Sebopeho sa SiCOI sa wafer sa 4inch 6inch HPSI SiC SiO2 Si subatrate

Sehatsetsi sa SiCOI 4inch 6inch HPSI SiC SiO2 Si subatrate sebopeho Setšoantšo se Hlahisitsoeng

Tlhaloso e Khutšoanyane:

Pampiri ena e hlahisa kakaretso e qaqileng ea li-wafer tsa Silicon Carbide-on-Insulator (SiCOI), tse shebaneng haholo le li-substrate tsa lisenthimithara tse 4 le lisenthimithara tse 6 tse nang le likarolo tse phahameng tsa ho thibela ho bola (HPSI) silicon carbide (SiC) tse hokahaneng le likarolo tse sireletsang tsa silicon dioxide (SiO₂) tse holim'a li-substrate tsa silicon (Si). Sebopeho sa SiCOI se kopanya thepa e ikhethang ea motlakase, mocheso le mechini ea SiC le melemo ea ho itšehla thajana ea lera la oxide le tšehetso ea mechini ea substrate ea silicon. Ho sebelisa HPSI SiC ho ntlafatsa ts'ebetso ea sesebelisoa ka ho fokotsa ho tsamaisoa ha substrate le ho fokotsa tahlehelo ea likokoana-hloko, ho etsa hore li-wafer tsena li be molemo bakeng sa lits'ebetso tsa semiconductor tse matla a holimo, maqhubu a phahameng le mocheso o phahameng. Ts'ebetso ea tlhahiso, litšobotsi tsa thepa, le melemo ea sebopeho sa tlhophiso ena ea mekhahlelo e mengata lia tšohloa, ho totobatsa bohlokoa ba eona ho lisebelisoa tsa motlakase tsa moloko o latelang le litsamaiso tsa microelectromechanical (MEMS). Phuputso e boetse e bapisa thepa le lits'ebetso tse ka bang teng tsa li-wafer tsa SiCOI tsa lisenthimithara tse 4 le lisenthimithara tse 6, e totobatsa menyetla ea ho hola le ho kopanya lisebelisoa tse tsoetseng pele tsa semiconductor.

Romella imeile ho rona

Likaroloana

Sebopeho sa wafer sa SiCOI

HPB (Bonding e Phahameng ea Ts'ebetso) BIC (Bonded Integrated Circuit) le SOD (Silicon-on-Diamond kapa theknoloji e kang ea Silicon-on-Insulator). E kenyelletsa:

Litekanyo tsa Tshebetso:

E thathamisa diparamitha tse kang ho nepahala, mefuta ya diphoso (mohlala, "Ha ho phoso," "Boholo ba sebaka"), le ditekanyo tsa botenya (mohlala, "Botebo ba Lera le Otlolohileng/kg").

Tafole e nang le boleng ba dipalo (mohlomong diteko kapa diparamitha tsa tshebetso) tlasa dihlooho tse kang "ADDR/SYGBDT," "10/0," jj.

Lintlha tsa Botenya ba Lera:

Litlhaloso tse pheta-phetoang tse ngata tse ngotsweng "L1 Thickness (A)" ho isa ho "L270 Thickness (A)" (mohlomong ho Ångströms, 1 Å = 0.1 nm).

E fana ka maikutlo a sebopeho sa mekhahlelo e mengata se nang le taolo e nepahetseng ea botenya bakeng sa lera ka leng, e tloaelehileng ho li-wafer tse tsoetseng pele tsa semiconductor.

Sebopeho sa Wafer sa SiCOI

SiCOI (Silicon Carbide on Insulator) ke sebopeho se ikgethang sa wafer se kopanyang silicon carbide (SiC) le lera le thibelang mocheso, le tshwanang le SOI (Silicon-on-Insulator) empa le ntlafaditswe bakeng sa ditshebediso tse matla/mocheso o phahameng. Dikarolo tsa bohlokwa:

Sebopeho sa Lera:

Lera le ka Holimo: Silicon Carbide e le 'ngoe ea kristale (SiC) bakeng sa ho tsamaea ha lielektrone tse ngata le botsitso ba mocheso.

Sehatsetsi se Patiloeng: Hangata SiO₂ (oxide) kapa daemane (ka SOD) ho fokotsa bokgoni ba dikokonyana le ho ntlafatsa ho ikarola.

Substrate ea Motheo: Silicon kapa polycrystalline SiC bakeng sa tšehetso ea mechini

Thepa ea SiCOI wafer

Matlo a Motlakase Sekheo se Sephara sa Band (3.2 eV bakeng sa 4H-SiC): E nolofalletsa motlakase o phahameng oa ho senyeha (>10× e phahameng ho feta silicon). E fokotsa maqhubu a ho lutla, e ntlafatsa bokhoni ba lisebelisoa tsa motlakase.

Ho Tsamaea ho Hoholo ha Elektrone:~900 cm²/V·s (4H-SiC) khahlano le ~1,400 cm²/V·s (Si), empa ts'ebetso e betere ea lebala le phahameng.

Ho se be le Khanyetso e Tlase:Li-transistors tse thehiloeng ho SiCOI (mohlala, MOSFET) li bontša tahlehelo e tlase ea conduction.

Ho Sireletsa ka Botle:Oxide e patiloeng (SiO₂) kapa lera la daemane le fokotsa bokgoni ba parasitic le crosstalk.

Matlotlo a ThermalHo Tsamaisa Mocheso o Phahameng: SiC (~490 W/m·K bakeng sa 4H-SiC) khahlanong le Si (~150 W/m·K). Taemane (haeba e sebelisoa e le insulator) e ka feta 2,000 W/m·K, e leng se eketsang ho qhalana ha mocheso.

Ho Tsitsisa ha Thermal:E sebetsa ka botshepehi ho >300°C (ha e bapiswa le ~150°C bakeng sa silicon). E fokotsa ditlhoko tsa ho phodisa disebedisweng tsa motlakase tsa motlakase.

3. Thepa ea Mekaniki le Lik'hemik'haleHo Tiea ho Feteletseng (~9.5 Mohs): E hanela ho tsofala, e leng se etsang hore SiCOI e tšoarelle nako e telele bakeng sa tikoloho e thata.

Ho se sebetse hantle ha lik'hemik'hale:E hanela oxidation le mafome, esita le maemong a asiti/alkaline.

Katoloso e Tlase ea Thermal:E tsamaisana hantle le thepa e meng e nang le mocheso o phahameng (mohlala, GaN).

4. Melemo ea Sebopeho (khahlanong le SiC e Kholo kapa SOI)

Tahlehelo e Fokolitsoeng ea Substrate:Lera la ho thibela ho dutla ha motlakase le thibela ho dutla ha motlakase ka hara substrate.

Tshebetso e Ntlafetseng ya RF:Bokgoni bo tlase ba parasitic bo nolofalletsa ho chencha ka potlako (ho thusa disebediswa tsa 5G/mmWave).

Moralo o Tenyetsehang:Lera le ka holimo la SiC le tshesane le dumella ho hola ha sesebediswa ka tsela e ntlafetseng (mohlala, dikanale tse tshesane haholo ka hara di-transistors).

Papiso le SOI le Bulk SiC

Thepa	SiCOI	SOI (Si/SiO₂/Si)	SiC e kholo
Lekhalo la lebanta	3.2 eV (SiC)	1.1 eV (Si)	3.2 eV (SiC)
Ho khanna ha mocheso	E Phahameng (SiC + taemane)	Tlase (SiO₂ e fokotsa phallo ea mocheso)	E Phahameng (SiC feela)
Phallo ea Motlakase	Holimo Haholo	E itekanetseng	Holimo Haholo
Litšenyehelo	E phahameng	Tlase	E phahameng ka ho fetisisa (SiC e hloekileng)

Lisebelisoa tsa SiCOI wafer

Matla a Elektroniki
Li-wafer tsa SiCOI li sebelisoa haholo lisebelisoa tsa semiconductor tse nang le motlakase o phahameng le matla a phahameng joalo ka MOSFET, Schottky diodes, le li-switch tsa motlakase. Sebaka se seholo sa bandgap le motlakase o phahameng oa ho senyeha ha SiC li nolofalletsa phetoho e sebetsang hantle ea motlakase ka tahlehelo e fokotsehileng le ts'ebetso e ntlafalitsoeng ea mocheso.

Lisebelisoa tsa Maqhubu a Radio (RF)
Lera le sireletsang mocheso ka har'a li-wafer tsa SiCOI le fokotsa bokhoni ba likokoana-hloko, e leng se etsang hore li lokele li-transistors le li-amplifier tse nang le maqhubu a phahameng tse sebelisoang likhokahanong tsa mohala, radar le theknoloji ea 5G.

Mekhoa ea Microelectromechanical (MEMS)
Li-wafer tsa SiCOI li fana ka sethala se matla sa ho etsa li-sensor tsa MEMS le li-actuator tse sebetsang ka mokhoa o tšepahalang libakeng tse thata ka lebaka la ho se sebetse hantle ha lik'hemik'hale tsa SiC le matla a mechini.

Lisebelisoa tsa Elektroniki tsa Mocheso o Phahameng
SiCOI e nolofalletsa lisebelisoa tsa elektroniki tse bolokang ts'ebetso le ts'epo mochesong o phahameng, e leng se thusang likoloi, lifofane le lits'ebetso tsa indasteri moo lisebelisoa tsa silicon tse tloaelehileng li hlōlehang.

Lisebelisoa tsa Photonic le Optoelectronic
Motsoako oa thepa ea optical ea SiC le lera la ho thibela mocheso o thusa ho kopanya lipotoloho tsa photonic le taolo e ntlafalitsoeng ea mocheso.

Lisebelisoa tsa Elektroniki tse Thatafalitsoeng ke Mahlaseli
Ka lebaka la mamello ea tlhaho ea mahlaseli a SiC, li-wafer tsa SiCOI li loketse libaka le lits'ebetso tsa nyutlelie tse hlokang lisebelisoa tse mamellang libaka tse nang le mahlaseli a mangata.

Lipotso le Likarabo tsa SiCOI wafer

P1: Sejana sa SiCOI ke eng?

A: SiCOI e emetse Silicon Carbide-on-Insulator. Ke sebopeho sa wafer sa semiconductor moo lera le lesesaane la silicon carbide (SiC) le hokahanngoang lera le thibelang mocheso (hangata silicon dioxide, SiO₂), le tshehetswang ke substrate ya silicon. Sebopeho sena se kopanya thepa e ntle ya SiC le ho ikarola ha motlakase ho tswa ho insulator.

P2: Melemo e meholo ea li-wafer tsa SiCOI ke efe?

K: Melemo e meholo e kenyelletsa motlakase o phahameng o senyehang, lekhalo le pharaletseng la band, ho tsamaisa mocheso hantle, ho thatafala ha mechini ho phahameng, le ho fokotseha ha bokgoni ba dikokonyana ka lebaka la lera la ho thibela ho futhumatsa. Sena se lebisa tshebetsong e ntlafetseng ya sesebediswa, bokgoni le botshepehi.

P3: Litšebeliso tse tloaelehileng tsa li-wafer tsa SiCOI ke life?

K: Li sebelisoa lielektronikeng tse matla, lisebelisoa tsa RF tse nang le maqhubu a phahameng, li-sensor tsa MEMS, lisebelisoa tsa elektroniki tse nang le mocheso o phahameng, lisebelisoa tsa photonic, le lisebelisoa tsa elektroniki tse thatafalitsoeng ke mahlaseli.