Sekwahelo sa Silicon sa lisenthimithara tse 8 sa mofuta wa P/N (100) 1-100Ω substrate ya ho kgutlisa e seng ya nnete

Sekwahelo sa Silicon sa lisenthimithara tse 8 sa mofuta wa P/N (100) 1-100Ω substrate ya dummy reclaimer Setšoantšo se Hlahisitsoeng

Tlhaloso e Khutšoanyane:

Letoto le leholo la di-wafer tse bentšitsoeng mahlakore a mabedi, di-wafer tsohle di tloha ho 50 ho isa ho 400mm ka bophara Haeba tlhaloso ya hao e sa fumanehe lenaneng la rona, re thehile dikamano tsa nako e telele le bafepedi ba bangata ba kgonang ho iketsetsa di-wafer ho lekana tlhaloso efe kapa efe e ikgethang. Di-wafer tse bentšitsoeng mahlakore a mabedi di ka sebediswa bakeng sa silicon, khalase le thepa e nngwe e sebediswang haholo indastering ya semiconductor.

Romella imeile ho rona

Likaroloana

Hlahisa lebokose la wafer

Wafer ea silicon ea lisenthimithara tse 8 ke thepa ea silicon substrate e sebelisoang haholo 'me e sebelisoa haholo ts'ebetsong ea tlhahiso ea lipotoloho tse kopantsoeng. Li-wafer tse joalo tsa silicon li sebelisoa haholo ho etsa mefuta e fapaneng ea lipotoloho tse kopantsoeng, ho kenyeletsoa li-microprocessor, li-memory chip, li-sensor le lisebelisoa tse ling tsa elektroniki. Li-wafer tsa silicon tsa lisenthimithara tse 8 li sebelisoa hangata ho etsa li-chips tsa boholo bo batlang bo le boholo, ka melemo e kenyeletsang sebaka se seholo le bokhoni ba ho etsa li-chips tse ngata holim'a wafer e le 'ngoe ea silicon, e leng se lebisang ho eketseheng ha katleho ea tlhahiso. Wafer ea silicon ea lisenthimithara tse 8 e boetse e na le thepa e ntle ea mechini le ea lik'hemik'hale, e loketseng tlhahiso e kholo ea potoloho e kopantsoeng.

Likarolo tsa sehlahisoa

Mofuta oa 8" P/N, Wafer ea silicon e bentšitsoeng (lik'hilograma tse 25)

Tataiso: 200

Ho hanyetsa: 0.1 - 40 ohm•cm (E ka fapana ho tloha sehlopheng se seng ho ea ho se seng)

Botenya: 725+/-20um

Kereiti ea Prime/Monitor/Teko

MATLHOHO A LINTHO

Paramethara	Tšobotsi
Mofuta/Dopant	P, Boron N, Phosphorous N, Antimony N, Arsenic
Likamano	<100>, <111> khaola litsela ho latela litlhaloso tsa moreki
Dikahare tsa Oksijene	10¹⁹ppmA Mamello e ikhethileng ho latela litlhaloso tsa moreki
Dikahare tsa Khabone	< 0.6 ppmA

MATLHOHO A MEKHANIKI

Paramethara	Prime	Mohlokomeli/ Teko ea A	Teko
Bophara	200±0.2mm	200 ± 0.2mm	200 ± 0.5 mm
Botenya	725±20µm (e tloaelehileng)	725±25µm(e tloaelehileng) 450±25µm 625±25µm 1000±25µm 1300±25µm 1500±25 µm	725±50µm (e tloaelehileng)
TTV	< 5 µm	< 10 µm	< 15 µm
Seqha	< 30 µm	< 30 µm	< 50 µm
Phuthela	< 30 µm	< 30 µm	< 50 µm
Ho potoloha moeli	SEMI-STD
Ho tšoaea	Matlo a mantlha a SEMI-Flat feela, Matlo a SEMI-STD Jeida Flat, Notch

Paramethara	Prime	Mohlokomeli/ Teko ea A	Teko
Mekhoa ea Lehlakore le ka Pele
Boemo ba bokaholimo	Lik'hemik'hale tse bentšitsoeng ka mechine	Lik'hemik'hale tse bentšitsoeng ka mechine	Lik'hemik'hale tse bentšitsoeng ka mechine
Bokahare bo Bobebe	< 2 A°	< 2 A°	< 2 A°
Tšilafalo Likaroloana @ >0.3 µm	= 20	= 20	= 30
Leru, Likoti Lekhapetla la lamunu	Ha ho letho	Ha ho letho	Ha ho letho
Saw, Marks Likhohlano	Ha ho letho	Ha ho letho	Ha ho letho
Mekhoa ea ho Lahla ka Morao
Mapetso, maoto a makhoaba, matheba a sakha, matheba	Ha ho letho	Ha ho letho	Ha ho letho
Boemo ba bokaholimo	E qotsitsoeng ka lebaka la ho thothomela