Wafer ea 8inch LNOI (LiNbO3 ho Insulator) bakeng sa Li-modulator tsa Optical Waveguides Lipotoloho tse Kopaneng
Setšoantšo se qaqileng
Selelekela
Li-wafer tsa Lithium Niobate on Insulator (LNOI) ke thepa ea sejoale-joale e sebelisoang lits'ebetsong tse fapaneng tse tsoetseng pele tsa optical le tsa elektroniki. Li-wafer tsena li hlahisoa ka ho fetisetsa lera le lesesaane la lithium niobate (LiNbO₃) holim'a substrate e thibelang mocheso, hangata silicon kapa thepa e 'ngoe e loketseng, ho sebelisoa mekhoa e rarahaneng joalo ka ho kenngoa ha ion le ho tlamahana ha wafer. Theknoloji ea LNOI e tšoana ka litsela tse ngata le theknoloji ea wafer ea Silicon on Insulator (SOI) empa e sebelisa monyetla oa thepa e ikhethang ea optical ea lithium niobate, thepa e tsejoang ka litšobotsi tsa eona tsa piezoelectric, pyroelectric, le nonlinear optical.
Li-wafer tsa LNOI li fumane tlhokomelo e kholo masimong a kang optics e kopaneng, puisano, le quantum computing ka lebaka la ts'ebetso ea tsona e phahameng lits'ebetsong tsa maqhubu a phahameng le lebelo le phahameng. Li-wafer li hlahisoa ho sebelisoa mokhoa oa "Smart-cut", o nolofalletsang taolo e nepahetseng holim'a botenya ba filimi e tšesaane ea lithium niobate, ho netefatsa hore li-wafer li fihlela litlhaloso tse hlokahalang bakeng sa lits'ebetso tse fapaneng.
Molao-motheo
Mokhoa oa ho etsa li-wafer tsa LNOI o qala ka kristale ea lithium niobate e ngata. Kristale e kenngoa ka har'a ion, moo li-ion tsa helium tse nang le matla a mangata li kenngoang holim'a kristale ea lithium niobate. Li-ion tsena li kenella ka har'a kristale ho ea botebong bo itseng 'me li sitisa sebopeho sa kristale, li theha sefofane se fokolang seo hamorao se ka sebelisoang ho arola kristale ka likarolo tse tšesaane. Matla a itseng a li-ion tsa helium a laola botebo ba ho kenngoa, e leng se amang ka ho toba botenya ba lera la ho qetela la lithium niobate.
Kamora ho kenngwa ha ion, kristale ya lithium niobate e hokahanngwa le substrate ho sebediswa mokgwa o bitswang wafer bonding. Mokgwa wa ho kopanya hangata o sebedisa mokgwa wa ho kopanya ka ho toba, moo dibaka tse pedi (kristale ya lithium niobate e kentsweng ion le substrate) di hatellwang mmoho tlasa mocheso o phahameng le kgatello ho theha tlamo e matla. Maemong a mang, thepa ya sekgomaretsi jwalo ka benzocyclobutene (BCB) e ka sebediswa bakeng sa tshehetso e eketsehileng.
Kamora ho hokahana, wafer e feta ts'ebetsong ea ho hokela ho lokisa tšenyo efe kapa efe e bakiloeng ke ho kenngoa ha ion le ho ntlafatsa tlamo pakeng tsa mekhahlelo. Ts'ebetso ea ho hokela e boetse e thusa lera le lesesaane la lithium niobate ho arohana le kristale ea pele, e siea lera le lesesaane le boleng bo holimo la lithium niobate le ka sebelisoang bakeng sa tlhahiso ea sesebelisoa.
Litlhaloso
Li-wafer tsa LNOI li khetholloa ka litlhaloso tse 'maloa tsa bohlokoa tse netefatsang hore li loketse lits'ebetso tse sebetsang hantle. Tsena li kenyelletsa:
Litlhaloso tsa thepa.
| .Thepa. | .Litlhaloso. |
| Thepa | E ts'oanang: LiNbO3 |
| Boleng ba Thepa | Lipululana kapa lintho tse kenyellelitsoeng tse ka tlase ho 100μm |
| Boikutlo | Ho seha ha Y ±0.2° |
| Botenya | 4.65 g/cm³ |
| Mocheso oa Curie | 1142 ±1°C |
| Ponaletso | >95% ka har'a mefuta ea 450-700 nm (botenya ba 10 mm) |
Litlhaloso tsa Tlhahiso.
| .Paramethara. | .Tlhaloso. |
| Bophara | 150 mm ± 0.2 mm |
| Botenya | 350 μm ±10 μm |
| Bophara | <1.3 μm |
| Phapang ea Botenya Bohle (TTV) | Sekoahelo <70 μm @ wafer ea 150 mm |
| Phapang ea Botenya ba Sebaka (LTV) | <70 μm @ 150 mm wafer |
| Ho ba le makukuno | Rq ≤0.5 nm (boleng ba AFM RMS) |
| Boleng ba Bokaholimo | 40-20 |
| Likaroloana (Ha li tlosoe) | 100-200 μm ≤3 dikarolwana |
| Li-chips | <300 μm (wafer e felletseng, ha ho na sebaka sa ho qhelela thoko) |
| Mapetso | Ha ho mapetso (wafer e felletseng) |
| Tšilafalo | Ha ho na matheba a sa tlosoeng (wafer e felletseng) |
| Ho tšoana ha lintho | Metsotsoana e ka tlase ho 30 |
| Sefofane sa Litšupiso sa Tsela (X-axis) | 47 ± 2 mm |
Likopo
Li-wafer tsa LNOI li sebelisoa lits'ebetsong tse fapaneng ka lebaka la thepa ea tsona e ikhethang, haholo-holo masimong a photonics, puisano le mahlale a quantum. Tse ling tsa lits'ebetso tsa bohlokoa li kenyelletsa:
Mabone a Kopaneng:Li-wafer tsa LNOI li sebelisoa haholo lipotolohong tse kopaneng tsa optical, moo li nolofalletsang lisebelisoa tsa photonic tse sebetsang hantle joalo ka li-modulator, li-waveguides le li-resonator. Litšobotsi tse phahameng tsa optical tse seng tsa linear tsa lithium niobate li etsa hore e be khetho e ntle bakeng sa lits'ebetso tse hlokang ho tsamaisoa ha leseli ka katleho.
Mehala ea puisano:Li-wafer tsa LNOI li sebelisoa li-modulator tsa optical, e leng likarolo tsa bohlokoa litsamaisong tsa puisano tse potlakileng, ho kenyeletsoa le marangrang a fiber optic. Bokhoni ba ho fetola khanya maqhubung a phahameng bo etsa hore li-wafer tsa LNOI li be ntle bakeng sa litsamaiso tsa puisano tsa sejoale-joale.
Khomphutha ea Quantum:Mehlaleng ea quantum, li-wafer tsa LNOI li sebelisoa ho etsa likarolo tsa lik'homphieutha tsa quantum le litsamaiso tsa puisano ea quantum. Litšobotsi tsa optical tse seng tsa linear tsa LNOI li sebelisoa ho theha lipara tse kopaneng tsa photon, tse bohlokoa bakeng sa kabo ea senotlolo sa quantum le cryptography ea quantum.
Li-sensor:Li-wafer tsa LNOI li sebelisoa lits'ebetsong tse fapaneng tsa ho lemoha, ho kenyeletsoa le li-sensor tsa optical le tsa acoustic. Bokhoni ba tsona ba ho sebelisana le leseli le molumo bo li etsa hore li be le mekhoa e fapaneng bakeng sa mefuta e fapaneng ea mahlale a ho lemoha.
LBH
Q:Theknoloji ea LNOI ke eng?
Theknoloji ea A:LNOI e kenyelletsa ho fetisetsa filimi e tšesaane ea lithium niobate holim'a substrate e thibelang mocheso, hangata e le silicon. Theknoloji ena e sebelisa litšobotsi tse ikhethang tsa lithium niobate, tse kang litšobotsi tsa eona tse phahameng tsa optical tse seng tsa mola, piezoelectricity, le pyroelectricity, e leng se etsang hore e be e loketseng bakeng sa optics e kopaneng le puisano.
Q:Phapang ke efe pakeng tsa li-wafer tsa LNOI le SOI?
K: Li-wafer tsa LNOI le SOI ka bobeli lia tšoana ka hore li entsoe ka lera le lesesaane la thepa e hokahaneng le substrate. Leha ho le joalo, li-wafer tsa LNOI li sebelisa lithium niobate e le thepa e tšesaane ea filimi, ha li-wafer tsa SOI li sebelisa silicon. Phapang ea bohlokoa e holim'a thepa ea thepa e tšesaane ea filimi, 'me LNOI e fana ka thepa e ntle ea optical le piezoelectric.
Q:Melemo ea ho sebelisa li-wafer tsa LNOI ke efe?
K: Melemo e meholo ea li-wafer tsa LNOI e kenyelletsa thepa ea tsona e ntle ea optical, joalo ka li-coefficient tse phahameng tsa optical tse seng tsa mola, le matla a tsona a mechini. Litšobotsi tsena li etsa hore li-wafer tsa LNOI li be ntle bakeng sa tšebeliso lits'ebetsong tsa lebelo le phahameng, maqhubu a phahameng le quantum.
Q:Na li-wafer tsa LNOI li ka sebelisoa bakeng sa lits'ebetso tsa quantum?
K: E, di-wafer tsa LNOI di sebediswa haholo ditheknolojing tsa quantum ka lebaka la bokgoni ba tsona ba ho hlahisa dipara tse kopaneng tsa photon le ho tsamaellana ha tsona le di-photonics tse kopaneng. Dithoto tsena di bohlokwa bakeng sa ditshebediso tsa quantum computing, puisanong le cryptography.
Q:Botenya bo tloaelehileng ba lifilimi tsa LNOI ke bofe?
Lifilimi tsa A:LNOI hangata li tloha ho li-nanometer tse makholo a 'maloa ho isa ho li-micrometer tse' maloa ka botenya, ho latela ts'ebeliso e itseng. Botenya bo laoloa nakong ea ts'ebetso ea ho kenya li-ion.
