Litharollo tsa ho qoelisa tsa Wafer e Metsi le e Omileng tsa Sapphire

Litharollo tsa ho qoelisa tsa Sapphire tse Metsi le tse Omileng Setšoantšo se Hlahisitsoeng

Tlhaloso e Khutšoanyane:

Li-wafer tse betliloeng ka safira li etsoa ka ho sebelisa li-substrate tsa safira tse nang le kristale e le 'ngoe (Al₂O₃) tse hloekileng haholo, tse sebetsoang ka photolithography e tsoetseng pele hammoho le mahlale a ho betla ka metsi le ho betla ka omileng. Lihlahisoa tsena li na le lipaterone tse nang le sebopeho se senyenyane se tšoanang haholo, ho nepahala ho babatsehang ha litekanyo, le botsitso bo ikhethang ba 'mele le lik'hemik'hale, e leng se etsang hore li lokele lits'ebetso tse tšepahalang haholo ho li-microelectronics, optoelectronics, liphutheloana tsa semiconductor le masimo a lipatlisiso a tsoetseng pele.

Romella imeile ho rona

Likaroloana

Setšoantšo se qaqileng

Litharollo tsa ho qoelisa tsa Wafer e Metsi le e Omileng tsa Sapphire

Selelekela sa Sehlahisoa

Li-wafer tse betliloeng ka sapphire li etsoa ka ho sebelisa li-substrate tsa sapphire ea kristale e le 'ngoe (Al₂O₃) tse hloekileng haholo, tse sebetsoang ka photolithography e tsoetseng pele hammoho lemahlale a ho hlaba ka metsi le ho hlaba ka omilengLihlahisoa tsena li na le lipaterone tse hlophisitsoeng ka mokhoa o ts'oanang haholo, ho nepahala ho hoholo ha litekanyo, le botsitso bo ikhethang ba 'mele le lik'hemik'hale, e leng se etsang hore li lokele lits'ebetso tse tšepahalang haholo ho li-microelectronics, optoelectronics, liphutheloana tsa semiconductor le masimo a lipatlisiso a tsoetseng pele.

Safira e tsebahala haholo ka ho thatafala ha yona ho ikgethang le botsitso ba sebopeho, ka thatafalo ya Mohs ya 9, e leng ya bobedi ho daemane. Ka ho laola diparamitha tsa ho betla ka nepo, dibopeho tse nyane tse hlalositsweng hantle le tse ka phetwang di ka thehwa hodima bokahodimo ba safire, ho netefatsa mathoko a dipaterone tse bohale, jiometri e tsitsitseng, le botsitso bo botle ho pholletsa le dihlopha.

Mahlale a ho Sebetsa

Ho qoelisoa ka metsi

Ho tjhesa ka metsi ho sebedisa ditharollo tse ikgethang tsa dikhemikhale ho tlosa thepa ya safire ka kgetho le ho etsa dibopeho tse nyane tse lakatsehang. Tshebetso ena e fana ka tlhahiso e hodimo, ho tshwana hantle, le ditjeo tse tlase tsa ho e lokisa, e leng se etsang hore e lokele ho etsa dipaterone tsa sebaka se seholo le ditshebediso tse nang le ditlhoko tse itekanetseng tsa profil ya mahlakore.

Ka ho laola ka nepo sebopeho sa tharollo, mocheso le nako ea ho fata, taolo e tsitsitseng ea botebo ba ho fata le sebopeho sa bokaholimo e ka finyelloa. Li-wafer tsa safire tse fatileng metsi li sebelisoa haholo liphuthelong tsa liphutheloana tsa LED, mekhahlelo ea tšehetso ea sebopeho, le lits'ebetsong tse khethiloeng tsa MEMS.

Ho qoelisoa ka omileng

Ho tjhesa ka omileng, jwalo ka ho tjhesa ka plasma kapa ho tjhesa ka ion e arabelang (RIE), ho sebedisa di-ion tse nang le matla a mangata kapa mefuta e arabelang ho tjhesa safire ka mekgwa ya mmele le ya dikhemikhale. Mokgwa ona o fana ka anisotropy e phahameng, ho nepahala ho hoholo, le bokgoni bo botle ba ho fetisetsa dipaterone, ho nolofalletsa tlhahiso ya dibopeho tse ntle le dibopeho tse nyane tse nang le tekanyo e hodimo.

Ho fata ka ommeng ho loketse haholo bakeng sa lits'ebetso tse hlokang mabota a mahlakoreng a otlolohileng, tlhaloso e bohale ea likarolo, le taolo e tiileng ea boholo, joalo ka lisebelisoa tsa Micro-LED, liphutheloana tse tsoetseng pele tsa semiconductor, le meaho ea MEMS e sebetsang hantle.

Likarolo tsa Bohlokoa le Melemo

Substrate ea safire e hloekileng haholo e nang le kristale e le 'ngoe e nang le matla a matle a mechini
Mekhoa e feto-fetohang ea ts'ebetso: ho hlaba ka metsi kapa ho hlaba ka omileng ho latela litlhoko tsa ts'ebeliso
Ho thatafala ho hoholo le ho hanyetsa ho tsofala bakeng sa ho tšepahala ha nako e telele
Botsitso bo botle ba mocheso le lik'hemik'hale, bo loketse libaka tse thata
Ponaletso e phahameng ea optical le thepa e tsitsitseng ea dielectric
Ho tšoana ha dipaterone tse phahameng le botsitso ba sehlopha ho sehlopha

Likopo

Lisebelisoa tsa ho paka le ho leka tsa LED le Micro-LED
Bajari ba chip ba semiconductor le sephutheloana se tsoetseng pele
Li-sensor tsa MEMS le litsamaiso tsa micro-electromechanical
Likarolo tsa mahlo le meaho ea ho hokahanya ka nepo
Litsi tsa lipatlisiso le nts'etsopele ea sebopeho se senyenyane se ikhethileng

Ho iketsetsa le Litšebeletso

Re fana ka lits'ebeletso tse felletseng tsa ho iketsetsa, ho kenyeletsoa moralo oa lipaterone, khetho ea mekhoa ea ho betla (e metsi kapa e omileng), taolo ea botebo ba ho betla, likhetho tsa botenya le boholo ba substrate, ho betla ka lehlakoreng le le leng kapa ka mahlakoreng a mabeli, le maemo a ho betla bokaholimo. Taolo e tiileng ea boleng le mekhoa ea tlhahlobo e netefatsa hore wafer e 'ngoe le e 'ngoe e betliloeng ea safire e fihlela botšepehi bo phahameng le maemo a ts'ebetso pele e tlisoa.

Lipotso Tse Botsoang Khafetsa - Lipotso Tse Botsoang Khafetsa

P1: Phapang ke efe pakeng tsa ho tjhesa ka metsi le ho tjhesa ka omileng bakeng sa safire?

A:Ho tjhesa ka metsi ho itshetlehile hodima dikarabelo tsa dikhemikhale mme ho loketse bakeng sa ts'ebetso ya sebaka se seholo le e theko e tlase, ha ho tjhesa ka metsi ho sebedisa mekgwa e thehilweng hodima plasma kapa ion ho fihlella ho nepahala ho hoholo, anisotropy e betere, le taolo e ntle ya dibopeho. Kgetho e itshetlehile hodima ho rarahana ha sebopeho, ditlhoko tsa ho nepahala, le ho nahanelwa ka ditjeo.

P2: Ke mokhoa ofe oa ho hlaba oo ke lokelang ho o khetha bakeng sa ts'ebeliso ea ka?

A:Ho tjhesa ka metsi ho kgothaletswa bakeng sa ditshebediso tse hlokang dipaterone tse tshwanang ka ho nepahala ho itekanetseng, jwalo ka di-substrate tse tlwaelehileng tsa LED. Ho tjhesa ka metsi ho loketse haholo bakeng sa ditshebediso tse nang le qeto e phahameng, karolelano e phahameng, kapa ditshebediso tsa Micro-LED le MEMS moo jiometri e nepahetseng e leng ya bohlokwa.

P3: Na o ka tšehetsa dipaterone le ditlhaloso tse ikgethileng?

A:E. Re tšehetsa meralo e ikhethileng ka botlalo, ho kenyeletsoa le moralo oa paterone, boholo ba likarolo, botebo ba etch, botenya ba wafer, le litekanyo tsa substrate.

Mabapi le rona

XKH e ikhethile ka nts'etsopele ea theknoloji e phahameng, tlhahiso le thekiso ea khalase e khethehileng ea mahlo le thepa e ncha ea kristale. Lihlahisoa tsa rona li sebeletsa lisebelisoa tsa elektroniki tsa mahlo, lisebelisoa tsa elektroniki tsa bareki le sesole. Re fana ka likarolo tsa mahlo tsa Sapphire, likoahelo tsa lense ea mohala oa thekeng, Ceramics, LT, Silicon Carbide SIC, Quartz, le li-wafer tsa kristale tsa semiconductor. Ka boiphihlelo bo nang le boiphihlelo le lisebelisoa tsa sejoale-joale, re ipabola ts'ebetsong ea lihlahisoa tse seng tsa maemo a holimo, re ikemiselitse ho ba khoebo e etellang pele ea theknoloji e phahameng ea lisebelisoa tsa optoelectronic.