana ka sehlahisoa ka kotloloho. Re ka fana ka Sapphire, Quartz, Corning, le SCHOTT, BF33 le likhalase tse ling. Haeba u na le tlhoko, u ka ikopanya le rona ka ho toba neng kapa neng! Rea u amohela ho botsa!