Li-substrate tsa N-Type SiC Composite Dia6inch Monocrystaline ea boleng bo holimo le substrate ea boleng bo tlase
Li-substrate tse kopaneng tsa SiC tsa Mofuta oa N Tafole ea liparamente tse tloaelehileng
| 项目Lintho | 指标Tlhaloso | 项目Lintho | 指标Tlhaloso |
| 直径Bophara | 150±0.2mm | 正 面 ( 硅 面 ) 粗 糙 度 Ho teneha ha sefahleho (ka pele) | Ra≤0.2nm (5μm*5μm) |
| 晶型Mofuta oa Polytype | 4H | Edge Chip, Scratch, Crack (tlhahlobo ea pono) | Ha ho letho |
| 电阻率Ho hanyetsa | 0.015-0.025ohm ·cm | 总厚度变化TTV | ≤3μm |
| Botenya ba lera la phetisetso | ≥0.4μm | 翘曲度Koahela | ≤35μm |
| 空洞E se na thuso | ≤5ea/wafer (2mm>D>0.5mm) | 总厚度Botenya | 350±25μm |
Tlhaloso ea "mofuta oa N" e bolela mofuta oa doping o sebelisoang thepa ea SiC. Fisiks ea semiconductor, doping e kenyelletsa ho kenngoa ha litšila ka boomo ka har'a semiconductor ho fetola thepa ea eona ea motlakase. Doping ea mofuta oa N e hlahisa likarolo tse fanang ka lielektrone tse ngata tse lokolohileng, e leng se fang thepa khatello e mpe ea mojari oa tjhaja.
Melemo ea li-substrate tsa mofuta oa N SiC tse kopaneng e kenyelletsa:
1. Tshebetso ya mocheso o phahameng: SiC e na le phallo e phahameng ya mocheso mme e ka sebetsa maemong a lehodimo, e leng se etsang hore e lokele ditshebediso tsa elektroniki tse nang le matla a maholo le maqhubu a phahameng.
2. Motlakase o phahameng oa ho senyeha: Lisebelisoa tsa SiC li na le motlakase o phahameng oa ho senyeha, o li nolofalletsang ho mamella masimo a motlakase a phahameng ntle le ho senyeha ha motlakase.
3. Khanyetso ea lik'hemik'hale le tikoloho: SiC e hanela lik'hemik'hale 'me e ka mamella maemo a thata a tikoloho, e leng se etsang hore e lokele ho sebelisoa lits'ebetsong tse thata.
4. Tahlehelo e fokotsehileng ea motlakase: Ha e bapisoa le thepa ea setso e thehiloeng ho silicon, li-substrate tsa SiC li nolofalletsa phetoho ea motlakase e sebetsang hantle le ho fokotsa tahlehelo ea motlakase lisebelisoa tsa elektroniki.
5. Lekhalo le leholo la leqhubu: SiC e na le lekhalo le leholo la leqhubu, le lumellang nts'etsopele ea lisebelisoa tsa elektroniki tse ka sebetsang maemong a mocheso o phahameng le matla a mangata.
Ka kakaretso, di-substrate tsa mofuta wa N tsa SiC tse kopaneng di fana ka melemo e meholo bakeng sa ntshetsopele ya disebediswa tsa elektroniki tse sebetsang hantle, haholoholo ditshebedisong moo tshebetso ya mocheso o phahameng, matla a mangata a mangata, le phetoho e sebetsang hantle ya matla di leng bohlokwa.