Sistimi ea ho Lebisa Wafer bakeng sa Tekanyo ea ho Lebisa Kristale

Tlhaloso e Khutšoanyane:

Sesebelisoa sa tataiso ea wafer ke sesebelisoa se nepahetseng haholo se sebelisang melao-motheo ea diffraction ea X-ray ho ntlafatsa lits'ebetso tsa tlhahiso ea semiconductor le saense ea thepa ka ho fumana tataiso ea kristale. Likarolo tsa eona tsa mantlha li kenyelletsa mohloli oa X-ray (mohlala, Cu-Kα, bolelele ba wavelength ba 0.154 nm), goniometer ea ho nepahala (resolution ea angular ≤0.001°), le li-detector (CCD kapa li-counters tsa scintillation). Ka ho potoloha lisampole le ho sekaseka mekhoa ea diffraction, e bala li-indices tsa kristale (mohlala, 100, 111) le sebaka sa lattice ka ho nepahala ha arcsecond ea ±30. Sistimi e tšehetsa ts'ebetso e iketsang, ho lokisa vacuum, le ho potoloha ha li-axis tse ngata, e tsamaellanang le li-wafer tsa lisenthimithara tse 2-8 bakeng sa litekanyo tse potlakileng tsa mathoko a wafer, lifofane tsa litšupiso, le alignment ea lera la epitaxial. Ts'ebeliso ea bohlokoa e kenyelletsa silicon carbide e shebaneng le ho seha, li-wafer tsa safire, le lehare la turbine blade le nang le netefatso ea ts'ebetso ea mocheso o phahameng, e ntlafatsa ka ho toba thepa ea motlakase ea chip le chai.

Romella imeile ho rona

Likaroloana

Selelekela sa Lisebelisoa

Lisebelisoa tsa tataiso ea wafer ke lisebelisoa tse nepahetseng tse thehiloeng melao-motheong ea X-ray diffraction (XRD), tse sebelisoang haholo-holo tlhahisong ea semiconductor, thepa ea optical, liseramik, le liindasteri tse ling tsa thepa ea kristale.

Lisebelisoa tsena li khetholla tataiso ea lekhoakhoa la kristale 'me li tataisa lits'ebetso tse nepahetseng tsa ho seha kapa ho bentša. Likarolo tsa bohlokoa li kenyelletsa:

Litekanyo tse nepahetseng haholo:E khona ho rarolla lifofane tsa kristale ka liphetho tsa angular ho fihlela ho 0.001°.
Ho lumellana ho hoholo ha mohlala:E tšehetsa li-wafer tse fihlang ho 450 mm ka bophara le boima ba 30 kg, e loketse thepa e kang silicon carbide (SiC), safire, le silicon (Si).
Moralo oa modular:Mesebetsi e ka atolosoang e kenyelletsa tlhahlobo ea curve e sisinyehang, 'mapa oa liphoso tsa bokaholimo ba 3D, le lisebelisoa tsa ho bokella bakeng sa ts'ebetso ea mehlala e mengata.

Liparamente tsa Bohlokoa tsa Tekheniki

Sehlopha sa Liparamente	Litekanyetso/Tlhophiso e Tloaelehileng
Mohloli oa X-ray	Cu-Kα (sebaka sa focal sa 0.4×1 mm), 30 kV e potlakisang motlakase, 0–5 mA e fetolwang ke pompo ya motlakase
Mefuta ea Angular	θ: -10° ho isa ho +50°; 2θ: -10° ho isa ho +100°
Ho nepahala	Qeto ea sekhutlo se sekametseng: 0.001°, ho lemoha sekoli sa bokaholimo: ±30 arcseconds (mokhoa o sisinyehang)
Lebelo la ho Skena	Ho skena ha Omega ho phethela tataiso e felletseng ea lattice ka metsotsoana e 5; Ho skena ha Theta ho nka metsotso e ka bang 1
Mokhahlelo oa mohlala	Moqomo o nang le V, ho hula ka moea, ho potoloha ka mahlakoreng a mangata, ho tsamaisana le li-wafer tsa lisenthimithara tse 2–8
Mesebetsi e Atolosoang	Tlhahlobo ea mothapo o thellang, 'mapa oa 3D, sesebelisoa sa ho bokella lintho, ho lemoha liphoso tsa mahlo (mengoapo, GBs)

Molao-motheo oa ho Sebetsa

1. Motheo oa Phapang ea X-ray

Mahlasedi a X a sebelisana le li-nuclei tsa athomo le lielektrone ka har'a lattice ea kristale, a hlahisa mekhoa ea diffraction. Molao oa Bragg (nλ = 2d sinθ) o laola kamano pakeng tsa li-angles tsa diffraction (θ) le sebaka sa lattice (d).
Li-detector li hapa mekhoa ena, e hlahlojoang ho tsosolosa sebopeho sa kristale.

2. Theknoloji ea ho Sekena ea Omega

Kristale e potoloha ka ho tsoelang pele ho potoloha axis e tsitsitseng ha mahlaseli a X a e bonesa.
Li-detector li bokella matšoao a diffraction ho pholletsa le lifofane tse ngata tsa kristale, li nolofalletsa ho fumana tataiso e felletseng ea lattice ka metsotsoana e 5.

3. Tlhahlobo ea Lekhalo la Rocking

Sekhutlo sa kristale se tsitsitseng ka dikhutlo tse fapaneng tsa ketsahalo ya X-ray ho lekanya bophara ba tlhoro (FWHM), ho lekola diphoso tsa lattice le kgatello.

4. Taolo e Iketsang

Li-interface tsa PLC le touchscreen li nolofalletsa likhutlo tse sehiloeng esale pele, maikutlo a nako ea sebele, le ho kopanngoa le mechini ea ho seha bakeng sa taolo e koetsoeng.

Melemo le Likarolo

1. Ho nepahala le Bokgoni

Ho nepahala ha Angular ± 0.001°, qeto ea ho lemoha sekoli <30 arcseconds.
Lebelo la ho skena la Omega le potlakile ka 200× ho feta ho skena tsa Theta tsa setso.

2. Ho Feto-fetoha ha Modulation le Ho Kgolofala

E ka atolosoa bakeng sa lits'ebetso tse ikhethileng (mohlala, li-wafer tsa SiC, mahare a turbine).
E hokahana le litsamaiso tsa MES bakeng sa ho beha leihlo tlhahiso ka nako ea sebele.

3. Ho lumellana le botsitso

E amohela disampole tse nang le sebopeho se sa tloaelehang (mohlala, li-ingot tsa safire tse petsohileng).
Moralo o phodisitsweng ke moya o fokotsa ditlhoko tsa tlhokomelo.

4. Ts'ebetso ea Bohlale

Tekanyetso ea ho tobetsa hanngoe le ts'ebetso ea mesebetsi e mengata.
Ho lekanya ka bohona ka likristale tsa litšupiso ho fokotsa liphoso tsa batho.

Likopo

1. Tlhahiso ea Semiconductor

Tsela ea ho seha ka wafer: E khetholla tsela ea Si, SiC, GaN bakeng sa katleho e ntle ea ho seha.
'Mapa o nang le diphoso: E hlwaya maqeba kapa ho sekama ha bokaholimo ho ntlafatsa chai ya di-chip.

2. Lisebelisoa tsa Optical

Likristale tse seng tsa mola (mohlala, LBO, BBO) bakeng sa lisebelisoa tsa laser.
Letšoao la litšupiso tsa bokaholimo ba wafer ea safire bakeng sa li-substrate tsa LED.

3. Liserami le Metswako

E sekaseka tataiso ea lijo-thollo ho Si3N4 le ZrO2 bakeng sa lits'ebetso tsa mocheso o phahameng.

4. Patlisiso le Taolo ea Boleng

Liunivesithi/lilaboratori bakeng sa nts'etsopele e ncha ea thepa (mohlala, li-alloy tse nang le entropy e ngata).
QC ea indasteri ho netefatsa botsitso ba sehlopha.

Litšebeletso tsa XKH

XKH e fana ka tšehetso e felletseng ea tekheniki bakeng sa lisebelisoa tsa tataiso ea wafer, ho kenyeletsoa ho kenya, ntlafatso ea liparamente tsa ts'ebetso, tlhahlobo ea curve ea rocking, le 'mapa oa liphoso tsa bokaholimo ba 3D. Litharollo tse etselitsoeng motho ka mong (mohlala, theknoloji ea ho bokella ingot) lia fanoa ho ntlafatsa katleho ea tlhahiso ea semiconductor le thepa ea optical ka ho feta 30%. Sehlopha se inehetseng se etsa koetliso sebakeng seo, ha tšehetso ea hole ea 24/7 le ho nkeloa sebaka ha likarolo tse ling ka potlako ho netefatsa hore lisebelisoa lia tšepahala.

E fetileng: Terei ea Ceramic ea SiC bakeng sa Mochini oa Wafer o nang le Khanyetso e Phahameng ea Mocheso

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