Li-wafer tsa Quartz tse Hloekileng ka ho Fetisisa bakeng sa Semiconductor, Lisebelisoa tsa Optical tsa Photonics 2″4″6″8″12″

Tlhaloso e Khutšoanyane:

Quartz e kopantsoeng—e tsejoang hape e leSilika e kopantsoeng—ke mofuta o sa kristale (o sa fetoheng) oa silicon dioxide (SiO₂). Ho fapana le likhalase tsa borosilicate kapa likhalase tse ling tsa indasteri, quartz e kopantsoeng ha e na lintho tse tlatsetsang kapa lintho tse eketsang, e fanang ka motsoako o hloekileng oa SiO₂ ka lik'hemik'hale. E tsebahala ka phetiso ea eona e ikhethang ea optical ho pholletsa le li-spectrum tsa ultraviolet (UV) le infrared (IR), e fetang thepa ea khalase ea setso.

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Likaroloana

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Li-wafer tsa khalase tsa Silica le Optical Quartz tse kopantsoeng-2

wafer_quartz_wafer_4_inch_fused_silica_wafer_

Kakaretso ea Khalase ea Quartz

Li-wafer tsa quartz li etsa mokokotlo oa lisebelisoa tse se nang palo tsa sejoale-joale tse tsamaisang lefats'e la dijithale la kajeno. Ho tloha ho tsamaiseng ka har'a smartphone ea hau ho ea mokokotlong oa liteishene tsa motheo tsa 5G, quartz e fana ka khutso botsitso, bohloeki le ho nepahala ho hlokahalang ho lisebelisoa tsa elektroniki tse sebetsang hantle le li-photonics. Ebang ke ho tšehetsa potoloho e tenyetsehang, ho nolofalletsa li-sensor tsa MEMS, kapa ho theha motheo oa khomphutha ea quantum, litšobotsi tse ikhethang tsa quartz li etsa hore e be ea bohlokoa ho pholletsa le liindasteri.

“Fused Silica” kapa “Fused Quartz” e leng karolo e sa fetoheng ea quartz (SiO2). Ha e bapisoa le khalase ea borosilicate, silica e kopantsoeng ha e na lintho tse ekelitsoeng; ka hona e teng ka sebopeho sa eona se hloekileng, SiO2. Silica e kopantsoeng e na le phetiso e phahameng ho spectrum ea infrared le ultraviolet ha e bapisoa le khalase e tloaelehileng. Silica e kopantsoeng e hlahisoa ka ho qhibilihisa le ho tiisa hape SiO2 e hloekileng haholo. Ka lehlakoreng le leng, silica e kopantsoeng ea maiketsetso e entsoe ka lik'hemik'hale tse ruileng ka silicon tse kang SiCl4 tse nang le khase ebe li oxidized sepakapakeng sa H2 + O2. Lerōle la SiO2 le entsoeng tabeng ena le kopanngoa le silica holim'a substrate. Li-block tsa silica tse kopantsoeng li khaoloa ka li-wafer ebe li-wafer lia bentšoa qetellong.

Li-wafer tsa khalase tsa Silica le Optical Quartz tse kopantsoeng

Likarolo tsa Bohlokoa le Melemo ea Quartz Glass Wafer

Bohloeki bo Phahameng ka ho Fetisisa (≥99.99% SiO2)
E loketse lits'ebetso tsa semiconductor le photonics tse hloekileng haholo moo tšilafalo ea thepa e lokelang ho fokotsoa.
Sebaka se Seholo sa Ts'ebetso ea Thermal
E boloka botsitso ba sebopeho ho tloha mochesong o sa bonahaleng ho fihlela ho 1100°C ntle le ho sotha kapa ho senyeha.
Phetiso e ikhethang ea UV le IR
E fana ka khanya e ntle ea optical ho tsoa ho ultraviolet e tebileng (DUV) ka har'a near-infrared (NIR), e tšehetsa lits'ebetso tsa optical tse nepahetseng.
Coefficient e Tlase ea Katoloso ea Thermal
E ntlafatsa botsitso ba litekanyo tlas'a ho feto-fetoha ha mocheso, e fokotsa khatello ea maikutlo le ho ntlafatsa ts'epo ea ts'ebetso.
Khanyetso e Phahameng ea Lik'hemik'hale
Ha e na matla ho boholo ba li-acid, li-alkali le li-solvents—e leng se etsang hore e lokele libaka tse mabifi tsa lik'hemik'hale.
Ho Fetoha ha Bokaholimo
E fumaneha ka lipheletso tse bentšitsoeng tse boreleli haholo, tse nang le lehlakore le le leng kapa tse nang le mahlakore a mabeli, e tsamaellanang le li-photonics le litlhoko tsa MEMS.

Mokhoa oa Tlhahiso ea Quartz Glass Wafer

Li-wafer tsa quartz tse kopantsoeng li hlahisoa ka letoto la mehato e laoloang le e nepahetseng:

Khetho ea Lisebelisoa tse Tala
Khetho ea quartz ea tlhaho e hloekileng haholo kapa mehloli ea maiketsetso ea SiO₂.
Ho qhibiliha le ho kopanya
Quartz e qhibilihisoa ka ~2000°C ka liontong tsa motlakase tlas'a sepakapaka se laoloang ho felisa lintho tse kenyellelitsoeng le lipululana.
Ho theha Li-block
Silica e qhibilihisitsoeng e phodiswa hore e be diboloko tse tiileng kapa di-ingot.
Ho seha ka Wafer
Lisakha tsa taemane kapa tsa terata tse nepahetseng li sebelisoa ho seha li-ingot hore e be likheo tsa wafer.
Ho lahla le ho polisha
Libaka ka bobeli li bataletse ebile li bentšitsoe ho fihlela litlhaloso tse nepahetseng tsa optical, botenya le ho ba thata.
Ho Hloekisa le ho Hlahloba
Li-wafer li hloekisoa ka likamoreng tse hloekileng tsa ISO Class 100/1000 'me li hlahlojoa ka hloko bakeng sa liphoso le ho lumellana ha boholo.

Thepa ea wafer ea khalase ea Quartz

tlhahlobo	yuniti	4"	6"	8"	10"	12"
Bophara / boholo (kapa sekwere)	mm	100	150	200	250	300
Mamello (±)	mm	0.2	0.2	0.2	0.2	0.2
Botenya	mm	0.10 kapa ho feta	0.30 kapa ho feta	0.40 kapa ho feta	0.50 kapa ho feta	0.50 kapa ho feta
Folete ea litšupiso ea mantlha	mm	32.5	57.5	Semi-notch	Semi-notch	Semi-notch
LTV (5mm×5mm)	μm	< 0.5	< 0.5	< 0.5	< 0.5	< 0.5
TTV	μm	< 2	< 3	< 3	< 5	< 5
Seqha	μm	±20	±30	±40	±40	±40
Koahela	μm	≤ 30	≤ 40	≤ 50	≤ 50	≤ 50
PLTV (5mm×5mm) < 0.4μm	%	≥95%	≥95%	≥95%	≥95%	≥95%
Ho potoloha moeli	mm	E lumellana le Maemo a SEMI M1.2 / sheba IEC62276
Mofuta oa Bokaholimo		Lehlakore le le Leng le bentšitsoeng / Mahlakore a Mabeli a bentšitsoeng
Lehlakore le bentšitsoeng Ra	nm	≤1	≤1	≤1	≤1	≤1
Mekhoa ea ho Lahla ka Morao	μm	kakaretso 0.2-0.7 kapa e etselitsoeng motho ka mong

Quartz khahlanong le Lisebelisoa tse ling tse sa bonahaleng

Thepa	Khalase ea Quartz	Khalase ea Borosilicate	Safire	Khalase e Tloaelehileng
Mocheso o Phahameng oa Ts'ebetso	~1100°C	~500°C	~2000°C	~200°C
Phetiso ea UV	E ntle haholo (JGS1)	Mafutsana	Ho lokile	E futsanehileng haholo
Khanyetso ea Lik'hemik'hale	E babatsehang	E itekanetseng	E babatsehang	Mafutsana
Bohloeki	E phahame haholo	Tlase ho isa ho mahareng	Holimo	Tlase
Katoloso ea Thermal	Tlase haholo	E itekanetseng	Tlase	Holimo
Litšenyehelo	E mahareng ho isa ho e phahameng	Tlase	Holimo	Tlase haholo

Lipotso Tse Botsoang Khafetsa ka Wafer ea Khalase ea Quartz

P1: Phapang ke efe pakeng tsa quartz e kopantsoeng le silica e kopantsoeng?
Leha ka bobedi e le mefuta e sa fetoheng ya SiO₂, quartz e kopantsweng hangata e tswa mehloding ya tlhaho ya quartz, athe silika e kopantsweng e hlahiswa ka maiketsetso. Ka tshebetso, di fana ka tshebetso e tshwanang, empa silika e kopantsweng e ka ba le bohloeki bo hodimo hanyane le ho tshwana.

P2: Na di-wafer tsa quartz tse kopantsweng di ka sebediswa dibakeng tse nang le vacuum e ngata?
E. Ka lebaka la thepa ea tsona e tlase ea ho ntša khase le ho hanyetsa mocheso o phahameng, li-wafer tsa quartz tse kopantsoeng li ntle haholo bakeng sa litsamaiso tsa vacuum le lits'ebetso tsa lifofane.

P3: Na di-wafer tsena di loketse tshebediso ya laser e tebileng ya UV?
Ka 'nete. Quartz e kopantsoeng e na le phetiso e phahameng ho fihlela ho ~185 nm, e leng se etsang hore e be ntle bakeng sa DUV optics, limaske tsa lithography, le litsamaiso tsa laser tsa excimer.

P4: Na o tšehetsa tlhahiso ea wafer e ikhethileng?
E. Re fana ka tlhophiso e felletseng ho kenyeletsoa bophara, botenya, boleng ba bokaholimo, li-flat/notches, le ho etsa lipaterone ka laser, ho latela litlhoko tsa hau tse ikhethileng tsa kopo.

Mabapi le rona

XKH e ikhethile ka nts'etsopele ea theknoloji e phahameng, tlhahiso le thekiso ea khalase e khethehileng ea mahlo le thepa e ncha ea kristale. Lihlahisoa tsa rona li sebeletsa lisebelisoa tsa elektroniki tsa mahlo, lisebelisoa tsa elektroniki tsa bareki le sesole. Re fana ka likarolo tsa mahlo tsa Sapphire, likoahelo tsa lense ea mohala oa thekeng, Ceramics, LT, Silicon Carbide SIC, Quartz, le li-wafer tsa kristale tsa semiconductor. Ka boiphihlelo bo nang le boiphihlelo le lisebelisoa tsa sejoale-joale, re ipabola ts'ebetsong ea lihlahisoa tse seng tsa maemo a holimo, re ikemiselitse ho ba khoebo e etellang pele ea theknoloji e phahameng ea lisebelisoa tsa optoelectronic.

Sekoti sa Sapphire se se nang letho se hloekileng haholo sa Sapphire se se nang letho bakeng sa ho sebetsoa 5