Wafer ea Sapphire ea lisenthimithara tse 12 bakeng sa Tlhahiso ea Semiconductor e Phahameng

Sejana sa Sapphire sa lisenthimithara tse 12 bakeng sa Tlhahiso ea Semiconductor e Phahameng Setšoantšo se Hlahisitsoeng

Tlhaloso e Khutšoanyane:

Wafer ea safire ea lisenthimithara tse 12 e etselitsoe ho fihlela tlhoko e ntseng e hola ea tlhahiso ea semiconductor ea sebaka se seholo, e nang le phallo e phahameng le ea optoelectronic. Ha meralo ea lisebelisoa e ntse e tsoela pele ho hola le mela ea tlhahiso e ntse e ea mefuteng e meholo ea wafer, li-substrate tsa safire tse nang le bophara bo boholo haholo li fana ka melemo e hlakileng tlhahisong, ntlafatsong ea chai le taolong ea litšenyehelo.

Romella imeile ho rona

Likaroloana

Setšoantšo se qaqileng

Selelekela sa wafer ea safire ea lisenthimithara tse 12

Li-wafer tsa rona tsa safire tsa lisenthimithara tse 12 li entsoe ka Al₂O₃ e hloekileng haholo, li kopanya matla a matle a mechini, botsitso ba mocheso le boleng ba bokaholimo. Ka kholo e ntlafalitsoeng ea kristale le ts'ebetso e nepahetseng ea wafer, li-substrate tsena li fana ka ts'ebetso e tšepahalang bakeng sa lits'ebetso tse tsoetseng pele tsa LED, GaN, le li-semiconductor.

Litšobotsi tsa Boitsebiso

Sapphire (single-crystal aluminium oxide, Al₂O₃) e tsebahala haholo ka thepa ea eona e ikhethang ea 'mele le ea lik'hemik'hale. Li-wafer tsa safire tsa lisenthimithara tse 12 li rua melemo eohle ea thepa ea safire ha li ntse li fana ka sebaka se seholo se ka sebelisoang.

Litšobotsi tsa bohlokoa tsa thepa li kenyelletsa:

Ho thatafala ho hoholo le ho hanyetsa ho roala
Botsitso bo botle ba mocheso le ntlha e phahameng ea ho qhibiliha
Ho hanyetsa lik'hemik'hale ka mokhoa o phahameng ho li-acid le li-alkali
Ponaletso e phahameng ea optical ho tloha ho UV ho ea ho IR wavelengths
Thepa e ntle ea ho thibela motlakase

Litšobotsi tsena li etsa hore li-wafer tsa safire tsa lisenthimithara tse 12 li lokele libaka tse thata tsa ts'ebetso le lits'ebetso tsa tlhahiso ea li-semiconductor tse nang le mocheso o phahameng.

Mokhoa oa Tlhahiso

Tlhahiso ea li-wafer tsa safire tsa lisenthimithara tse 12 e hloka kholo e tsoetseng pele ea kristale le mahlale a ho sebetsana le ho nepahala haholo. Ts'ebetso e tloaelehileng ea tlhahiso e kenyelletsa:

Kgolo ea kristale e le 'Ngoe
Likristale tsa safire tse hloekileng haholo li lengoa ho sebelisoa mekhoa e tsoetseng pele joalo ka KY kapa mahlale a mang a kholo a kristale a bophara bo boholo, ho netefatsa hore kristale e ts'oana le khatello e tlase ea ka hare.
Ho Bopa le ho Seha Kristale
Sekoti sa safire se bōpehile hantle 'me se sehiloe ka li-wafer tsa lisenthimithara tse 12 ho sebelisoa lisebelisoa tsa ho seha tse nepahetseng haholo ho fokotsa tšenyo e ka tlas'a lefatše.
Ho lapa le ho polisha
Mekhoa ea ho lapa ka mehato e mengata le ho polisha ka mechine ea lik'hemik'hale (CMP) e sebelisoa ho fihlela ho ba le ho hlaka ho hoholo ha bokaholimo, ho ba bataletseng le ho tšoana ha botenya.
Ho Hloekisa le ho Hlahloba
Wafer e 'ngoe le e 'ngoe ea safire ea lisenthimithara tse 12 e hloekisoa ka botlalo le tlhahlobo e tiileng, ho kenyeletsoa boleng ba bokaholimo, TTV, bow, warp, le tlhahlobo ea liphoso.

Likopo

Li-wafer tsa safire tsa lisenthimithara tse 12 li sebelisoa haholo mahlaleng a tsoetseng pele le a ntseng a hlaha, ho kenyeletsoa:

Li-substrate tsa LED tse matla haholo le tse khanyang haholo
Lisebelisoa tsa motlakase tse thehiloeng ho GaN le lisebelisoa tsa RF
Lisebelisoa tsa ho jara thepa ea semiconductor le li-substrate tse sireletsang mocheso
Lifensetere tsa mahlo le likarolo tse kholo tsa mahlo
Sephutheloana se tsoetseng pele sa semiconductor le bajari ba khethehileng ba ts'ebetso

Bophara bo boholo bo nolofalletsa tlhahiso e phahameng le ho ntlafatsa ts'ebetso ea litšenyehelo tlhahisong ea bongata.

Melemo ea Li-wafer tsa Sapphire tsa lisenthimithara tse 12

Sebaka se seholo se ka sebelisoang bakeng sa tlhahiso e phahameng ea sesebelisoa ka wafer
Ho tsitsa le ho tšoana ha ts'ebetso ho ntlafetseng
Theko e fokotsehileng ka sesebelisoa tlhahisong e phahameng
Matla a matle a mechini bakeng sa ho sebetsana le boholo bo boholo
Litlhaloso tse ka fetoloang bakeng sa lits'ebetso tse fapaneng

Dikgetho tsa ho iketsetsa

Re fana ka mokhoa o feto-fetohang oa ho iketsetsa li-wafer tsa safire tsa lisenthimithara tse 12, ho kenyeletsoa:

Tsela eo kristale e shebaneng le yona (C-plane, A-plane, R-plane, jj.)
Botenya le mamello ea bophara
Ho bentša ka lehlakore le le leng kapa ka lehlakore le le leng
Profaele ea moeli le moralo oa chamfer
Litlhoko tsa ho ba thata le ho ba bataletse holim'a bokaholimo

Paramethara	Tlhaloso	Lintlha
Bophara ba Wafer	Li-inch tse 12 (300 mm)	Sejana se tloaelehileng sa bophara bo boholo
Thepa	Sapphire ea kristale e le 'ngoe (Al₂O₃)	Bohloeki bo phahameng, sehlopha sa elektroniki/sa mahlo
Boikutlo ba kristale	Sefofane sa C (0001), Sefofane sa A (11-20), Sefofane sa R (1-102)	Mekhoa e meng e fumanehang
Botenya	430–500 μm	Botenya bo ikhethileng bo fumaneha ha ho kopuoa
Mamello ea Botenya	± 10 μm	Mamello e thata bakeng sa lisebelisoa tse tsoetseng pele
Phapang ea Botenya Bohle (TTV)	≤10 μm	E netefatsa ts'ebetso e ts'oanang ho pholletsa le wafer
Seqha	≤50 μm	E lekantsoe holim'a wafer eohle
Koahela	≤50 μm	E lekantsoe holim'a wafer eohle
Qetello ea Bokaholimo	E bentšitsoeng ka lehlakore le le leng (SSP) / E bentšitsoeng ka lehlakore le le leng (DSP)	Boleng bo phahameng ba optical
Bokgoni ba Bokaholimo (Ra)	≤0.5 nm (e bentšitsoeng)	Boreleli ba maemo a athomo bakeng sa kholo ea epitaxial
Profaele ea Moeli	Chamfer / Moeli o chitja	Ho thibela ho qhetsoha ha ho sebetsoa
Ho nepahala ha tataiso	± 0.5°	E netefatsa kholo e nepahetseng ea lera la epitaxial
Botenya bo Phethahetseng ba Sekoli	<10 cm⁻²	E lekantsoe ka tlhahlobo ea mahlo
Bophara	≤2 μm / 100 mm	E netefatsa lithography e ts'oanang le kholo ea epitaxial
Bohloeki	Sehlopha sa 100 - Sehlopha sa 1000	E lumellana le kamore ea ho hlwekisa
Phetiso ea Optical	>85% (UV–IR)	Ho itshetlehile ka bolelele ba leqhubu le botenya

Lipotso Tse Botsoang Khafetsa ka Wafer ea Sapphire ea lisenthimithara tse 12

P1: Botenya bo tloaelehileng ba wafer ea safire ea lisenthimithara tse 12 ke bofe?
K: Botenya bo tloaelehileng bo tloha ho 430 μm ho isa ho 500 μm. Botenya bo ikhethileng bo ka boela ba hlahisoa ho latela litlhoko tsa bareki.

P2: Ke litsela life tsa kristale tse fumanehang bakeng sa li-wafer tsa safire tsa lisenthimithara tse 12?
K: Re fana ka tataiso ea C-plane (0001), A-plane (11-20), le R-plane (1-102). Litsela tse ling li ka fetoloa ho latela litlhoko tse itseng tsa sesebelisoa.

P3: Phapang ea botenya bohle (TTV) ea wafer ke efe?
K: Li-wafer tsa rona tsa safire tsa lisenthimithara tse 12 hangata li na le TTV ≤10 μm, e leng se netefatsang hore lia tšoana holim'a bokaholimo bohle ba wafer bakeng sa tlhahiso ea lisebelisoa tsa boleng bo holimo.

Mabapi le rona

XKH e ikhethile ka nts'etsopele ea theknoloji e phahameng, tlhahiso le thekiso ea khalase e khethehileng ea mahlo le thepa e ncha ea kristale. Lihlahisoa tsa rona li sebeletsa lisebelisoa tsa elektroniki tsa mahlo, lisebelisoa tsa elektroniki tsa bareki le sesole. Re fana ka likarolo tsa mahlo tsa Sapphire, likoahelo tsa lense ea mohala oa thekeng, Ceramics, LT, Silicon Carbide SIC, Quartz, le li-wafer tsa kristale tsa semiconductor. Ka boiphihlelo bo nang le boiphihlelo le lisebelisoa tsa sejoale-joale, re ipabola ts'ebetsong ea lihlahisoa tse seng tsa maemo a holimo, re ikemiselitse ho ba khoebo e etellang pele ea theknoloji e phahameng ea lisebelisoa tsa optoelectronic.