2inch SiC ingot Dia50.8mmx10mmt 4H-N monocrystal

Tlhaloso e Khutšoanyane:

Ingot ea SiC (silicon carbide) ea lisenthimithara tse 2 e bolela kristale e le 'ngoe ea silicon carbide e bopehileng joaloka cylindrical kapa block e nang le bophara kapa bolelele ba lisenthimithara tse 2. Li-ingot tsa silicon carbide li sebelisoa e le thepa ea ho qala bakeng sa tlhahiso ea lisebelisoa tse fapaneng tsa semiconductor, joalo ka lisebelisoa tsa elektroniki tse matla le lisebelisoa tsa optoelectronic.

Romella imeile ho rona

Likaroloana

Theknoloji ea Kholo ea Crystal ea SiC

Litšobotsi tsa SiC li etsa hore ho be thata ho holisa likristale tse le 'ngoe. Sena se bakoa haholo-holo ke taba ea hore ha ho na karolo ea metsi e nang le karolelano ea stoichiometric ea Si: C = 1: 1 khatellong ea sepakapaka, 'me ho ke ke ha khoneha ho holisa SiC ka mekhoa ea kholo e holileng haholoanyane, joalo ka mokhoa oa ho hula ka kotloloho le mokhoa oa ho oa oa, e leng lintho tsa bohlokoa indastering ea semiconductor. Ka khopolo-taba, tharollo e nang le karolelano ea stoichiometric ea Si: C = 1: 1 e ka fumanoa feela ha khatello e le kholo ho feta 10E5atm 'me mocheso o phahame ho feta 3200℃. Hona joale, mekhoa e meholo e kenyelletsa mokhoa oa PVT, mokhoa oa karolo ea metsi, le mokhoa oa ho beha lik'hemik'hale tsa mouoane oa mocheso o phahameng.

Li-wafer le likristale tsa SiC tseo re fanang ka tsona li lengoa haholo-holo ka ho tsamaisoa ha mouoane oa 'mele (PVT), 'me se latelang ke selelekela se sekhutšoanyane sa PVT:

Mokhoa oa ho tsamaisa mouoane oa 'mele (PVT) o simolohile mokhoeng oa ho kenya mocheso oa khase o qapiloeng ke Lely ka 1955, moo phofo ea SiC e kenngoang ka har'a tube ea graphite 'me e futhumatsoa mochesong o phahameng ho etsa hore phofo ea SiC e bole le ho etsa hore e be sublimate, ebe tube ea graphite ea pholisoa, 'me likarolo tsa khase tse bolileng tsa phofo ea SiC li bolokoa le ho kristaletsoa e le likristale tsa SiC sebakeng se potolohileng tube ea graphite. Le hoja mokhoa ona o le thata ho fumana likristale tse le 'ngoe tsa SiC tse kholo 'me mokhoa oa ho beha ka har'a tube ea graphite o le thata ho o laola, o fana ka mehopolo bakeng sa bafuputsi ba latelang.

YM Tairov le ba bang ba Russia ba hlahisitse mohopolo oa kristale ea peo motheong ona, o ileng oa rarolla bothata ba sebopeho sa kristale se sa laoleheng le boemo ba nucleation ba likristale tsa SiC. Bafuputsi ba latelang ba ile ba tsoela pele ho ntlafatsa 'me qetellong ba hlahisa mokhoa oa phetisetso ea mouoane oa 'mele (PVT) o sebelisoang indastering kajeno.

Jwalo ka mokgwa wa pele wa kgolo ya kristale ya SiC, PVT hajoale ke mokgwa o tsebahalang haholo wa kgolo bakeng sa kristale ya SiC. Ha e bapiswa le mekgwa e meng, mokgwa ona o na le ditlhoko tse tlase bakeng sa disebediswa tsa kgolo, tshebetso e bonolo ya kgolo, taolo e matla, ntshetsopele e phethahetseng le dipatlisiso, mme o se o ntse o ntlafaditswe indastering.