Poleiti/terei ea ceramic ea SiC bakeng sa sehokelo sa wafer sa lisenthimithara tse 4 sa lisenthimithara tse 6 bakeng sa ICP

Poleiti/terei ea ceramic ea SiC bakeng sa sehokelo sa wafer sa lisenthimithara tse 4 bakeng sa ICP Setšoantšo se Hlahisitsoeng

Tlhaloso e Khutšoanyane:

Poleiti ea ceramic ea SiC ke karolo e sebetsang hantle e entsoeng ka Silicon Carbide e hloekileng haholo, e etselitsoeng ho sebelisoa libakeng tse chesang haholo, lik'hemik'hale le mechini. Poleiti ea SiC e tumme ka ho thatafala ha eona ho ikhethang, ho khanna ha mocheso, le ho hanyetsa mafome, e sebelisoa haholo e le karolo ea wafer, susceptor, kapa ea sebopeho indastering ea semiconductor, LED, photovoltaic, le ea lifofane.

Romella imeile ho rona

Likaroloana

Poleiti ea letsopa ea SiC Kakaretso

Ka botsitso bo ikhethang ba mocheso ho fihlela ho 1600°C le ho hanyetsa likhase tse arabelang le tikoloho ea plasma, poleiti ea SiC e netefatsa ts'ebetso e tsitsitseng nakong ea lits'ebetso tsa ho fata, ho beha le ho hasanya mocheso o phahameng. Sebopeho sa eona se senyenyane, se se nang masoba se fokotsa tlhahiso ea likaroloana, e leng se etsang hore e be se loketseng bakeng sa lits'ebetso tse hloekileng haholo maemong a vacuum kapa a cleanroom.

Kopo ea poleiti ea ceramic ea SiC

1. Tlhahiso ea Semiconductor

Lipoleiti tsa ceramic tsa SiC li sebelisoa hangata e le lijari tsa wafer, li-susceptor, le lipoleiti tsa pedestal lisebelisoa tsa tlhahiso ea semiconductor tse kang CVD (Chemical Vapor Deposition), PVD (Physical Vapor Deposition), le litsamaiso tsa ho fata. Ho tsamaisa ha tsona mocheso hantle le katoloso e tlase ea mocheso ho li lumella ho boloka kabo e ts'oanang ea mocheso, e leng habohlokoa bakeng sa ts'ebetso ea wafer e nepahetseng haholo. Ho hanyetsa ha SiC likhase tse senyang le li-plasma ho netefatsa ho tšoarella libakeng tse thata, ho thusa ho fokotsa tšilafalo ea likaroloana le tlhokomelo ea lisebelisoa.

2. Indasteri ea LED - Ho Sebetsa ka ICP

Lefapheng la tlhahiso ea LED, lipoleiti tsa SiC ke likarolo tsa bohlokoa lits'ebetsong tsa ho betla tsa ICP (Inductively Coupled Plasma). Li sebetsa e le li-wafer tse tšoereng li-wafer, li fana ka sethala se tsitsitseng le se matla mochesong ho tšehetsa li-wafer tsa safire kapa GaN nakong ea ts'ebetso ea plasma. Ho hanyetsa ha tsona plasma hantle, ho ba sephara holim'a metsi, le botsitso ba litekanyo li thusa ho netefatsa ho nepahala le ho tšoana ha ho betla, e leng se lebisang ho keketseho ea chai le ts'ebetso ea sesebelisoa ho li-chip tsa LED.

3. Photovoltaics (PV) le Matla a Letsatsi

Lipoleiti tsa letsopa tsa SiC le tsona li sebelisoa tlhahisong ea lisele tsa letsatsi, haholo-holo nakong ea mehato ea ho sinter le ho annealing mochesong o phahameng. Ho se tsitse ha tsona mochesong o phahameng le bokhoni ba ho hanela ho sotha ho netefatsa ts'ebetso e tsitsitseng ea li-wafer tsa silicon. Ho feta moo, kotsi ea tsona e tlase ea tšilafalo ke ea bohlokoa bakeng sa ho boloka katleho ea lisele tsa photovoltaic.

Matlotlo a poleiti ea letsopa ea SiC

1. Matla le ho Tiea ha Mechini ho Ikhethang

Lipoleiti tsa letsopa tsa SiC li bontša matla a phahameng haholo a mechini, ka matla a tloaelehileng a ho kobeha a fetang 400 MPa le boima ba Vickers bo fihlang ho >2000 HV. Sena se etsa hore li hanele haholo ho tsofala ha mechini, ho hohlana le ho fetoha ha sebopeho, ho netefatsa bophelo bo bolelele ba ts'ebeletso esita le tlas'a mojaro o phahameng kapa potoloho e pheta-phetoang ea mocheso.

2. Ho khanna ha mocheso o phahameng

SiC e na le phallo e ntle ea mocheso (hangata 120–200 W/m·K), e e lumellang ho aba mocheso ka ho lekana holim'a bokaholimo ba eona. Thepa ena e bohlokoa lits'ebetsong tse kang ho etching, ho beha, kapa ho sintering, moo ho tšoana ha mocheso ho amang chai le boleng ba sehlahisoa ka kotloloho.

3. Botsitso bo Phahameng ba Thermal

Ka ntlha e phahameng ea ho qhibiliha (2700°C) le coefficient e tlase ea katoloso ea mocheso (4.0 × 10⁻⁶/K), lipoleiti tsa letsopa tsa SiC li boloka ho nepahala ha litekanyo le botšepehi ba sebopeho tlas'a potoloho e potlakileng ea ho futhumatsa le ho pholisa. Sena se etsa hore li be ntle bakeng sa ts'ebeliso liontong tsa mocheso o phahameng, likamoreng tsa vacuum le libakeng tsa plasma.

Matlo a Tekheniki
Index	Yuniti	Boleng
Lebitso la Thepa		Karabelo Sintered Silicon Carbide	Khatello ea Sintered Silicon Carbide e se nang khatello	Silicon Carbide e entsoeng hape
Sebopeho		RBSiC	SSiC	R-SiC
Bongata ba Bongata	g/cm3	3	3.15 ± 0.03	2.60-2.70
Matla a ho Tenyetseha	MPa (kpsi)	338(49)	380(55)	80-90 (20°C) 90-100 (1400°C)
Matla a Khatello	MPa (kpsi)	1120(158)	3970(560)	> 600
Bothata	Knoop	2700	2800	/
Ho Roba Boikemisetso	MPa m1/2	4.5	4	/
Ho khanna ha mocheso	W/mk	95	120	23
Katoloso ea Thermal e sebetsang hantle	10^-6.1/°C	5	4	4.7
Mocheso o Ikhethang	Joule/g 0k	0.8	0.67	/
Mocheso o phahameng moeeng	℃	1200	1500	1600
Modulus e tenyetsehang	Gpa	360	410	240

Lipotso le Likarabo tsa Poleiti ea Ceramic ea SiC

P: Thepa ea poleiti ea silicon carbide ke efe?

A: Lipoleiti tsa silicon carbide (SiC) li tsebahala ka matla a tsona a phahameng, ho thatafala, le botsitso ba mocheso. Li fana ka phetisetso e ntle ea mocheso le katoloso e tlase ea mocheso, ho netefatsa ts'ebetso e tšepahalang tlas'a mocheso o feteletseng. SiC e boetse e sa sebetse ka lik'hemik'hale, e hanela li-acid, alkalis le tikoloho ea plasma, e leng se etsang hore e be e loketseng ts'ebetso ea semiconductor le LED. Bokaholimo ba eona bo teteaneng, bo boreleli bo fokotsa tlhahiso ea likaroloana, bo boloka ho lumellana ha kamore e hloekileng. Lipoleiti tsa SiC li sebelisoa haholo e le lijari tsa wafer, li-susceptor, le likarolo tsa tšehetso libakeng tse nang le mocheso o phahameng le tse senyang ho pholletsa le liindasteri tsa semiconductor, photovoltaic, le tsa lifofane.