Wafer e koahetsoeng ka Au, wafer ea safire, wafer ea silicon, wafer ea SiC, 2inch 4inch 6inch, Botenya bo koahetsoeng ka khauta 10nm 50nm 100nm
Likarolo tsa Bohlokoa
| Tšobotsi | Tlhaloso |
| Lisebelisoa tsa Substrate | Silicon (Si), Sapphire (Al₂O₃), Silicon Carbide (SiC) |
| Botenya ba Khauta ea ho Aparela | 10nm, 50nm, 100nm, 500nm |
| Khauta e Hloekileng | 99.999%bohloeki bakeng sa ts'ebetso e ntle ka ho fetisisa |
| Filimi ea ho khomarela | Chromium (Cr), Bohloeki ba 99.98%, ho netefatsa ho khomarela ho matla |
| Bokakang ba Bokaholimo | Nm tse 'maloa (boleng ba bokaholimo bo boreleli bakeng sa lits'ebetso tse nepahetseng) |
| Khanyetso (Si Wafer) | 1-30 Ohm/cm(ho latela mofuta) |
| Boholo ba Wafer | Li-inch tse 2, Li-inch tse 4, Li-inch tse 6, le boholo bo ikhethileng |
| Botenya (Si Wafer) | 275µm, 381µm, 525µm |
| TTV (Phetoho ea Botenya Bohle) | ≤20µm |
| Folete ea Pele (Si Wafer) | 15.9 ± 1.65mmho32.5 ± 2.5mm |
Hobaneng ho Koahela Khauta ho le Bohlokoa Indastering ea Semiconductor
Ho Tsamaisa Motlakase
Khauta ke e 'ngoe ea thepa e ntle ka ho fetisisa bakeng saho tsamaisa motlakaseLi-wafer tse koahetsoeng ka khauta li fana ka litsela tse sa hanyetseng haholo, tse bohlokoa bakeng sa lisebelisoa tsa semiconductor tse hlokang likhokahano tsa motlakase tse potlakileng le tse tsitsitseng.bohloeki bo phahamengea khauta e netefatsa ho tsamaisoa ha motlakase hantle, e fokotsa tahlehelo ea lets'oao.
Khanyetso ea ts'enyeho
Khauta keha e senye'me e hanela oxidation haholo. Sena se etsa hore e be ntle bakeng sa lits'ebetso tsa semiconductor tse sebetsang libakeng tse thata kapa tse tlas'a mocheso o phahameng, mongobo, kapa maemo a mang a senyang. Wafer e koahetsoeng ka khauta e tla boloka thepa ea eona ea motlakase le ts'epo ha nako e ntse e ea, e fane kabophelo bo bolelele ba tšebeletsobakeng sa disebediswa tseo e sebediswang ho tsona.
Tsamaiso ea Thermal
Khautaconductivity e ntle haholo ea mochesoe netefatsa hore mocheso o hlahisoang nakong ea ts'ebetso ea lisebelisoa tsa semiconductor o qhala ka katleho. Sena se bohlokoa haholo bakeng sa lits'ebetso tse nang le matla a maholo joalo kaMabone a LED, motlakase oa elektronikelelisebelisoa tsa optoelectronic, moo mocheso o feteletseng o ka lebisang ho hloleheng ha sesebediswa haeba se sa laolwe hantle.
Ho Tšoarella ha Mekaniki
Liaparo tsa khauta li fana katšireletso ea mechiniho wafer, ho thibela tshenyo ya bokahodimo nakong ya ho sebetsana le ho sebetsana le yona. Lera lena le eketsehileng la tshireletso le netefatsa hore di-wafer di boloka botsitso ba sebopeho sa tsona le botshepehi, esita le maemong a thata.
Litšobotsi tsa ho Koahela ka Mor'a ho Koahela
Boleng bo Ntlafalitsoeng ba Bokaholimo
Sekoahelo sa khauta se ntlafatsaboreledi ba bokaholimoea wafer, e leng ntho ea bohlokoa bakeng saho nepahala ho hoholoditshebediso.ho rarahana ha bokaholimoe fokotsoa ho ba li-nanometer tse 'maloa, e leng se netefatsang hore sebaka se se nang sekoli se loketse lits'ebetso tse kangho tlamahana ka terata, ho kopanyalefotolithography.
Matlo a Ntlafalitsoeng a Kopanyo le a ho Theola
Lera la khauta le ntlafatsathepa ea ho kopanyaea wafer, e leng se etsang hore e be e loketseng bakeng saho tlamahana ka terataletlamo ea flip-chipSena se fella ka dikgokelo tsa motlakase tse sireletsehileng le tse tshwarellang nako e telele hoSephutheloana sa IClelikopano tsa semiconductor.
Ha e na tshenyo mme e nka nako e telele
Sekoahelo sa khauta se netefatsa hore wafer e tla lula e se na oxidation le ho senyeha, esita le ka mor'a ho pepesehela maemo a thata a tikoloho nako e telele. Sena se tlatsetsa hobotsitso ba nako e teleleea sesebelisoa sa ho qetela sa semiconductor.
Botsitso ba Thermal le Motlakase
Li-wafer tse koahetsoeng ka khauta li fana ka botsitsoho qhalana ha mochesoleho tsamaisa motlakase, e lebisang tshebetsong e betere lebotšepehiea lisebelisoa ha nako e ntse e ea, esita le maemong a mocheso o feteletseng.
Liparamente
| Thepa | Boleng |
| Lisebelisoa tsa Substrate | Silicon (Si), Sapphire (Al₂O₃), Silicon Carbide (SiC) |
| Botenya ba Lera la Khauta | 10nm, 50nm, 100nm, 500nm |
| Khauta e Hloekileng | 99.999%(bohloeki bo phahameng bakeng sa ts'ebetso e ntle ka ho fetisisa) |
| Filimi ea ho khomarela | Chromium (Cr),99.98%bohloeki |
| Bokakang ba Bokaholimo | Li-nanometer tse 'maloa |
| Khanyetso (Si Wafer) | 1-30 Ohm/cm |
| Boholo ba Wafer | Li-inch tse 2, Li-inch tse 4, Li-inch tse 6, boholo bo ikhethileng |
| Botenya ba Wafer | 275µm, 381µm, 525µm |
| TTV | ≤20µm |
| Folete ea Pele (Si Wafer) | 15.9 ± 1.65mmho32.5 ± 2.5mm |
Litšebeliso tsa Li-wafer tse koahetsoeng ka khauta
Sephutheloana sa Semiconductor
Li-wafer tse koahetsoeng ka khauta li sebelisoa haholo hoSephutheloana sa IC, moo baho tsamaisa motlakase, ho tšoarella ha mechinileho qhalana ha mochesothepa e netefatsa hore e ka tšeptjoalikhokahanoletlamoka disebedisweng tsa semiconductor.
Tlhahiso ea LED
Li-wafer tse koahetsoeng ka khauta li bapala karolo ea bohlokoa hoTlhahiso ea LED, moo ba ntlafatsangtaolo ea mochesolets'ebetso ea motlakase. Lera la khauta le netefatsa hore mocheso o hlahisoang ke mabone a LED a matla a maholo o qhala ka katleho, e leng se tlatsetsang bophelong bo bolelele le katlehong e ntlafetseng.
Lisebelisoa tsa Optoelectronic
In lisebelisoa tsa optoelectronics, di-wafer tse manehilweng ka kgauta di sebediswa disebedisweng tse kangli-photodetectors, diode tsa laserleli-sensor tsa leseliSeaparo sa khauta se fana ka bokhabane bo boholoho khanna ha mochesolebotsitso ba motlakase, ho netefatsa tshebetso e tsitsitseng disebedisweng tse hlokang taolo e nepahetseng ya mabone le matshwao a motlakase.
Matla a Elektroniki
Li-wafer tse koahetsoeng ka khauta lia hlokahala bakeng salisebelisoa tsa elektroniki tsa motlakase, moo bokgoni bo phahameng le botshepehi di leng bohlokwa. Di-wafer tsena di netefatsa hore di tsitsitsephetoho ea matlaleho qhala ha mochesodisebedisweng tse kangli-transistors tsa matlalebalaoli ba motlakase.
Microelectronics le MEMS
In dielekthroniki tse nyaneleMEMS (Mekhoa e Menyenyane ea Motlakase), di-wafer tse manehilweng ka kgauta di sebediswa ho etsalikarolo tsa microelectromechanicaltse hlokang ho nepahala ho hoholo le ho tšoarella. Lera la khauta le fana ka ts'ebetso e tsitsitseng ea motlakase letšireletso ea mechinidisebedisweng tse bonolo tsa elektroniki.
Lipotso tse Botsoang Khafetsa (Lipotso le Likarabo)
P1: Ke hobane'ng ha u sebelisa khauta bakeng sa ho koahela li-wafer?
A1:Khauta e sebelisetsoamotlakase o phahameng ka ho fetisisa, khanyetso ea ts'enyeholetaolo ea mochesothepa. E netefatsalikhokahano tse tšepahalang, nako e telele ea bophelo ba sesebelisoaletshebetso e tsitsitsenglits'ebetsong tsa semiconductor.
P2: Melemo ea ho sebelisa li-wafer tse koahetsoeng ka khauta lits'ebetsong tsa semiconductor ke efe?
A2:Li-wafer tse koahetsoeng ka khauta li fana kabotšepehi bo phahameng, botsitso ba nako e teleleletshebetso e betere ya motlakase le mochesoHape li ntlafatsathepa ea ho kopanyale ho sireletsa khahlanong leoxidationlets'enyeho.
P3: Ke lokela ho khetha botenya bofe ba ho roala khauta bakeng sa ts'ebeliso ea ka?
A3:Botenya bo loketseng bo itšetlehile ka kopo ea hau e itseng.10nme loketse lits'ebetso tse nepahetseng le tse bonolo, ha50nmho100nmLiaparo li sebelisoa bakeng sa lisebelisoa tse matla a holimo.500nme ka sebelisoa bakeng sa lits'ebetso tse boima tse hlokang mekhahlelo e teteaneng bakeng saho tšoarellaleho qhala ha mocheso.
P4: Na o ka etsa boholo ba wafer?
A4:E, li-wafer li fumaneha kaLi-inch tse 2, Li-inch tse 4leLi-inch tse 6boholo bo tloaelehileng, 'me re ka boela ra fana ka boholo bo ikhethileng ho fihlela litlhoko tsa hau tse ikhethileng.
P5: Seaparo sa khauta se ntlafatsa ts'ebetso ea sesebelisoa joang?
A5:Khauta ea ntlafalaho qhalana ha mocheso, ho tsamaisa motlakaselekhanyetso ea ts'enyeho, tseo kaofela li tlatsetsang ho ntlafatseng le holisebelisoa tse tšepahalang tsa semiconductorka nako e telele ea ts'ebetso.
P6: Filimi ea ho khomarela e ntlafatsa joang ho penta ha khauta?
A6:Thechromium (Cr)filimi ea ho khomarela e netefatsa tlamo e matla pakeng tsalera la khautalesubstrate, ho thibela ho arohana ha dikotwana le ho netefatsa botšepehi ba wafer nakong ya ho sebetsa le ho sebedisa.
Qetello
Li-Wafer tsa rona tse koahetsoeng ka khauta tsa Silicon, Sapphire, le SiC li fana ka litharollo tse tsoetseng pele bakeng sa lits'ebetso tsa semiconductor, tse fanang ka conductivity e phahameng ea motlakase, ho qhibiliha ha mocheso, le ho hanyetsa mafome. Li-wafer tsena li loketse ho paka li-semiconductor, tlhahiso ea LED, optoelectronics, le tse ling. Ka khauta e hloekileng haholo, botenya ba ho roala bo ka fetoloang, le ho tšoarella ho babatsehang ha mechini, li netefatsa ho tšepahala ha nako e telele le ts'ebetso e tsitsitseng libakeng tse thata.
Setšoantšo se qaqileng
