Wafer Orientation System ea Crystal Orientation Measurement

Wafer Orientation System bakeng sa Crystal Orientation Measurement Featured Image

Tlhaloso e Khutšoanyane:

Sesebelisoa sa ho shebana le li-wafer ke sesebelisoa se nepahetseng haholo se sebelisang melao-motheo ea phallo ea X-ray ho ntlafatsa tlhahiso ea semiconductor le lits'ebetso tsa mahlale a lintho tse bonahalang ka ho tseba maemo a crystallographic. Likarolo tsa eona tsa mantlha li kenyelletsa mohloli oa X-ray (mohlala, Cu-Kα, 0.154 nm wavelength), goniometer e nepahetseng (angular resolution ≤0.001 °), le li-detectors (CCD kapa scintillation counters). Ka ho potoloha disampole le ho sekaseka lipaterone tsa diffraction, e bala li-indices tsa crystallographic (mohlala, 100, 111) le sebaka sa marang-rang se nang le ± 30 arcsecond ho nepahala. Sistimi e ts'ehetsa ts'ebetso ea othomathike, ho lokisa vacuum, le ho potoloha ha li-axis tse ngata, tse tsamaellanang le li-wafers tsa 2-8-inch bakeng sa litekanyo tse potlakileng tsa mapheo a li-wafer, lifofane tsa litšupiso, le ho tsamaisana ha epitaxial layer. Lisebelisoa tsa bohlokoa li kenyelletsa silicon carbide e shebileng pele, liphaephe tsa safire, le netefatso ea ts'ebetso ea mocheso o phahameng oa turbine blade, e ntlafatsang ka kotloloho thepa ea motlakase ea chip le chai.

Re romelle lengolo-tsoibila

Likaroloana

Selelekela sa Thepa

Lisebelisoa tsa Wafer orientation ke lisebelisoa tse nepahetseng tse ipapisitseng le melao-motheo ea X-ray diffraction (XRD), e sebelisoang haholo tlhahisong ea semiconductor, lisebelisoa tsa optical, ceramics le liindasteri tse ling tsa kristale.

Lisebelisoa tsena li khetholla sebopeho sa kristale lattice le ho tataisa mekhoa e nepahetseng ea ho itšeha kapa ho bentša. Lintlha tsa bohlokoa li kenyelletsa:

Litekanyo tse nepahetseng haholo:E khona ho rarolla lifofane tsa crystallographic tse nang le liqeto tse ka tlase ho 0.001 ° ...
Mehlala e kholo ea ho lumellana:E tšehetsa li-wafers tse fihlang ho 450 mm bophara le boima ba lik'hilograma tse 30, tse loketseng lisebelisoa tse kang silicon carbide (SiC), safire le silicon (Si).
Moralo oa modular:Ts'ebetso e atolositsoeng e kenyelletsa tlhahlobo ea li-rocking curve, 'mapa oa sekoli sa 3D, le lisebelisoa tsa ho bokellana bakeng sa ts'ebetso ea mehlala e mengata.

Lintlha tsa bohlokoa tsa Tekheniki

Sehlopha sa Parameter	Maemo a Tloaelehileng / Tlhophiso
Mohloli oa X-ray	Cu-Kα (0.4 × 1 mm sebaka se shebaneng), 30 kV e potlakisang motlakase, 0–5 mA tube e feto-fetohang
Angular Range	θ: -10 ° ho +50 °; 2θ: -10° ho ea ho +100°
Ho nepahala	Qeto ea angle e sekame: 0.001 °, ho lemoha sekoli holim'a metsi: ± 30 arcseconds (mokokotlo o sisinyehang)
Lebelo la ho hlahloba	Sekena sa Omega se phethela sebopeho se felletseng sa lattice ka metsotsoana e 5; Theta scanning e nka ~ motsotso o le mong
Sethala sa mohlala	V-groove, ho huloa ha moea, ho potoloha ha li-angle tse ngata, ho tsamaellana le li-wafers tsa 2-8-inch
Mesebetsi e Atolositsoeng	Tlhahlobo ea curve curve, 'mapa oa 3D, sesebelisoa sa ho bokella, ho lemoha sekoli sa mahlo (mekhoa, li-GB)

Molao-motheo oa ho sebetsa

1. Motheo oa X-ray Diffraction

Li-X-ray li sebelisana le li-nuclei tsa athomo le li-electrone ka har'a lesela la kristale, li hlahisa mekhoa ea ho fapana. Molao oa Bragg ( nλ = 2d sinθ ) o laola kamano pakeng tsa li-angles tsa diffraction (θ) le sebaka sa marang-rang (d).
Li-detectors li tšoara mekhoa ena, e hlahlobiloeng ho tsosolosa sebopeho sa crystallographic.

2. Omega Scanning Technology

Kristale e potoloha e sa khaotse ho potoloha axis e tsitsitseng ha X-ray e e khantša.
Li-Detector li bokella mats'oao a phapano ho lifofane tse ngata tsa crystallographic, tse nolofalletsang boikemisetso bo felletseng ba ho shebana le lattice ka metsotsoana e 5.

3. Rocking Curve Analysis

Sekhutlo se tsitsitseng sa kristale se nang le li-angles tse fapaneng tsa liketsahalo tsa X-ray ho lekanya bophara ba tlhoro (FWHM), ho lekola bofokoli le khatello.

4. Taolo ea Boiketsetso

PLC le li-touchscreen interfaces li nolofalletsa li-angles tsa ho itšeha esale pele, maikutlo a nako ea nnete, le ho hokahana le mechini ea ho itšeha bakeng sa taolo e koetsoeng.

Melemo le Likarolo

1. Ho nepahala le ho sebetsa ka katleho

Ho nepahala ha angular ± 0.001 °, tharollo ea ho lemoha sekoli <30 arcseconds.
Lebelo la scan la Omega le lebelo la 200 × ho feta likheo tsa setso tsa Theta.

2. Modularity le Scalability

E ka atolosoa bakeng sa lits'ebetso tse ikhethileng (mohlala, li-wafers tsa SiC, li-blade tsa turbine).
E hokahana le litsamaiso tsa MES bakeng sa tlhahlobo ea tlhahiso ea nako ea nnete.

3. Ho lumellana le botsitso

E amohela lisampole tse nang le sebopeho se sa tloaelehang (mohlala, li-ingots tsa safire tse phatlohileng).
Moralo o pholileng ka moea o fokotsa litlhoko tsa tlhokomelo.

4. Ts'ebetso e Bohlale

Tekanyetso ea ho tobetsa ha 'ngoe le ts'ebetso ea mesebetsi e mengata.
Ho lekanya ka boits'oaro ka likristale tsa litšupiso ho fokotsa liphoso tsa motho.

Lisebelisoa

1. Semiconductor Manufacturing

Mokhoa oa ho qoelisa oa Wafer: E khetha Si, SiC, li-wafer tsa GaN bakeng sa ts'ebetso e ntle ea ho itšeha.
'Mapa o nang le liphoso: E hloaea mengoallo kapa ho kheloha holimo ho ntlafatsa tlhahiso ea chip.

2. Lisebelisoa tsa Optical

Likristale tse se nang moeli (mohlala, LBO, BBO) bakeng sa lisebelisoa tsa laser.
Letšoao la sefahleho sa Sapphire wafer bakeng sa likaroloana tsa LED.

3. Li-Ceramics le Composites

E sekaseka maemo a lijo-thollo ho Si3N4 le ZrO2 bakeng sa lisebelisoa tsa mocheso o phahameng.

4. Patlisiso le Taolo ea Boleng

Liunivesithi / lilab tsa nts'etsopele ea lisebelisoa tse ncha (mohlala, li-alloys tse phahameng tsa entropy).
QC ea indasteri ho etsa bonnete ba hore batch ba lumellana.

Litšebeletso tsa XKH

XKH e fana ka ts'ehetso e felletseng ea tekheniki bakeng sa lisebelisoa tse tsamaisang liphaephe, ho kenyeletsoa ho kenya, ts'ebetso ea ts'ebetso ea paramethara, tlhahlobo e sisinyehang, le 'mapa oa bokooa ba 3D. Litharollo tse lokiselitsoeng (mohlala, theknoloji ea ingot stacking) li fanoa ho ntlafatsa katleho ea tlhahiso ea lisebelisoa tsa semiconductor le optical ka ho feta 30%. Sehlopha se inehetseng se etsa koetliso ea sebaka sa marang-rang, ha ts'ehetso e hole ea 24/7 le phetoho e potlakileng ea karolo e setseng e netefatsa ho ts'epahala ha lisebelisoa.

E fetileng: SiC Ceramic Tray ea Wafer Carrier e nang le khanyetso e phahameng ea mocheso

E 'ngoe: Sapphire Raw Raw Material E Thehiloe Lab bakeng sa Tlhahiso ea Mabenyane